DE69714392T2 - Feldemissionsvorrichtung mit reduziertem Leckstrom zwischen Zeilen und Spalten sowie Verfahren zu deren Herstellung - Google Patents

Feldemissionsvorrichtung mit reduziertem Leckstrom zwischen Zeilen und Spalten sowie Verfahren zu deren Herstellung

Info

Publication number
DE69714392T2
DE69714392T2 DE69714392T DE69714392T DE69714392T2 DE 69714392 T2 DE69714392 T2 DE 69714392T2 DE 69714392 T DE69714392 T DE 69714392T DE 69714392 T DE69714392 T DE 69714392T DE 69714392 T2 DE69714392 T2 DE 69714392T2
Authority
DE
Germany
Prior art keywords
rows
columns
production
leakage current
field emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69714392T
Other languages
English (en)
Other versions
DE69714392D1 (de
Inventor
John Song
Thomas Nilsson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE69714392D1 publication Critical patent/DE69714392D1/de
Publication of DE69714392T2 publication Critical patent/DE69714392T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
DE69714392T 1996-12-13 1997-11-26 Feldemissionsvorrichtung mit reduziertem Leckstrom zwischen Zeilen und Spalten sowie Verfahren zu deren Herstellung Expired - Fee Related DE69714392T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/767,246 US5696385A (en) 1996-12-13 1996-12-13 Field emission device having reduced row-to-column leakage

Publications (2)

Publication Number Publication Date
DE69714392D1 DE69714392D1 (de) 2002-09-05
DE69714392T2 true DE69714392T2 (de) 2003-01-16

Family

ID=25078929

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714392T Expired - Fee Related DE69714392T2 (de) 1996-12-13 1997-11-26 Feldemissionsvorrichtung mit reduziertem Leckstrom zwischen Zeilen und Spalten sowie Verfahren zu deren Herstellung

Country Status (7)

Country Link
US (2) US5696385A (de)
EP (1) EP0848406B1 (de)
JP (1) JP3954710B2 (de)
KR (1) KR100441184B1 (de)
CN (1) CN1155979C (de)
DE (1) DE69714392T2 (de)
TW (1) TW358955B (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5908699A (en) * 1996-10-11 1999-06-01 Skion Corporation Cold cathode electron emitter and display structure
US7070651B1 (en) * 1997-05-21 2006-07-04 Si Diamond Technology, Inc. Process for growing a carbon film
US6310432B1 (en) * 1997-05-21 2001-10-30 Si Diamond Technology, Inc. Surface treatment process used in growing a carbon film
US6181056B1 (en) * 1997-10-21 2001-01-30 Si Diamond Technology, Inc. Cold cathode carbon film
GB2330687B (en) * 1997-10-22 1999-09-29 Printable Field Emitters Ltd Field emission devices
US6204597B1 (en) 1999-02-05 2001-03-20 Motorola, Inc. Field emission device having dielectric focusing layers
US6059625A (en) 1999-03-01 2000-05-09 Micron Technology, Inc. Method of fabricating field emission arrays employing a hard mask to define column lines
US6197607B1 (en) * 1999-03-01 2001-03-06 Micron Technology, Inc. Method of fabricating field emission arrays to optimize the size of grid openings and to minimize the occurrence of electrical shorts
US6017772A (en) * 1999-03-01 2000-01-25 Micron Technology, Inc. Field emission arrays and method of fabricating emitter tips and corresponding resistors thereof with a single mask
US6359383B1 (en) * 1999-08-19 2002-03-19 Industrial Technology Research Institute Field emission display device equipped with nanotube emitters and method for fabricating
JP3874396B2 (ja) 2000-01-13 2007-01-31 パイオニア株式会社 電子放出素子及びその製造方法並びに電子放出素子を用いた表示装置
US6753544B2 (en) 2001-04-30 2004-06-22 Hewlett-Packard Development Company, L.P. Silicon-based dielectric tunneling emitter
US6911768B2 (en) * 2001-04-30 2005-06-28 Hewlett-Packard Development Company, L.P. Tunneling emitter with nanohole openings
US6458676B1 (en) 2001-06-25 2002-10-01 Lucent Technologies Inc. Method of varying the resistance along a conductive layer
US6542397B2 (en) 2001-06-25 2003-04-01 Lucent Technologies Inc. Read only memory structure
US20030073302A1 (en) * 2001-10-12 2003-04-17 Reflectivity, Inc., A California Corporation Methods for formation of air gap interconnects
US6558968B1 (en) * 2001-10-31 2003-05-06 Hewlett-Packard Development Company Method of making an emitter with variable density photoresist layer
KR100474271B1 (ko) * 2002-08-16 2005-03-10 엘지전자 주식회사 전계방출소자 및 그 제조방법
KR100474272B1 (ko) * 2002-08-16 2005-03-10 엘지전자 주식회사 평면형 전계방출소자 및 그 제조방법
KR20050096534A (ko) * 2004-03-31 2005-10-06 삼성에스디아이 주식회사 전자 방출 표시 장치의 캐소드 기판 및 그 제조 방법
KR20050113045A (ko) * 2004-05-28 2005-12-01 삼성에스디아이 주식회사 유기 전계 발광 표시 소자 및 그 제조방법
US7429820B2 (en) * 2004-12-07 2008-09-30 Motorola, Inc. Field emission display with electron trajectory field shaping
TWI329882B (en) * 2005-08-25 2010-09-01 Ind Tech Res Inst Method of fabricating field emission display device and cathode plate thereof
WO2015191044A1 (en) 2014-06-10 2015-12-17 Hewlett-Packard Development Company, L.P. Wake up message transmission rate

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4040080A (en) * 1976-03-22 1977-08-02 Hamamatsu Terebi Kabushiki Kaisha Semiconductor cold electron emission device
JP2503621B2 (ja) * 1989-01-23 1996-06-05 日本電気株式会社 半導体装置の製造方法
US5144191A (en) * 1991-06-12 1992-09-01 Mcnc Horizontal microelectronic field emission devices
US5397428A (en) * 1991-12-20 1995-03-14 The University Of North Carolina At Chapel Hill Nucleation enhancement for chemical vapor deposition of diamond
US5473218A (en) * 1994-05-31 1995-12-05 Motorola, Inc. Diamond cold cathode using patterned metal for electron emission control
EP0696042B1 (de) * 1994-08-01 1999-12-01 Motorola, Inc. Bogen-Unterdrückungsvorrichtung für eine Feldemissionsvorrichtung
US5826160A (en) * 1995-08-14 1998-10-20 The United States Of America As Represented By The Secretary Of The Army Hot explosive consolidation of refractory metal and alloys
US5719406A (en) * 1996-10-08 1998-02-17 Motorola, Inc. Field emission device having a charge bleed-off barrier

Also Published As

Publication number Publication date
JP3954710B2 (ja) 2007-08-08
CN1193834A (zh) 1998-09-23
EP0848406B1 (de) 2002-07-31
DE69714392D1 (de) 2002-09-05
KR19980063544A (ko) 1998-10-07
EP0848406A2 (de) 1998-06-17
US5696385A (en) 1997-12-09
JPH10177838A (ja) 1998-06-30
CN1155979C (zh) 2004-06-30
US5821132A (en) 1998-10-13
TW358955B (en) 1999-05-21
KR100441184B1 (ko) 2004-12-29
EP0848406A3 (de) 1998-08-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee