DE69803910D1 - Gesinterter Aluminiumnitridkörper und daraus hergestelltes metallisiertes Substrat - Google Patents

Gesinterter Aluminiumnitridkörper und daraus hergestelltes metallisiertes Substrat

Info

Publication number
DE69803910D1
DE69803910D1 DE69803910T DE69803910T DE69803910D1 DE 69803910 D1 DE69803910 D1 DE 69803910D1 DE 69803910 T DE69803910 T DE 69803910T DE 69803910 T DE69803910 T DE 69803910T DE 69803910 D1 DE69803910 D1 DE 69803910D1
Authority
DE
Germany
Prior art keywords
aluminum nitride
substrate made
made therefrom
metallized substrate
sintered aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69803910T
Other languages
English (en)
Other versions
DE69803910T2 (de
Inventor
Yasuhisa Yushio
Kazutaka Sasaki
Motoyuki Tanaka
Hirohiko Nakata
Masuhiro Natsuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69803910D1 publication Critical patent/DE69803910D1/de
Publication of DE69803910T2 publication Critical patent/DE69803910T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5116—Ag or Au
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5133—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/88—Metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)
DE69803910T 1997-10-30 1998-10-29 Gesinterter Aluminiumnitridkörper und daraus hergestelltes metallisiertes Substrat Expired - Lifetime DE69803910T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP29807797 1997-10-30
JP1046898 1998-01-22
JP1681598 1998-01-29
JP25622198A JP4161423B2 (ja) 1997-10-30 1998-09-10 窒化アルミニウム焼結体及びそのメタライズ基板

Publications (2)

Publication Number Publication Date
DE69803910D1 true DE69803910D1 (de) 2002-03-28
DE69803910T2 DE69803910T2 (de) 2002-07-11

Family

ID=27455398

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69803910T Expired - Lifetime DE69803910T2 (de) 1997-10-30 1998-10-29 Gesinterter Aluminiumnitridkörper und daraus hergestelltes metallisiertes Substrat

Country Status (6)

Country Link
US (1) US6174614B1 (de)
EP (1) EP0913371B1 (de)
JP (1) JP4161423B2 (de)
KR (1) KR100516759B1 (de)
CA (1) CA2252075C (de)
DE (1) DE69803910T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001064079A (ja) * 1999-08-25 2001-03-13 Sumitomo Electric Ind Ltd 窒化アルミニウム焼結体及びその製造方法
JP4540221B2 (ja) * 2000-04-21 2010-09-08 日本碍子株式会社 積層体、耐蝕性部材および耐ハロゲンガスプラズマ用部材
JP2002160974A (ja) * 2000-11-22 2002-06-04 Ibiden Co Ltd 窒化アルミニウム焼結体、窒化アルミニウム焼結体の製造方法、セラミック基板およびセラミック基板の製造方法
JP4950379B2 (ja) * 2000-12-21 2012-06-13 株式会社東芝 ＡｌＮメタライズ基板およびその製造方法
KR100585909B1 (ko) * 2001-10-09 2006-06-07 이 아이 듀폰 디 네모아 앤드 캄파니 질화알루미늄 기판에 사용하기 위한 후막 전도체 조성물
US7034641B1 (en) * 2002-11-27 2006-04-25 K2 Optronics, Inc. Substrate structure for photonic assemblies and the like having a low-thermal-conductivity dielectric layer on a high-thermal-conductivity substrate body
US6953761B2 (en) * 2002-12-27 2005-10-11 Hitachi, Ltd. Aluminum nitride sintered body and substrate for electronic devices
JP3996138B2 (ja) * 2004-03-26 2007-10-24 Ｔｏｗａ株式会社 低密着性材料及び樹脂成形型
US7161799B2 (en) * 2004-06-11 2007-01-09 Michael Z. Lim Thermal insulating board for laptop computers
JP2006044980A (ja) * 2004-08-04 2006-02-16 Sumitomo Electric Ind Ltd 窒化アルミニウム焼結体
JP2006131429A (ja) * 2004-11-02 2006-05-25 Towa Corp 低密着性材料及び樹脂成形型
WO2006051881A1 (ja) * 2004-11-12 2006-05-18 Tokuyama Corporation メタライズド窒化アルミニウム基板の製造方法及びそれによって得られる基板
EP2099068A4 (de) 2006-12-28 2011-01-26 Tokuyama Corp Prozess zur herstellung eines metallisierten aluminiumnitridsubstrats
JP4550080B2 (ja) 2007-03-26 2010-09-22 シャープ株式会社 半導体装置および液晶モジュール
RU2528815C1 (ru) * 2013-02-19 2014-09-20 Открытое акционерное общество "Научно-производственное предприятие "Пульсар" Металлизационная паста и способ металлизации алюмонитридной керамики
RU2559160C1 (ru) * 2014-03-19 2015-08-10 Закрытое акционерное общество "НПО "НИИТАЛ" Способ металлизации алюмонитридной керамики
JP6262598B2 (ja) * 2014-05-12 2018-01-17 住友電気工業株式会社 ＡｌＮ焼結体、ＡｌＮ基板およびＡｌＮ基板の製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659611A (en) 1984-02-27 1987-04-21 Kabushiki Kaisha Toshiba Circuit substrate having high thermal conductivity
JPH0679988B2 (ja) 1984-11-30 1994-10-12 京セラ株式会社 窒化物セラミツク体へのメタライズ方法
JPH0717454B2 (ja) 1985-06-28 1995-03-01 株式会社東芝 窒化アルミニウム焼結体およびその製造方法
JPS63190761A (ja) 1987-01-30 1988-08-08 京セラ株式会社 窒化アルミニウム質焼結体
US5154863A (en) 1985-10-31 1992-10-13 Kyocera Corporation Aluminum nitride-based sintered body and process for the production thereof
JPH0738491B2 (ja) 1986-07-23 1995-04-26 株式会社東芝 回路基板の製造方法及び回路基板
JP2666942B2 (ja) 1988-01-19 1997-10-22 株式会社東芝 窒化アルミニウム焼結体
US5118645A (en) * 1988-01-27 1992-06-02 The Dow Chemical Company Self-reinforced silicon nitride ceramic of high fracture toughness and a method of preparing the same
JP2742600B2 (ja) 1989-04-18 1998-04-22 京セラ株式会社 窒化アルミニウム質焼結体およびその製造方法
JP3194992B2 (ja) 1991-06-04 2001-08-06 シャープ株式会社 ワイドアスペクトテレビジョン受像機
JP2916032B2 (ja) 1991-09-13 1999-07-05 松下電工株式会社 飾り付軒樋の接続構造
JPH0647085B2 (ja) 1991-09-24 1994-06-22 三菱化工機株式会社 スクリュー型遠心分離機
JPH0649613A (ja) 1992-07-02 1994-02-22 Nippon Alum Co Ltd めっき処理方法
JP3362460B2 (ja) 1993-06-30 2003-01-07 カシオ計算機株式会社 走行状態検出装置
JP2962466B2 (ja) 1997-01-06 1999-10-12 株式会社東芝 窒化アルミニウム焼結体

Also Published As

Publication number Publication date
JPH11278941A (ja) 1999-10-12
JP4161423B2 (ja) 2008-10-08
EP0913371A3 (de) 1999-09-15
CA2252075A1 (en) 1999-04-30
CA2252075C (en) 2007-11-27
KR100516759B1 (ko) 2005-12-28
DE69803910T2 (de) 2002-07-11
EP0913371A2 (de) 1999-05-06
US6174614B1 (en) 2001-01-16
EP0913371B1 (de) 2002-02-20
KR19990037503A (ko) 1999-05-25

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