KR870009495A - 반도체 변형게이지 브리지회로 - Google Patents

반도체 변형게이지 브리지회로 Download PDF

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Publication number
KR870009495A
KR870009495A KR870002555A KR870002555A KR870009495A KR 870009495 A KR870009495 A KR 870009495A KR 870002555 A KR870002555 A KR 870002555A KR 870002555 A KR870002555 A KR 870002555A KR 870009495 A KR870009495 A KR 870009495A
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KR
South Korea
Prior art keywords
bridge circuit
resistance
semiconductor strain
strain gauge
resistance element
Prior art date
Application number
KR870002555A
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English (en)
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KR900004369B1 (ko
Inventor
아츠시 미야자키
료이치 고바야시
Original Assignee
미타 가츠시게
가부시키가이샤 히타치세이사쿠쇼
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Publication of KR870009495A publication Critical patent/KR870009495A/ko
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Publication of KR900004369B1 publication Critical patent/KR900004369B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Force In General (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)

Abstract

내용 없음

Description

반도체 변형게이지 브리지회로
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본원 발명의 제1의 실시예에 의한 반도체 변형게이지 브리지 회로장치의 회로도.
제2A도는 본원 발명의 반도체 변형게이지 브리지 회로장치를 사용한 압력트랜스듀서의 구성을 나타낸 측면단면도.
제2B도는 제2A도의 트랜스 듀서내의 반도체 변형게이지의 구성을 나타낸 평면도.
제3A도, 제3B도, 제3C도는 제1도의 브리지회로에 있어서의 감도온도 특성의 보상을 설명하기 위한 도면.

Claims (6)

  1. 반도체 변형게이지 에 의해서 구성되는 브리지회로와,
    이 브리지회로의 1쌍의 출력단자의 한쪽에 접속되고, 소정온도에 있어서의 이 한쪽의 출력단자의 전위 와 실질적으로 동일한 전압을 발생하는 수단을 포함한 제1의 영점온도 보상회로와,
    상기 출력단자의 다른 쪽의 단자에 접속되고, 상기 반도체 변형게이지의 온도특성과 동일한 온도특성을 가진 저항소자를 포함한 제2의 영점온도 보상회로로 이루어진 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  2. 제1항에 있어서, 상기 제2의 영점온도 보상회로는 마이너스성 온도저항특성를 가진 저항소자와, 이 저항소자에 직렬 접속된 고정저항을 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  3. 제1항에 있어서, 상기 제2의 영점온도 보상회로는 마이너스성 온도 저항특성를 가진 저항소자와, 이 저항소자에 병렬로 접속된 제1의 고정저항과, 상기 저항소자와 상기 제1의 고정저항의 병렬접속에 직렬로 접속된 제2의 고정저항을 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  4. 제1항에 있어서, 상기 브리지회로의 온도감도를 보상하기 위하여 다시 상기 반도체 변형게이지 브리지회로의 1쌍의 전원단자의 한쪽의 단자에 접속된 상기 브리지회로의 감도온도 보상회로를 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  5. 제4항에 있어서, 상기 제2의 영점온도 보상회로는 마이너스성 온도저항 특성을 가진 저항소자와, 이 저항소자에 직렬 접속된 고정저항을 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
  6. 제4항에 있어서, 상기 제2의 영점온도 보상회로는 마이너스성 온도저항 특성을 가진 저항소자와, 이 저항소자에 병렬로 접속된 제1의 고정저항과, 상기 저항소자와 상기 제1의 고정저항의 병렬 접속에 직렬로 접속된 제2의 고정저항을 포함한 것을 특징으로 하는 반도체 변형게이지 브리지 회로장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870002555A 1986-03-26 1987-03-20 반도체 변형게이지 브리지회로 KR900004369B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61065713A JPH0797010B2 (ja) 1986-03-26 1986-03-26 半導体歪ゲ−ジブリツジ回路
JP86-65713 1986-03-26
JP65713 1986-03-26

Publications (2)

Publication Number Publication Date
KR870009495A true KR870009495A (ko) 1987-10-27
KR900004369B1 KR900004369B1 (ko) 1990-06-23

Family

ID=13294932

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870002555A KR900004369B1 (ko) 1986-03-26 1987-03-20 반도체 변형게이지 브리지회로

Country Status (5)

Country Link
US (1) US4911016A (ko)
EP (1) EP0239094B1 (ko)
JP (1) JPH0797010B2 (ko)
KR (1) KR900004369B1 (ko)
DE (1) DE3776931D1 (ko)

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Also Published As

Publication number Publication date
JPH0797010B2 (ja) 1995-10-18
US4911016A (en) 1990-03-27
EP0239094A2 (en) 1987-09-30
EP0239094A3 (en) 1989-06-14
JPS62223601A (ja) 1987-10-01
EP0239094B1 (en) 1992-03-04
KR900004369B1 (ko) 1990-06-23
DE3776931D1 (de) 1992-04-09

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