FR2887245B1 - Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire - Google Patents
Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaireInfo
- Publication number
- FR2887245B1 FR2887245B1 FR0551676A FR0551676A FR2887245B1 FR 2887245 B1 FR2887245 B1 FR 2887245B1 FR 0551676 A FR0551676 A FR 0551676A FR 0551676 A FR0551676 A FR 0551676A FR 2887245 B1 FR2887245 B1 FR 2887245B1
- Authority
- FR
- France
- Prior art keywords
- gas
- mixture
- preparation
- containing molecular
- molecular fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/126—Microwaves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/129—Radiofrequency
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0433—Physical processing only
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/20—Fluorine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
- B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
- B01J2219/00065—Pressure measurement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
- B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
- B01J2219/00069—Flow rate measurement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00164—Controlling or regulating processes controlling the flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00191—Control algorithm
- B01J2219/00193—Sensing a parameter
- B01J2219/00195—Sensing a parameter of the reaction system
- B01J2219/00202—Sensing a parameter of the reaction system at the reactor outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00191—Control algorithm
- B01J2219/00222—Control algorithm taking actions
- B01J2219/00227—Control algorithm taking actions modifying the operating conditions
- B01J2219/00229—Control algorithm taking actions modifying the operating conditions of the reaction system
- B01J2219/00231—Control algorithm taking actions modifying the operating conditions of the reaction system at the reactor inlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0875—Gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0076—Nitrogen halides
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0551676A FR2887245B1 (fr) | 2005-06-21 | 2005-06-21 | Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire |
US11/570,111 US20080110744A1 (en) | 2004-06-30 | 2005-06-26 | Method for the Preparation of a Gas or Mixture of Gases Containing Molecular Fluorine |
EP05783865A EP1763488A1 (fr) | 2004-06-30 | 2005-06-29 | Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire |
PCT/FR2005/001652 WO2006010857A1 (fr) | 2004-06-30 | 2005-06-29 | Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire |
KR1020067027553A KR20070046794A (ko) | 2004-06-30 | 2005-06-29 | 분자 불소를 함유하는 기체 또는 기체 혼합물의 제조 방법 |
JP2007518645A JP2008504208A (ja) | 2004-06-30 | 2005-06-29 | 分子フッ素を含むガスまたはガスの混合物の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0551676A FR2887245B1 (fr) | 2005-06-21 | 2005-06-21 | Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2887245A1 FR2887245A1 (fr) | 2006-12-22 |
FR2887245B1 true FR2887245B1 (fr) | 2007-11-02 |
Family
ID=35906990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0551676A Expired - Fee Related FR2887245B1 (fr) | 2004-06-30 | 2005-06-21 | Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2887245B1 (fr) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4213102A (en) * | 1978-03-21 | 1980-07-15 | The United States Of America As Represented By The Secretary Of The Air Force | Fluorine generator for chemical lasers |
JPS6217025A (ja) * | 1985-07-16 | 1987-01-26 | Kokusai Denshin Denwa Co Ltd <Kdd> | フツ化物ガラスの製造方法 |
JPH04323377A (ja) * | 1991-04-19 | 1992-11-12 | Hitachi Electron Eng Co Ltd | Cvd装置のクリーニング方法 |
GB9224745D0 (en) * | 1992-11-26 | 1993-01-13 | Atomic Energy Authority Uk | Microwave plasma generator |
FR2751565B1 (fr) * | 1996-07-26 | 1998-09-04 | Air Liquide | Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction |
WO2002007194A2 (fr) * | 2000-07-18 | 2002-01-24 | Showa Denko K.K. | Gaz de nettoyage destine a un materiel de production de semi-conducteurs |
-
2005
- 2005-06-21 FR FR0551676A patent/FR2887245B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2887245A1 (fr) | 2006-12-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20100226 |