FR2872506B1 - Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire - Google Patents

Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire

Info

Publication number
FR2872506B1
FR2872506B1 FR0451379A FR0451379A FR2872506B1 FR 2872506 B1 FR2872506 B1 FR 2872506B1 FR 0451379 A FR0451379 A FR 0451379A FR 0451379 A FR0451379 A FR 0451379A FR 2872506 B1 FR2872506 B1 FR 2872506B1
Authority
FR
France
Prior art keywords
gas
mixture
preparation
containing molecular
molecular fluorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0451379A
Other languages
English (en)
Other versions
FR2872506A1 (fr
Inventor
Jean Marc Girard
Herve Dulphy
Jean Christophe Rostaing
Pascal Moine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
Air Liquide Electronics Systems SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
Air Liquide Electronics Systems SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, Air Liquide Electronics Systems SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR0451379A priority Critical patent/FR2872506B1/fr
Priority to US11/570,111 priority patent/US20080110744A1/en
Priority to EP05783865A priority patent/EP1763488A1/fr
Priority to KR1020067027553A priority patent/KR20070046794A/ko
Priority to PCT/FR2005/001652 priority patent/WO2006010857A1/fr
Priority to JP2007518645A priority patent/JP2008504208A/ja
Priority to CN 200580022253 priority patent/CN1980859A/zh
Publication of FR2872506A1 publication Critical patent/FR2872506A1/fr
Application granted granted Critical
Publication of FR2872506B1 publication Critical patent/FR2872506B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/20—Fluorine

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
FR0451379A 2004-06-30 2004-06-30 Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire Expired - Fee Related FR2872506B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0451379A FR2872506B1 (fr) 2004-06-30 2004-06-30 Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire
US11/570,111 US20080110744A1 (en) 2004-06-30 2005-06-26 Method for the Preparation of a Gas or Mixture of Gases Containing Molecular Fluorine
KR1020067027553A KR20070046794A (ko) 2004-06-30 2005-06-29 분자 불소를 함유하는 기체 또는 기체 혼합물의 제조 방법
PCT/FR2005/001652 WO2006010857A1 (fr) 2004-06-30 2005-06-29 Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire
EP05783865A EP1763488A1 (fr) 2004-06-30 2005-06-29 Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire
JP2007518645A JP2008504208A (ja) 2004-06-30 2005-06-29 分子フッ素を含むガスまたはガスの混合物の製造方法
CN 200580022253 CN1980859A (zh) 2004-06-30 2005-06-29 制备含有分子氟的气体或气体混合物的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0451379A FR2872506B1 (fr) 2004-06-30 2004-06-30 Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire

Publications (2)

Publication Number Publication Date
FR2872506A1 FR2872506A1 (fr) 2006-01-06
FR2872506B1 true FR2872506B1 (fr) 2007-02-02

Family

ID=34945706

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0451379A Expired - Fee Related FR2872506B1 (fr) 2004-06-30 2004-06-30 Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire

Country Status (2)

Country Link
CN (1) CN1980859A (fr)
FR (1) FR2872506B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112013002632B1 (pt) * 2010-08-02 2020-01-21 Basell Polyolefine Gmbh processo e aparelho para misturar e dividir correntes de fluido
KR102031984B1 (ko) * 2018-07-13 2019-10-14 (주)플라즈닉스 플라즈마 상에서 대상기체 함유 배출기체를 처리하는 방법 및 장치
CN113606820B (zh) * 2021-08-27 2022-09-23 中船(邯郸)派瑞特种气体股份有限公司 一种直接与间接制冷相结合的三氟化氮电解气超低温冷阱装置
CN116425118B (zh) * 2023-03-31 2024-08-06 南大光电(淄博)有限公司 裂解三氟化氮生产高纯氟气的方法及其裂解反应器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4213102A (en) * 1978-03-21 1980-07-15 The United States Of America As Represented By The Secretary Of The Air Force Fluorine generator for chemical lasers
JPS6217025A (ja) * 1985-07-16 1987-01-26 Kokusai Denshin Denwa Co Ltd <Kdd> フツ化物ガラスの製造方法
JPH04323377A (ja) * 1991-04-19 1992-11-12 Hitachi Electron Eng Co Ltd Ｃｖｄ装置のクリーニング方法
FR2751565B1 (fr) * 1996-07-26 1998-09-04 Air Liquide Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction

Also Published As

Publication number Publication date
FR2872506A1 (fr) 2006-01-06
CN1980859A (zh) 2007-06-13

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Effective date: 20100226