DE69801626T2 - Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung - Google Patents

Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung

Info

Publication number
DE69801626T2
DE69801626T2 DE69801626T DE69801626T DE69801626T2 DE 69801626 T2 DE69801626 T2 DE 69801626T2 DE 69801626 T DE69801626 T DE 69801626T DE 69801626 T DE69801626 T DE 69801626T DE 69801626 T2 DE69801626 T2 DE 69801626T2
Authority
DE
Germany
Prior art keywords
sintered body
aluminum nitride
electrostatic chuck
body made
functional material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69801626T
Other languages
English (en)
Other versions
DE69801626D1 (de
Inventor
Yuji Katsuda
Kiyoshi Araki
Tsuneaki Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17387968&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69801626(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69801626D1 publication Critical patent/DE69801626D1/de
Application granted granted Critical
Publication of DE69801626T2 publication Critical patent/DE69801626T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means
DE69801626T 1997-09-29 1998-09-28 Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung Expired - Lifetime DE69801626T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26332997A JP3433063B2 (ja) 1997-09-29 1997-09-29 窒化アルミニウム焼結体、電子機能材料および静電チャック

Publications (2)

Publication Number Publication Date
DE69801626D1 DE69801626D1 (de) 2001-10-18
DE69801626T2 true DE69801626T2 (de) 2002-06-27

Family

ID=17387968

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69801626T Expired - Lifetime DE69801626T2 (de) 1997-09-29 1998-09-28 Sinterkörper aus Aluminiumnitrid, elektronisches Funktionsmaterial und elektrostatische Einspannvorrichtung

Country Status (6)

Country Link
US (1) US5998321A (de)
EP (1) EP0905106B1 (de)
JP (1) JP3433063B2 (de)
KR (1) KR100345083B1 (de)
DE (1) DE69801626T2 (de)
TW (1) TW494093B (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4013386B2 (ja) 1998-03-02 2007-11-28 住友電気工業株式会社 半導体製造用保持体およびその製造方法
WO2001017927A1 (fr) 1999-09-06 2001-03-15 Ibiden Co., Ltd. Briquette et substrat ceramique en nitrure d'aluminium carbone fritte destine a des equipements de fabrication ou de verification de semi-conducteurs
JP4447750B2 (ja) 1999-09-30 2010-04-07 日本碍子株式会社 窒化アルミニウム焼結体および半導体製造用部材
WO2001058828A1 (fr) 2000-02-07 2001-08-16 Ibiden Co., Ltd. Substrat ceramique pour dispositif de production ou d'examen de semi-conducteurs
WO2001059833A1 (fr) 2000-02-08 2001-08-16 Ibiden Co., Ltd. Carte en ceramique destinee a la production de semi-conducteurs et a des dispositifs de controle
WO2002003435A1 (fr) 2000-07-04 2002-01-10 Ibiden Co., Ltd. Plaque chaude destinee a la fabrication et aux essais de semiconducteurs
TWI243158B (en) * 2000-12-21 2005-11-11 Ngk Insulators Ltd Aluminum nitride sintered bodies
JP4243943B2 (ja) * 2002-04-22 2009-03-25 日本碍子株式会社 窒化アルミニウム材料および半導体製造用部材
US6982125B2 (en) * 2002-12-23 2006-01-03 Saint-Gobain Ceramics & Plastics, Inc. ALN material and electrostatic chuck incorporating same
US7369393B2 (en) * 2004-04-15 2008-05-06 Saint-Gobain Ceramics & Plastics, Inc. Electrostatic chucks having barrier layer
JP4987238B2 (ja) * 2005-03-25 2012-07-25 日本碍子株式会社 窒化アルミニウム焼結体、半導体製造用部材及び窒化アルミニウム焼結体の製造方法
JP5159625B2 (ja) * 2006-08-07 2013-03-06 株式会社トクヤマ 窒化アルミニウム焼結体およびその製造方法
JP5121268B2 (ja) * 2007-03-27 2013-01-16 日本碍子株式会社 窒化アルミニウム焼結体及び半導体製造装置用部材
JP5042886B2 (ja) * 2008-03-06 2012-10-03 太平洋セメント株式会社 静電チャック
JP6338998B2 (ja) * 2014-10-23 2018-06-06 国立大学法人九州工業大学 蛍光素子
KR101965895B1 (ko) * 2018-11-08 2019-04-04 주식회사 케이에스엠컴포넌트 정전 척 및 그 제조 방법
KR102138983B1 (ko) * 2018-12-14 2020-07-28 한국세라믹기술원 중고온에서 높은 비저항을 갖는 정전척용 질화알루미늄 소결체의 제조방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4672046A (en) * 1984-10-15 1987-06-09 Tdk Corporation Sintered aluminum nitride body
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
JP3404813B2 (ja) * 1992-09-04 2003-05-12 住友電気工業株式会社 窒化アルミニウム焼結体およびその製造方法
US5413360A (en) * 1992-12-01 1995-05-09 Kyocera Corporation Electrostatic chuck
JP3152847B2 (ja) * 1994-09-30 2001-04-03 京セラ株式会社 静電チャック
JP3559123B2 (ja) * 1995-08-04 2004-08-25 日本碍子株式会社 窒化アルミニウムおよび半導体製造用装置
KR970011434A (ko) * 1995-08-31 1997-03-27 배순훈 온수순환펌프의 샤프트 지지용 베어링 결합구조
JP3670416B2 (ja) * 1995-11-01 2005-07-13 日本碍子株式会社 金属包含材および静電チャック
JP3457495B2 (ja) * 1996-03-29 2003-10-20 日本碍子株式会社 窒化アルミニウム焼結体、金属埋設品、電子機能材料および静電チャック

Also Published As

Publication number Publication date
EP0905106A3 (de) 1999-06-23
EP0905106B1 (de) 2001-09-12
US5998321A (en) 1999-12-07
EP0905106A2 (de) 1999-03-31
DE69801626D1 (de) 2001-10-18
KR100345083B1 (ko) 2002-10-25
TW494093B (en) 2002-07-11
JPH11100270A (ja) 1999-04-13
JP3433063B2 (ja) 2003-08-04
KR19990030057A (ko) 1999-04-26

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