DE69836311D1 - Anregungsvorrichtung für einen Vibrationswellenantrieb - Google Patents

Anregungsvorrichtung für einen Vibrationswellenantrieb

Info

Publication number
DE69836311D1
DE69836311D1 DE69836311T DE69836311T DE69836311D1 DE 69836311 D1 DE69836311 D1 DE 69836311D1 DE 69836311 T DE69836311 T DE 69836311T DE 69836311 T DE69836311 T DE 69836311T DE 69836311 D1 DE69836311 D1 DE 69836311D1
Authority
DE
Germany
Prior art keywords
vibration wave
excitation device
wave drive
drive
excitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69836311T
Other languages
English (en)
Other versions
DE69836311T2 (de
Inventor
Akio Atsuta
Shinji Yamamoto
Kenichi Kataoka
Tadashi Hayashi
Jun Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP34345497A external-priority patent/JP3768664B2/ja
Priority claimed from JP9343458A external-priority patent/JPH11178374A/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69836311D1 publication Critical patent/DE69836311D1/de
Publication of DE69836311T2 publication Critical patent/DE69836311T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/145—Large signal circuits, e.g. final stages
    • H02N2/147—Multi-phase circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
DE69836311T 1997-12-12 1998-12-07 Anregungsvorrichtung für einen Vibrationswellenantrieb Expired - Lifetime DE69836311T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP34345497A JP3768664B2 (ja) 1997-12-12 1997-12-12 振動型アクチュエータの駆動装置、振動型アクチュエータを用いた機器および画像形成装置
JP34345497 1997-12-12
JP9343458A JPH11178374A (ja) 1997-12-12 1997-12-12 振動型アクチュエータの駆動装置及び振動型アクチュエータを用いた機器、および画像形成装置
JP34345897 1997-12-12

Publications (2)

Publication Number Publication Date
DE69836311D1 true DE69836311D1 (de) 2006-12-14
DE69836311T2 DE69836311T2 (de) 2007-04-05

Family

ID=26577536

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69836311T Expired - Lifetime DE69836311T2 (de) 1997-12-12 1998-12-07 Anregungsvorrichtung für einen Vibrationswellenantrieb
DE69838595T Expired - Lifetime DE69838595T2 (de) 1997-12-12 1998-12-07 Antriebsvorrichtung für einen Vibrationsaktor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69838595T Expired - Lifetime DE69838595T2 (de) 1997-12-12 1998-12-07 Antriebsvorrichtung für einen Vibrationsaktor

Country Status (5)

Country Link
US (1) US6100622A (de)
EP (2) EP0926808B1 (de)
KR (1) KR100300245B1 (de)
CN (1) CN1155125C (de)
DE (2) DE69836311T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
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US6724607B2 (en) 2000-09-28 2004-04-20 Canon Kabushiki Kaisha Driving apparatus of vibration type actuator
JP2002204585A (ja) 2000-12-28 2002-07-19 Canon Inc 振動型アクチュエータの制御装置
JP2002199758A (ja) * 2000-12-28 2002-07-12 Canon Inc 振動型アクチュエータの制御装置
JP4834243B2 (ja) * 2001-06-01 2011-12-14 キヤノン株式会社 振動型アクチュエータの制御装置
JP2002362250A (ja) * 2001-06-01 2002-12-18 Nippon Pop Rivets & Fasteners Ltd モール取付装置及びモールクリップ
DE10149671A1 (de) * 2001-10-09 2003-04-24 Eppendorf Ag Verfahren zum Steuern eines Piezoantriebes und Piezoantrieb zur Durchführung des Verfahrens
JP3805242B2 (ja) * 2001-12-07 2006-08-02 キヤノン株式会社 振動波駆動装置
JP2003228932A (ja) * 2002-01-30 2003-08-15 Toshiba Corp ディスク記憶装置及びヘッド移動制御方法
JP2003289681A (ja) * 2002-03-27 2003-10-10 Canon Inc 振動型アクチュエータの制御装置
JP4086536B2 (ja) * 2002-04-18 2008-05-14 キヤノン株式会社 振動波駆動装置及びその駆動回路
US7129618B2 (en) * 2003-03-31 2006-10-31 Canon Kabushiki Kaisha Control apparatus capable of low-speed driving of vibration type driving apparatus, actuating apparatus using the control apparatus, control method capable of low-speed driving of vibration type driving apparatus, and storage medium storing program including program codes capable of realizing the control method
JP4478407B2 (ja) * 2003-06-30 2010-06-09 キヤノン株式会社 制御装置およびプログラム
JP4148127B2 (ja) * 2003-12-12 2008-09-10 株式会社デンソー 燃料噴射装置
US7339305B2 (en) * 2004-03-17 2008-03-04 Seiko Epson Corporation Piezoelectric actuator drive apparatus, electronic device, driving method thereof, drive control program thereof, and storage medium in which program is stored
JP4385938B2 (ja) * 2004-12-15 2009-12-16 セイコーエプソン株式会社 アクチュエータ
DE102005007371A1 (de) * 2005-02-17 2006-08-24 Siemens Ag Elektrische Maschine
US7064509B1 (en) * 2005-03-14 2006-06-20 Visteon Global Technologies, Inc. Apparatus for DC motor position detection with capacitive ripple current extraction
JP2009168532A (ja) * 2008-01-11 2009-07-30 Mitsubishi Heavy Ind Ltd 外部制御手段の信号状態診断装置
JP2009168530A (ja) * 2008-01-11 2009-07-30 Mitsubishi Heavy Ind Ltd 出力対象の信号状態診断装置
JP5383252B2 (ja) * 2009-02-27 2014-01-08 キヤノン株式会社 振動波モータの駆動方法及び駆動装置
JP5791343B2 (ja) 2010-05-31 2015-10-07 キヤノン株式会社 振動型モータの制御方法および振動型モータの駆動装置
JP5893307B2 (ja) * 2011-09-13 2016-03-23 キヤノン株式会社 振動型アクチュエータの駆動装置
CN102981522B (zh) * 2012-11-29 2015-03-25 中国科学院武汉物理与数学研究所 基于压电陶瓷和压电加速度计的小型主动振动控制系统
JP6324117B2 (ja) * 2013-04-12 2018-05-16 キヤノン株式会社 振動型駆動装置、ロボット、及び画像形成装置
JP6584247B2 (ja) * 2014-10-10 2019-10-02 キヤノン株式会社 振動型アクチュエータの駆動方法、駆動装置の制御方法、駆動装置、撮像装置及び装置
US9397668B2 (en) * 2014-12-18 2016-07-19 Linear Technology Corporation System and method for providing programmable synchronous output delay in a clock generation or distribution device
JP6478665B2 (ja) 2015-01-30 2019-03-06 キヤノン株式会社 振動体の駆動制御回路、振動体の駆動方法、振動型駆動装置及び撮像装置
JP2018030107A (ja) * 2016-08-26 2018-03-01 レノボ・シンガポール・プライベート・リミテッド 触覚フィードバック・システム、電子機器および触覚フィードバックの生成方法
US11081979B2 (en) * 2017-04-25 2021-08-03 Canon Kabushiki Kaisha Vibration-type driving apparatus that detects undesired vibrations, control method for the vibration-type driving apparatus, storage medium, robot, pan head for image pickup apparatus, and image forming apparatus
EP3435535A1 (de) * 2017-07-25 2019-01-30 Physik Instrumente (PI) GmbH & Co. Kg Verfahren zur geregelten bewegungskontrolle eines ultraschallmotors
CN109424535B (zh) * 2017-08-21 2021-03-09 研能科技股份有限公司 共振式压电气体泵的节能控制方法
WO2019103411A1 (ko) * 2017-11-21 2019-05-31 주식회사 모다이노칩 압전 액추에이터의 구동 장치 및 방법
CN109981869B (zh) * 2017-12-27 2020-10-02 宁波舜宇光电信息有限公司 基于图像技术测量透镜致动器振荡周期的方法及测试设备
JP7191547B2 (ja) 2018-05-11 2022-12-19 キヤノン株式会社 振動型駆動装置、電子機器及び振動型アクチュエータの制御方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4692649A (en) * 1985-03-01 1987-09-08 Canon Kabushiki Kaisha Driving circuit of a vibration wave motor
JP2589698B2 (ja) * 1987-07-03 1997-03-12 キヤノン株式会社 振動型アクチュエータ装置
US5247221A (en) * 1988-10-21 1993-09-21 Canon Kabushiki Kaisha Vibration wave driven actuator
JP2890484B2 (ja) * 1989-06-15 1999-05-17 株式会社ニコン 超音波モータの駆動装置
JP2874765B2 (ja) * 1989-06-19 1999-03-24 キヤノン株式会社 振動型モーター装置
JP2998967B2 (ja) * 1990-01-10 2000-01-17 キヤノン株式会社 振動型モータを有する装置
US5285134A (en) * 1990-03-09 1994-02-08 Canon Kabushiki Kaisha Control device for vibration type motor
JP2996483B2 (ja) * 1990-04-05 1999-12-27 キヤノン株式会社 振動型モータ
JP2972010B2 (ja) * 1992-01-08 1999-11-08 キヤノン株式会社 振動型アクチュエーター駆動制御装置
JP3107903B2 (ja) * 1992-04-24 2000-11-13 キヤノン株式会社 振動波モータのための駆動装置
JPH05328757A (ja) * 1992-05-21 1993-12-10 Canon Inc 振動波アクチュエータの駆動装置
JP3245214B2 (ja) * 1992-06-02 2002-01-07 キヤノン株式会社 振動型アクチュエータ制御装置
JP2872862B2 (ja) * 1992-06-12 1999-03-24 キヤノン株式会社 振動型モータの駆動装置
JPH06327273A (ja) * 1993-05-14 1994-11-25 Canon Inc 振動型アクチュエーター装置
JPH07131987A (ja) * 1993-11-05 1995-05-19 Matsushita Electric Ind Co Ltd 超音波モータの駆動制御回路
JP3165315B2 (ja) * 1994-02-18 2001-05-14 アスモ株式会社 超音波モータの駆動回路
JP3412923B2 (ja) * 1994-09-14 2003-06-03 キヤノン株式会社 振動波駆動装置の制御装置
JP3402816B2 (ja) * 1994-12-22 2003-05-06 キヤノン株式会社 超音波モータの駆動回路
US5794078A (en) * 1995-09-11 1998-08-11 Nikon Corporation Image movement correction of camera
US5714831A (en) * 1995-11-13 1998-02-03 Wisconsin Alumni Research Foundation Method and apparatus for improved control of piezoelectric positioners
JP3437359B2 (ja) * 1996-01-08 2003-08-18 キヤノン株式会社 振動波駆動装置の制御装置

Also Published As

Publication number Publication date
KR19990063019A (ko) 1999-07-26
EP0926808A3 (de) 2000-11-22
CN1155125C (zh) 2004-06-23
DE69836311T2 (de) 2007-04-05
EP0926808B1 (de) 2006-11-02
KR100300245B1 (ko) 2001-09-06
EP1638197A3 (de) 2006-05-31
DE69838595D1 (de) 2007-11-29
CN1226013A (zh) 1999-08-18
EP1638197B1 (de) 2007-10-17
EP1638197A2 (de) 2006-03-22
US6100622A (en) 2000-08-08
EP0926808A2 (de) 1999-06-30
DE69838595T2 (de) 2008-07-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition