DE69813126D1 - Vier-Spiegel Projektionsoptik für extremes UV - Google Patents

Vier-Spiegel Projektionsoptik für extremes UV

Info

Publication number
DE69813126D1
DE69813126D1 DE69813126T DE69813126T DE69813126D1 DE 69813126 D1 DE69813126 D1 DE 69813126D1 DE 69813126 T DE69813126 T DE 69813126T DE 69813126 T DE69813126 T DE 69813126T DE 69813126 D1 DE69813126 D1 DE 69813126D1
Authority
DE
Germany
Prior art keywords
extreme
projection optics
mirror projection
mirror
optics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69813126T
Other languages
English (en)
Other versions
DE69813126T2 (de
Inventor
David M Williamson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
SVG Lithography Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SVG Lithography Systems Inc filed Critical SVG Lithography Systems Inc
Publication of DE69813126D1 publication Critical patent/DE69813126D1/de
Application granted granted Critical
Publication of DE69813126T2 publication Critical patent/DE69813126T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
    • G02B13/143—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0657—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
DE69813126T 1997-09-18 1998-09-10 Vier-Spiegel Projektionsoptik für extremes UV Expired - Fee Related DE69813126T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US933272 1997-09-18
US08/933,272 US5956192A (en) 1997-09-18 1997-09-18 Four mirror EUV projection optics

Publications (2)

Publication Number Publication Date
DE69813126D1 true DE69813126D1 (de) 2003-05-15
DE69813126T2 DE69813126T2 (de) 2004-03-04

Family

ID=25463660

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69813126T Expired - Fee Related DE69813126T2 (de) 1997-09-18 1998-09-10 Vier-Spiegel Projektionsoptik für extremes UV

Country Status (6)

Country Link
US (1) US5956192A (de)
EP (1) EP0903605B1 (de)
JP (1) JP4309980B2 (de)
KR (1) KR100597471B1 (de)
CA (1) CA2247709A1 (de)
DE (1) DE69813126T2 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW594438B (en) * 1997-11-07 2004-06-21 Koninkl Philips Electronics Nv Three-mirror system for lithographic projection, and projection apparatus comprising such a mirror system
DE10053587A1 (de) 2000-10-27 2002-05-02 Zeiss Carl Beleuchtungssystem mit variabler Einstellung der Ausleuchtung
US6577443B2 (en) 1998-05-30 2003-06-10 Carl-Zeiss Stiftung Reduction objective for extreme ultraviolet lithography
DE19923609A1 (de) * 1998-05-30 1999-12-02 Zeiss Carl Fa Ringfeld-4-Spiegelsysteme mit konvexem Primärspiegel für die EUV-Lithographie
US7151592B2 (en) * 1999-02-15 2006-12-19 Carl Zeiss Smt Ag Projection system for EUV lithography
US6985210B2 (en) * 1999-02-15 2006-01-10 Carl Zeiss Smt Ag Projection system for EUV lithography
USRE42118E1 (en) * 1999-02-15 2011-02-08 Carl-Zeiss-Smt Ag Projection system for EUV lithography
US6033079A (en) 1999-03-15 2000-03-07 Hudyma; Russell High numerical aperture ring field projection system for extreme ultraviolet lithography
US6188513B1 (en) 1999-03-15 2001-02-13 Russell Hudyma High numerical aperture ring field projection system for extreme ultraviolet lithography
JP4717974B2 (ja) * 1999-07-13 2011-07-06 株式会社ニコン 反射屈折光学系及び該光学系を備える投影露光装置
JP3770542B2 (ja) 1999-07-22 2006-04-26 コーニング インコーポレイテッド 遠紫外軟ｘ線投影リソグラフィー法およびマスク装置
EP1093021A3 (de) 1999-10-15 2004-06-30 Nikon Corporation Projektionsbelichtungssystem sowie ein solches System benutzendes Gerät und Verfahren
WO2002044786A2 (en) * 2000-11-28 2002-06-06 Carl Zeiss Smt Ag Catadioptric projection system for 157 nm lithography
TW538256B (en) * 2000-01-14 2003-06-21 Zeiss Stiftung Microlithographic reduction projection catadioptric objective
US6776006B2 (en) 2000-10-13 2004-08-17 Corning Incorporated Method to avoid striae in EUV lithography mirrors
TW573234B (en) 2000-11-07 2004-01-21 Asml Netherlands Bv Lithographic projection apparatus and integrated circuit device manufacturing method
US6558261B1 (en) 2000-11-15 2003-05-06 Honeywell International Inc. Actuator drive and display mechanism
US6829908B2 (en) 2002-02-27 2004-12-14 Corning Incorporated Fabrication of inclusion free homogeneous glasses
US6832493B2 (en) 2002-02-27 2004-12-21 Corning Incorporated High purity glass bodies formed by zero shrinkage casting
US20030235682A1 (en) * 2002-06-21 2003-12-25 Sogard Michael R. Method and device for controlling thermal distortion in elements of a lithography system
US6975385B2 (en) * 2002-11-08 2005-12-13 Canon Kabushiki Kaisha Projection optical system and exposure apparatus
US6853440B1 (en) 2003-04-04 2005-02-08 Asml Netherlands B.V. Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US7466489B2 (en) * 2003-12-15 2008-12-16 Susanne Beder Projection objective having a high aperture and a planar end surface
WO2005059645A2 (en) * 2003-12-19 2005-06-30 Carl Zeiss Smt Ag Microlithography projection objective with crystal elements
US20080151364A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
US7463422B2 (en) * 2004-01-14 2008-12-09 Carl Zeiss Smt Ag Projection exposure apparatus
CN102830487A (zh) * 2004-01-14 2012-12-19 卡尔蔡司Smt有限责任公司 反射折射投影物镜
WO2005098504A1 (en) 2004-04-08 2005-10-20 Carl Zeiss Smt Ag Imaging system with mirror group
WO2005111689A2 (en) 2004-05-17 2005-11-24 Carl Zeiss Smt Ag Catadioptric projection objective with intermediate images
JP4337648B2 (ja) * 2004-06-24 2009-09-30 株式会社ニコン Ｅｕｖ光源、ｅｕｖ露光装置、及び半導体デバイスの製造方法
EP2192446B1 (de) * 2005-03-08 2011-10-19 Carl Zeiss SMT GmbH Mikrolithographie-Projektionssystem mit einer zugänglichen Aperturblende
KR101309880B1 (ko) * 2005-05-13 2013-09-17 칼 짜이스 에스엠티 게엠베하 낮은 입사각을 갖는 육-미러 ｅｕｖ 프로젝션 시스템
JP5045429B2 (ja) * 2007-12-27 2012-10-10 コニカミノルタアドバンストレイヤー株式会社 斜め投射光学系
JP5294804B2 (ja) * 2008-10-31 2013-09-18 三菱電機株式会社 光学調整装置
DE102009008644A1 (de) * 2009-02-12 2010-11-18 Carl Zeiss Smt Ag Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithografie mit einer derartigen abbildenden Optik
JP4935886B2 (ja) * 2009-12-10 2012-05-23 三菱電機株式会社 画像読取装置
WO2013118615A1 (ja) 2012-02-06 2013-08-15 株式会社ニコン 反射結像光学系、露光装置、およびデバイス製造方法
CN105589305B (zh) * 2015-12-21 2017-10-03 中国科学院长春光学精密机械与物理研究所 微缩投影系统波像差检测过程中的视场点定位方法
JP2018157503A (ja) * 2017-03-21 2018-10-04 富士ゼロックス株式会社 読取装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748015A (en) * 1971-06-21 1973-07-24 Perkin Elmer Corp Unit power imaging catoptric anastigmat
US4240707A (en) * 1978-12-07 1980-12-23 Itek Corporation All-reflective three element objective
US4650315A (en) * 1985-05-10 1987-03-17 The Perkin-Elmer Corporation Optical lithographic system
US4733955A (en) * 1986-04-14 1988-03-29 Hughes Aircraft Company Reflective optical triplet having a real entrance pupil
EP0947882B1 (de) * 1986-07-11 2006-03-29 Canon Kabushiki Kaisha Verkleinerndes Projektionsbelichtungssystem des Reflexionstyps für Röntgenstrahlung
US4747678A (en) * 1986-12-17 1988-05-31 The Perkin-Elmer Corporation Optical relay system with magnification
US5063586A (en) * 1989-10-13 1991-11-05 At&T Bell Laboratories Apparatus for semiconductor lithography
US5315629A (en) * 1990-10-10 1994-05-24 At&T Bell Laboratories Ringfield lithography
US5353322A (en) * 1992-05-05 1994-10-04 Tropel Corporation Lens system for X-ray projection lithography camera
US5410434A (en) * 1993-09-09 1995-04-25 Ultratech Stepper, Inc. Reflective projection system comprising four spherical mirrors
US5815310A (en) * 1995-12-12 1998-09-29 Svg Lithography Systems, Inc. High numerical aperture ring field optical reduction system

Also Published As

Publication number Publication date
KR100597471B1 (ko) 2006-10-24
EP0903605A3 (de) 2000-05-17
JPH11249313A (ja) 1999-09-17
CA2247709A1 (en) 1999-03-18
EP0903605A2 (de) 1999-03-24
EP0903605B1 (de) 2003-04-09
DE69813126T2 (de) 2004-03-04
US5956192A (en) 1999-09-21
KR19990029826A (ko) 1999-04-26
JP4309980B2 (ja) 2009-08-05

Similar Documents

Publication Publication Date Title
DE69813126D1 (de) Vier-Spiegel Projektionsoptik für extremes UV
DE69806846D1 (de) Verbesserungen für räumliche Lichtmodulatoren
DE69739470D1 (de) Optisches System für Terrahertz-Strahlung
DE69725072D1 (de) Optisches Element für Projektionsanzeigevorrichtung
DE59710318D1 (de) Bildschirm für laseraufprojektion
DE69806667D1 (de) Katadioptrisches optisches System
DE69829907D1 (de) Ein optisches Spiegelsystem
DE69824658D1 (de) Optisches System für Projektion
DE998646T1 (de) Leuchte für unterstand
DE69817623D1 (de) Stellantrieb für objektivlinse
DE69803730D1 (de) Fixiervorrichtung für Bilderzeugungsgerät
DE69805163D1 (de) Optisches system
DE69810090T2 (de) Entferner für keratöse komedonen
DE29714562U1 (de) Befestigungssystem für Regenrinnen
DE59910448D1 (de) Leuchte für Fahrzeuge
DE69632611D1 (de) Mikroabtastelemente für optisches System
DE69815503D1 (de) Optisches rückblicksystem
DE69632642D1 (de) Stützmechanismus für paneel
DE59909461D1 (de) Lichteinheit für Fahrzeuge
DE29618180U1 (de) Überfahrbrücke für Rampen
DE69825927D1 (de) Fixiereinrichtung
ATE341739T1 (de) Leuchteneinheit für lichtbandsystem
DE59811625D1 (de) Befestigungssystem für eine Blinkleuchte
DE69908861D1 (de) Befestigungsvorrichtung für einen Mündungsspiegel
DE29605672U1 (de) Überfahrbrücke für Rampen

Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: ASML HOLDING, N.V., VELDHOVEN, NL

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee