ES2217809T3 - Sensor con diafragma y una pluralidad de transductores conmutables para encontrar el borde. - Google Patents
Sensor con diafragma y una pluralidad de transductores conmutables para encontrar el borde.Info
- Publication number
- ES2217809T3 ES2217809T3 ES99946594T ES99946594T ES2217809T3 ES 2217809 T3 ES2217809 T3 ES 2217809T3 ES 99946594 T ES99946594 T ES 99946594T ES 99946594 T ES99946594 T ES 99946594T ES 2217809 T3 ES2217809 T3 ES 2217809T3
- Authority
- ES
- Spain
- Prior art keywords
- sensor
- diaphragm
- elements
- substrate
- attack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 description 42
- 239000000126 substance Substances 0.000 description 30
- 235000012431 wafers Nutrition 0.000 description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000012938 design process Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000135 prohibitive effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US137765 | 1998-08-21 | ||
| US09/137,765 US6142021A (en) | 1998-08-21 | 1998-08-21 | Selectable pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2217809T3 true ES2217809T3 (es) | 2004-11-01 |
Family
ID=22478952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES99946594T Expired - Lifetime ES2217809T3 (es) | 1998-08-21 | 1999-08-12 | Sensor con diafragma y una pluralidad de transductores conmutables para encontrar el borde. |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6142021A (enExample) |
| EP (1) | EP1110067B1 (enExample) |
| JP (1) | JP2002523736A (enExample) |
| DE (1) | DE69915651T2 (enExample) |
| ES (1) | ES2217809T3 (enExample) |
| WO (1) | WO2000011441A2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6790699B2 (en) | 2002-07-10 | 2004-09-14 | Robert Bosch Gmbh | Method for manufacturing a semiconductor device |
| DE102007062711A1 (de) * | 2007-12-27 | 2009-07-02 | Robert Bosch Gmbh | Halbleiterwafer mit einer Vielzahl von Sensorelementen und Verfahren zum Vermessen von Sensorelementen auf einem Halbleiterwafer |
| US7926353B2 (en) * | 2009-01-16 | 2011-04-19 | Infineon Technologies Ag | Pressure sensor including switchable sensor elements |
| GB2515715A (en) | 2012-11-21 | 2015-01-07 | Continental Automotive Systems | Piezoresistive transducer with low thermal noise |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3456226A (en) * | 1967-10-27 | 1969-07-15 | Conrac Corp | Strain gage configuration |
| JPS5217780A (en) * | 1975-07-04 | 1977-02-09 | Hitachi Ltd | Pressure convertor with semi-conductor elements |
| US4322980A (en) * | 1979-11-08 | 1982-04-06 | Hitachi, Ltd. | Semiconductor pressure sensor having plural pressure sensitive diaphragms and method |
| US4400681A (en) * | 1981-02-23 | 1983-08-23 | General Motors Corporation | Semiconductor pressure sensor with slanted resistors |
| CA1186163A (en) * | 1982-01-04 | 1985-04-30 | James B. Starr | Semiconductor pressure transducer |
| US4539554A (en) * | 1982-10-18 | 1985-09-03 | At&T Bell Laboratories | Analog integrated circuit pressure sensor |
| JPS6077470A (ja) * | 1983-10-04 | 1985-05-02 | Nec Corp | ダイアフラム型半導体圧力センサ |
| US4996082A (en) * | 1985-04-26 | 1991-02-26 | Wisconsin Alumni Research Foundation | Sealed cavity semiconductor pressure transducers and method of producing the same |
| US4885621A (en) * | 1988-05-02 | 1989-12-05 | Delco Electronics Corporation | Monolithic pressure sensitive integrated circuit |
| US5058435A (en) * | 1989-06-22 | 1991-10-22 | Ic Sensors, Inc. | Single diaphragm transducer with multiple sensing elements |
| US5220838A (en) * | 1991-03-28 | 1993-06-22 | The Foxboro Company | Overpressure-protected, differential pressure sensor and method of making the same |
| US5264075A (en) * | 1992-11-06 | 1993-11-23 | Ford Motor Company | Fabrication methods for silicon/glass capacitive absolute pressure sensors |
| US5427975A (en) * | 1993-05-10 | 1995-06-27 | Delco Electronics Corporation | Method of micromachining an integrated sensor on the surface of a silicon wafer |
| WO1995002164A1 (en) * | 1993-07-07 | 1995-01-19 | Ic Sensors, Inc. | Pulsed thermal flow sensor system |
| DE19527687A1 (de) * | 1995-07-28 | 1997-01-30 | Bosch Gmbh Robert | Sensor |
| US5672808A (en) * | 1996-06-11 | 1997-09-30 | Moore Products Co. | Transducer having redundant pressure sensors |
-
1998
- 1998-08-21 US US09/137,765 patent/US6142021A/en not_active Expired - Lifetime
-
1999
- 1999-08-12 EP EP99946594A patent/EP1110067B1/en not_active Expired - Lifetime
- 1999-08-12 JP JP2000566649A patent/JP2002523736A/ja active Pending
- 1999-08-12 ES ES99946594T patent/ES2217809T3/es not_active Expired - Lifetime
- 1999-08-12 DE DE69915651T patent/DE69915651T2/de not_active Expired - Lifetime
- 1999-08-12 WO PCT/US1999/018474 patent/WO2000011441A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP1110067A4 (en) | 2001-10-24 |
| EP1110067A2 (en) | 2001-06-27 |
| DE69915651D1 (de) | 2004-04-22 |
| JP2002523736A (ja) | 2002-07-30 |
| DE69915651T2 (de) | 2004-08-19 |
| EP1110067B1 (en) | 2004-03-17 |
| US6142021A (en) | 2000-11-07 |
| WO2000011441A3 (en) | 2000-06-02 |
| WO2000011441A2 (en) | 2000-03-02 |
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