DE69735143D1 - Tintenstrahlaufzeichnungskopf - Google Patents

Tintenstrahlaufzeichnungskopf

Info

Publication number
DE69735143D1
DE69735143D1 DE69735143T DE69735143T DE69735143D1 DE 69735143 D1 DE69735143 D1 DE 69735143D1 DE 69735143 T DE69735143 T DE 69735143T DE 69735143 T DE69735143 T DE 69735143T DE 69735143 D1 DE69735143 D1 DE 69735143D1
Authority
DE
Germany
Prior art keywords
ink jet
recording head
jet recording
head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69735143T
Other languages
English (en)
Other versions
DE69735143T2 (de
Inventor
Tsutomu Hashizume
Tetsushi Takahashi
Akira Matsuzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8846996A external-priority patent/JPH09277520A/ja
Priority claimed from JP8324597A external-priority patent/JP3552013B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69735143D1 publication Critical patent/DE69735143D1/de
Application granted granted Critical
Publication of DE69735143T2 publication Critical patent/DE69735143T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
DE69735143T 1996-04-10 1997-04-10 Tintenstrahlaufzeichnungskopf Expired - Lifetime DE69735143T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP8846996A JPH09277520A (ja) 1996-04-10 1996-04-10 インクジェットプリンタヘッドとインクジェットプリンタヘッドの製造方法
JP8846996 1996-04-10
JP34456896 1996-12-09
JP34456896 1996-12-09
JP8324597 1997-03-17
JP8324597A JP3552013B2 (ja) 1996-12-09 1997-03-17 インクジェット式記録ヘッド

Publications (2)

Publication Number Publication Date
DE69735143D1 true DE69735143D1 (de) 2006-04-13
DE69735143T2 DE69735143T2 (de) 2006-07-20

Family

ID=27304167

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69710240T Expired - Lifetime DE69710240T2 (de) 1996-04-10 1997-04-10 Tintenstrahlaufzeichnungskopf
DE69735143T Expired - Lifetime DE69735143T2 (de) 1996-04-10 1997-04-10 Tintenstrahlaufzeichnungskopf

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69710240T Expired - Lifetime DE69710240T2 (de) 1996-04-10 1997-04-10 Tintenstrahlaufzeichnungskopf

Country Status (3)

Country Link
US (2) US6089701A (de)
EP (2) EP1118467B1 (de)
DE (2) DE69710240T2 (de)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
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JPH10211701A (ja) * 1996-11-06 1998-08-11 Seiko Epson Corp 圧電体素子を備えたアクチュエータ及びインクジェット式記録ヘッド、並びにこれらの製造方法
US7052594B2 (en) * 2002-01-31 2006-05-30 Sri International Devices and methods for controlling fluid flow using elastic sheet deflection
EP0890440B1 (de) * 1997-07-10 2004-04-07 Seiko Epson Corporation Tintenstrahldruckkopf
EP2000307B1 (de) 1997-07-18 2013-09-11 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf, Herstellungsverfahren dafür und Tintenstrahlaufzeichnungsvorrichtung
WO1999042292A1 (fr) * 1998-02-18 1999-08-26 Sony Corporation Actionneur piezo-electrique, procede de fabrication, et tete d'impression a jet d'encre
AUPP702498A0 (en) * 1998-11-09 1998-12-03 Silverbrook Research Pty Ltd Image creation method and apparatus (ART77)
JP3868143B2 (ja) * 1999-04-06 2007-01-17 松下電器産業株式会社 圧電体薄膜素子及びこれを用いたインクジェット式記録ヘッド並びにこれらの製造方法
US6755511B1 (en) * 1999-10-05 2004-06-29 Spectra, Inc. Piezoelectric ink jet module with seal
ATE249341T1 (de) * 1999-11-15 2003-09-15 Seiko Epson Corp Tintenstrahldruckkopf und tintenstrahlaufzeichnungsvorrichtung
WO2001074591A1 (fr) * 2000-03-31 2001-10-11 Fujitsu Limited Tete a jet d'encre a buses multiples
US6623101B1 (en) 2000-10-20 2003-09-23 Silverbrook Research Pty Ltd Moving nozzle ink jet
AU2004233538B2 (en) * 2000-10-20 2006-03-09 Memjet Technology Limited An inkjet nozzle structure having a structure for correcting the direction of ink ejection
US6854825B1 (en) * 2000-10-20 2005-02-15 Silverbrook Research Pty Ltd Printed media production
AU2004203502B2 (en) * 2000-10-20 2004-09-30 Zamtec Limited Nozzle for an ink jet printhead
AU2004202942B2 (en) * 2000-10-20 2004-09-16 Zamtec Limited Method for operating nozzles in an ink jet printhead
US6457812B1 (en) * 2000-10-20 2002-10-01 Silverbrook Research Pty Ltd Bend actuator in an ink jet printhead
US6701593B2 (en) * 2001-01-08 2004-03-09 Nanodynamics, Inc. Process for producing inkjet printhead
JP2003022892A (ja) 2001-07-06 2003-01-24 Semiconductor Energy Lab Co Ltd 発光装置の製造方法
CN1269642C (zh) 2002-02-18 2006-08-16 兄弟工业株式会社 喷墨打印头以及具有该喷墨打印头的喷墨打印机
JP4549622B2 (ja) * 2002-12-04 2010-09-22 リコープリンティングシステムズ株式会社 インクジェット式記録ヘッド及びそれを用いたインクジェット式記録装置
JP3998254B2 (ja) * 2003-02-07 2007-10-24 キヤノン株式会社 インクジェットヘッドの製造方法
KR100481996B1 (ko) * 2003-06-17 2005-04-14 주식회사 피에조닉스 압전방식 잉크젯 프린터헤드와 제조방법
EP1648038B1 (de) * 2003-07-22 2011-02-16 NGK Insulators, Ltd. Stellgliedelement und einrichtung mit stellgliedelement
US8399972B2 (en) 2004-03-04 2013-03-19 Skyworks Solutions, Inc. Overmolded semiconductor package with a wirebond cage for EMI shielding
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JP4595418B2 (ja) * 2004-07-16 2010-12-08 ブラザー工業株式会社 インクジェットヘッド
US7344228B2 (en) * 2004-08-02 2008-03-18 Fujifilm Dimatix, Inc. Actuator with reduced drive capacitance
US7497962B2 (en) * 2004-08-06 2009-03-03 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head and method of manufacturing substrate for liquid discharge head
DE602006018214D1 (de) * 2005-03-22 2010-12-30 Brother Ind Ltd Piezoelektrischer Aktuator, Vorrichtung um Flüssigkeit zu transportieren, Verfahren um piezoelektrischen Aktuator herzustellen
US7737612B1 (en) 2005-05-25 2010-06-15 Maxim Integrated Products, Inc. BAW resonator bi-layer top electrode with zero etch undercut
US7612488B1 (en) 2007-01-16 2009-11-03 Maxim Integrated Products, Inc. Method to control BAW resonator top electrode edge during patterning
JP2008244201A (ja) * 2007-03-28 2008-10-09 Brother Ind Ltd 圧電アクチュエータの製造方法
EP2174360A4 (de) 2007-06-29 2013-12-11 Artificial Muscle Inc Wandler mit elektroaktivem polymer für anwendungen der sensorischen rückmeldung
JP5639738B2 (ja) * 2008-02-14 2014-12-10 日本碍子株式会社 圧電／電歪素子の製造方法
US8178285B2 (en) * 2008-03-06 2012-05-15 Ngk Insulators, Ltd. Method for manufacturing piezoelectric/electrostrictive film type element
JP5305018B2 (ja) * 2009-03-26 2013-10-02 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
US8454132B2 (en) * 2009-12-14 2013-06-04 Fujifilm Corporation Moisture protection of fluid ejector
US8628173B2 (en) * 2010-06-07 2014-01-14 Xerox Corporation Electrical interconnect using embossed contacts on a flex circuit
JP5822057B2 (ja) * 2010-07-08 2015-11-24 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、液体噴射ヘッド、および液体噴射装置
JP5704303B2 (ja) 2010-09-06 2015-04-22 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、液体噴射ヘッド、および液体噴射装置
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JP5724263B2 (ja) * 2010-09-16 2015-05-27 株式会社リコー インクジェットヘッド
KR20140008416A (ko) 2011-03-01 2014-01-21 바이엘 인텔렉쳐 프로퍼티 게엠베하 변형가능한 중합체 장치 및 필름을 제조하기 위한 자동화 제조 방법
US9195058B2 (en) 2011-03-22 2015-11-24 Parker-Hannifin Corporation Electroactive polymer actuator lenticular system
JP5824895B2 (ja) * 2011-06-17 2015-12-02 株式会社リコー インクジェットヘッド及びインクジェット記録装置
US8584331B2 (en) * 2011-09-14 2013-11-19 Xerox Corporation In situ flexible circuit embossing to form an electrical interconnect
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
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JP5927866B2 (ja) 2011-11-28 2016-06-01 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子
WO2013142552A1 (en) 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
WO2013192143A1 (en) 2012-06-18 2013-12-27 Bayer Intellectual Property Gmbh Stretch frame for stretching process
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
JP6233581B2 (ja) * 2013-12-26 2017-11-22 セイコーエプソン株式会社 超音波センサー及びその製造方法
WO2016017665A1 (ja) * 2014-07-30 2016-02-04 京セラ株式会社 インクジェットヘッド及びプリンタ
WO2016147539A1 (ja) * 2015-03-16 2016-09-22 セイコーエプソン株式会社 圧電素子の製造方法、圧電素子、圧電駆動装置、ロボット、およびポンプ
US9682555B2 (en) 2015-07-24 2017-06-20 Oce-Technologies B.V. Inkjet print head with improved lifetime and efficiency
JP6922651B2 (ja) * 2017-10-26 2021-08-18 セイコーエプソン株式会社 超音波デバイス、及び超音波測定装置
JP7087413B2 (ja) * 2018-01-31 2022-06-21 セイコーエプソン株式会社 圧電デバイス、液体噴射ヘッド、および、液体噴射装置
JP7035763B2 (ja) * 2018-04-25 2022-03-15 セイコーエプソン株式会社 梱包体、梱包体の製造方法、及び液体吐出装置の製造方法

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Also Published As

Publication number Publication date
EP1118467B1 (de) 2006-01-25
EP1118467A3 (de) 2001-10-24
US6089701A (en) 2000-07-18
DE69710240D1 (de) 2002-03-21
DE69710240T2 (de) 2002-06-27
EP1118467A2 (de) 2001-07-25
USRE39474E1 (en) 2007-01-23
EP0800920A2 (de) 1997-10-15
EP0800920A3 (de) 1998-08-05
EP0800920B1 (de) 2002-02-06
DE69735143T2 (de) 2006-07-20

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