DE69728082D1 - Flüssigkeitsausstosskopf, Vorrichtung zum Austossen von Flüssigkeit und Drucksystem - Google Patents

Flüssigkeitsausstosskopf, Vorrichtung zum Austossen von Flüssigkeit und Drucksystem

Info

Publication number
DE69728082D1
DE69728082D1 DE69728082T DE69728082T DE69728082D1 DE 69728082 D1 DE69728082 D1 DE 69728082D1 DE 69728082 T DE69728082 T DE 69728082T DE 69728082 T DE69728082 T DE 69728082T DE 69728082 D1 DE69728082 D1 DE 69728082D1
Authority
DE
Germany
Prior art keywords
liquid
ejection head
pressure system
ejecting
liquid ejection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69728082T
Other languages
English (en)
Other versions
DE69728082T2 (de
Inventor
Yoshie Asakawa
Kiyomitsu Kudo
Hiroshi Sugitani
Kiyomi Aono
Hiroyuki Ishinaga
Toshio Kashino
Aya Yoshihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP14629096A external-priority patent/JP3710206B2/ja
Priority claimed from JP20314996A external-priority patent/JP3517526B2/ja
Priority claimed from JP18372696A external-priority patent/JPH1024587A/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69728082D1 publication Critical patent/DE69728082D1/de
Application granted granted Critical
Publication of DE69728082T2 publication Critical patent/DE69728082T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14048—Movable member in the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/145—Arrangement thereof
    • B41J2/155—Arrangement thereof for line printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/20—Modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/21—Line printing
DE69728082T 1996-06-07 1997-06-06 Flüssigkeitsausstosskopf, Vorrichtung zum Austossen von Flüssigkeit und Drucksystem Expired - Fee Related DE69728082T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP14629096A JP3710206B2 (ja) 1996-06-07 1996-06-07 液体吐出ヘッド、液体吐出装置、および記録方法
JP14629096 1996-06-07
JP20314996A JP3517526B2 (ja) 1996-07-12 1996-07-12 液体吐出ヘッドおよび液体吐出装置
JP18372696A JPH1024587A (ja) 1996-07-12 1996-07-12 液体吐出ヘッド、液体吐出装置、および記録システム
JP18372696 1996-07-12
JP20314996 1996-07-12

Publications (2)

Publication Number Publication Date
DE69728082D1 true DE69728082D1 (de) 2004-04-22
DE69728082T2 DE69728082T2 (de) 2005-01-20

Family

ID=27319143

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69728082T Expired - Fee Related DE69728082T2 (de) 1996-06-07 1997-06-06 Flüssigkeitsausstosskopf, Vorrichtung zum Austossen von Flüssigkeit und Drucksystem

Country Status (6)

Country Link
US (1) US6302518B1 (de)
EP (1) EP0811498B1 (de)
CN (1) CN1139488C (de)
AU (1) AU2474597A (de)
CA (1) CA2207240C (de)
DE (1) DE69728082T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1024582A (ja) * 1996-07-12 1998-01-27 Canon Inc 液体吐出ヘッド並びに該液体吐出ヘッドの回復方法及び製造方法、並びに該液体吐出ヘッドを用いた液体吐出装置
JPH1024584A (ja) 1996-07-12 1998-01-27 Canon Inc 液体吐出ヘッドカートリッジおよび液体吐出装置
CN1103288C (zh) * 1998-07-24 2003-03-19 财团法人工业技术研究院 压力调节装置
JP2003054004A (ja) 2001-08-10 2003-02-26 Canon Inc インクジェット記録装置及びインクジェット記録ヘッド、並びにインクジェット記録方法
JP3826749B2 (ja) 2001-08-22 2006-09-27 株式会社日立製作所 シャント抵抗を備えた電力変換装置
JP3891561B2 (ja) * 2002-07-24 2007-03-14 キヤノン株式会社 インクジェット記録ヘッド
US8668328B2 (en) * 2007-11-09 2014-03-11 Hewlett-Packard Development Company, L.P. Printer including positionable printing units
JP5569092B2 (ja) * 2010-03-26 2014-08-13 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射ヘッドユニット及び液体噴射装置
WO2014065793A1 (en) * 2012-10-24 2014-05-01 Hewlett-Packard Development Company, L.P. Printer and printing method
EP3763531B1 (de) * 2018-03-05 2024-04-03 Think Laboratory Co., Ltd. System und verfahren zur detektion der menge an tinte, die von einem tintenstrahldrucker genutzt wird, und tintenstrahldrucker
CN114563934B (zh) * 2022-03-01 2023-08-11 中国科学院光电技术研究所 基于平面基板加工双面微米级定位标记的简易装置及方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
US4417251A (en) 1980-03-06 1983-11-22 Canon Kabushiki Kaisha Ink jet head
JPS57102366A (en) 1980-12-18 1982-06-25 Canon Inc Ink jet head
US4437100A (en) 1981-06-18 1984-03-13 Canon Kabushiki Kaisha Ink-jet head and method for production thereof
US4450455A (en) 1981-06-18 1984-05-22 Canon Kabushiki Kaisha Ink jet head
US4611219A (en) 1981-12-29 1986-09-09 Canon Kabushiki Kaisha Liquid-jetting head
JPS58220756A (ja) 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツドの製造方法
JPS58220754A (ja) 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツド
US4609427A (en) 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
JPS5919168A (ja) 1982-07-26 1984-01-31 Canon Inc インクジエツト記録ヘツド
US4480259A (en) * 1982-07-30 1984-10-30 Hewlett-Packard Company Ink jet printer with bubble driven flexible membrane
JPS59115853A (ja) * 1982-12-23 1984-07-04 Sharp Corp インクジエツト記録装置
JPS62196154A (ja) * 1986-02-24 1987-08-29 Canon Inc 液体噴射記録ヘツド
JPS63199972A (ja) 1987-02-13 1988-08-18 Canon Inc 弁素子の製造方法
JP2676699B2 (ja) * 1987-09-03 1997-11-17 株式会社リコー インクジェット記録方法
US4994825A (en) 1988-06-30 1991-02-19 Canon Kabushiki Kaisha Ink jet recording head equipped with a discharging opening forming member including a protruding portion and a recessed portion
US5208604A (en) 1988-10-31 1993-05-04 Canon Kabushiki Kaisha Ink jet head and manufacturing method thereof, and ink jet apparatus with ink jet head
CA2025536C (en) 1989-09-18 1995-04-18 Hiroshi Nakagomi Ink jet recording head and ink jet recording apparatus having same
EP0436047A1 (de) 1990-01-02 1991-07-10 Siemens Aktiengesellschaft Flüssigkeitsstrahlaufzeichnungskopf für Tintendruckeinrichtungen
DE69127855T2 (de) 1990-06-15 1998-03-12 Canon Kk Tintenstrahlaufzeichnungskopf und mit diesem Kopf versehenes Gerät
DE69132396T2 (de) * 1990-06-15 2001-02-01 Canon Kk Tintenstrahlaufzeichnungsgerät und Steuerungsverfahren dafür
US5278585A (en) * 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
US6036295A (en) 1993-11-26 2000-03-14 Sony Corporation Ink jet printer head and method for manufacturing the same
SG44309A1 (en) * 1994-03-04 1997-12-19 Canon Kk An ink jet recording apparatus
JP3397473B2 (ja) * 1994-10-21 2003-04-14 キヤノン株式会社 液体噴射ヘッド用素子基板を用いた液体噴射ヘッド、該ヘッドを用いた液体噴射装置
US5826333A (en) * 1994-10-31 1998-10-27 Canon Kabushiki Kaisha Method of manufacturing an ink jet head
US5821962A (en) * 1995-06-02 1998-10-13 Canon Kabushiki Kaisha Liquid ejection apparatus and method
JP3423534B2 (ja) * 1995-09-04 2003-07-07 キヤノン株式会社 液体吐出方法、該方法に用いられる液体吐出ヘッド、および該液体吐出ヘッドを用いたヘッドカートリッジ
JPH1063185A (ja) 1996-08-20 1998-03-06 Miracle Kogyo Kk 立体印刷画線を有する貼着表示体の製造法

Also Published As

Publication number Publication date
AU2474597A (en) 1997-12-11
US6302518B1 (en) 2001-10-16
EP0811498A3 (de) 1998-08-19
DE69728082T2 (de) 2005-01-20
EP0811498B1 (de) 2004-03-17
CN1139488C (zh) 2004-02-25
EP0811498A2 (de) 1997-12-10
CA2207240A1 (en) 1997-12-07
CA2207240C (en) 2002-10-22
CN1178167A (zh) 1998-04-08

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