DE69629475D1 - Tapping-modus-atomkraftmikroskop mit phasen- oder frequenzdetektion - Google Patents

Tapping-modus-atomkraftmikroskop mit phasen- oder frequenzdetektion

Info

Publication number
DE69629475D1
DE69629475D1 DE69629475T DE69629475T DE69629475D1 DE 69629475 D1 DE69629475 D1 DE 69629475D1 DE 69629475 T DE69629475 T DE 69629475T DE 69629475 T DE69629475 T DE 69629475T DE 69629475 D1 DE69629475 D1 DE 69629475D1
Authority
DE
Germany
Prior art keywords
phase
nuclear power
frequency detection
tapping mode
power microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69629475T
Other languages
English (en)
Other versions
DE69629475T2 (de
Inventor
B Elings
A Gurley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Digital Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23503927&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69629475(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Digital Instruments Inc filed Critical Digital Instruments Inc
Application granted granted Critical
Publication of DE69629475D1 publication Critical patent/DE69629475D1/de
Publication of DE69629475T2 publication Critical patent/DE69629475T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
DE69629475T 1995-01-31 1996-01-31 Tapping-modus-atomkraftmikroskop mit phasen- oder frequenzdetektion Expired - Lifetime DE69629475T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US381159 1989-07-17
US08/381,159 US5519212A (en) 1992-08-07 1995-01-31 Tapping atomic force microscope with phase or frequency detection
PCT/US1996/001543 WO1996024026A1 (en) 1995-01-31 1996-01-31 Tapping atomic force microscope with phase or frequency detection

Publications (2)

Publication Number Publication Date
DE69629475D1 true DE69629475D1 (de) 2003-09-18
DE69629475T2 DE69629475T2 (de) 2004-06-09

Family

ID=23503927

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69629475T Expired - Lifetime DE69629475T2 (de) 1995-01-31 1996-01-31 Tapping-modus-atomkraftmikroskop mit phasen- oder frequenzdetektion

Country Status (5)

Country Link
US (1) US5519212A (de)
EP (1) EP0839312B1 (de)
JP (1) JP3266267B2 (de)
DE (1) DE69629475T2 (de)
WO (1) WO1996024026A1 (de)

Families Citing this family (98)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE36488E (en) * 1992-08-07 2000-01-11 Veeco Instruments Inc. Tapping atomic force microscope with phase or frequency detection
JP3523688B2 (ja) * 1994-07-06 2004-04-26 オリンパス株式会社 試料測定用プローブ装置
JP3229914B2 (ja) * 1994-12-12 2001-11-19 日本電子株式会社 走査型プローブ顕微鏡
US5936237A (en) * 1995-07-05 1999-08-10 Van Der Weide; Daniel Warren Combined topography and electromagnetic field scanning probe microscope
US5874668A (en) 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
US5700953A (en) * 1996-04-03 1997-12-23 University Of Utah Research Foundation Method for mapping mechanical property of a material using a scanning force microscope
DE19646120C2 (de) * 1996-06-13 2001-07-26 Ibm Mikromechanischer Sensor für die AFM/STM Profilometrie
US5874734A (en) * 1996-12-31 1999-02-23 Elings; Virgil B. Atomic force microscope for measuring properties of dielectric and insulating layers
US5866807A (en) * 1997-02-04 1999-02-02 Digital Instruments Method and apparatus for measuring mechanical properties on a small scale
US5763768A (en) * 1997-03-17 1998-06-09 Iowa State University Research Foundation, Inc. Analytical method using modified scanning probes
US5801381A (en) * 1997-05-21 1998-09-01 International Business Machines Corporation Method for protecting a probe tip using active lateral scanning control
US6246054B1 (en) 1997-06-10 2001-06-12 Olympus Optical Co., Ltd. Scanning probe microscope suitable for observing the sidewalls of steps in a specimen and measuring the tilt angle of the sidewalls
DE19728357C2 (de) * 1997-07-03 2001-09-27 Martin Munz Vorrichtung und Verfahren in der kontaktierenden Rasterkraftmikroskopie mit periodischer Modulation der Auflagekraft zur Messung der lokalen elastischen und anelastischen Eigenschaften von Oberflächen unter Konstanthaltung der Deformation im Kontaktbereich von Meßsonde und Probenoberfläche
JPH1130619A (ja) * 1997-07-11 1999-02-02 Jeol Ltd 走査プローブ顕微鏡
US6038916A (en) * 1997-07-22 2000-03-21 Digital Instruments Method and apparatus for measuring energy dissipation by a probe during operation of an atomic force microscope
JP3278046B2 (ja) * 1997-07-29 2002-04-30 セイコーインスツルメンツ株式会社 ３次元走査プローブ顕微鏡
US5898106A (en) * 1997-09-25 1999-04-27 Digital Instruments, Inc. Method and apparatus for obtaining improved vertical metrology measurements
JPH11160333A (ja) * 1997-11-25 1999-06-18 Jeol Ltd 走査プローブ顕微鏡
US6008489A (en) * 1997-12-03 1999-12-28 Digital Instruments Method for improving the operation of oscillating mode atomic force microscopes
US6518570B1 (en) * 1998-04-03 2003-02-11 Brookhaven Science Associates Sensing mode atomic force microscope
US5992226A (en) * 1998-05-08 1999-11-30 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for measuring intermolecular interactions by atomic force microscopy
US6121611A (en) * 1998-05-20 2000-09-19 Molecular Imaging Corporation Force sensing probe for scanning probe microscopy
US6744268B2 (en) * 1998-08-27 2004-06-01 The Micromanipulator Company, Inc. High resolution analytical probe station
US6198299B1 (en) 1998-08-27 2001-03-06 The Micromanipulator Company, Inc. High Resolution analytical probe station
US6280939B1 (en) 1998-09-01 2001-08-28 Veeco Instruments, Inc. Method and apparatus for DNA sequencing using a local sensitive force detector
GB9819319D0 (en) * 1998-09-05 1998-10-28 Aea Technology Plc Assay of chemical binding
US6357285B1 (en) 1998-11-09 2002-03-19 Veeco Instruments Inc. Method and apparatus for the quantitative and objective correlation of data from a local sensitive force detector
US20010013574A1 (en) * 1998-11-10 2001-08-16 Oden L. Warren Intermittent contact imaging under force-feedback control
DE19900114B4 (de) * 1999-01-05 2005-07-28 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Verfahren und Vorrichtung zur gleichzeitigen Bestimmung zumindest zweier Materialeigenschaften einer Probenoberfläche, umfassend die Adhäsion, die Reibung, die Oberflächentopographie sowie die Elastizität und Steifigkeit
US20060156798A1 (en) * 2003-12-22 2006-07-20 Vladimir Mancevski Carbon nanotube excitation system
AU2870700A (en) * 1999-02-05 2000-08-25 Xidex Corporation System and method of multi-dimensional force sensing for atomic force microscopy
US6672144B2 (en) * 1999-03-29 2004-01-06 Veeco Instruments Inc. Dynamic activation for an atomic force microscope and method of use thereof
US6189374B1 (en) * 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof
US6452170B1 (en) 1999-04-08 2002-09-17 University Of Puerto Rico Scanning force microscope to determine interaction forces with high-frequency cantilever
US20020042081A1 (en) * 2000-10-10 2002-04-11 Eric Henderson Evaluating binding affinities by force stratification and force panning
US20030186311A1 (en) * 1999-05-21 2003-10-02 Bioforce Nanosciences, Inc. Parallel analysis of molecular interactions
US20030073250A1 (en) * 1999-05-21 2003-04-17 Eric Henderson Method and apparatus for solid state molecular analysis
US6573369B2 (en) * 1999-05-21 2003-06-03 Bioforce Nanosciences, Inc. Method and apparatus for solid state molecular analysis
US6185992B1 (en) 1999-07-15 2001-02-13 Veeco Instruments Inc. Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
WO2001006296A1 (en) 1999-07-20 2001-01-25 Martin Moskovits High q-factor micro tuning fork by thin optical fiber for nsom
DE10003693A1 (de) * 2000-01-28 2001-08-02 Zeiss Carl Abtastsystem mit auslenkbarer Tastspitze
US6897015B2 (en) * 2000-03-07 2005-05-24 Bioforce Nanosciences, Inc. Device and method of use for detection and characterization of pathogens and biological materials
US6437562B2 (en) 2000-03-27 2002-08-20 Kabushiki Kaisha Toshiba Magnetic field characteristics evaluation apparatus and magnetic field characteristics measuring method
US6441371B1 (en) 2000-04-03 2002-08-27 Korea Institute Of Science And Technology Scanning probe microscope
FR2810111B1 (fr) * 2000-06-09 2004-04-02 Univ Haute Alsace Dispositif pour evaluer l'etat de surface d'un materiau et procede de mise en oeuvre dudit dispositif
JP2004538443A (ja) * 2000-08-15 2004-12-24 バイオフォース ナノサイエンシズ インコーポレイテッド ナノスケール分子配列装置
JP2002107285A (ja) * 2000-09-29 2002-04-10 Jeol Ltd 磁気力顕微鏡
CN100380124C (zh) * 2000-10-09 2008-04-09 拜澳富斯毫微科学有限公司 通过力分层和力扫视评价结合力
US7877816B2 (en) * 2000-12-13 2011-01-25 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Scanning probe in pulsed-force mode, digital and in real time
DE10062049A1 (de) * 2000-12-13 2002-06-27 Witec Wissenschaftliche Instr Verfahren zur Abbildung einer Probenoberfläche mit Hilfe einer Rastersonde sowie Rastersondenmikroskop
US6590208B2 (en) * 2001-01-19 2003-07-08 Veeco Instruments Inc. Balanced momentum probe holder
US6612160B2 (en) * 2001-03-09 2003-09-02 Veeco Instruments, Inc. Apparatus and method for isolating and measuring movement in metrology apparatus
AU2002329606A1 (en) * 2001-07-17 2003-03-03 Bioforce Nanosciences, Inc. Combined molecular blinding detection through force microscopy and mass spectrometry
US7042488B2 (en) 2001-09-27 2006-05-09 Fujinon Corporation Electronic endoscope for highlighting blood vessel
JP3961258B2 (ja) * 2001-10-10 2007-08-22 株式会社ミツトヨ タッチセンサ、および微細形状測定装置用プローブ
DE10208800A1 (de) * 2002-03-01 2003-09-18 Harald Fuchs Haftsensor zur berührungsfreien Messung der Haftungseigenschaften von Oberflächen
US6977379B2 (en) * 2002-05-10 2005-12-20 Rensselaer Polytechnic Institute T-ray Microscope
US20050239193A1 (en) * 2002-05-30 2005-10-27 Bioforce Nanosciences, Inc. Device and method of use for detection and characterization of microorganisms and microparticles
US7473887B2 (en) * 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
US6952952B2 (en) * 2002-11-01 2005-10-11 Molecular Imaging Corporation Topography and recognition imaging atomic force microscope and method of operation
AU2003303160A1 (en) * 2002-12-18 2004-07-14 Asylum Research Corporation Fully digital controller for cantilever-based instruments
AU2003300156A1 (en) * 2003-01-02 2004-07-29 Bioforce Nanoscience, Inc. Method and apparatus for molecular analysis in small sample volumes
US7521257B2 (en) * 2003-02-11 2009-04-21 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno Chemical sensor with oscillating cantilevered probe and mechanical stop
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US7055378B2 (en) * 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
DE10346286B3 (de) 2003-10-06 2005-04-14 J. Eberspächer GmbH & Co. KG Abgasreinigungsanordnung
US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
US7146034B2 (en) * 2003-12-09 2006-12-05 Superpower, Inc. Tape manufacturing system
US6935167B1 (en) 2004-03-15 2005-08-30 The Board Of Trustees Of The Leland Stanford Junior University Harmonic cantilevers and imaging methods for atomic force microscopy
US7596990B2 (en) * 2004-04-14 2009-10-06 Veeco Instruments, Inc. Method and apparatus for obtaining quantitative measurements using a probe based instrument
US7089787B2 (en) * 2004-07-08 2006-08-15 Board Of Trustees Of The Leland Stanford Junior University Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy
GB2437753B8 (en) 2004-10-01 2009-05-20 Nevada System Of Higher Education Cantilevered probe detector with piezoelectric element
DE502005003509D1 (de) * 2004-11-19 2008-05-08 Ebm Papst St Georgen Gmbh & Co Anordnung mit einem luefter und einer pumpe
JP4699748B2 (ja) * 2004-12-16 2011-06-15 エスアイアイ・ナノテクノロジー株式会社 微細加工装置及び微細加工方法
US20060213289A1 (en) * 2005-03-24 2006-09-28 Kjoller Kevin J Probe for a scanning probe microscope and method of manufacture
CN1322323C (zh) * 2005-04-22 2007-06-20 清华大学 一种多模式原子力探针扫描系统
ES2264647B1 (es) * 2005-06-24 2007-12-01 Consejo Superior Investigaciones Cientificas Metodo de utilizacion de un microscopio de fuerzas atomicas y microscopio.
US7451646B2 (en) * 2005-07-28 2008-11-18 The Regents Of The University Of California Device and method for resonant high-speed microscopic impedance probe
WO2008042009A1 (en) * 2006-03-13 2008-04-10 Asylum Research Corporation Nanoindenter
US7603891B2 (en) * 2006-04-25 2009-10-20 Asylum Research Corporation Multiple frequency atomic force microscopy
KR100761059B1 (ko) * 2006-09-29 2007-09-21 파크시스템스 주식회사 오버행 샘플 측정이 가능한 주사 탐침 현미경
US8024963B2 (en) * 2006-10-05 2011-09-27 Asylum Research Corporation Material property measurements using multiple frequency atomic force microscopy
JP5156251B2 (ja) * 2007-03-30 2013-03-06 Ｈｏｙａ株式会社 蒸着膜評価方法およびそれを用いる眼鏡レンズの製造方法
US7856866B2 (en) * 2007-09-06 2010-12-28 University Of Maryland Method of operating an atomic force microscope in tapping mode with a reduced impact force
US8849611B2 (en) * 2007-11-27 2014-09-30 Intermodulation Products Ab Intermodulation scanning force spectroscopy
US8955161B2 (en) 2008-11-13 2015-02-10 Bruker Nano, Inc. Peakforce photothermal-based detection of IR nanoabsorption
CN102439462B (zh) 2008-11-13 2015-07-22 布鲁克纳米公司 操作扫描探针显微镜的方法和装置
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
EP2409165A1 (de) 2009-03-16 2012-01-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Rasterkraftmikroskop
WO2012057723A1 (en) 2009-10-22 2012-05-03 Proksch, Roger Thermal measurements using multiple frequency atomic force microscopy
US8689358B2 (en) * 2010-06-28 2014-04-01 International Business Machines Corporation Dynamic mode nano-scale imaging and position control using deflection signal direct sampling of higher mode-actuated microcantilevers
WO2012104625A1 (en) 2011-01-31 2012-08-09 Infinitesima Limited Adaptive mode scanning probe microscope
JP2014062864A (ja) * 2012-09-24 2014-04-10 Hitachi High-Technologies Corp 熱アシスト磁気ヘッド素子の検査方法及びその装置
US9110092B1 (en) 2013-04-09 2015-08-18 NT-MDT Development Inc. Scanning probe based apparatus and methods for low-force profiling of sample surfaces and detection and mapping of local mechanical and electromagnetic properties in non-resonant oscillatory mode
US9097737B2 (en) 2013-11-25 2015-08-04 Oxford Instruments Asylum Research, Inc. Modular atomic force microscope with environmental controls
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
US10845382B2 (en) 2016-08-22 2020-11-24 Bruker Nano, Inc. Infrared characterization of a sample using oscillating mode
WO2019144128A2 (en) * 2018-01-22 2019-07-25 Lehigh University System and method for a non-tapping mode scattering-type scanning near-field optical microscopy

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5212987A (en) * 1988-06-16 1993-05-25 Hommelwerke Gmbh Acoustic screen scan microscope for the examination of an object in the short-range field of a resonant acoustic oscillator
US4935634A (en) * 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
GB8910566D0 (en) * 1989-05-08 1989-06-21 Amersham Int Plc Imaging apparatus and method
US5229606A (en) * 1989-06-05 1993-07-20 Digital Instruments, Inc. Jumping probe microscope
US5266801A (en) * 1989-06-05 1993-11-30 Digital Instruments, Inc. Jumping probe microscope
US5254854A (en) * 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi Ltd Verfahren und Vorrichtung zum Beobachten einer Fläche
US5408094A (en) * 1992-05-07 1995-04-18 Olympus Optical Co., Ltd. Atomic force microscope with light beam emission at predetermined angle
US5412980A (en) * 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
US5372930A (en) * 1992-09-16 1994-12-13 The United States Of America As Represented By The Secretary Of The Navy Sensor for ultra-low concentration molecular recognition
US5347854A (en) * 1992-09-22 1994-09-20 International Business Machines Corporation Two dimensional profiling with a contact force atomic force microscope
US5308974B1 (en) * 1992-11-30 1998-01-06 Digital Instr Inc Scanning probe microscope using stored data for vertical probe positioning
US5406832A (en) * 1993-07-02 1995-04-18 Topometrix Corporation Synchronous sampling scanning force microscope

Also Published As

Publication number Publication date
US5519212A (en) 1996-05-21
JPH10507000A (ja) 1998-07-07
EP0839312B1 (de) 2003-08-13
DE69629475T2 (de) 2004-06-09
EP0839312A4 (de) 1998-05-06
EP0839312A1 (de) 1998-05-06
WO1996024026A1 (en) 1996-08-08
JP3266267B2 (ja) 2002-03-18

Similar Documents

Publication Publication Date Title
DE69629475D1 (de) Tapping-modus-atomkraftmikroskop mit phasen- oder frequenzdetektion
DE69415090T2 (de) Taktgeneratorsystem mit Mehrfachfrequenz am Ausgang
DE9490479U1 (de) Hochfrequenzleistungsmessung
DE69432239D1 (de) Bildfelddetektion
DE69529960T2 (de) Phasendetektor mit ternärem Ausgang
DE69400935D1 (de) Leistungswechselrichter-Einrichtung
DE69526265T2 (de) Vollwellengleichrichter mit dynamischer Vorspannungsregelung
DE69411991T2 (de) Leistungsaufteilungsdetektor
DE69430939D1 (de) Intelligentes Leistungsbauelement
DE69617275T2 (de) Oszillator mit niedriger Leistung
FI954297A (fi) Tehomittari
FI954296A0 (fi) Parannettu tehomittari
DE59410139D1 (de) Rastersondenmikroskop mit detektorsonde
DE69403232D1 (de) Flüssigkristalline Polyester
DE69502120D1 (de) Phasen-Kontrast-Haploskop mit Drehscheibe
DE69503324D1 (de) Uhrwerk mit elektroakustischem Umsetzer
DE69617384D1 (de) Stromschaltende schaltungen
DE69417182T2 (de) Flüssigkristalline Polyester
DE69408688T2 (de) Energiespeicher - schwungrad
DE29606700U1 (de) Verbraucherzähler mit magnetischem Impulsgeber
KR940021174U (ko) 동전 수집함의 개폐장치
KR970045237U (ko) 인버터 역률 측정 장치
KR960008957U (ko) 지능 변환장치
KR960032233U (ko) 와류발생기를 구비한 냉장고 착상판
NO930031D0 (no) Fremgangsmaate for maaling av stroemstyrke

Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8327 Change in the person/name/address of the patent owner

Owner name: VEECO INSTRUMENTS INC., PLAINVIEW, N.Y., US