DE69632611D1 - Mikroabtastelemente für optisches System - Google Patents

Mikroabtastelemente für optisches System

Info

Publication number
DE69632611D1
DE69632611D1 DE69632611T DE69632611T DE69632611D1 DE 69632611 D1 DE69632611 D1 DE 69632611D1 DE 69632611 T DE69632611 T DE 69632611T DE 69632611 T DE69632611 T DE 69632611T DE 69632611 D1 DE69632611 D1 DE 69632611D1
Authority
DE
Germany
Prior art keywords
microscanning
elements
optical system
optical
microscanning elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69632611T
Other languages
English (en)
Other versions
DE69632611T2 (de
Inventor
Serge Valette
Yves Fouillet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69632611D1 publication Critical patent/DE69632611D1/de
Application granted granted Critical
Publication of DE69632611T2 publication Critical patent/DE69632611T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
DE69632611T 1995-07-19 1996-07-17 Mikroabtastelemente für optisches System Expired - Fee Related DE69632611T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9508751 1995-07-19
FR9508751A FR2737019B1 (fr) 1995-07-19 1995-07-19 Microelements de balayage pour systeme optique

Publications (2)

Publication Number Publication Date
DE69632611D1 true DE69632611D1 (de) 2004-07-08
DE69632611T2 DE69632611T2 (de) 2005-06-09

Family

ID=9481150

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69632611T Expired - Fee Related DE69632611T2 (de) 1995-07-19 1996-07-17 Mikroabtastelemente für optisches System

Country Status (5)

Country Link
US (1) US5818623A (de)
EP (1) EP0754959B1 (de)
JP (1) JPH0933828A (de)
DE (1) DE69632611T2 (de)
FR (1) FR2737019B1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6392775B1 (en) 1998-01-13 2002-05-21 Seagate Technology Llc Optical reflector for micro-machined mirrors
US6206290B1 (en) * 1998-03-06 2001-03-27 Symbol Technologies, Inc. Control system for oscillating optical element in scanners
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
US6624549B2 (en) * 2001-03-02 2003-09-23 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of fabricating the same
JP3755460B2 (ja) * 2001-12-26 2006-03-15 ソニー株式会社 静電駆動型ｍｅｍｓ素子とその製造方法、光学ｍｅｍｓ素子、光変調素子、ｇｌｖデバイス、レーザディスプレイ、及びｍｅｍｓ装置
WO2005119313A2 (en) * 2004-05-29 2005-12-15 Polatis Ltd Optical switches & actuators
FR2930457B1 (fr) * 2008-04-24 2010-06-25 Commissariat Energie Atomique Procede de fabrication de microcanaux reconfigurables

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5625483A (en) * 1990-05-29 1997-04-29 Symbol Technologies, Inc. Integrated light source and scanning element implemented on a semiconductor or electro-optical substrate
US5281887A (en) * 1992-06-15 1994-01-25 Engle Craig D Two independent spatial variable degree of freedom wavefront modulator
EP0614101A3 (de) * 1993-02-03 1994-10-19 Canon Kk Optischer Ablenker und Verfahren zu seiner Herstellung.

Also Published As

Publication number Publication date
FR2737019A1 (fr) 1997-01-24
JPH0933828A (ja) 1997-02-07
EP0754959A1 (de) 1997-01-22
FR2737019B1 (fr) 1997-08-22
US5818623A (en) 1998-10-06
DE69632611T2 (de) 2005-06-09
EP0754959B1 (de) 2004-06-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee