DE69619717T2 - Verbesserte Schlitzventiltür - Google Patents
Verbesserte SchlitzventiltürInfo
- Publication number
- DE69619717T2 DE69619717T2 DE69619717T DE69619717T DE69619717T2 DE 69619717 T2 DE69619717 T2 DE 69619717T2 DE 69619717 T DE69619717 T DE 69619717T DE 69619717 T DE69619717 T DE 69619717T DE 69619717 T2 DE69619717 T2 DE 69619717T2
- Authority
- DE
- Germany
- Prior art keywords
- valve door
- slit valve
- improved slit
- improved
- door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/06—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials
- H01L21/08—Preparation of the foundation plate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Gasket Seals (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/414,420 US5579718A (en) | 1995-03-31 | 1995-03-31 | Slit valve door |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69619717D1 DE69619717D1 (de) | 2002-04-18 |
DE69619717T2 true DE69619717T2 (de) | 2002-11-07 |
Family
ID=23641384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69619717T Expired - Fee Related DE69619717T2 (de) | 1995-03-31 | 1996-03-29 | Verbesserte Schlitzventiltür |
Country Status (5)
Country | Link |
---|---|
US (1) | US5579718A (de) |
EP (2) | EP0735574B1 (de) |
JP (1) | JPH1050791A (de) |
KR (1) | KR100371996B1 (de) |
DE (1) | DE69619717T2 (de) |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5656082A (en) * | 1994-04-04 | 1997-08-12 | Tatsumo Kabushiki Kaisha | Liquid applying apparatus utilizing centrifugal force |
KR960002534A (ko) * | 1994-06-07 | 1996-01-26 | 이노우에 아키라 | 감압·상압 처리장치 |
US5746434A (en) * | 1996-07-09 | 1998-05-05 | Lam Research Corporation | Chamber interfacing O-rings and method for implementing same |
US6032419A (en) * | 1997-04-08 | 2000-03-07 | Tokyo Electron Limited | Vacuum processing apparatus with low particle generating vacuum seal |
US6089543A (en) * | 1997-07-11 | 2000-07-18 | Applied Materials, Inc. | Two-piece slit valve door with molded-in-place seal for a vacuum processing system |
US6056267A (en) * | 1998-05-19 | 2000-05-02 | Applied Materials, Inc. | Isolation valve with extended seal life |
US6192827B1 (en) * | 1998-07-03 | 2001-02-27 | Applied Materials, Inc. | Double slit-valve doors for plasma processing |
US6126527A (en) * | 1998-07-10 | 2000-10-03 | Aplex Inc. | Seal for polishing belt center support having a single movable sealed cavity |
US6217272B1 (en) | 1998-10-01 | 2001-04-17 | Applied Science And Technology, Inc. | In-line sputter deposition system |
US6328858B1 (en) | 1998-10-01 | 2001-12-11 | Nexx Systems Packaging, Llc | Multi-layer sputter deposition apparatus |
US6328316B1 (en) | 1999-01-12 | 2001-12-11 | Dupont Dow Elastomers, L.L.C. | Rubber seal for semi-dynamic applications |
US6291814B1 (en) * | 1999-06-04 | 2001-09-18 | Utek Semiconductor Corporation | Slit valve with safety detect device |
US6463203B1 (en) * | 1999-07-29 | 2002-10-08 | Avaya Technology Corp. | High pressure sealed telecommunications equipment enclosure |
US6682288B2 (en) | 2000-07-27 | 2004-01-27 | Nexx Systems Packaging, Llc | Substrate processing pallet and related substrate processing method and machine |
US6530733B2 (en) | 2000-07-27 | 2003-03-11 | Nexx Systems Packaging, Llc | Substrate processing pallet and related substrate processing method and machine |
US6821912B2 (en) | 2000-07-27 | 2004-11-23 | Nexx Systems Packaging, Llc | Substrate processing pallet and related substrate processing method and machine |
WO2003064900A1 (en) | 2002-01-31 | 2003-08-07 | Dupont Dow Elastomers L.L.C. | Gate valve seal assembly |
US6824343B2 (en) * | 2002-02-22 | 2004-11-30 | Applied Materials, Inc. | Substrate support |
US6883776B2 (en) * | 2002-08-20 | 2005-04-26 | Asm America, Inc. | Slit valve for a semiconductor processing system |
TW200407513A (en) * | 2002-11-07 | 2004-05-16 | Wei-Yueh Wu | Gate valve assembly |
US7100954B2 (en) | 2003-07-11 | 2006-09-05 | Nexx Systems, Inc. | Ultra-thin wafer handling system |
US7282097B2 (en) * | 2004-06-14 | 2007-10-16 | Applied Materials, Inc. | Slit valve door seal |
US7422653B2 (en) * | 2004-07-13 | 2008-09-09 | Applied Materials, Inc. | Single-sided inflatable vertical slit valve |
CN1323250C (zh) * | 2005-06-15 | 2007-06-27 | 黄作兴 | 双向四氟密封蝶阀 |
TWI295816B (en) | 2005-07-19 | 2008-04-11 | Applied Materials Inc | Hybrid pvd-cvd system |
US7396001B2 (en) * | 2005-12-20 | 2008-07-08 | Vat Holding Ag | Valve for essentially gastight closing a flow path |
JP4821314B2 (ja) * | 2005-12-26 | 2011-11-24 | ダイキン工業株式会社 | 半導体製造装置用バルブの弁体およびその製造方法 |
WO2008046048A2 (en) * | 2006-10-12 | 2008-04-17 | Parker-Hannifin Corporation | Slit valve door assembly |
US20080191474A1 (en) * | 2007-02-12 | 2008-08-14 | Kotz George J | Tri-Lobed O-Ring Seal |
US7806383B2 (en) * | 2007-06-01 | 2010-10-05 | Applied Materials, Inc. | Slit valve |
US9383036B2 (en) * | 2007-08-14 | 2016-07-05 | Parker-Hannifin Corporation | Bonded slit valve door seal with thin non-metallic film gap control bumper |
WO2009055507A1 (en) * | 2007-10-26 | 2009-04-30 | Applied Materials, Inc. | Methods and apparatus for sealing a slit valve door |
US20090184279A1 (en) * | 2008-01-23 | 2009-07-23 | Buckhorn Rubber Products, Inc. | Wedge and covered insert assembly |
US8011381B2 (en) * | 2008-10-02 | 2011-09-06 | Applied Material, Inc. | Balanced purge slit valve |
US20100127201A1 (en) * | 2008-11-21 | 2010-05-27 | Applied Materials, Inc. | Interlocking valve chamber and lid |
DE102009004493B3 (de) * | 2009-01-09 | 2010-06-10 | Sovello Ag | Vakuumbeschichtungsanlage und Verfahren zum Betrieb einer Vakuumbeschichtungsanlage |
US9010718B2 (en) * | 2009-08-10 | 2015-04-21 | Dean Foote | Seal assembly for a pressure plate in a blowout preventer |
DE102010053411B4 (de) * | 2009-12-15 | 2023-07-06 | Vat Holding Ag | Vakuumventil |
CA2782366A1 (en) | 2009-12-16 | 2011-07-14 | Opko Curna, Llc | Treatment of membrane bound transcription factor peptidase, site 1 (mbtps1) related diseases by inhibition of natural antisense transcript to mbtps1 |
JP4814384B2 (ja) * | 2010-04-05 | 2011-11-16 | 株式会社日立ハイテクノロジーズ | 弁体 |
US10023954B2 (en) | 2011-09-15 | 2018-07-17 | Applied Materials, Inc. | Slit valve apparatus, systems, and methods |
JP2013161887A (ja) * | 2012-02-02 | 2013-08-19 | Toyota Motor Corp | 筐体 |
US20130269599A1 (en) * | 2012-04-13 | 2013-10-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods and Apparatus for Continuous Pressure Control Processing |
ITMI20120694A1 (it) * | 2012-04-26 | 2013-10-27 | Mib Italiana Spa | Valvola di controllo a petali con guarnizione di tenuta per unita' di collegamento separabili per tubi flessibili. |
KR101383668B1 (ko) * | 2012-04-27 | 2014-04-10 | 주식회사 테라세미콘 | 실링부재 및 이를 사용한 기판 처리 장치 |
EP2853351B1 (de) * | 2013-09-27 | 2019-12-25 | Aktiebolaget SKF | Drehanordnung, Verfahren zum Ausbau eines Dichtelements und Ausbauwerkzeug zum Ausbauen eines Dichtelements |
JP6160926B2 (ja) * | 2014-06-05 | 2017-07-12 | Smc株式会社 | ゲートバルブ |
KR101725250B1 (ko) * | 2015-05-04 | 2017-04-11 | 프리시스 주식회사 | 진공밸브용 블레이드 |
US10072776B2 (en) | 2015-08-20 | 2018-09-11 | Deere & Company | Fluid connector with annular groove and seal |
US20170213705A1 (en) * | 2016-01-27 | 2017-07-27 | Applied Materials, Inc. | Slit valve gate coating and methods for cleaning slit valve gates |
JP6388182B1 (ja) * | 2017-07-25 | 2018-09-12 | Smc株式会社 | ゲートバルブの取付構造 |
JP7456993B2 (ja) | 2018-07-19 | 2024-03-27 | アプライド マテリアルズ インコーポレイテッド | シールを行うためのマルチノード複数回使用oリングおよび方法 |
JP7281968B2 (ja) * | 2019-05-30 | 2023-05-26 | 東京エレクトロン株式会社 | アリ溝加工方法及び基板処理装置 |
KR102277809B1 (ko) * | 2019-07-15 | 2021-07-14 | 세메스 주식회사 | 기판 지지 유닛 및 이를 구비하는 기판 처리 시스템 |
KR102617386B1 (ko) * | 2021-10-07 | 2023-12-27 | (주)다산이엔지 | 진공 게이트 밸브 |
CN113932011A (zh) * | 2021-11-23 | 2022-01-14 | 深圳市尊绅投资有限公司 | 一种应用于tft、pecvd工艺的腔体真空传输阀门密封组件 |
US11867307B1 (en) * | 2022-07-28 | 2024-01-09 | Applied Materials, Inc. | Multi-piece slit valve gate |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2870987A (en) * | 1955-07-08 | 1959-01-27 | Dolphice H Greenwood | Gate valve and sealing means therefor |
US3000610A (en) * | 1958-10-13 | 1961-09-19 | Grove Valve & Regulator Co | Valve construction |
JPS5462445A (en) * | 1977-10-28 | 1979-05-19 | Hitachi Ltd | Fitting seal equipment |
US4376526A (en) * | 1980-08-04 | 1983-03-15 | Seaboard Wellhead Control, Inc. | Seal assembly and valve |
JPS6158252A (ja) * | 1984-08-29 | 1986-03-25 | Hitachi Ltd | 真空排気リ−ク装置 |
US4753417A (en) * | 1985-01-28 | 1988-06-28 | The Boc Group, Inc. | Gate valve for vacuum processing apparatus |
DE3602051A1 (de) * | 1986-01-24 | 1987-07-30 | Schaeffler Waelzlager Kg | Waelzlager-drehverbindung |
US4721282A (en) * | 1986-12-16 | 1988-01-26 | Lam Research Corporation | Vacuum chamber gate valve |
US4785962A (en) * | 1987-04-20 | 1988-11-22 | Applied Materials, Inc. | Vacuum chamber slit valve |
US5188402A (en) * | 1989-01-31 | 1993-02-23 | University Of Florida | Gasket apparatus and hermetically sealed joints employing said gasket apparatus |
US5002255A (en) * | 1989-03-03 | 1991-03-26 | Irie Koken Kabushiki Kaisha | Non-sliding gate valve for high vacuum use |
US5120019A (en) * | 1989-08-03 | 1992-06-09 | Brooks Automation, Inc. | Valve |
US5013009A (en) * | 1989-08-04 | 1991-05-07 | Goddard Valve Corporation | Top entry valve |
EP0453867B1 (de) * | 1990-04-20 | 1994-08-10 | Applied Materials, Inc. | Vorrichtung und Verfahren für Schlitzventil |
US5226632A (en) * | 1990-04-20 | 1993-07-13 | Applied Materials, Inc. | Slit valve apparatus and method |
JPH0478377A (ja) * | 1990-07-20 | 1992-03-12 | Tokyo Electron Ltd | トグル式ゲート |
US5275303A (en) * | 1992-02-03 | 1994-01-04 | Applied Materials, Inc. | Valve closure mechanism for semiconductor deposition apparatus |
US5236345A (en) * | 1992-02-11 | 1993-08-17 | Nevrekar Venkatesh R | Expanding gate valve assembly |
US5271602A (en) * | 1992-04-13 | 1993-12-21 | The Japan Steel Works Ltd. | Vacuum gate valve |
US5302120A (en) * | 1992-06-15 | 1994-04-12 | Semitool, Inc. | Door assembly for semiconductor processor |
US5341835A (en) * | 1992-12-14 | 1994-08-30 | Foster Valve Corporation | Lubrication system for valve seat of a gate valve |
US5363872A (en) * | 1993-03-16 | 1994-11-15 | Applied Materials, Inc. | Low particulate slit valve system and method for controlling same |
US5379984A (en) * | 1994-01-11 | 1995-01-10 | Intevac, Inc. | Gate valve for vacuum processing system |
-
1995
- 1995-03-31 US US08/414,420 patent/US5579718A/en not_active Expired - Fee Related
-
1996
- 1996-03-29 EP EP96105015A patent/EP0735574B1/de not_active Expired - Lifetime
- 1996-03-29 DE DE69619717T patent/DE69619717T2/de not_active Expired - Fee Related
- 1996-03-29 EP EP01120661A patent/EP1179835A2/de not_active Withdrawn
- 1996-03-30 KR KR1019960009968A patent/KR100371996B1/ko not_active IP Right Cessation
- 1996-04-01 JP JP8079084A patent/JPH1050791A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0735574B1 (de) | 2002-03-13 |
EP1179835A2 (de) | 2002-02-13 |
EP0735574A1 (de) | 1996-10-02 |
KR960035774A (ko) | 1996-10-28 |
US5579718A (en) | 1996-12-03 |
JPH1050791A (ja) | 1998-02-20 |
KR100371996B1 (ko) | 2003-04-10 |
DE69619717D1 (de) | 2002-04-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69619717T2 (de) | Verbesserte Schlitzventiltür | |
DK1170184T3 (da) | Ventilkonnektor | |
BR9601163A (pt) | Válvula | |
DE59602501D1 (de) | Verschlussteil | |
BR9601068A (pt) | Válvula | |
DE59605738D1 (de) | Türschliesser | |
DE69616587T2 (de) | Schliessvorrichtung | |
DE69612339T2 (de) | Ventilstössel | |
ATA138895A (de) | Sektionaltorblatt | |
DE29604095U1 (de) | Sektionaltor | |
DE29614414U1 (de) | Türblatt | |
DE29501929U1 (de) | Türschließer | |
DE29511323U1 (de) | Türblatt | |
FI952273A0 (fi) | Venttiili | |
DE29607326U1 (de) | Tür | |
DE29518679U1 (de) | Türelement | |
DE29506412U1 (de) | Sektionaltor | |
DE29503474U1 (de) | Sektionaltor | |
DE29514618U1 (de) | Durchgangsschleuse | |
KR960034827U (ko) | 여닫이 문의 문짝 결합구조 | |
DE29513687U1 (de) | Türschließer | |
DE29520067U1 (de) | Schiebetür | |
KR970006092U (ko) | 문짝 | |
KR960037745U (ko) | 문 | |
KR970013998U (ko) | 문틀 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |