DE69700554D1 - Siliziumscheibe mit auf einer Oberfläche gestapelten polykristallinen Siliziumschichten,und ihr Herstellungsverfahren - Google Patents
Siliziumscheibe mit auf einer Oberfläche gestapelten polykristallinen Siliziumschichten,und ihr HerstellungsverfahrenInfo
- Publication number
- DE69700554D1 DE69700554D1 DE69700554T DE69700554T DE69700554D1 DE 69700554 D1 DE69700554 D1 DE 69700554D1 DE 69700554 T DE69700554 T DE 69700554T DE 69700554 T DE69700554 T DE 69700554T DE 69700554 D1 DE69700554 D1 DE 69700554D1
- Authority
- DE
- Germany
- Prior art keywords
- production process
- layers stacked
- silicon wafer
- polycrystalline silicon
- silicon layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12528—Semiconductor component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12674—Ge- or Si-base component
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP09937196A JP3391184B2 (ja) | 1996-03-28 | 1996-03-28 | シリコンウエーハおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69700554D1 true DE69700554D1 (de) | 1999-11-04 |
DE69700554T2 DE69700554T2 (de) | 2000-04-13 |
Family
ID=14245690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69700554T Expired - Fee Related DE69700554T2 (de) | 1996-03-28 | 1997-03-26 | Siliziumscheibe mit auf einer Oberfläche gestapelten polykristallinen Siliziumschichten,und ihr Herstellungsverfahren |
Country Status (6)
Country | Link |
---|---|
US (1) | US5863659A (de) |
EP (1) | EP0798770B1 (de) |
JP (1) | JP3391184B2 (de) |
DE (1) | DE69700554T2 (de) |
MY (1) | MY132487A (de) |
TW (1) | TW387115B (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3090201B2 (ja) * | 1997-06-04 | 2000-09-18 | 日本電気株式会社 | 多結晶シリコン膜及び半導体装置 |
US6479166B1 (en) | 1998-10-06 | 2002-11-12 | Case Western Reserve University | Large area polysilicon films with predetermined stress characteristics and method for producing same |
US6268068B1 (en) * | 1998-10-06 | 2001-07-31 | Case Western Reserve University | Low stress polysilicon film and method for producing same |
JP2002231665A (ja) * | 2001-02-06 | 2002-08-16 | Sumitomo Metal Ind Ltd | エピタキシャル膜付き半導体ウエーハの製造方法 |
US8846500B2 (en) | 2010-12-13 | 2014-09-30 | Semiconductor Components Industries, Llc | Method of forming a gettering structure having reduced warpage and gettering a semiconductor wafer therewith |
JP6100200B2 (ja) * | 2014-04-24 | 2017-03-22 | 信越半導体株式会社 | 貼り合わせsoiウェーハの製造方法 |
JP6118757B2 (ja) * | 2014-04-24 | 2017-04-19 | 信越半導体株式会社 | 貼り合わせsoiウェーハの製造方法 |
JP6353814B2 (ja) * | 2015-06-09 | 2018-07-04 | 信越半導体株式会社 | 貼り合わせsoiウェーハの製造方法 |
CN113035688B (zh) * | 2019-12-09 | 2023-02-28 | 华润微电子(重庆)有限公司 | 一种半导体结构及其制作方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4053335A (en) * | 1976-04-02 | 1977-10-11 | International Business Machines Corporation | Method of gettering using backside polycrystalline silicon |
US4608096A (en) * | 1983-04-04 | 1986-08-26 | Monsanto Company | Gettering |
US5189508A (en) * | 1988-03-30 | 1993-02-23 | Nippon Steel Corporation | Silicon wafer excelling in gettering ability and method for production thereof |
JPH07120657B2 (ja) * | 1988-04-05 | 1995-12-20 | 三菱電機株式会社 | 半導体基板 |
JP3063143B2 (ja) * | 1990-10-29 | 2000-07-12 | 日本電気株式会社 | Si基板の製造方法 |
JP2649876B2 (ja) * | 1991-05-08 | 1997-09-03 | 三菱電機株式会社 | 基 板 |
DE4304849C2 (de) * | 1992-02-21 | 2000-01-27 | Mitsubishi Electric Corp | Halbleitervorrichtung und Verfahren zur Herstellung einer Halbleitervorrichtung |
JPH0722428A (ja) * | 1993-06-30 | 1995-01-24 | Sony Corp | シリコンウェハの製造方法及びシリコンウェハ |
JP3232168B2 (ja) * | 1993-07-02 | 2001-11-26 | 三菱電機株式会社 | 半導体基板およびその製造方法ならびにその半導体基板を用いた半導体装置 |
-
1996
- 1996-03-28 JP JP09937196A patent/JP3391184B2/ja not_active Expired - Fee Related
-
1997
- 1997-03-24 TW TW086103676A patent/TW387115B/zh not_active IP Right Cessation
- 1997-03-24 US US08/826,440 patent/US5863659A/en not_active Expired - Fee Related
- 1997-03-26 DE DE69700554T patent/DE69700554T2/de not_active Expired - Fee Related
- 1997-03-26 EP EP97302060A patent/EP0798770B1/de not_active Expired - Lifetime
- 1997-03-27 MY MYPI97001321A patent/MY132487A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP3391184B2 (ja) | 2003-03-31 |
TW387115B (en) | 2000-04-11 |
MY132487A (en) | 2007-10-31 |
DE69700554T2 (de) | 2000-04-13 |
EP0798770A3 (de) | 1998-02-25 |
EP0798770A2 (de) | 1997-10-01 |
EP0798770B1 (de) | 1999-09-29 |
JPH09266213A (ja) | 1997-10-07 |
US5863659A (en) | 1999-01-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |