DE69818724D1 - Rücksaugventil - Google Patents

Rücksaugventil

Info

Publication number
DE69818724D1
DE69818724D1 DE69818724T DE69818724T DE69818724D1 DE 69818724 D1 DE69818724 D1 DE 69818724D1 DE 69818724 T DE69818724 T DE 69818724T DE 69818724 T DE69818724 T DE 69818724T DE 69818724 D1 DE69818724 D1 DE 69818724D1
Authority
DE
Germany
Prior art keywords
suck back
suck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69818724T
Other languages
English (en)
Other versions
DE69818724T2 (de
Inventor
Yoshihiro Fukano
Tetsuro Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Application granted granted Critical
Publication of DE69818724D1 publication Critical patent/DE69818724D1/de
Publication of DE69818724T2 publication Critical patent/DE69818724T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1026—Valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/28—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with integral means for shielding the discharged liquid or other fluent material, e.g. to limit area of spray; with integral means for catching drips or collecting surplus liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1047—Apparatus or installations for supplying liquid or other fluent material comprising a buffer container or an accumulator between the supply source and the applicator
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K23/00—Valves for preventing drip from nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetically Actuated Valves (AREA)
  • Coating Apparatus (AREA)
DE69818724T 1997-03-05 1998-02-24 Rücksaugventil Expired - Lifetime DE69818724T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP5001797 1997-03-05
JP5001797 1997-03-05
JP00807798A JP4081620B2 (ja) 1997-03-05 1998-01-19 サックバックバルブ
JP807798 1998-01-19

Publications (2)

Publication Number Publication Date
DE69818724D1 true DE69818724D1 (de) 2003-11-13
DE69818724T2 DE69818724T2 (de) 2004-07-22

Family

ID=26342517

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69818724T Expired - Lifetime DE69818724T2 (de) 1997-03-05 1998-02-24 Rücksaugventil

Country Status (4)

Country Link
US (1) US5971296A (de)
EP (1) EP0863346B1 (de)
JP (1) JP4081620B2 (de)
DE (1) DE69818724T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3493322B2 (ja) * 1998-09-25 2004-02-03 Ｓｍｃ株式会社 液だれ防止方法およびシステム
JP4596614B2 (ja) * 2000-08-04 2010-12-08 東芝機械株式会社 基材表面に間欠的に塗布剤を塗布する装置
JP3825342B2 (ja) * 2002-03-06 2006-09-27 Ｓｍｃ株式会社 サックバックバルブ
JP4310532B2 (ja) * 2002-11-27 2009-08-12 Ｓｍｃ株式会社 流量調整弁
JP4035728B2 (ja) * 2003-07-07 2008-01-23 Ｓｍｃ株式会社 サックバックバルブ
US6863260B2 (en) * 2003-07-18 2005-03-08 Peter Johann Medina Piston actuator incorporating partitioned pressure chambers
JP2006010038A (ja) * 2004-06-29 2006-01-12 Smc Corp サックバックバルブ
JP2006010037A (ja) * 2004-06-29 2006-01-12 Smc Corp サックバックバルブ
US20060065868A1 (en) * 2004-09-28 2006-03-30 Strong Warren N Diaphragm valve
JP5009107B2 (ja) * 2007-09-12 2012-08-22 サーパス工業株式会社 サックバックバルブ
JP5301805B2 (ja) * 2007-10-17 2013-09-25 サーパス工業株式会社 サックバックバルブシステム及びその閉弁動作制御方法
US8469333B2 (en) * 2010-03-13 2013-06-25 Synapse Engineering, Inc. Counter-biased valve and actuator assembly
CN102563173A (zh) * 2010-12-28 2012-07-11 高砂电气(苏州)有限公司 回吸结构电磁阀
JP6097545B2 (ja) * 2012-12-12 2017-03-15 日本ダイヤバルブ株式会社 ダイヤフラム弁
JP6180267B2 (ja) * 2013-09-30 2017-08-16 Ckd株式会社 流体駆動式遮断弁
US10022815B2 (en) 2014-09-09 2018-07-17 Proteus Industries Inc. Drawback valve systems and methods for coolant drawback
DE102017122006A1 (de) * 2017-09-22 2019-03-28 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Anordnung mit einer Ventileinheit, einer Rücksaugeinheit und einem Ventilkörper
EP3714993B1 (de) * 2019-03-29 2021-12-08 Robatech AG Vorrichtung zum ausgeben eines fliessfähigen mediums
JP7243961B2 (ja) * 2019-09-30 2023-03-22 Smc株式会社 管継手用ナット、管継手、流体圧機器及び流体制御システムと、ナット回転用治具及び管継手用ナットの螺回方法
CN113217672B (zh) * 2021-05-06 2022-04-15 长江存储科技有限责任公司 阀体结构及具有其的晶圆清洗系统

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3895748A (en) * 1974-04-03 1975-07-22 George R Klingenberg No drip suck back units for glue or other liquids either separately installed with or incorporated into no drip suck back liquid applying and control apparatus
NO800594L (no) * 1979-03-20 1980-09-22 Curt Arnold Bjoerklund Ventil.
US4394945A (en) * 1981-08-06 1983-07-26 Loctite Corporation Valve having suck-back feature
JPS59177929A (ja) * 1983-03-28 1984-10-08 Canon Inc サツクバツクポンプ
JPH0810399Y2 (ja) 1989-07-13 1996-03-29 株式会社コガネイ サックバックバルブ
JP2803859B2 (ja) * 1989-09-29 1998-09-24 株式会社日立製作所 流動体供給装置およびその制御方法
NL9100393A (nl) * 1991-03-05 1992-10-01 Petrus Nicolaas Roelof Johanne Klep, klepsamenstel alsmede vulinrichting.
JPH065506A (ja) * 1992-06-18 1994-01-14 Toshiba Corp 薬液供給装置
DE4236371C2 (de) * 1992-10-28 1995-08-17 Erno Raumfahrttechnik Gmbh Vorrichtung und Verfahren zum Einspritzen
US5333643A (en) * 1993-03-24 1994-08-02 South Bend Controls, Inc. Solenoid valve
US5960831A (en) * 1993-05-07 1999-10-05 Robohand, Inc. Electromechanical servovalve
JPH0810399A (ja) * 1994-07-04 1996-01-16 Matsushita Electric Ind Co Ltd 球発射装置

Also Published As

Publication number Publication date
JPH10305255A (ja) 1998-11-17
DE69818724T2 (de) 2004-07-22
JP4081620B2 (ja) 2008-04-30
US5971296A (en) 1999-10-26
EP0863346B1 (de) 2003-10-08
EP0863346A2 (de) 1998-09-09
EP0863346A3 (de) 1999-05-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition