FR2872505B1 - Generateur de gaz fluore - Google Patents

Generateur de gaz fluore

Info

Publication number
FR2872505B1
FR2872505B1 FR0451378A FR0451378A FR2872505B1 FR 2872505 B1 FR2872505 B1 FR 2872505B1 FR 0451378 A FR0451378 A FR 0451378A FR 0451378 A FR0451378 A FR 0451378A FR 2872505 B1 FR2872505 B1 FR 2872505B1
Authority
FR
France
Prior art keywords
gas generator
fluorine gas
fluorine
generator
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0451378A
Other languages
English (en)
Other versions
FR2872505A1 (fr
Inventor
Jean Marc Girard
Herve Dulphy
Jean Christophe Rostaing
Pascal Moine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
Air Liquide Electronics Systems SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
Air Liquide Electronics Systems SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, Air Liquide Electronics Systems SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR0451378A priority Critical patent/FR2872505B1/fr
Priority to US11/570,111 priority patent/US20080110744A1/en
Priority to PCT/FR2005/001652 priority patent/WO2006010857A1/fr
Priority to EP05783865A priority patent/EP1763488A1/fr
Priority to KR1020067027553A priority patent/KR20070046794A/ko
Priority to JP2007518645A priority patent/JP2008504208A/ja
Publication of FR2872505A1 publication Critical patent/FR2872505A1/fr
Application granted granted Critical
Publication of FR2872505B1 publication Critical patent/FR2872505B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/20—Fluorine
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/126—Halogenation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Drying Of Semiconductors (AREA)
FR0451378A 2004-06-30 2004-06-30 Generateur de gaz fluore Expired - Fee Related FR2872505B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0451378A FR2872505B1 (fr) 2004-06-30 2004-06-30 Generateur de gaz fluore
US11/570,111 US20080110744A1 (en) 2004-06-30 2005-06-26 Method for the Preparation of a Gas or Mixture of Gases Containing Molecular Fluorine
PCT/FR2005/001652 WO2006010857A1 (fr) 2004-06-30 2005-06-29 Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire
EP05783865A EP1763488A1 (fr) 2004-06-30 2005-06-29 Procede de preparation d'un gaz ou melange de gaz contenant du fluor moleculaire
KR1020067027553A KR20070046794A (ko) 2004-06-30 2005-06-29 분자 불소를 함유하는 기체 또는 기체 혼합물의 제조 방법
JP2007518645A JP2008504208A (ja) 2004-06-30 2005-06-29 分子フッ素を含むガスまたはガスの混合物の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0451378A FR2872505B1 (fr) 2004-06-30 2004-06-30 Generateur de gaz fluore

Publications (2)

Publication Number Publication Date
FR2872505A1 FR2872505A1 (fr) 2006-01-06
FR2872505B1 true FR2872505B1 (fr) 2007-02-02

Family

ID=34945705

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0451378A Expired - Fee Related FR2872505B1 (fr) 2004-06-30 2004-06-30 Generateur de gaz fluore

Country Status (1)

Country Link
FR (1) FR2872505B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3269843A1 (fr) * 2006-04-10 2018-01-17 Solvay Fluor GmbH Procédé de gravure
CN101466873B (zh) * 2006-04-10 2012-09-26 苏威氟有限公司 蚀刻方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4213102A (en) * 1978-03-21 1980-07-15 The United States Of America As Represented By The Secretary Of The Air Force Fluorine generator for chemical lasers
JPS6217025A (ja) * 1985-07-16 1987-01-26 Kokusai Denshin Denwa Co Ltd <Kdd> フツ化物ガラスの製造方法
JPH04323377A (ja) * 1991-04-19 1992-11-12 Hitachi Electron Eng Co Ltd Ｃｖｄ装置のクリーニング方法
US5700922A (en) * 1991-12-24 1997-12-23 Isis Pharmaceuticals, Inc. PNA-DNA-PNA chimeric macromolecules
BE1005831A3 (fr) * 1992-04-29 1994-02-15 Solvay Procede pour la production de corps creux impermeables et corps creux ainsi obtenus.
FR2751565B1 (fr) * 1996-07-26 1998-09-04 Air Liquide Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction
AU2001271063A1 (en) * 2000-07-18 2002-01-30 Showa Denko K K Cleaning gas for semiconductor production equipment

Also Published As

Publication number Publication date
FR2872505A1 (fr) 2006-01-06

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20100226