DE69523333D1 - Getter pumpmodell und system - Google Patents

Getter pumpmodell und system

Info

Publication number
DE69523333D1
DE69523333D1 DE69523333T DE69523333T DE69523333D1 DE 69523333 D1 DE69523333 D1 DE 69523333D1 DE 69523333 T DE69523333 T DE 69523333T DE 69523333 T DE69523333 T DE 69523333T DE 69523333 D1 DE69523333 D1 DE 69523333D1
Authority
DE
Germany
Prior art keywords
getter
disks
heat
shield
heating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69523333T
Other languages
English (en)
Other versions
DE69523333T2 (de
Inventor
P Krueger
H Lorimer
Sergio Carella
Andrea Conte
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris GP Inc
Original Assignee
SAES Pure Gas Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/348,798 external-priority patent/US5911560A/en
Application filed by SAES Pure Gas Inc filed Critical SAES Pure Gas Inc
Publication of DE69523333D1 publication Critical patent/DE69523333D1/de
Application granted granted Critical
Publication of DE69523333T2 publication Critical patent/DE69523333T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Confectionery (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Light Receiving Elements (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • External Artificial Organs (AREA)
DE69523333T 1994-12-02 1995-11-30 Getter pumpmodell und system Expired - Lifetime DE69523333T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/348,798 US5911560A (en) 1994-10-31 1994-12-02 Getter pump module and system
US08/521,943 US5972183A (en) 1994-10-31 1995-09-01 Getter pump module and system
PCT/US1995/015598 WO1996017171A2 (en) 1994-12-02 1995-11-30 Getter pump module and system

Publications (2)

Publication Number Publication Date
DE69523333D1 true DE69523333D1 (de) 2001-11-22
DE69523333T2 DE69523333T2 (de) 2002-07-04

Family

ID=26995895

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69523333T Expired - Lifetime DE69523333T2 (de) 1994-12-02 1995-11-30 Getter pumpmodell und system

Country Status (12)

Country Link
US (4) US5972183A (de)
EP (1) EP0795084B1 (de)
JP (1) JP3574661B2 (de)
KR (1) KR100302178B1 (de)
CN (1) CN1097163C (de)
AT (1) ATE207189T1 (de)
AU (1) AU4505896A (de)
BR (1) BR9509847A (de)
CA (2) CA2206264A1 (de)
DE (1) DE69523333T2 (de)
RU (1) RU2138686C1 (de)
WO (1) WO1996017171A2 (de)

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IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
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JP4827294B2 (ja) * 1999-11-29 2011-11-30 株式会社半導体エネルギー研究所 成膜装置及び発光装置の作製方法
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US7309269B2 (en) * 2002-04-15 2007-12-18 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
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DE102013016774A1 (de) * 2013-07-31 2015-02-05 Liebherr-Hausgeräte Lienz Gmbh Vakuumdämmkörper
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CN104947039B (zh) * 2014-03-24 2017-07-04 北京北方微电子基地设备工艺研究中心有限责任公司 隔热挡板及反应腔室
KR102154893B1 (ko) * 2014-06-26 2020-09-11 사에스 게터스 에스.페.아. 게터 펌핑 시스템
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Also Published As

Publication number Publication date
CN1097163C (zh) 2002-12-25
EP0795084B1 (de) 2001-10-17
WO1996017171A3 (en) 1996-10-24
EP0795084A2 (de) 1997-09-17
CA2206264A1 (en) 1996-06-06
CA2485918A1 (en) 1996-06-06
WO1996017171A2 (en) 1996-06-06
US5997255A (en) 1999-12-07
KR987000518A (ko) 1998-03-30
US6043137A (en) 2000-03-28
JPH10510024A (ja) 1998-09-29
BR9509847A (pt) 1997-12-30
ATE207189T1 (de) 2001-11-15
US5980213A (en) 1999-11-09
US5972183A (en) 1999-10-26
CN1174593A (zh) 1998-02-25
AU4505896A (en) 1996-06-19
JP3574661B2 (ja) 2004-10-06
DE69523333T2 (de) 2002-07-04
KR100302178B1 (ko) 2002-03-21
RU2138686C1 (ru) 1999-09-27

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8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: FIENER, J., PAT.-ANW., 87719 MINDELHEIM