DE69813730T2 - Ventil mit metallischer Membran - Google Patents

Ventil mit metallischer Membran

Info

Publication number
DE69813730T2
DE69813730T2 DE69813730T DE69813730T DE69813730T2 DE 69813730 T2 DE69813730 T2 DE 69813730T2 DE 69813730 T DE69813730 T DE 69813730T DE 69813730 T DE69813730 T DE 69813730T DE 69813730 T2 DE69813730 T2 DE 69813730T2
Authority
DE
Germany
Prior art keywords
valve
metallic membrane
metallic
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69813730T
Other languages
English (en)
Other versions
DE69813730D1 (de
Inventor
Shuhei Ogawa
Kazuhiro Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Application granted granted Critical
Publication of DE69813730D1 publication Critical patent/DE69813730D1/de
Publication of DE69813730T2 publication Critical patent/DE69813730T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Diaphragms And Bellows (AREA)
  • Lift Valve (AREA)
DE69813730T 1997-11-24 1998-11-13 Ventil mit metallischer Membran Expired - Fee Related DE69813730T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/976,639 US5881997A (en) 1997-11-24 1997-11-24 Metal diaphragm type valve

Publications (2)

Publication Number Publication Date
DE69813730D1 DE69813730D1 (de) 2003-05-28
DE69813730T2 true DE69813730T2 (de) 2003-10-16

Family

ID=25524320

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69813730T Expired - Fee Related DE69813730T2 (de) 1997-11-24 1998-11-13 Ventil mit metallischer Membran

Country Status (9)

Country Link
US (1) US5881997A (de)
EP (1) EP0918181B1 (de)
JP (1) JP4286934B2 (de)
KR (1) KR100286130B1 (de)
CA (1) CA2253988C (de)
DE (1) DE69813730T2 (de)
IL (1) IL126914A (de)
SG (1) SG67581A1 (de)
TW (1) TW368578B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001201212A (ja) * 2000-01-18 2001-07-27 Fuji Koki Corp 温度膨張弁
US6378548B1 (en) 2000-05-31 2002-04-30 United Dominion Industries, Inc. Varying size diaphragm valve assemblies utilizing diaphragm of uniform size
ES2524802T3 (es) 2002-04-26 2014-12-12 Emd Millipore Corporation Dispositivo de transferencia de fluido estéril, desechable
US7222636B2 (en) * 2002-08-20 2007-05-29 Applied Materials, Inc. Electronically actuated valve
US6698671B1 (en) * 2002-12-17 2004-03-02 Shin Tai Spurt Water Of The Garden Tools Co., Ltd. Movable shield structure of a flow control valve rod of a pistol-type nozzle
US6941963B2 (en) * 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition
US7021330B2 (en) * 2003-06-26 2006-04-04 Planar Systems, Inc. Diaphragm valve with reliability enhancements for atomic layer deposition
US6907897B2 (en) * 2003-06-26 2005-06-21 Planar Systems, Inc. Diaphragm valve for high-temperature precursor supply in atomic layer deposition
JP4340119B2 (ja) 2003-10-02 2009-10-07 シーケーディ株式会社 薬液弁
JP2005113778A (ja) * 2003-10-07 2005-04-28 Seiko Epson Corp ポンプ
JP4807554B2 (ja) * 2005-08-11 2011-11-02 旭有機材工業株式会社 流路付開閉弁
EP1906066A1 (de) * 2006-09-28 2008-04-02 Luxembourg Patent Company S.A. Ventil, insbesondere für Behälter von ultrahochreinem Gas
SG153002A1 (en) * 2007-11-16 2009-06-29 Millipore Corp Fluid transfer device
EP2267312A4 (de) * 2008-03-14 2017-01-11 Tacmina Corporation Metallmembran
US9874883B2 (en) * 2009-07-02 2018-01-23 Tescom Corporation Diaphragm interface apparatus to improve a cycle life of a diaphragm
JP3177094U (ja) * 2012-05-08 2012-07-19 イハラサイエンス株式会社 ダイヤフラム弁
US9863542B2 (en) 2013-02-01 2018-01-09 Swagelok Company Diaphragm valve with welded diaphragm seat carrier
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP2018507997A (ja) * 2015-03-19 2018-03-22 ゲーエーアー トゥーヘンハーゲン ゲーエムベーハー 回転減結合装置を備えた玉形弁
JP6033912B2 (ja) * 2015-04-17 2016-11-30 株式会社キッツエスシーティー ダイヤフラムバルブ
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN112673204A (zh) * 2018-09-27 2021-04-16 株式会社富士金 阀、阀的阀芯单元的更换方法以及阀的组装方法
CN111237473B (zh) * 2020-03-06 2021-12-03 西华大学 一种密封装置的密封性能控制系统
JP2023548331A (ja) 2020-11-04 2023-11-16 スウェージロック カンパニー 一体型オリフィス絞り付きバルブ
JP2023550601A (ja) 2020-11-06 2023-12-04 スウェージロック カンパニー バルブキャビティキャップ機構

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH351465A (de) * 1957-07-30 1961-01-15 Werner Dipl Ing Imobersteg Ventil
JPS5446927U (de) * 1977-09-08 1979-03-31
JPS6036777Y2 (ja) * 1979-02-01 1985-10-31 三菱自動車工業株式会社 排気ガス再循環流量制御弁
JPH0234532Y2 (de) * 1985-12-04 1990-09-17
US4750709A (en) * 1986-05-16 1988-06-14 Nupro Company Diaphragm valve
US4732363A (en) * 1986-05-16 1988-03-22 Nupro Company Diaphragm valve
US4671490A (en) * 1986-05-16 1987-06-09 Nupro Co. Diaphragm valve
JP2775176B2 (ja) * 1989-06-22 1998-07-16 愛三工業株式会社 ダイアフラムの取付構造
DE3928678C1 (de) * 1989-08-30 1990-12-20 Messer Griesheim Gmbh, 6000 Frankfurt, De
AT394626B (de) * 1990-05-17 1992-05-25 Balik Gmbh Membranventil
JPH05288280A (ja) * 1992-04-08 1993-11-02 Hitachi Metals Ltd メタルダイヤフラムバルブ
JPH0680958U (ja) * 1993-04-28 1994-11-15 清原 まさ子 金属製ダイヤフラムの取付構造
JPH07317925A (ja) * 1994-05-27 1995-12-08 Hitachi Metals Ltd ダイアフラムシール弁及びその金属ダイアフラム
JP3469331B2 (ja) * 1994-10-17 2003-11-25 株式会社フジキン 金属製ダイヤフラムの内周縁部のシール構造
JPH08200525A (ja) * 1995-01-31 1996-08-06 Hitachi Metals Ltd 液体原料気化器用弁
JP3291151B2 (ja) * 1995-02-15 2002-06-10 株式会社フジキン ダイヤフラム弁
JP3291152B2 (ja) * 1995-02-15 2002-06-10 株式会社フジキン ダイヤフラム弁
JP3190566B2 (ja) * 1995-03-14 2001-07-23 セイコーインスツルメンツ株式会社 超塑性Ｎｉ−Ｃｏ基合金およびその超塑性加工方法
JPH09138709A (ja) * 1995-11-14 1997-05-27 Yamato Sangyo Kk 圧力調整弁
JP3414914B2 (ja) * 1995-12-26 2003-06-09 大日本スクリーン製造株式会社 グラビア彫刻機の彫刻ヘッド

Also Published As

Publication number Publication date
TW368578B (en) 1999-09-01
IL126914A (en) 2002-07-25
IL126914A0 (en) 1999-09-22
KR100286130B1 (ko) 2002-05-09
CA2253988A1 (en) 1999-05-24
JP4286934B2 (ja) 2009-07-01
EP0918181B1 (de) 2003-04-23
EP0918181A1 (de) 1999-05-26
US5881997A (en) 1999-03-16
SG67581A1 (en) 1999-09-21
JPH11182708A (ja) 1999-07-06
CA2253988C (en) 2001-05-29
DE69813730D1 (de) 2003-05-28
KR19990062597A (ko) 1999-07-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee