DE59802824D1 - Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben - Google Patents

Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben

Info

Publication number
DE59802824D1
DE59802824D1 DE59802824T DE59802824T DE59802824D1 DE 59802824 D1 DE59802824 D1 DE 59802824D1 DE 59802824 T DE59802824 T DE 59802824T DE 59802824 T DE59802824 T DE 59802824T DE 59802824 D1 DE59802824 D1 DE 59802824D1
Authority
DE
Germany
Prior art keywords
semiconductor wafers
polishing semiconductor
polishing
wafers
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59802824T
Other languages
English (en)
Inventor
Heinrich Hennhoefer
Hans Kraemer
Helmut Kirschner
Manfred Thurner
Thomas Buschhardt
Klaus Dr Roettger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siltronic AG
Original Assignee
Wacker Siltronic AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Siltronic AG filed Critical Wacker Siltronic AG
Application granted granted Critical
Publication of DE59802824D1 publication Critical patent/DE59802824D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/015—Temperature control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
DE59802824T 1997-10-30 1998-10-08 Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben Expired - Lifetime DE59802824D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19748020A DE19748020A1 (de) 1997-10-30 1997-10-30 Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben

Publications (1)

Publication Number Publication Date
DE59802824D1 true DE59802824D1 (de) 2002-02-28

Family

ID=7847146

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19748020A Withdrawn DE19748020A1 (de) 1997-10-30 1997-10-30 Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben
DE59802824T Expired - Lifetime DE59802824D1 (de) 1997-10-30 1998-10-08 Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19748020A Withdrawn DE19748020A1 (de) 1997-10-30 1997-10-30 Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben

Country Status (8)

Country Link
US (1) US6095898A (de)
EP (1) EP0916450B1 (de)
JP (1) JPH11207605A (de)
KR (1) KR100315162B1 (de)
DE (2) DE19748020A1 (de)
MY (1) MY133888A (de)
SG (1) SG75876A1 (de)
TW (1) TW407311B (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5700180A (en) 1993-08-25 1997-12-23 Micron Technology, Inc. System for real-time control of semiconductor wafer polishing
JP3693483B2 (ja) * 1998-01-30 2005-09-07 株式会社荏原製作所 研磨装置
US6020262A (en) * 1998-03-06 2000-02-01 Siemens Aktiengesellschaft Methods and apparatus for chemical mechanical planarization (CMP) of a semiconductor wafer
US6352466B1 (en) 1998-08-31 2002-03-05 Micron Technology, Inc. Method and apparatus for wireless transfer of chemical-mechanical planarization measurements
JP2000334658A (ja) * 1999-05-28 2000-12-05 Fujitsu Ltd ラップ加工装置
US6358119B1 (en) * 1999-06-21 2002-03-19 Taiwan Semiconductor Manufacturing Company Way to remove CU line damage after CU CMP
US6244944B1 (en) * 1999-08-31 2001-06-12 Micron Technology, Inc. Method and apparatus for supporting and cleaning a polishing pad for chemical-mechanical planarization of microelectronic substrates
DE10009656B4 (de) * 2000-02-24 2005-12-08 Siltronic Ag Verfahren zur Herstellung einer Halbleiterscheibe
DE10012840C2 (de) * 2000-03-16 2001-08-02 Wacker Siltronic Halbleitermat Verfahren zur Herstellung einer Vielzahl von polierten Halbleiterscheiben
KR100413493B1 (ko) * 2001-10-17 2004-01-03 주식회사 하이닉스반도체 화학적 기계적 연마 장치의 연마 플래튼 및 그를 이용한평탄화방법
JP4510362B2 (ja) * 2001-11-30 2010-07-21 俊郎 土肥 Ｃｍｐ装置およびｃｍｐ方法
US20050161814A1 (en) * 2002-12-27 2005-07-28 Fujitsu Limited Method for forming bumps, semiconductor device and method for manufacturing same, substrate processing apparatus, and semiconductor manufacturing apparatus
DE102004017452A1 (de) * 2004-04-08 2005-11-03 Siltronic Ag Vorrichtung zur flächigen, abrasiven Bearbeitung eines scheibenförmigen Werkstücks
US20060226123A1 (en) * 2005-04-07 2006-10-12 Applied Materials, Inc. Profile control using selective heating
US7201634B1 (en) 2005-11-14 2007-04-10 Infineon Technologies Ag Polishing methods and apparatus
US20070227901A1 (en) * 2006-03-30 2007-10-04 Applied Materials, Inc. Temperature control for ECMP process
DE102006032455A1 (de) * 2006-07-13 2008-04-10 Siltronic Ag Verfahren zum gleichzeitigen beidseitigen Schleifen mehrerer Halbleiterscheiben sowie Halbleierscheibe mit hervorragender Ebenheit
DE102007063232B4 (de) * 2007-12-31 2023-06-22 Advanced Micro Devices, Inc. Verfahren zum Polieren eines Substrats
US8149256B2 (en) * 2008-06-04 2012-04-03 Varian Semiconductor Equipment Associates, Inc. Techniques for changing temperature of a platen
US20100279435A1 (en) * 2009-04-30 2010-11-04 Applied Materials, Inc. Temperature control of chemical mechanical polishing
TWI819009B (zh) 2018-06-27 2023-10-21 美商應用材料股份有限公司 化學機械研磨設備及化學機械研磨方法
US11628478B2 (en) 2019-05-29 2023-04-18 Applied Materials, Inc. Steam cleaning of CMP components
US11633833B2 (en) 2019-05-29 2023-04-25 Applied Materials, Inc. Use of steam for pre-heating of CMP components
TW202110575A (zh) 2019-05-29 2021-03-16 美商應用材料股份有限公司 用於化學機械研磨系統的蒸氣處置站
US11897079B2 (en) 2019-08-13 2024-02-13 Applied Materials, Inc. Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity
JP2023516871A (ja) 2020-06-29 2023-04-21 アプライド マテリアルズ インコーポレイテッド Ｃｍｐにおける温度及びスラリ流量の制御
KR20220116324A (ko) 2020-06-29 2022-08-22 어플라이드 머티어리얼스, 인코포레이티드 화학 기계적 연마를 위한 스팀 생성의 제어
US11919123B2 (en) 2020-06-30 2024-03-05 Applied Materials, Inc. Apparatus and method for CMP temperature control
US11577358B2 (en) 2020-06-30 2023-02-14 Applied Materials, Inc. Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2809274A1 (de) * 1978-03-03 1979-09-13 Wacker Chemitronic Verfahren zur vergleichmaessigung des polierabtrages von scheiben beim polieren
DE3128880A1 (de) * 1981-07-22 1983-02-10 Fa. Peter Wolters, 2370 Rendsburg Maschine zum laeppen oder polieren
JPH0659623B2 (ja) * 1984-03-23 1994-08-10 株式会社日立製作所 ウェハのメカノケミカルポリシング加工方法および装置
US5036630A (en) * 1990-04-13 1991-08-06 International Business Machines Corporation Radial uniformity control of semiconductor wafer polishing
JP2985490B2 (ja) * 1992-02-28 1999-11-29 信越半導体株式会社 研磨機の除熱方法
US5873769A (en) * 1997-05-30 1999-02-23 Industrial Technology Research Institute Temperature compensated chemical mechanical polishing to achieve uniform removal rates

Also Published As

Publication number Publication date
DE19748020A1 (de) 1999-05-06
US6095898A (en) 2000-08-01
KR19990037292A (ko) 1999-05-25
SG75876A1 (en) 2000-10-24
KR100315162B1 (ko) 2002-06-20
JPH11207605A (ja) 1999-08-03
EP0916450B1 (de) 2002-01-09
MY133888A (en) 2007-11-30
TW407311B (en) 2000-10-01
EP0916450A1 (de) 1999-05-19

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: WACKER SILTRONIC AG, 84489 BURGHAUSEN, DE

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SILTRONIC AG, 81737 MUENCHEN, DE