DE69605381D1 - Fotoresistzusammensetzung - Google Patents
FotoresistzusammensetzungInfo
- Publication number
- DE69605381D1 DE69605381D1 DE69605381T DE69605381T DE69605381D1 DE 69605381 D1 DE69605381 D1 DE 69605381D1 DE 69605381 T DE69605381 T DE 69605381T DE 69605381 T DE69605381 T DE 69605381T DE 69605381 D1 DE69605381 D1 DE 69605381D1
- Authority
- DE
- Germany
- Prior art keywords
- photoresist composition
- photoresist
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/12—Nitrogen compound containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/114—Initiator containing
- Y10S430/122—Sulfur compound containing
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25421595A JP3456808B2 (ja) | 1995-09-29 | 1995-09-29 | ホトレジスト組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69605381D1 true DE69605381D1 (de) | 2000-01-05 |
DE69605381T2 DE69605381T2 (de) | 2000-04-06 |
Family
ID=17261867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69605381T Expired - Fee Related DE69605381T2 (de) | 1995-09-29 | 1996-09-19 | Fotoresistzusammensetzung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5800964A (de) |
EP (1) | EP0768572B1 (de) |
JP (1) | JP3456808B2 (de) |
DE (1) | DE69605381T2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3587413B2 (ja) * | 1995-12-20 | 2004-11-10 | 東京応化工業株式会社 | 化学増幅型レジスト組成物及びそれに用いる酸発生剤 |
JP3665166B2 (ja) | 1996-07-24 | 2005-06-29 | 東京応化工業株式会社 | 化学増幅型レジスト組成物及びそれに用いる酸発生剤 |
CA2263254A1 (en) * | 1996-09-02 | 1998-03-12 | Ciba Specialty Chemicals Holding Inc. | Alkysulfonyloximes for high-resolution i-line photoresists of high sensitivity |
JP3053072B2 (ja) * | 1996-09-10 | 2000-06-19 | 東京応化工業株式会社 | レジスト積層体及びそれを用いたパターン形成方法 |
TW575792B (en) * | 1998-08-19 | 2004-02-11 | Ciba Sc Holding Ag | New unsaturated oxime derivatives and the use thereof as latent acids |
US6323287B1 (en) | 1999-03-12 | 2001-11-27 | Arch Specialty Chemicals, Inc. | Hydroxy-amino thermally cured undercoat for 193 NM lithography |
NL1014545C2 (nl) | 1999-03-31 | 2002-02-26 | Ciba Sc Holding Ag | Oxim-derivaten en de toepassing daarvan als latente zuren. |
SG78412A1 (en) * | 1999-03-31 | 2001-02-20 | Ciba Sc Holding Ag | Oxime derivatives and the use thereof as latent acids |
US6576394B1 (en) * | 2000-06-16 | 2003-06-10 | Clariant Finance (Bvi) Limited | Negative-acting chemically amplified photoresist composition |
US6482567B1 (en) * | 2000-08-25 | 2002-11-19 | Shipley Company, L.L.C. | Oxime sulfonate and N-oxyimidosulfonate photoacid generators and photoresists comprising same |
JP4694686B2 (ja) * | 2000-08-31 | 2011-06-08 | 東京応化工業株式会社 | 半導体素子製造方法 |
US6824954B2 (en) * | 2001-08-23 | 2004-11-30 | Jsr Corporation | Sulfonyloxime compound, and radiation sensitive acid generator, positive type radiation sensitive resin composition and negative type radiation sensitive resin composition using same |
JP2005517026A (ja) | 2002-02-06 | 2005-06-09 | チバ スペシャルティ ケミカルズ ホールディング インコーポレーテッド | スルホナート誘導体及び潜酸としてのその使用 |
TW200403523A (en) | 2002-03-22 | 2004-03-01 | Shinetsu Chemical Co | Photoacid generators, chemically amplified resist compositions, and patterning process |
JP4040392B2 (ja) * | 2002-08-22 | 2008-01-30 | 富士フイルム株式会社 | ポジ型フォトレジスト組成物 |
AU2005231979B2 (en) | 2004-04-07 | 2011-02-03 | Basf Se | Method of coloring a coating composition |
JP4566619B2 (ja) * | 2004-05-13 | 2010-10-20 | 東京応化工業株式会社 | ネガ型レジスト組成物およびレジストパターン形成方法 |
US8049186B2 (en) * | 2006-08-24 | 2011-11-01 | Basf Se | UV-dosis indicators |
JP5850863B2 (ja) | 2010-02-24 | 2016-02-03 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | 潜在性酸及びそれらの使用 |
EP3253735B1 (de) | 2015-02-02 | 2021-03-31 | Basf Se | Latente säuren und ihre verwendung |
JP6667204B2 (ja) * | 2015-03-18 | 2020-03-18 | 東京応化工業株式会社 | 感光性樹脂層の形成方法、ホトレジストパターンの製造方法、及びメッキ造形物の形成方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3166592D1 (en) * | 1980-07-14 | 1984-11-15 | Akzo Nv | Thermosetting coating composition containing a blocked acid catalyst |
US4540598A (en) * | 1983-08-17 | 1985-09-10 | Ciba-Geigy Corporation | Process for curing acid-curable finishes |
DE3660255D1 (en) * | 1985-04-12 | 1988-07-07 | Ciba Geigy Ag | Oxime sulphonates containing reactive groups |
GB8608528D0 (en) * | 1986-04-08 | 1986-05-14 | Ciba Geigy Ag | Production of positive images |
EP0361907A3 (de) * | 1988-09-29 | 1991-05-02 | Hoechst Celanese Corporation | Photolack-Zusammensetzung mit Bildumkehr für tiefes UV |
US5019488A (en) * | 1988-09-29 | 1991-05-28 | Hoechst Celanese Corporation | Method of producing an image reversal negative photoresist having a photo-labile blocked imide |
US5216135A (en) * | 1990-01-30 | 1993-06-01 | Wako Pure Chemical Industries, Ltd. | Diazodisulfones |
JP3000745B2 (ja) * | 1991-09-19 | 2000-01-17 | 富士通株式会社 | レジスト組成物とレジストパターンの形成方法 |
DE59309494D1 (de) * | 1992-05-22 | 1999-05-12 | Ciba Geigy Ag | Hochauflösender I-Linien Photoresist mit höherer Empfindlichkeit |
JPH07191463A (ja) * | 1993-12-27 | 1995-07-28 | Fujitsu Ltd | レジストおよびこれを使った半導体装置の製造方法 |
JP3317576B2 (ja) * | 1994-05-12 | 2002-08-26 | 富士写真フイルム株式会社 | ポジ型感光性樹脂組成物 |
-
1995
- 1995-09-29 JP JP25421595A patent/JP3456808B2/ja not_active Expired - Fee Related
-
1996
- 1996-09-19 EP EP96306821A patent/EP0768572B1/de not_active Expired - Lifetime
- 1996-09-19 DE DE69605381T patent/DE69605381T2/de not_active Expired - Fee Related
- 1996-09-24 US US08/717,779 patent/US5800964A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69605381T2 (de) | 2000-04-06 |
JP3456808B2 (ja) | 2003-10-14 |
EP0768572A1 (de) | 1997-04-16 |
US5800964A (en) | 1998-09-01 |
EP0768572B1 (de) | 1999-12-01 |
JPH0996900A (ja) | 1997-04-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |