DE69820950D1 - Vorrichtung zur chemischen Abscheidung aus der Dampfphase und Verfahren zu deren Reinigung - Google Patents
Vorrichtung zur chemischen Abscheidung aus der Dampfphase und Verfahren zu deren ReinigungInfo
- Publication number
- DE69820950D1 DE69820950D1 DE69820950T DE69820950T DE69820950D1 DE 69820950 D1 DE69820950 D1 DE 69820950D1 DE 69820950 T DE69820950 T DE 69820950T DE 69820950 T DE69820950 T DE 69820950T DE 69820950 D1 DE69820950 D1 DE 69820950D1
- Authority
- DE
- Germany
- Prior art keywords
- cleaning
- vapor deposition
- chemical vapor
- deposition apparatus
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/205—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10S156/916—Differential etching apparatus including chamber cleaning means or shield for preventing deposits
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29776297A JP3398027B2 (ja) | 1997-10-15 | 1997-10-15 | 気相成長装置及びその洗浄方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69820950D1 true DE69820950D1 (de) | 2004-02-12 |
DE69820950T2 DE69820950T2 (de) | 2004-10-21 |
Family
ID=17850853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69820950T Expired - Fee Related DE69820950T2 (de) | 1997-10-15 | 1998-10-13 | Vorrichtung zur chemischen Abscheidung aus der Dampfphase und Verfahren zu deren Reinigung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6312569B1 (de) |
EP (1) | EP0909837B1 (de) |
JP (1) | JP3398027B2 (de) |
KR (1) | KR100562200B1 (de) |
DE (1) | DE69820950T2 (de) |
TW (1) | TW510923B (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6352623B1 (en) * | 1999-12-17 | 2002-03-05 | Nutool, Inc. | Vertically configured chamber used for multiple processes |
JP4730572B2 (ja) * | 2000-08-21 | 2011-07-20 | 株式会社アルバック | プラズマ成膜装置及びそのクリーニング方法 |
US7247561B2 (en) * | 2003-12-11 | 2007-07-24 | Micron Technology, Inc. | Method of removing residual contaminants from an environment |
KR100711916B1 (ko) * | 2005-12-28 | 2007-04-27 | 동부일렉트로닉스 주식회사 | 증착설비 및 이를 이용한 증착방법 |
JP5123820B2 (ja) * | 2008-10-27 | 2013-01-23 | 東京エレクトロン株式会社 | 基板処理装置の真空排気方法及び基板処理装置 |
DE102011080202A1 (de) * | 2011-08-01 | 2013-02-07 | Gebr. Schmid Gmbh | Vorrichtung und Verfahren zur Herstellung von dünnen Schichten |
US9309603B2 (en) | 2011-09-14 | 2016-04-12 | Applied Materials, Inc | Component cleaning in a metal plating apparatus |
US9352355B1 (en) * | 2012-04-15 | 2016-05-31 | David P. Jackson | Particle-plasma ablation process |
CN107012444B (zh) * | 2017-05-05 | 2023-09-15 | 宁波工程学院 | 一种化学气相沉积镀制金刚石膜的设备的吹气装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63149380A (ja) * | 1986-12-10 | 1988-06-22 | Nec Corp | Cvd装置 |
KR0145302B1 (ko) * | 1988-04-28 | 1998-08-17 | 카자마 젠쥬 | 얇은 막의 형성방법 |
JPH029115A (ja) * | 1988-06-28 | 1990-01-12 | Mitsubishi Electric Corp | 半導体製造装置 |
US5298720A (en) * | 1990-04-25 | 1994-03-29 | International Business Machines Corporation | Method and apparatus for contamination control in processing apparatus containing voltage driven electrode |
EP0574075B1 (de) * | 1992-06-09 | 1996-02-07 | Koninklijke Philips Electronics N.V. | Verfahren zur Herstellung eines Halbleiterbauelementes durch CVD |
US5252178A (en) * | 1992-06-24 | 1993-10-12 | Texas Instruments Incorporated | Multi-zone plasma processing method and apparatus |
JP3148004B2 (ja) * | 1992-07-06 | 2001-03-19 | 株式会社東芝 | 光cvd装置及びこれを用いた半導体装置の製造方法 |
US5403459A (en) * | 1993-05-17 | 1995-04-04 | Applied Materials, Inc. | Cleaning of a PVD chamber containing a collimator |
JP2659919B2 (ja) * | 1994-01-13 | 1997-09-30 | インターナショナル・ビジネス・マシーンズ・コーポレイション | プラズマの不均一性を補正するプラズマ装置 |
JPH08298244A (ja) * | 1995-04-27 | 1996-11-12 | Nec Yamagata Ltd | スパッタ装置 |
US5904800A (en) * | 1997-02-03 | 1999-05-18 | Motorola, Inc. | Semiconductor wafer processing chamber for reducing particles deposited onto the semiconductor wafer |
JP3470557B2 (ja) * | 1997-06-27 | 2003-11-25 | 株式会社日立製作所 | プラズマ処理装置 |
-
1997
- 1997-10-15 JP JP29776297A patent/JP3398027B2/ja not_active Expired - Fee Related
-
1998
- 1998-10-13 EP EP98119305A patent/EP0909837B1/de not_active Expired - Lifetime
- 1998-10-13 DE DE69820950T patent/DE69820950T2/de not_active Expired - Fee Related
- 1998-10-14 US US09/172,141 patent/US6312569B1/en not_active Expired - Fee Related
- 1998-10-14 TW TW087117005A patent/TW510923B/zh active
- 1998-10-15 KR KR1019980043106A patent/KR100562200B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0909837A2 (de) | 1999-04-21 |
KR19990037106A (ko) | 1999-05-25 |
DE69820950T2 (de) | 2004-10-21 |
EP0909837B1 (de) | 2004-01-07 |
TW510923B (en) | 2002-11-21 |
KR100562200B1 (ko) | 2006-06-28 |
EP0909837A3 (de) | 1999-05-19 |
JP3398027B2 (ja) | 2003-04-21 |
JPH11121445A (ja) | 1999-04-30 |
US6312569B1 (en) | 2001-11-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |