DE69840031D1 - Methode und System zur Detektion einer Marke - Google Patents
Methode und System zur Detektion einer MarkeInfo
- Publication number
- DE69840031D1 DE69840031D1 DE69840031T DE69840031T DE69840031D1 DE 69840031 D1 DE69840031 D1 DE 69840031D1 DE 69840031 T DE69840031 T DE 69840031T DE 69840031 T DE69840031 T DE 69840031T DE 69840031 D1 DE69840031 D1 DE 69840031D1
- Authority
- DE
- Germany
- Prior art keywords
- alignment mark
- mark
- optical system
- image
- photoelectric detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7065—Production of alignment light, e.g. light source, control of coherence, polarization, pulse length, wavelength
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7084—Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31923997 | 1997-11-20 | ||
PCT/JP1998/005226 WO1999027567A1 (fr) | 1997-11-20 | 1998-11-19 | Procede de detection de marque et capteur de position de marque |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69840031D1 true DE69840031D1 (de) | 2008-10-30 |
Family
ID=18107976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69840031T Expired - Lifetime DE69840031D1 (de) | 1997-11-20 | 1998-11-19 | Methode und System zur Detektion einer Marke |
Country Status (7)
Country | Link |
---|---|
US (1) | US6285455B1 (de) |
EP (1) | EP1041608B1 (de) |
JP (1) | JP4192423B2 (de) |
AT (1) | ATE408857T1 (de) |
AU (1) | AU1174599A (de) |
DE (1) | DE69840031D1 (de) |
WO (1) | WO1999027567A1 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU1174599A (en) | 1997-11-20 | 1999-06-15 | Nikon Corporation | Mark detection method and mark position sensor |
US7057299B2 (en) * | 2000-02-03 | 2006-06-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Alignment mark configuration |
US6704089B2 (en) * | 2000-04-28 | 2004-03-09 | Asml Netherlands B.V. | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby |
KR100500469B1 (ko) * | 2001-01-12 | 2005-07-12 | 삼성전자주식회사 | 정렬마크와 이를 이용하는 노광정렬시스템 및 그 정렬방법 |
US6633048B2 (en) * | 2001-05-03 | 2003-10-14 | Northrop Grumman Corporation | High output extreme ultraviolet source |
US20040005769A1 (en) * | 2002-07-03 | 2004-01-08 | Cabot Microelectronics Corp. | Method and apparatus for endpoint detection |
SG120949A1 (en) * | 2002-09-20 | 2006-04-26 | Asml Netherlands Bv | Alignment system and methods for lithographic systems using at least two wavelengths |
US6774452B1 (en) | 2002-12-17 | 2004-08-10 | Cypress Semiconductor Corporation | Semiconductor structure having alignment marks with shallow trench isolation |
KR100519948B1 (ko) * | 2003-05-20 | 2005-10-10 | 엘지.필립스 엘시디 주식회사 | 비정질 실리콘의 결정화 공정 및 이를 이용한 스위칭 소자 |
DE10356519A1 (de) * | 2003-12-03 | 2005-07-07 | Infineon Technologies Ag | Verfahren und optisches System zum Erfassen einer geometrischen Form auf einem Halbleitersubstrat |
US7565219B2 (en) * | 2003-12-09 | 2009-07-21 | Asml Netherlands B.V. | Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby |
JP4777731B2 (ja) * | 2005-03-31 | 2011-09-21 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
US7612892B2 (en) * | 2005-10-06 | 2009-11-03 | Nikon Corporation | Imaging optical system configured with through the lens optics for producing control information |
JP5425363B2 (ja) * | 2006-11-28 | 2014-02-26 | ルネサスエレクトロニクス株式会社 | 半導体装置、及び表示装置 |
JP4966719B2 (ja) | 2007-04-11 | 2012-07-04 | 株式会社日立ハイテクノロジーズ | 校正用標準部材及びその作製方法、並びにそれを用いた電子ビーム装置 |
JP2008270072A (ja) * | 2007-04-24 | 2008-11-06 | Sii Nanotechnology Inc | 荷電粒子ビーム装置 |
IL194580A0 (en) * | 2007-10-09 | 2009-08-03 | Asml Netherlands Bv | Alignment method and apparatus, lithographic apparatus, metrology apparatus and device manufacturing method |
CN101435997B (zh) * | 2007-11-15 | 2012-06-27 | 上海华虹Nec电子有限公司 | 光刻套刻精度的测试图形及测量方法 |
NL1036179A1 (nl) * | 2007-11-20 | 2009-05-25 | Asml Netherlands Bv | Lithographic apparatus and method. |
JP5406624B2 (ja) * | 2009-08-10 | 2014-02-05 | キヤノン株式会社 | 検出装置、露光装置及びデバイスの製造方法 |
US8088633B2 (en) * | 2009-12-02 | 2012-01-03 | Ultratech, Inc. | Optical alignment methods for forming LEDs having a rough surface |
CN102243442B (zh) * | 2010-05-12 | 2014-11-12 | 上海微电子装备有限公司 | 硅片对准光源幅度调制装置 |
US8422027B2 (en) | 2010-06-08 | 2013-04-16 | Nikon Corporation | Imaging optical system for producing control information regarding lateral movement of an image plane or an object plane |
DE102013220190B4 (de) * | 2013-10-07 | 2021-08-12 | Dr. Johannes Heidenhain Gmbh | Messteilung und lichtelektrische Positionsmesseinrichtung mit dieser Messteilung |
CN104359410B (zh) * | 2014-12-01 | 2017-05-17 | 清华大学 | 一种利用可旋转光栅测量的位移测量系统 |
JP6378117B2 (ja) * | 2015-03-13 | 2018-08-22 | 東芝メモリ株式会社 | アライメントマークの形成方法および半導体装置 |
JP6553817B2 (ja) | 2016-01-19 | 2019-07-31 | エーエスエムエル ネザーランズ ビー.ブイ. | 位置センシング機構、そのような機構を含むリソグラフィ装置、位置センシング方法、及びデバイス製造方法 |
NL2019155A (en) | 2016-08-30 | 2018-03-06 | Asml Netherlands Bv | Position sensor, lithographic apparatus and method for manufacturing devices |
JP6791584B2 (ja) * | 2017-02-01 | 2020-11-25 | 株式会社ディスコ | 加工方法 |
JP6584567B1 (ja) * | 2018-03-30 | 2019-10-02 | キヤノン株式会社 | リソグラフィ装置、パターン形成方法及び物品の製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63240018A (ja) | 1987-03-27 | 1988-10-05 | Matsushita Electric Ind Co Ltd | アライメント方法 |
JP2773147B2 (ja) * | 1988-08-19 | 1998-07-09 | 株式会社ニコン | 露光装置の位置合わせ装置及び方法 |
JP2906433B2 (ja) | 1989-04-25 | 1999-06-21 | 株式会社ニコン | 投影露光装置及び投影露光方法 |
US5151750A (en) | 1989-04-14 | 1992-09-29 | Nikon Corporation | Alignment apparatus |
JPH032504A (ja) * | 1989-05-30 | 1991-01-08 | Nikon Corp | 位置合わせ装置 |
JPH05326360A (ja) * | 1992-05-20 | 1993-12-10 | Victor Co Of Japan Ltd | 半導体装置の製造方法及び製造装置 |
JPH06260389A (ja) | 1993-03-05 | 1994-09-16 | Nikon Corp | アライメント装置 |
JPH07321030A (ja) | 1994-03-29 | 1995-12-08 | Nikon Corp | アライメント装置 |
US5721605A (en) | 1994-03-29 | 1998-02-24 | Nikon Corporation | Alignment device and method with focus detection system |
JPH08250391A (ja) * | 1995-03-10 | 1996-09-27 | Nikon Corp | 位置検出用マーク及び位置検出方法 |
AU1174599A (en) | 1997-11-20 | 1999-06-15 | Nikon Corporation | Mark detection method and mark position sensor |
-
1998
- 1998-11-19 AU AU11745/99A patent/AU1174599A/en not_active Abandoned
- 1998-11-19 JP JP2000522614A patent/JP4192423B2/ja not_active Expired - Fee Related
- 1998-11-19 EP EP98954761A patent/EP1041608B1/de not_active Expired - Lifetime
- 1998-11-19 WO PCT/JP1998/005226 patent/WO1999027567A1/ja active IP Right Grant
- 1998-11-19 AT AT98954761T patent/ATE408857T1/de not_active IP Right Cessation
- 1998-11-19 DE DE69840031T patent/DE69840031D1/de not_active Expired - Lifetime
-
2000
- 2000-05-19 US US09/573,223 patent/US6285455B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1999027567A1 (fr) | 1999-06-03 |
EP1041608A1 (de) | 2000-10-04 |
JP4192423B2 (ja) | 2008-12-10 |
US6285455B1 (en) | 2001-09-04 |
EP1041608A4 (de) | 2003-11-19 |
AU1174599A (en) | 1999-06-15 |
ATE408857T1 (de) | 2008-10-15 |
EP1041608B1 (de) | 2008-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |