DE69730280D1 - Verfahren und Anlage zur Behandlung von perfluorierten und hydrofluorkohlenwasserstoffhaltigen Gasen zu ihrer Vernichtung - Google Patents

Verfahren und Anlage zur Behandlung von perfluorierten und hydrofluorkohlenwasserstoffhaltigen Gasen zu ihrer Vernichtung

Info

Publication number
DE69730280D1
DE69730280D1 DE69730280T DE69730280T DE69730280D1 DE 69730280 D1 DE69730280 D1 DE 69730280D1 DE 69730280 T DE69730280 T DE 69730280T DE 69730280 T DE69730280 T DE 69730280T DE 69730280 D1 DE69730280 D1 DE 69730280D1
Authority
DE
Germany
Prior art keywords
perfluorinated
destruction
plant
treatment
hydrofluorocarbon gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69730280T
Other languages
English (en)
Other versions
DE69730280T2 (de
Inventor
Jean-Christophe Rostaing
Francois Coeuret
Saint Etienne Claude De
Michel Moisan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE69730280D1 publication Critical patent/DE69730280D1/de
Application granted granted Critical
Publication of DE69730280T2 publication Critical patent/DE69730280T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B01D53/323—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00 by electrostatic effects or by high-voltage electric fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE69730280T 1996-07-26 1997-07-08 Verfahren und Anlage zur Behandlung von perfluorierten und hydrofluorkohlenwasserstoffhaltigen Gasen zu ihrer Vernichtung Expired - Lifetime DE69730280T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9609475A FR2751565B1 (fr) 1996-07-26 1996-07-26 Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction
FR9609475 1996-07-26

Publications (2)

Publication Number Publication Date
DE69730280D1 true DE69730280D1 (de) 2004-09-23
DE69730280T2 DE69730280T2 (de) 2005-09-01

Family

ID=9494552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69730280T Expired - Lifetime DE69730280T2 (de) 1996-07-26 1997-07-08 Verfahren und Anlage zur Behandlung von perfluorierten und hydrofluorkohlenwasserstoffhaltigen Gasen zu ihrer Vernichtung

Country Status (5)

Country Link
US (2) US5965786A (de)
EP (2) EP0820801B1 (de)
JP (1) JP4414004B2 (de)
DE (1) DE69730280T2 (de)
FR (1) FR2751565B1 (de)

Families Citing this family (47)

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FR2757082B1 (fr) * 1996-12-13 1999-01-15 Air Liquide Procede d'epuration d'un gaz plasmagene et installation pour la mise en oeuvre d'un tel procede
FR2787677B1 (fr) * 1998-12-22 2001-01-19 Air Liquide Element de canalisation pour dispositif de traitement de gaz et dispositif incorporant un tel element de canalisation
AU746038B2 (en) * 1999-04-12 2002-04-11 Mitsubishi Heavy Industries, Ltd. Method for decomposition-treating organic halogen compound and decomposing device
JP2000296313A (ja) * 1999-04-12 2000-10-24 Mitsubishi Heavy Ind Ltd 有機ハロゲン化合物の分解装置
AUPP979099A0 (en) * 1999-04-16 1999-05-13 Swinburne Limited Ioniser for effluent gas
US6689252B1 (en) * 1999-07-28 2004-02-10 Applied Materials, Inc. Abatement of hazardous gases in effluent
US6468490B1 (en) * 2000-06-29 2002-10-22 Applied Materials, Inc. Abatement of fluorine gas from effluent
US6361706B1 (en) * 1999-08-13 2002-03-26 Philips Electronics North America Corp. Method for reducing the amount of perfluorocompound gas contained in exhaust emissions from plasma processing
JP2001252527A (ja) * 2000-03-13 2001-09-18 Seiko Epson Corp Ｐｆｃの処理方法および処理装置
US6673323B1 (en) 2000-03-24 2004-01-06 Applied Materials, Inc. Treatment of hazardous gases in effluent
US6261525B1 (en) 2000-05-17 2001-07-17 Bruce Minaee Process gas decomposition reactor
AU2001265093A1 (en) 2000-05-25 2001-12-11 Russell F. Jewett Methods and apparatus for plasma processing
FR2815888B1 (fr) * 2000-10-27 2003-05-30 Air Liquide Dispositif de traitement de gaz par plasma
TW496764B (en) * 2001-03-23 2002-08-01 Winbond Electronics Corp Highly efficient cleaning device for reducing waste gas in the atmosphere
FR2825295B1 (fr) * 2001-05-31 2004-05-28 Air Liquide Application des plasmas denses crees a pression atmospherique au traitement d'effluents gazeux
US6824748B2 (en) * 2001-06-01 2004-11-30 Applied Materials, Inc. Heated catalytic treatment of an effluent gas from a substrate fabrication process
US7220396B2 (en) 2001-07-11 2007-05-22 Battelle Memorial Institute Processes for treating halogen-containing gases
US6962679B2 (en) 2001-07-11 2005-11-08 Battelle Memorial Institute Processes and apparatuses for treating halogen-containing gases
US7160521B2 (en) 2001-07-11 2007-01-09 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber
FR2864795B1 (fr) * 2004-01-06 2008-04-18 Air Liquide Procede de traitement des gaz par des decharges hautes frequence
JP4895612B2 (ja) * 2004-01-29 2012-03-14 大陽日酸株式会社 排ガス処理方法および排ガス処理装置
FR2872505B1 (fr) * 2004-06-30 2007-02-02 Air Liquide Generateur de gaz fluore
FR2872506B1 (fr) * 2004-06-30 2007-02-02 Air Liquide Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire
US20080110744A1 (en) * 2004-06-30 2008-05-15 Jean-Marc Girard Method for the Preparation of a Gas or Mixture of Gases Containing Molecular Fluorine
FR2887245B1 (fr) * 2005-06-21 2007-11-02 Air Liquide Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire
FR2873045B1 (fr) * 2004-07-13 2007-01-19 Air Liquide Traitement d'effluents gazeux par plasma a pression atmospherique
WO2006008421A2 (fr) * 2004-07-13 2006-01-26 L'air Liquide, Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Traitement d'effluents gazeux par plasma a pression atmospherique
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US20070228008A1 (en) * 2004-12-06 2007-10-04 University Of Houston Medium pressure plasma system for removal of surface layers without substrate loss
FR2898066B1 (fr) * 2006-03-03 2008-08-15 L'air Liquide Procede de destruction d'effluents
JP5102217B2 (ja) 2005-10-31 2012-12-19 アプライド マテリアルズ インコーポレイテッド プロセス削減反応器
GB0523947D0 (en) * 2005-11-24 2006-01-04 Boc Group Plc Microwave plasma system
CN100352793C (zh) * 2006-01-20 2007-12-05 杨鸿生 用于以天然气制乙烯的槽波导微波化学反应设备及制备方法
GB0615271D0 (en) * 2006-08-01 2006-09-06 Boc Group Plc Apparatus for treating a gas stream
EP2131633A1 (de) * 2008-05-28 2009-12-09 L'AIR LIQUIDE, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Kühlverfahren von Mikrowellenplasma und selektives Zerstörungssystem von chemischen Molekülen, bei dem dieses Verfahren verwendet wird
FR2932058A1 (fr) * 2008-05-28 2009-12-04 Air Liquide Procede de demarrage d'un plasma micro-onde et systeme de destruction selective de molecules chimiques utilisant ce procede
US20110023908A1 (en) * 2009-07-30 2011-02-03 Applied Materials, Inc. Methods and apparatus for process abatement with recovery and reuse of abatement effluent
IT1395146B1 (it) * 2009-08-07 2012-09-05 Eurovector S P A Reattore di pirolisi migliorato per conversione ad alta temperatura
WO2012026945A1 (en) * 2010-08-27 2012-03-01 Empire Technology Development Llc Hydrofluorocarbon elimination device
US8043574B1 (en) 2011-04-12 2011-10-25 Midwest Refrigerants, Llc Apparatus for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8128902B2 (en) * 2011-04-12 2012-03-06 Midwest Refrigerants, Llc Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
EP2874739B1 (de) * 2012-07-18 2018-12-26 Atlantic Hydrogen Inc. Durch elektromagnetische energie initiierte plasmareaktorsysteme und verfahren dafür
US8834830B2 (en) 2012-09-07 2014-09-16 Midwest Inorganics LLC Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents
KR101475822B1 (ko) * 2014-03-19 2014-12-23 한국기초과학지원연구원 전자파 플라즈마 토치
KR102031984B1 (ko) * 2018-07-13 2019-10-14 (주)플라즈닉스 플라즈마 상에서 대상기체 함유 배출기체를 처리하는 방법 및 장치
JP2022527863A (ja) * 2019-04-05 2022-06-06 パイロウェーブ・インコーポレイテッド マイクロ波熱分解システムのための内部冷却されるインピーダンスチューナ
CN115554823B (zh) * 2022-06-16 2023-08-04 西安交通大学 基于热等离子体的六氟化硫降解装置

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FR2579855A1 (fr) * 1985-03-28 1986-10-03 Centre Nat Rech Scient Dispositif pour l'excitation par ondes hyperfrequences d'un plasma dans une colonne de gaz, permettant notamment la realisation d'un laser ionique
US4883570A (en) * 1987-06-08 1989-11-28 Research-Cottrell, Inc. Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electromagnetic waves
WO1991002580A1 (de) * 1989-08-26 1991-03-07 Moegel Helmut Verfahren und vorrichtung zur entsorgung von organischen dämpfen, insbesondere von lösemitteldämpfen
US5468356A (en) * 1991-08-23 1995-11-21 The United States Of America As Represented By The Secretary Of The Navy Large scale purification of contaminated air
JP3421954B2 (ja) * 1992-12-18 2003-06-30 株式会社ダイオー オゾン層破壊物質の処理方法
DE4428418C2 (de) * 1994-08-11 1997-03-06 Buck Chem Tech Werke Verfahren und Vorrichtung zum Inertisieren toxischer Gase oder toxischer vergasbarer Stoffe
US5695619A (en) * 1995-05-25 1997-12-09 Hughes Aircraft Gaseous pollutant destruction method using self-resonant corona discharge
US5750823A (en) * 1995-07-10 1998-05-12 R.F. Environmental Systems, Inc. Process and device for destruction of halohydrocarbons
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
US5882615A (en) * 1995-07-28 1999-03-16 Japan Pionics Co., Ltd. Cleaning agent and cleaning process for harmful gas

Also Published As

Publication number Publication date
EP0820801A1 (de) 1998-01-28
JPH10165753A (ja) 1998-06-23
DE69730280T2 (de) 2005-09-01
JP4414004B2 (ja) 2010-02-10
FR2751565B1 (fr) 1998-09-04
US5965786A (en) 1999-10-12
EP1424120A1 (de) 2004-06-02
FR2751565A1 (fr) 1998-01-30
EP0820801B1 (de) 2004-08-18
US6290918B1 (en) 2001-09-18

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Legal Events

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8364 No opposition during term of opposition