DE69708711T2 - Verfahren zur Herstellung von Stickstofftrifluorid - Google Patents

Verfahren zur Herstellung von Stickstofftrifluorid

Info

Publication number
DE69708711T2
DE69708711T2 DE69708711T DE69708711T DE69708711T2 DE 69708711 T2 DE69708711 T2 DE 69708711T2 DE 69708711 T DE69708711 T DE 69708711T DE 69708711 T DE69708711 T DE 69708711T DE 69708711 T2 DE69708711 T2 DE 69708711T2
Authority
DE
Germany
Prior art keywords
production
nitrogen trifluoride
trifluoride
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69708711T
Other languages
English (en)
Other versions
DE69708711D1 (de
Inventor
Daniel Gene Coronell
Thomas Hsiao-Ling Hsiung
Withers, Jr
Andrew Joseph Woytek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE69708711D1 publication Critical patent/DE69708711D1/de
Publication of DE69708711T2 publication Critical patent/DE69708711T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/194—Preparation from ammonium fluoride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
DE69708711T 1996-01-30 1997-01-29 Verfahren zur Herstellung von Stickstofftrifluorid Expired - Lifetime DE69708711T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/593,779 US5637285A (en) 1996-01-30 1996-01-30 Process for nitrogen trifluoride synthesis

Publications (2)

Publication Number Publication Date
DE69708711D1 DE69708711D1 (de) 2002-01-17
DE69708711T2 true DE69708711T2 (de) 2002-05-08

Family

ID=24376142

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69708711T Expired - Lifetime DE69708711T2 (de) 1996-01-30 1997-01-29 Verfahren zur Herstellung von Stickstofftrifluorid

Country Status (8)

Country Link
US (1) US5637285A (de)
EP (1) EP0787684B1 (de)
JP (1) JP2929577B2 (de)
KR (1) KR100235516B1 (de)
CA (1) CA2195908C (de)
DE (1) DE69708711T2 (de)
ES (1) ES2169281T3 (de)
ZA (1) ZA97691B (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3727797B2 (ja) * 1998-05-22 2005-12-14 セントラル硝子株式会社 三フッ化窒素の製造方法
JP4508356B2 (ja) * 2000-05-12 2010-07-21 昭和電工株式会社 三フッ化窒素の製造方法及びその用途
CN1213943C (zh) * 2000-05-12 2005-08-10 昭和电工株式会社 生产三氟化氮的方法及其应用
US6986874B2 (en) * 2000-12-14 2006-01-17 The Boc Group, Inc. Method and apparatus for the production of nitrogen trifluoride
RU2184698C1 (ru) * 2001-05-08 2002-07-10 Закрытое акционерное общество Научно-производственное объединение "ПиМ-Инвест" Способ получения трифторида азота
RU2178384C1 (ru) * 2001-05-11 2002-01-20 Общество с ограниченной ответственностью "НьюКем" Способ получения фторидов азота
KR20030021661A (ko) * 2001-09-07 2003-03-15 대백신소재주식회사 삼불화 질소 가스의 제조 방법
US6908601B2 (en) * 2002-02-08 2005-06-21 The Boc Group, Inc. Method for the production of nitrogen trifluoride
US6790428B2 (en) * 2002-03-20 2004-09-14 Air Products And Chemicals, Inc. Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride
WO2003088314A2 (en) * 2002-04-12 2003-10-23 Arch Specialty Chemicals, Inc. Remote monitoring system for chemical liquid delivery
KR100452233B1 (ko) * 2002-07-19 2004-10-12 한국과학기술연구원 젯트루프식 분사형 반응기를 이용한 삼불화질소 제조방법
EP1433747B1 (de) * 2002-11-19 2011-05-18 Air Products And Chemicals, Inc. Verfahren zur Herstellung von Stickstofftrifluorid
US20040096386A1 (en) * 2002-11-19 2004-05-20 Syvret Robert George Method for nitrogen trifluoride production
US7128885B2 (en) * 2002-12-23 2006-10-31 The Boc Group, Inc. NF3 production reactor
US7074378B2 (en) * 2004-01-23 2006-07-11 Air Products And Chemicals, Inc. Process for the purification of NF3
US7395823B2 (en) * 2004-04-09 2008-07-08 The Boc Group, Inc. Method and apparatus for local fluorine and nitrogen trifluoride production
US7045107B2 (en) 2004-09-20 2006-05-16 Air Products And Chemicals, Inc. Process for the production of nitrogen trifluoride
JP5034322B2 (ja) * 2005-07-06 2012-09-26 セントラル硝子株式会社 ハロゲン化窒素の合成方法
US7413722B2 (en) * 2005-08-04 2008-08-19 Foosung Co., Ltd. Method and apparatus for manufacturing nitrogen trifluoride
JP2010018849A (ja) * 2008-07-10 2010-01-28 Permelec Electrode Ltd 三フッ化窒素の電解合成方法
JP2010138029A (ja) * 2008-12-11 2010-06-24 Central Glass Co Ltd Ｎｆ３又は塩化フッ素化合物の製造方法
US8163262B1 (en) 2011-01-04 2012-04-24 Omotowa Bamidele A Method for production of nitrogen trifluoride from trimethylsilylamines

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961024A (en) * 1963-06-18 1976-06-01 Allied Chemical Corporation Fluoro compound production
US4091081A (en) * 1977-04-19 1978-05-23 Air Products And Chemicals, Inc. Preparation of nitrogen trifluoride
JPS6071503A (ja) * 1983-09-27 1985-04-23 Central Glass Co Ltd Νｆ↓３の製造法
JPH0225512A (ja) * 1988-07-14 1990-01-29 Nkk Corp 電気炉の底吹き用羽口
JPH02255511A (ja) * 1989-03-28 1990-10-16 Asahi Glass Co Ltd 三フッ化窒素製造用反応器
JPH02255513A (ja) * 1989-03-28 1990-10-16 Asahi Glass Co Ltd 三フッ化窒素の製造方法
JP2863574B2 (ja) * 1989-11-27 1999-03-03 関東電化工業株式会社 三フッ化窒素の製造方法
JP2930351B2 (ja) * 1990-02-06 1999-08-03 関東電化工業株式会社 Ｎｆ▲下３▼の製造法

Also Published As

Publication number Publication date
ES2169281T3 (es) 2002-07-01
CA2195908C (en) 1999-11-09
ZA97691B (en) 1998-07-28
KR970059088A (ko) 1997-08-12
JPH09221307A (ja) 1997-08-26
CA2195908A1 (en) 1997-07-31
KR100235516B1 (ko) 1999-12-15
US5637285A (en) 1997-06-10
EP0787684B1 (de) 2001-12-05
EP0787684A3 (de) 1998-03-11
DE69708711D1 (de) 2002-01-17
MX9700756A (es) 1997-07-31
EP0787684A2 (de) 1997-08-06
JP2929577B2 (ja) 1999-08-03

Similar Documents

Publication Publication Date Title
DE69704964D1 (de) Verfahren zur Herstellung von Acryloxypropylsilane
DE69708711T2 (de) Verfahren zur Herstellung von Stickstofftrifluorid
DE69611658D1 (de) Verfahren zur Herstellung von Ethylenglykol
DE69713022T2 (de) Verfahren zur Herstellung von Unterkleidung
DE69715578D1 (de) Verfahren zur Herstellung von Molekularsieben
DE69407536T2 (de) Verfahren zur Herstellung von Methanol
DE69705738T2 (de) Verfahren zur herstellung von benzylethern
DE69618022T2 (de) Verfahren zur Herstellung von Schleifmitteln
DE59707913D1 (de) Kontinuierliches Verfahren zur Herstellung von gamma- Aminopropyltrialkoxysilanen
DE69305323T3 (de) Verfahren zur Herstellung von Äthylen-Propylen-Blockcopolymeren
DE69424024D1 (de) Verfahren zur Herstellung von Laktamen
DE69708508T2 (de) Verfahren zur Herstellung von geschweissten Strukturen
DE69522877D1 (de) Verfahren zur Herstellung von hochreinem Stickstoff
DE69711706T2 (de) Verfahren zur Herstellung von lichthärtbaren Formkörpern
DE59606220D1 (de) Verfahren zur Herstellung von Hohlkörpern
DE69714668D1 (de) Verfahren zur Herstellung von Olefinplanen
DE69707085D1 (de) Verfahren zur Herstellung von Homocystin
DE59705601D1 (de) Verfahren zur Herstellung von Siliciumdioxid
DE69700508T2 (de) Verfahren zur Herstellung von Organodisilanen
DE69702339D1 (de) Verfahren zur herstellung von cellulosealkanoatacetoacetaten
DE69713701D1 (de) Verfahren zur Herstellung von 3-Methyltetrahydrofuran
DE69708002D1 (de) Verfahren zur Herstellung von alpha-Brom,omega-Chloralkanen
DE69707373D1 (de) Verfahren zur Herstellung von Epsilon-Caprolacton
DE59700569D1 (de) Verfahren zur Herstellung von Polyacrylaten
DE59403845D1 (de) Verfahren zur Herstellung von gamma-Vinylpyrrolidonen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition