DE69618433T2 - Verfahren und Gerät zur Werskstückzufuhr zum Gerät zur Serienverarbeitung von Halbleiterplatten - Google Patents
Verfahren und Gerät zur Werskstückzufuhr zum Gerät zur Serienverarbeitung von HalbleiterplattenInfo
- Publication number
- DE69618433T2 DE69618433T2 DE69618433T DE69618433T DE69618433T2 DE 69618433 T2 DE69618433 T2 DE 69618433T2 DE 69618433 T DE69618433 T DE 69618433T DE 69618433 T DE69618433 T DE 69618433T DE 69618433 T2 DE69618433 T2 DE 69618433T2
- Authority
- DE
- Germany
- Prior art keywords
- serial processing
- semiconductor plates
- supplying workpieces
- workpieces
- supplying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the transport system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by programme execution
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32077—Batch control system
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32078—Calculate process end time, form batch of workpieces and transport to process
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45027—Masking, project image on wafer semiconductor, photo tracer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7305357A JP2702466B2 (ja) | 1995-11-24 | 1995-11-24 | 半導体ウェーハの生産方法及びその生産装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69618433D1 DE69618433D1 (de) | 2002-02-14 |
DE69618433T2 true DE69618433T2 (de) | 2002-11-07 |
Family
ID=17944148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69618433T Expired - Fee Related DE69618433T2 (de) | 1995-11-24 | 1996-11-15 | Verfahren und Gerät zur Werskstückzufuhr zum Gerät zur Serienverarbeitung von Halbleiterplatten |
Country Status (5)
Country | Link |
---|---|
US (1) | US5930137A (de) |
EP (1) | EP0775952B1 (de) |
JP (1) | JP2702466B2 (de) |
CN (1) | CN1117388C (de) |
DE (1) | DE69618433T2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006025406A1 (de) * | 2006-05-31 | 2007-12-06 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zum Steuern von Prozessanlagen durch Unterbrechen von Prozessaufgaben in Abhängigkeit von der Aufgabenpriorität |
DE102006056597A1 (de) * | 2006-11-30 | 2008-06-05 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zum Steuern der Substrathandhabung in Substratpuffern durch Unterbrechen von Prozessaufgaben in Abhängigkeit von der Aufgabenpriorität |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2326522B (en) * | 1997-05-29 | 1999-07-14 | Nec Corp | Semiconductor device manufacturing system |
JP2000223386A (ja) | 1999-02-02 | 2000-08-11 | Mitsubishi Electric Corp | 半導体製造システムおよび当該システムで用いられる半導体製造システム制御装置 |
US7249356B1 (en) * | 1999-04-29 | 2007-07-24 | Fisher-Rosemount Systems, Inc. | Methods and structure for batch processing event history processing and viewing |
KR100303321B1 (ko) * | 1999-05-20 | 2001-09-26 | 박종섭 | 반도체 라인 자동화 시스템에서의 오류발생 로트 제어 장치 및그 방법 |
JP2001189363A (ja) | 2000-01-04 | 2001-07-10 | Mitsubishi Electric Corp | 半導体装置製造設備およびその制御方法 |
JP3515724B2 (ja) | 2000-01-13 | 2004-04-05 | Necエレクトロニクス株式会社 | 製品の製造管理方法及び製造管理システム |
US6491451B1 (en) | 2000-11-03 | 2002-12-10 | Motorola, Inc. | Wafer processing equipment and method for processing wafers |
JP2003022945A (ja) * | 2001-07-06 | 2003-01-24 | Mitsubishi Electric Corp | 工程管理装置、工程管理方法および工程を管理するためのプログラム |
US6615093B1 (en) * | 2002-01-04 | 2003-09-02 | Taiwan Semiconductor Manufacturing Company | Adaptive control algorithm for improving AMHS push lot accuracy |
US6594536B1 (en) | 2002-02-13 | 2003-07-15 | Taiwan Semiconductor Manufacturing Company | Method and computer program for using tool performance data for dynamic dispatch of wafer processing to increase quantity of output |
TWI316044B (en) * | 2004-02-28 | 2009-10-21 | Applied Materials Inc | Methods and apparatus for material control system interface |
CN100397562C (zh) * | 2004-11-02 | 2008-06-25 | 力晶半导体股份有限公司 | 制造过程中实时批次发送系统及其方法 |
US20060095153A1 (en) * | 2004-11-04 | 2006-05-04 | Chang Yung C | Wafer carrier transport management method and system thereof |
JP4693464B2 (ja) * | 2005-04-05 | 2011-06-01 | 株式会社東芝 | 品質管理システム、品質管理方法及びロット単位のウェハ処理方法 |
US20070005170A1 (en) * | 2005-06-29 | 2007-01-04 | Thorsten Schedel | Method for the preferred processing of workpieces of highest priority |
US7793292B2 (en) | 2006-09-13 | 2010-09-07 | Fisher-Rosemount Systems, Inc. | Compact batch viewing techniques for use in batch processes |
GB0803967D0 (en) * | 2008-03-03 | 2008-04-09 | Colt Telecom Group Plc | Queing System |
US9927788B2 (en) | 2011-05-19 | 2018-03-27 | Fisher-Rosemount Systems, Inc. | Software lockout coordination between a process control system and an asset management system |
JP5817476B2 (ja) * | 2011-11-29 | 2015-11-18 | 株式会社デンソー | バッチ処理制御方法およびバッチ処理制御システム |
CN113608105A (zh) * | 2021-08-04 | 2021-11-05 | 杭州芯云半导体技术有限公司 | 芯片cp测试中探针台驱动配置方法及系统 |
CN113731907B (zh) * | 2021-08-13 | 2022-05-31 | 江苏吉星新材料有限公司 | 蓝宝石产品清洗方法及清洗装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6359524B1 (en) * | 1981-12-07 | 2002-03-19 | Itt Manufacturing Enterprises, Inc. | Modulation pulse-top ripple compensation for a travelling wave tube pulser |
US5148370A (en) * | 1987-06-17 | 1992-09-15 | The Standard Oil Company | Expert system and method for batch production scheduling and planning |
US5351195A (en) * | 1989-07-24 | 1994-09-27 | The George Group | Method for improving manufacturing processes |
WO1991001850A1 (fr) * | 1989-08-10 | 1991-02-21 | Fujitsu Limited | Systeme de commande de procede de fabrication |
JPH03236213A (ja) | 1990-02-13 | 1991-10-22 | Mitsubishi Electric Corp | バッチ投入方法及び装置 |
JP3189326B2 (ja) * | 1990-11-21 | 2001-07-16 | セイコーエプソン株式会社 | 生産管理装置および該装置を用いた生産管理方法 |
JPH04318122A (ja) * | 1991-04-17 | 1992-11-09 | Sumitomo Metal Ind Ltd | バッチ式焼鈍炉の操業管理方法 |
JPH05265775A (ja) * | 1992-03-19 | 1993-10-15 | Hitachi Ltd | ジョブ実行予測制御方法およびジョブ実行状況表示方法 |
US5359524A (en) * | 1992-06-29 | 1994-10-25 | Darius Rohan | Method and system for determining an average batch size |
US5465534A (en) * | 1994-05-26 | 1995-11-14 | Equipto | Flooring substructure |
US5696689A (en) * | 1994-11-25 | 1997-12-09 | Nippondenso Co., Ltd. | Dispatch and conveyer control system for a production control system of a semiconductor substrate |
US5745364A (en) * | 1994-12-28 | 1998-04-28 | Nec Corporation | Method of producing semiconductor wafer |
JPH0973313A (ja) * | 1995-02-09 | 1997-03-18 | Matsushita Electric Ind Co Ltd | 製造計画立案方法および製造計画立案装置 |
-
1995
- 1995-11-24 JP JP7305357A patent/JP2702466B2/ja not_active Expired - Fee Related
-
1996
- 1996-11-15 EP EP96118364A patent/EP0775952B1/de not_active Expired - Lifetime
- 1996-11-15 DE DE69618433T patent/DE69618433T2/de not_active Expired - Fee Related
- 1996-11-19 US US08/752,305 patent/US5930137A/en not_active Expired - Fee Related
- 1996-11-22 CN CN96117259A patent/CN1117388C/zh not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006025406A1 (de) * | 2006-05-31 | 2007-12-06 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zum Steuern von Prozessanlagen durch Unterbrechen von Prozessaufgaben in Abhängigkeit von der Aufgabenpriorität |
US7571020B2 (en) | 2006-05-31 | 2009-08-04 | Advanced Micro Devices, Inc. | Method and system for controlling process tools by interrupting process jobs depending on job priority |
DE102006056597A1 (de) * | 2006-11-30 | 2008-06-05 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zum Steuern der Substrathandhabung in Substratpuffern durch Unterbrechen von Prozessaufgaben in Abhängigkeit von der Aufgabenpriorität |
DE102006056597B4 (de) * | 2006-11-30 | 2009-03-12 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren und System zum Steuern der Substrathandhabung in Substratpuffern von Prozessanlagensystemen durch Unterbrechen von Prozessaufgaben in Abhängigkeit von der Aufgabenpriorität |
Also Published As
Publication number | Publication date |
---|---|
CN1156898A (zh) | 1997-08-13 |
CN1117388C (zh) | 2003-08-06 |
EP0775952A3 (de) | 1998-09-16 |
EP0775952B1 (de) | 2002-01-09 |
JP2702466B2 (ja) | 1998-01-21 |
DE69618433D1 (de) | 2002-02-14 |
JPH09148210A (ja) | 1997-06-06 |
US5930137A (en) | 1999-07-27 |
EP0775952A2 (de) | 1997-05-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: NEC ELECTRONICS CORP., KAWASAKI, KANAGAWA, JP |
|
8339 | Ceased/non-payment of the annual fee |