DE69905179D1 - Verfahren zur herstellung einer einkristallinen schicht aus germanium auf einem einkristallinen siliziumsubstrat und dadurch hergestellte produkte - Google Patents

Verfahren zur herstellung einer einkristallinen schicht aus germanium auf einem einkristallinen siliziumsubstrat und dadurch hergestellte produkte

Info

Publication number
DE69905179D1
DE69905179D1 DE69905179T DE69905179T DE69905179D1 DE 69905179 D1 DE69905179 D1 DE 69905179D1 DE 69905179 T DE69905179 T DE 69905179T DE 69905179 T DE69905179 T DE 69905179T DE 69905179 D1 DE69905179 D1 DE 69905179D1
Authority
DE
Germany
Prior art keywords
germanium
producing
silicon substrate
crystalline
products produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69905179T
Other languages
English (en)
Inventor
Caroline Hernandez
Yves Campidelli
Daniel Bensahel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orange SA
Original Assignee
France Telecom SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by France Telecom SA filed Critical France Telecom SA
Application granted granted Critical
Publication of DE69905179D1 publication Critical patent/DE69905179D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/08—Germanium
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/52—Alloys

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)
DE69905179T 1998-09-10 1999-09-10 Verfahren zur herstellung einer einkristallinen schicht aus germanium auf einem einkristallinen siliziumsubstrat und dadurch hergestellte produkte Expired - Lifetime DE69905179D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9811313A FR2783254B1 (fr) 1998-09-10 1998-09-10 Procede d'obtention d'une couche de germanium monocristallin sur un substrat de silicium monocristallin,et produits obtenus
PCT/FR1999/002154 WO2000015885A1 (fr) 1998-09-10 1999-09-10 Procede d'obtention d'une couche de germanium monocristallin sur un substrat de silicium monocristallin, et produits obtenus

Publications (1)

Publication Number Publication Date
DE69905179D1 true DE69905179D1 (de) 2003-03-06

Family

ID=9530304

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69905179T Expired - Lifetime DE69905179D1 (de) 1998-09-10 1999-09-10 Verfahren zur herstellung einer einkristallinen schicht aus germanium auf einem einkristallinen siliziumsubstrat und dadurch hergestellte produkte

Country Status (6)

Country Link
US (1) US6537370B1 (de)
EP (1) EP1115920B1 (de)
JP (1) JP4486753B2 (de)
DE (1) DE69905179D1 (de)
FR (1) FR2783254B1 (de)
WO (1) WO2000015885A1 (de)

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US20070104441A1 (en) * 2005-11-08 2007-05-10 Massachusetts Institute Of Technology Laterally-integrated waveguide photodetector apparatus and related coupling methods
JP2007173354A (ja) * 2005-12-20 2007-07-05 Shin Etsu Chem Co Ltd Ｓｏｉ基板およびｓｏｉ基板の製造方法
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US20070262296A1 (en) * 2006-05-11 2007-11-15 Matthias Bauer Photodetectors employing germanium layers
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KR20110065446A (ko) * 2008-10-02 2011-06-15 스미또모 가가꾸 가부시키가이샤 반도체 기판, 전자 디바이스 및 반도체 기판의 제조 방법
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Also Published As

Publication number Publication date
FR2783254B1 (fr) 2000-11-10
JP2002525255A (ja) 2002-08-13
FR2783254A1 (fr) 2000-03-17
US6537370B1 (en) 2003-03-25
JP4486753B2 (ja) 2010-06-23
EP1115920B1 (de) 2003-01-29
EP1115920A1 (de) 2001-07-18
WO2000015885A1 (fr) 2000-03-23

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