DE69735398D1 - Verfahren zur Herstellung optischer Komponenten zur Verwendung im ultravioletten Gebiet - Google Patents
Verfahren zur Herstellung optischer Komponenten zur Verwendung im ultravioletten GebietInfo
- Publication number
- DE69735398D1 DE69735398D1 DE69735398T DE69735398T DE69735398D1 DE 69735398 D1 DE69735398 D1 DE 69735398D1 DE 69735398 T DE69735398 T DE 69735398T DE 69735398 T DE69735398 T DE 69735398T DE 69735398 D1 DE69735398 D1 DE 69735398D1
- Authority
- DE
- Germany
- Prior art keywords
- preparation
- optical components
- ultraviolet region
- ultraviolet
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/008—Other surface treatment of glass not in the form of fibres or filaments comprising a lixiviation step
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S65/00—Glass manufacturing
- Y10S65/08—Quartz
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25994896 | 1996-09-30 | ||
JP25994896 | 1996-09-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69735398D1 true DE69735398D1 (de) | 2006-05-04 |
DE69735398T2 DE69735398T2 (de) | 2006-11-30 |
Family
ID=17341151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69735398T Expired - Lifetime DE69735398T2 (de) | 1996-09-30 | 1997-09-30 | Verfahren zur Herstellung optischer Komponenten zur Verwendung im ultravioletten Gebiet |
Country Status (4)
Country | Link |
---|---|
US (2) | US5983672A (de) |
EP (1) | EP0837345B1 (de) |
KR (1) | KR100521897B1 (de) |
DE (1) | DE69735398T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100521897B1 (ko) * | 1996-09-30 | 2005-12-29 | 가부시키가이샤 니콘 | 광학소자제조방법 |
US6231676B1 (en) * | 1998-01-27 | 2001-05-15 | Seagate Technology Llc | Cleaning process for disc drive components |
DE69916879T2 (de) * | 1998-07-15 | 2005-04-21 | Kitagawa Ind Co Ltd | Faseroptische Vorrichtung, und Herstellungsverfahren dafür |
WO2001000907A1 (en) | 1999-06-25 | 2001-01-04 | Corning Incorporated | Polishing of fluoride crystal optical lenses and preforms using cerium oxide for microlithography |
FR2802843B1 (fr) * | 1999-12-28 | 2002-03-22 | Delta Thermique | Procede de depolissage d'articles en verre et articles en verre depolis par ce procede |
JP2002003227A (ja) * | 2000-06-16 | 2002-01-09 | Canon Inc | 光学素子の製造方法、光学素子、および該光学素子を用いた光学系、光学装置、デバイス製造方法とデバイス |
US6669536B2 (en) * | 2000-12-11 | 2003-12-30 | Corning Incorporated | Method of making optical fluoride laser crystal components |
RU2001111056A (ru) * | 2001-04-16 | 2003-04-10 | Репкина Тать на Александровна | Способ выращивания монокристаллов фторида кальция |
RU2001111055A (ru) | 2001-04-16 | 2003-04-10 | Репкина Тать на Александровна | Многосекционный контейнер для выращивания монокристаллов фторида кальция |
US7090693B1 (en) * | 2001-12-20 | 2006-08-15 | Boston Scientific Santa Rosa Corp. | Endovascular graft joint and method for manufacture |
JP2003246648A (ja) * | 2002-02-25 | 2003-09-02 | Canon Inc | 光学素子の洗浄方法 |
EP1586386A4 (de) * | 2002-12-03 | 2010-04-21 | Nikon Corp | Verfahren und vorrichtung zur entfernung von verunreinigungen sowie belichtungsverfahren und -vorrichtung |
DE102007058105A1 (de) * | 2007-12-03 | 2009-06-10 | Carl Zeiss Smt Ag | Vorrichtung und Verfahren zur Bearbeitung von optischen Elementen mittels Laserablation |
DE102011086563B4 (de) * | 2011-11-17 | 2019-03-21 | Interpane Entwicklungs-Und Beratungsgesellschaft Mbh | Verfahren zur Ausbildung einer Diffusionssperrschicht an einer Glasoberfläche und entsprechend behandeltes Glassubstrat |
DE102021202848A1 (de) | 2021-03-24 | 2022-09-29 | Carl Zeiss Smt Gmbh | Optische Anordnung für den FUV/VUV-Wellenlängenbereich |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE844649C (de) * | 1940-06-11 | 1952-07-24 | Optische Werke C A Steinheil S | Verfahren zur Erhoehung der chemischen Widerstandsfaehigkeit und mechanischen Haertevon Glaesern |
US2659665A (en) * | 1950-10-27 | 1953-11-17 | Eastman Kodak Co | Reticles |
US3468646A (en) * | 1966-09-30 | 1969-09-23 | Owens Illinois Inc | Process for producing reflective colored glass surface |
CH589306A5 (de) * | 1975-06-27 | 1977-06-30 | Bbc Brown Boveri & Cie | |
US4028082A (en) * | 1976-02-10 | 1977-06-07 | American Optical Corporation | Method of making artificial intraocular lenses with holes |
JPS583374B2 (ja) * | 1977-06-15 | 1983-01-21 | 超エル・エス・アイ技術研究組合 | シリコン単結晶の処理方法 |
US4273826A (en) * | 1979-12-03 | 1981-06-16 | Owens-Illinois, Inc. | Process of making glass articles having antireflective coatings and product |
US4427500A (en) * | 1982-03-15 | 1984-01-24 | American Hoechst Corporation | Method for producing an aluminum support useful for lithography |
JPS58171004A (ja) * | 1982-03-31 | 1983-10-07 | Nippon Telegr & Teleph Corp <Ntt> | 半導体光導波路装置 |
JPS60131850A (ja) * | 1983-12-20 | 1985-07-13 | Toshiba Corp | ガラスのエツチング方法 |
SU1295352A1 (ru) * | 1985-10-10 | 1987-03-07 | Сибирский физико-технический институт им.В.Д.Кузнецова при Томском государственном университете им.В.В.Куйбышева | Способ изготовлени оптического волновода на основе кристалла ниобата лити |
US4911743A (en) * | 1986-05-29 | 1990-03-27 | Hughes Aircraft Company | Glass structure strengthening by etching |
JPS63107842A (ja) * | 1986-10-24 | 1988-05-12 | Kunio Yoshida | 光学用ガラス基材の製造方法 |
US5055958A (en) * | 1989-03-31 | 1991-10-08 | Tdk Corporation | Surface-reinforced glass and magnetic head having surface-reinforced glass |
JPH05250719A (ja) * | 1992-03-05 | 1993-09-28 | Seiko Epson Corp | 光素子 |
US5702495A (en) * | 1993-02-10 | 1997-12-30 | Nikon Corporation | Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production |
JPH07120633A (ja) * | 1993-10-25 | 1995-05-12 | Fuji Photo Film Co Ltd | 光導波路素子の作製方法 |
JP3669378B2 (ja) * | 1994-09-08 | 2005-07-06 | 株式会社ニコン | 光学素材及びその作製方法 |
KR100521897B1 (ko) * | 1996-09-30 | 2005-12-29 | 가부시키가이샤 니콘 | 광학소자제조방법 |
-
1997
- 1997-09-11 KR KR1019970046775A patent/KR100521897B1/ko not_active IP Right Cessation
- 1997-09-29 US US08/939,203 patent/US5983672A/en not_active Expired - Lifetime
- 1997-09-30 EP EP97116991A patent/EP0837345B1/de not_active Expired - Lifetime
- 1997-09-30 DE DE69735398T patent/DE69735398T2/de not_active Expired - Lifetime
-
1999
- 1999-07-06 US US09/347,403 patent/US6269661B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0837345B1 (de) | 2006-03-08 |
DE69735398T2 (de) | 2006-11-30 |
US5983672A (en) | 1999-11-16 |
KR19980024555A (ko) | 1998-07-06 |
US6269661B1 (en) | 2001-08-07 |
KR100521897B1 (ko) | 2005-12-29 |
EP0837345A1 (de) | 1998-04-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |