DE69606508T2 - Kopf mit integriertem Dünnfilmtrieb für wärmegetriebene Tintenstrahldrucker - Google Patents
Kopf mit integriertem Dünnfilmtrieb für wärmegetriebene TintenstrahldruckerInfo
- Publication number
- DE69606508T2 DE69606508T2 DE69606508T DE69606508T DE69606508T2 DE 69606508 T2 DE69606508 T2 DE 69606508T2 DE 69606508 T DE69606508 T DE 69606508T DE 69606508 T DE69606508 T DE 69606508T DE 69606508 T2 DE69606508 T2 DE 69606508T2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- transistor
- resistor
- ink
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 29
- 239000000758 substrate Substances 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 230000004888 barrier function Effects 0.000 claims description 14
- 239000004020 conductor Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 105
- 238000000034 method Methods 0.000 description 36
- 238000009792 diffusion process Methods 0.000 description 23
- 230000008569 process Effects 0.000 description 23
- 238000010304 firing Methods 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 9
- 229910021332 silicide Inorganic materials 0.000 description 9
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000002161 passivation Methods 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 210000003371 toe Anatomy 0.000 description 7
- 238000013183 transoesophageal echocardiography Methods 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 239000003870 refractory metal Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000004151 rapid thermal annealing Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- FZQYVWUONRVDQB-UHFFFAOYSA-N gold titanium tungsten Chemical compound [Ti][W][Au] FZQYVWUONRVDQB-UHFFFAOYSA-N 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/811—Combinations of field-effect devices and one or more diodes, capacitors or resistors
- H10D84/817—Combinations of field-effect devices and resistors only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/568,209 US6758552B1 (en) | 1995-12-06 | 1995-12-06 | Integrated thin-film drive head for thermal ink-jet printer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69606508D1 DE69606508D1 (de) | 2000-03-09 |
| DE69606508T2 true DE69606508T2 (de) | 2000-10-12 |
Family
ID=24270369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69606508T Expired - Lifetime DE69606508T2 (de) | 1995-12-06 | 1996-05-07 | Kopf mit integriertem Dünnfilmtrieb für wärmegetriebene Tintenstrahldrucker |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6758552B1 (enExample) |
| EP (1) | EP0778139B1 (enExample) |
| JP (1) | JP4332227B2 (enExample) |
| KR (1) | KR100387548B1 (enExample) |
| DE (1) | DE69606508T2 (enExample) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11105286A (ja) * | 1997-07-03 | 1999-04-20 | Lexmark Internatl Inc | 離間した別個の平面に位置する加熱要素導体を有するプリントヘッド |
| AUPP653998A0 (en) | 1998-10-16 | 1998-11-05 | Silverbrook Research Pty Ltd | Micromechanical device and method (ij46B) |
| AUPP654398A0 (en) | 1998-10-16 | 1998-11-05 | Silverbrook Research Pty Ltd | Micromechanical device and method (ij46g) |
| AUPP654598A0 (en) | 1998-10-16 | 1998-11-05 | Silverbrook Research Pty Ltd | Micromechanical device and method (ij46h) |
| US5980025A (en) * | 1997-11-21 | 1999-11-09 | Xerox Corporation | Thermal inkjet printhead with increased resistance control and method for making the printhead |
| US6742873B1 (en) | 2001-04-16 | 2004-06-01 | Silverbrook Research Pty Ltd | Inkjet printhead construction |
| US7028474B2 (en) | 1998-10-16 | 2006-04-18 | Silverbook Research Pty Ltd | Micro-electromechanical actuator with control logic circuitry |
| US7419250B2 (en) | 1999-10-15 | 2008-09-02 | Silverbrook Research Pty Ltd | Micro-electromechanical liquid ejection device |
| US7815291B2 (en) | 1998-10-16 | 2010-10-19 | Silverbrook Research Pty Ltd | Printhead integrated circuit with low drive transistor to nozzle area ratio |
| AU1139100A (en) | 1998-10-16 | 2000-05-08 | Silverbrook Research Pty Limited | Improvements relating to inkjet printers |
| US6994424B2 (en) | 1998-10-16 | 2006-02-07 | Silverbrook Research Pty Ltd | Printhead assembly incorporating an array of printhead chips on an ink distribution structure |
| US6863378B2 (en) | 1998-10-16 | 2005-03-08 | Silverbrook Research Pty Ltd | Inkjet printer having enclosed actuators |
| US7677686B2 (en) | 1998-10-16 | 2010-03-16 | Silverbrook Research Pty Ltd | High nozzle density printhead ejecting low drop volumes |
| US7216956B2 (en) | 1998-10-16 | 2007-05-15 | Silverbrook Research Pty Ltd | Printhead assembly with power and ground connections along single edge |
| US7182431B2 (en) | 1999-10-19 | 2007-02-27 | Silverbrook Research Pty Ltd | Nozzle arrangement |
| US6132032A (en) * | 1999-08-13 | 2000-10-17 | Hewlett-Packard Company | Thin-film print head for thermal ink-jet printers |
| JP2002052725A (ja) | 2000-08-07 | 2002-02-19 | Sony Corp | プリンタ、プリンタヘッド及びプリンタヘッドの製造方法 |
| US6465856B2 (en) * | 2001-03-19 | 2002-10-15 | Xerox Corporation | Micro-fabricated shielded conductors |
| US6504226B1 (en) * | 2001-12-20 | 2003-01-07 | Stmicroelectronics, Inc. | Thin-film transistor used as heating element for microreaction chamber |
| KR20040079509A (ko) * | 2003-03-07 | 2004-09-16 | 삼성전자주식회사 | 저항 소자를 구비하는 반도체 장치 및 그 제조 방법 |
| GB0500114D0 (en) * | 2005-01-06 | 2005-02-09 | Koninkl Philips Electronics Nv | Inkjet print head |
| GB0500111D0 (en) * | 2005-01-06 | 2005-02-09 | Koninkl Philips Electronics Nv | Inkjet print head |
| EP1720177B1 (en) * | 2005-02-17 | 2012-01-11 | Zakrytoe Aktsionernoe Obshchestvo "Elox-Prom" | Electrical hermetic penetrant structure |
| JP5145636B2 (ja) * | 2005-12-27 | 2013-02-20 | 富士ゼロックス株式会社 | 液滴吐出ヘッド及び液滴吐出装置 |
| US20100231655A1 (en) * | 2007-11-24 | 2010-09-16 | Hewlett-Packard Developement Company, L.P. | Inkjet-printing device printhead die having edge protection layer for heating resistor |
| US8333459B2 (en) | 2008-04-29 | 2012-12-18 | Hewlett-Packard Development Company, L.P. | Printing device |
| EP2515337B1 (en) * | 2008-12-24 | 2016-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit and semiconductor device |
| US8816436B2 (en) * | 2012-05-16 | 2014-08-26 | International Business Machines Corporation | Method and structure for forming fin resistors |
| JP6380890B2 (ja) * | 2013-08-12 | 2018-08-29 | Ｔｉａｎｍａ Ｊａｐａｎ株式会社 | インクジェットプリンタヘッド及びその製造方法、並びにインクジェットプリンタヘッドを搭載した描画装置 |
| JP6322448B2 (ja) * | 2014-03-12 | 2018-05-09 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッドの製造方法、液体噴射ヘッド、及び液体噴射装置 |
| EP3962793A4 (en) * | 2019-04-29 | 2023-01-04 | Hewlett-Packard Development Company, L.P. | CORROSION TOLERANT MICROELECTRO-MECHANICAL FLUID EJECTION DEVICE |
| CN113211985B (zh) * | 2020-01-21 | 2022-10-14 | 国际联合科技股份有限公司 | 热气泡喷墨头装置 |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3700852A (en) | 1970-10-09 | 1972-10-24 | Displaytek Corp | Thermal display module |
| US3852563A (en) | 1974-02-01 | 1974-12-03 | Hewlett Packard Co | Thermal printing head |
| US3973106A (en) | 1974-11-15 | 1976-08-03 | Hewlett-Packard Company | Thin film thermal print head |
| JPS5299786A (en) * | 1976-02-18 | 1977-08-22 | Agency Of Ind Science & Technol | Mos integrated circuit |
| US4429321A (en) * | 1980-10-23 | 1984-01-31 | Canon Kabushiki Kaisha | Liquid jet recording device |
| US4490728A (en) | 1981-08-14 | 1984-12-25 | Hewlett-Packard Company | Thermal ink jet printer |
| JPS58153672A (ja) | 1982-03-10 | 1983-09-12 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜トランジスタ回路を内蔵する記録ヘツド |
| US4514741A (en) | 1982-11-22 | 1985-04-30 | Hewlett-Packard Company | Thermal ink jet printer utilizing a printhead resistor having a central cold spot |
| US4616408A (en) | 1982-11-24 | 1986-10-14 | Hewlett-Packard Company | Inversely processed resistance heater |
| US4528574A (en) | 1983-03-28 | 1985-07-09 | Hewlett-Packard Company | Apparatus for reducing erosion due to cavitation in ink jet printers |
| US4513298A (en) | 1983-05-25 | 1985-04-23 | Hewlett-Packard Company | Thermal ink jet printhead |
| US4535343A (en) | 1983-10-31 | 1985-08-13 | Hewlett-Packard Company | Thermal ink jet printhead with self-passivating elements |
| JPS60116452A (ja) | 1983-11-30 | 1985-06-22 | Canon Inc | インクジェットヘッド |
| US4716423A (en) | 1985-11-22 | 1987-12-29 | Hewlett-Packard Company | Barrier layer and orifice plate for thermal ink jet print head assembly and method of manufacture |
| US4719477A (en) | 1986-01-17 | 1988-01-12 | Hewlett-Packard Company | Integrated thermal ink jet printhead and method of manufacture |
| JPH0737146B2 (ja) | 1986-03-06 | 1995-04-26 | ソニー株式会社 | 薄膜サ−マルヘツド |
| JPS62242552A (ja) | 1986-04-15 | 1987-10-23 | Sony Corp | 薄膜サ−マルヘツド |
| US4922265A (en) | 1986-04-28 | 1990-05-01 | Hewlett-Packard Company | Ink jet printhead with self-aligned orifice plate and method of manufacture |
| US4862197A (en) | 1986-08-28 | 1989-08-29 | Hewlett-Packard Co. | Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby |
| US4695853A (en) | 1986-12-12 | 1987-09-22 | Hewlett-Packard Company | Thin film vertical resistor devices for a thermal ink jet printhead and methods of manufacture |
| US4931813A (en) | 1987-09-21 | 1990-06-05 | Hewlett-Packard Company | Ink jet head incorporating a thick unpassivated TaAl resistor |
| US4809428A (en) | 1987-12-10 | 1989-03-07 | Hewlett-Packard Company | Thin film device for an ink jet printhead and process for the manufacturing same |
| US4847630A (en) | 1987-12-17 | 1989-07-11 | Hewlett-Packard Company | Integrated thermal ink jet printhead and method of manufacture |
| US5008689A (en) | 1988-03-16 | 1991-04-16 | Hewlett-Packard Company | Plastic substrate for thermal ink jet printer |
| US4927505A (en) | 1988-07-05 | 1990-05-22 | Motorola Inc. | Metallization scheme providing adhesion and barrier properties |
| EP0378439B1 (en) * | 1989-01-13 | 1995-01-04 | Canon Kabushiki Kaisha | Recording head |
| US4965611A (en) | 1989-03-22 | 1990-10-23 | Hewlett-Packard Company | Amorphous diffusion barrier for thermal ink jet print heads |
| US5010355A (en) | 1989-12-26 | 1991-04-23 | Xerox Corporation | Ink jet printhead having ionic passivation of electrical circuitry |
| US5081473A (en) * | 1990-07-26 | 1992-01-14 | Xerox Corporation | Temperature control transducer and MOS driver for thermal ink jet printing chips |
| JPH04110161A (ja) | 1990-08-30 | 1992-04-10 | Ricoh Co Ltd | サーマルヘッド用発熱抵抗体およびそれを用いたサーマルヘッド |
| US5229785A (en) | 1990-11-08 | 1993-07-20 | Hewlett-Packard Company | Method of manufacture of a thermal inkjet thin film printhead having a plastic orifice plate |
| US5122812A (en) | 1991-01-03 | 1992-06-16 | Hewlett-Packard Company | Thermal inkjet printhead having driver circuitry thereon and method for making the same |
| US5159353A (en) | 1991-07-02 | 1992-10-27 | Hewlett-Packard Company | Thermal inkjet printhead structure and method for making the same |
| ATE144194T1 (de) | 1991-08-01 | 1996-11-15 | Canon Kk | Aufzeichnungskopfherstellungsverfahren |
| US5420627A (en) | 1992-04-02 | 1995-05-30 | Hewlett-Packard Company | Inkjet printhead |
-
1995
- 1995-12-06 US US08/568,209 patent/US6758552B1/en not_active Expired - Fee Related
-
1996
- 1996-05-07 EP EP96303148A patent/EP0778139B1/en not_active Expired - Lifetime
- 1996-05-07 DE DE69606508T patent/DE69606508T2/de not_active Expired - Lifetime
- 1996-12-05 KR KR1019960062069A patent/KR100387548B1/ko not_active Expired - Fee Related
- 1996-12-06 JP JP32630696A patent/JP4332227B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09174844A (ja) | 1997-07-08 |
| US6758552B1 (en) | 2004-07-06 |
| DE69606508D1 (de) | 2000-03-09 |
| EP0778139B1 (en) | 2000-02-02 |
| JP4332227B2 (ja) | 2009-09-16 |
| EP0778139A1 (en) | 1997-06-11 |
| KR100387548B1 (ko) | 2003-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69606508T2 (de) | Kopf mit integriertem Dünnfilmtrieb für wärmegetriebene Tintenstrahldrucker | |
| DE69013480T2 (de) | Farbstrahldruckkopf mit ionischer Passivierung der elektrischen Schaltungen. | |
| DE69210115T2 (de) | Thermische Tintenstrahldruckkopfstruktur und Herstellungsverfahren | |
| DE69222192T2 (de) | Monolithischer integrierter Schaltkreis-Chip für Thermo-Farbstrahldruckkopf | |
| DE69230196T2 (de) | Trägerschicht für Aufzeichnungskopf, Aufzeichnungskopf und Herstellungsverfahren dafür | |
| DE3780177T2 (de) | Integrierter waermetintenstrahl-druckkopf und herstellungsverfahren. | |
| DE69102479T2 (de) | Verfahren zur Herstellung eines integrierten thermischen Tintenstrahldruckkopfes. | |
| DE3788110T2 (de) | Bauelement mit vertikalem Dünnschichtwiderstand für thermischen Tintenspritzdruckkopf und Verfahren zu seiner Herstellung. | |
| DE60001524T2 (de) | Vollintegrierter thermischer Tintenstrahl-Druckkopf mit mehreren Tintenzuführlöchern pro Düse | |
| DE2657484C2 (de) | Aufladeelektrodenanordnung für Tintenstrahldrucker | |
| DE69614209T2 (de) | Herstellung von Tintenzufuhrkanälen in einem Siliziumsubstrat eines Thermotintenstrahldruckers | |
| DE69310626T2 (de) | Anordnung der Heizelemente eines Thermo-Druckkopfes und Herstellungsverfahren | |
| DE60131223T2 (de) | Mit Bläschen angetriebener Tintenstrahldruckkopf und dazugehöriges Hertsellungsverfahren | |
| DE68913012T2 (de) | Thermischer Farbstrahldrucker mit mehrstufigen Durchschaltungen in den Druckkopfwandlern. | |
| DE60016503T2 (de) | Flüssigkeitsausstosskopf, Flüsigkeitsausstossvorrichtung und Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes | |
| DE69808882T2 (de) | Dünnschicht-Tintenstrahldruckkopf | |
| DE69730667T2 (de) | Verfahren zur Herstellung eines Durchgangslochs, Gebrauch dieses Verfahrens zur Herstellung eines Slikonsubstrates mit einem solchen Durchgangsloch oder eine Vorrichtung mit diesem Substrat, Verfahren zur Herstellung eines Tintenstrahl-Druckkopfes und Gebrauch dieses Verfahrens zur Herstellung eines Tintenstrahldruckkopfes | |
| DE60319328T2 (de) | Monolitischer Tintenstrahldruckkopf und Herstellungsverfahren | |
| DE60118113T2 (de) | Mit Bläschen angetriebener Tintenstrahldruckkopf, dazugehöriges Herstellungsverfahren, und Tintenausstossverfahren | |
| DE69736460T2 (de) | Verfahren zur Herstellung von gerichtet abgeschiedenem Silizid über Transistorelektroden | |
| DE60306472T2 (de) | Monolithischer Tintenstrahldruckkopf mit konischer Düse und Verfahren zu seiner Herstellung | |
| DE69714210T2 (de) | Struktur zum Bewirken einer Haftung zwischen dem Substrat und der Tintensperre in einem Tintenstrahldruckkopf | |
| DE60101138T2 (de) | Flüssigkeitsstrahldruckkopf | |
| DE69525669T2 (de) | Substrat für Tintenstrahlkopf, Tintenstrahlkopf, Tintenstrahlschreiber und Tintenstrahlgerät | |
| DE69105639T2 (de) | Tintenstrahl-Wärmedruckkopf mit einer Steuerung des Ortes für den Blasensprung. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD CO. (N.D.GES.D.STAATES DELAWARE), |
|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE |