FR2898066B1 - Procede de destruction d'effluents - Google Patents
Procede de destruction d'effluentsInfo
- Publication number
- FR2898066B1 FR2898066B1 FR0650761A FR0650761A FR2898066B1 FR 2898066 B1 FR2898066 B1 FR 2898066B1 FR 0650761 A FR0650761 A FR 0650761A FR 0650761 A FR0650761 A FR 0650761A FR 2898066 B1 FR2898066 B1 FR 2898066B1
- Authority
- FR
- France
- Prior art keywords
- effluents
- destruction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000006378 damage Effects 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
- B01D53/323—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00 by electrostatic effects or by high-voltage electric fields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0650761A FR2898066B1 (fr) | 2006-03-03 | 2006-03-03 | Procede de destruction d'effluents |
KR1020087000816A KR20080032089A (ko) | 2005-07-12 | 2006-07-10 | 기체 폐기물의 플라즈마 처리 방법 |
EP06794474A EP1904664A2 (fr) | 2005-07-12 | 2006-07-10 | Procede de traitement par plasma d'effluents gazeux |
JP2008520927A JP5335423B2 (ja) | 2005-07-12 | 2006-07-10 | ガス流出物のプラズマ処理のための方法 |
PCT/FR2006/050699 WO2007007003A2 (fr) | 2005-07-12 | 2006-07-10 | Procede de traitement par plasma d'effluents gazeux |
JP2008556762A JP2010519012A (ja) | 2006-03-03 | 2007-02-26 | Pfc及びhfcのようなフッ素化合物を含む流出物を処理するための方法 |
US12/281,303 US20090314626A1 (en) | 2006-03-03 | 2007-02-26 | Method for treating effluents containing fluorocompounds like pfc and hfc |
EP07726511A EP1993707A1 (fr) | 2006-03-03 | 2007-02-26 | Procédé de traitement d'effluents contenant des composés fluorés tels que le pfc et le hfc |
PCT/EP2007/051811 WO2007099081A1 (fr) | 2006-03-03 | 2007-02-26 | Procédé de traitement d'effluents contenant des composés fluorés tels que le pfc et le hfc |
KR1020087021539A KR20090005295A (ko) | 2006-03-03 | 2007-02-26 | Pfc 및 hfc와 같은 불소화합물을 함유하는 배출물을 처리하는 방법 |
TW096106622A TW200734033A (en) | 2006-03-03 | 2007-02-27 | Method for destroying effluents |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0650761A FR2898066B1 (fr) | 2006-03-03 | 2006-03-03 | Procede de destruction d'effluents |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2898066A1 FR2898066A1 (fr) | 2007-09-07 |
FR2898066B1 true FR2898066B1 (fr) | 2008-08-15 |
Family
ID=37565745
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0650761A Active FR2898066B1 (fr) | 2005-07-12 | 2006-03-03 | Procede de destruction d'effluents |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090314626A1 (fr) |
EP (1) | EP1993707A1 (fr) |
JP (1) | JP2010519012A (fr) |
KR (1) | KR20090005295A (fr) |
FR (1) | FR2898066B1 (fr) |
TW (1) | TW200734033A (fr) |
WO (1) | WO2007099081A1 (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5335423B2 (ja) * | 2005-07-12 | 2013-11-06 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | ガス流出物のプラズマ処理のための方法 |
US8128902B2 (en) | 2011-04-12 | 2012-03-06 | Midwest Refrigerants, Llc | Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide |
US8043574B1 (en) | 2011-04-12 | 2011-10-25 | Midwest Refrigerants, Llc | Apparatus for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide |
CN102338734B (zh) * | 2011-08-30 | 2013-11-13 | 中国石油化工股份有限公司 | 微波辐射控制对液体腐蚀性的检测装置 |
US8834830B2 (en) | 2012-09-07 | 2014-09-16 | Midwest Inorganics LLC | Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents |
KR101376238B1 (ko) * | 2013-04-30 | 2014-03-27 | 주식회사 지앤비에스엔지니어링 | 공정 폐가스 처리용 스크러버 |
CN106298421A (zh) * | 2015-06-23 | 2017-01-04 | 应用材料公司 | 用以消除来自离子注入工艺的自燃副产物的方法和装置 |
SG11201809018UA (en) * | 2016-04-15 | 2018-11-29 | Applied Materials Inc | Plasma abatement solids avoidance by use of oxygen plasma cleaning cycle |
WO2018148062A1 (fr) | 2017-02-09 | 2018-08-16 | Applied Materials, Inc. | Technologie de réduction de plasma utilisant de la vapeur d'eau et un réactif à l'oxygène |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
HU184389B (en) * | 1981-02-27 | 1984-08-28 | Villamos Ipari Kutato Intezet | Method and apparatus for destroying wastes by using of plasmatechnic |
US4883570A (en) * | 1987-06-08 | 1989-11-28 | Research-Cottrell, Inc. | Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electromagnetic waves |
US5026464A (en) * | 1988-08-31 | 1991-06-25 | Agency Of Industrial Science And Technology | Method and apparatus for decomposing halogenated organic compound |
US5611947A (en) * | 1994-09-07 | 1997-03-18 | Alliant Techsystems, Inc. | Induction steam plasma torch for generating a steam plasma for treating a feed slurry |
US5750823A (en) * | 1995-07-10 | 1998-05-12 | R.F. Environmental Systems, Inc. | Process and device for destruction of halohydrocarbons |
JP2985762B2 (ja) * | 1996-03-18 | 1999-12-06 | 日本電気株式会社 | 排気ガスの処理方法及び処理装置 |
US6888040B1 (en) * | 1996-06-28 | 2005-05-03 | Lam Research Corporation | Method and apparatus for abatement of reaction products from a vacuum processing chamber |
FR2751565B1 (fr) * | 1996-07-26 | 1998-09-04 | Air Liquide | Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction |
US6139694A (en) * | 1998-05-28 | 2000-10-31 | Science Applications International Corporation | Method and apparatus utilizing ethanol in non-thermal plasma treatment of effluent gas |
JP2000133494A (ja) * | 1998-10-23 | 2000-05-12 | Mitsubishi Heavy Ind Ltd | マイクロ波プラズマ発生装置及び方法 |
US6689252B1 (en) * | 1999-07-28 | 2004-02-10 | Applied Materials, Inc. | Abatement of hazardous gases in effluent |
US6423284B1 (en) * | 1999-10-18 | 2002-07-23 | Advanced Technology Materials, Inc. | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases |
DE60132089T2 (de) * | 2000-05-29 | 2008-12-11 | ADTEC Plasma Technology Co., Ltd., Fukuyama City | Vorrichtung zur behandlung von gasen miitels plasma |
US6576573B2 (en) * | 2001-02-09 | 2003-06-10 | Advanced Technology Materials, Inc. | Atmospheric pressure plasma enhanced abatement of semiconductor process effluent species |
US6969494B2 (en) * | 2001-05-11 | 2005-11-29 | Continental Research & Engineering, Llc | Plasma based trace metal removal apparatus and method |
US7060234B2 (en) * | 2001-07-18 | 2006-06-13 | Applied Materials | Process and apparatus for abatement of by products generated from deposition processes and cleaning of deposition chambers |
TW200412409A (en) * | 2003-01-03 | 2004-07-16 | Desiccant Technology Corp | Vortex-type reaction chamber toxic gas treatment device and method |
GB0403797D0 (en) * | 2004-02-20 | 2004-03-24 | Boc Group Plc | Gas abatement |
JP5335423B2 (ja) * | 2005-07-12 | 2013-11-06 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | ガス流出物のプラズマ処理のための方法 |
-
2006
- 2006-03-03 FR FR0650761A patent/FR2898066B1/fr active Active
-
2007
- 2007-02-26 EP EP07726511A patent/EP1993707A1/fr not_active Withdrawn
- 2007-02-26 JP JP2008556762A patent/JP2010519012A/ja active Pending
- 2007-02-26 WO PCT/EP2007/051811 patent/WO2007099081A1/fr active Application Filing
- 2007-02-26 US US12/281,303 patent/US20090314626A1/en not_active Abandoned
- 2007-02-26 KR KR1020087021539A patent/KR20090005295A/ko not_active Application Discontinuation
- 2007-02-27 TW TW096106622A patent/TW200734033A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
US20090314626A1 (en) | 2009-12-24 |
TW200734033A (en) | 2007-09-16 |
KR20090005295A (ko) | 2009-01-13 |
FR2898066A1 (fr) | 2007-09-07 |
WO2007099081A1 (fr) | 2007-09-07 |
JP2010519012A (ja) | 2010-06-03 |
EP1993707A1 (fr) | 2008-11-26 |
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