DE69520313D1 - Zerstörung giftiger Substanzen durch Verbrennung - Google Patents
Zerstörung giftiger Substanzen durch VerbrennungInfo
- Publication number
- DE69520313D1 DE69520313D1 DE69520313T DE69520313T DE69520313D1 DE 69520313 D1 DE69520313 D1 DE 69520313D1 DE 69520313 T DE69520313 T DE 69520313T DE 69520313 T DE69520313 T DE 69520313T DE 69520313 D1 DE69520313 D1 DE 69520313D1
- Authority
- DE
- Germany
- Prior art keywords
- combustion
- fuel gas
- foraminous
- gas
- combustion zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/12—Radiant burners
- F23D14/16—Radiant burners using permeable blocks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2203/00—Gaseous fuel burners
- F23D2203/10—Flame diffusing means
- F23D2203/105—Porous plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2212/00—Burner material specifications
- F23D2212/10—Burner material specifications ceramic
- F23D2212/103—Fibres
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2212/00—Burner material specifications
- F23D2212/20—Burner material specifications metallic
- F23D2212/201—Fibres
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
- F23G2209/142—Halogen gases, e.g. silane
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2215/00—Preventing emissions
- F23J2215/30—Halogen; Compounds thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2219/00—Treatment devices
- F23J2219/70—Condensing contaminants with coolers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Incineration Of Waste (AREA)
- Compounds Of Unknown Constitution (AREA)
- Treating Waste Gases (AREA)
- Combustion Of Fluid Fuel (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/280,072 US5510093A (en) | 1994-07-25 | 1994-07-25 | Combustive destruction of halogenated compounds |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69520313D1 true DE69520313D1 (de) | 2001-04-19 |
DE69520313T2 DE69520313T2 (de) | 2001-10-31 |
Family
ID=23071536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69520313T Expired - Lifetime DE69520313T2 (de) | 1994-07-25 | 1995-07-21 | Zerstörung giftiger Substanzen durch Verbrennung |
Country Status (5)
Country | Link |
---|---|
US (2) | US5510093A (de) |
EP (1) | EP0694735B9 (de) |
JP (1) | JP3512528B2 (de) |
AT (1) | ATE199776T1 (de) |
DE (1) | DE69520313T2 (de) |
Families Citing this family (80)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3404981B2 (ja) * | 1995-04-21 | 2003-05-12 | 日本鋼管株式会社 | 気体加熱装置 |
JP3486022B2 (ja) * | 1995-10-16 | 2004-01-13 | ジャパン・エア・ガシズ株式会社 | 排ガス処理装置 |
JPH09202973A (ja) * | 1996-01-24 | 1997-08-05 | Tokyo Electron Ltd | 成膜処理装置の排気システム構造 |
GB9608061D0 (en) * | 1996-04-16 | 1996-06-19 | Boc Group Plc | Removal of noxious substances from gas streams |
USH1709H (en) * | 1996-04-19 | 1998-02-03 | E. I. Du Pont De Nemours And Company | Thermal destruction of halocarbons |
TW342436B (en) * | 1996-08-14 | 1998-10-11 | Nippon Oxygen Co Ltd | Combustion type harm removal apparatus (1) |
US5955037A (en) * | 1996-12-31 | 1999-09-21 | Atmi Ecosys Corporation | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
US6000930A (en) * | 1997-05-12 | 1999-12-14 | Altex Technologies Corporation | Combustion process and burner apparatus for controlling NOx emissions |
JPH1151357A (ja) * | 1997-07-31 | 1999-02-26 | Tokyo Gas Co Ltd | 有機溶剤直接燃焼処理装置および有機溶剤直接燃焼処理装置における廃熱回収システム |
JPH1182978A (ja) * | 1997-08-29 | 1999-03-26 | Tokyo Gas Co Ltd | 有機物含有排気燃焼処理装置および有機物含有排気燃焼処理装置における廃熱回収システム |
JP4176132B2 (ja) * | 1997-11-21 | 2008-11-05 | 株式会社荏原製作所 | 排ガス処理用燃焼器 |
JP4066107B2 (ja) | 1997-11-21 | 2008-03-26 | 株式会社荏原製作所 | 排ガス処理用燃焼器 |
JPH11159734A (ja) * | 1997-11-28 | 1999-06-15 | Tokyo Gas Co Ltd | 通気性多孔体配置型排気燃焼処理装置 |
US6153150A (en) | 1998-01-12 | 2000-11-28 | Advanced Technology Materials, Inc. | Apparatus and method for controlled decomposition oxidation of gaseous pollutants |
US6261524B1 (en) | 1999-01-12 | 2001-07-17 | Advanced Technology Materials, Inc. | Advanced apparatus for abatement of gaseous pollutants |
US6224834B1 (en) | 1998-04-16 | 2001-05-01 | International Business Machines Corporation | Silane oxidation exhaust trap |
JP4497726B2 (ja) | 1998-12-01 | 2010-07-07 | 株式会社荏原製作所 | 排ガス処理装置 |
EP1142621B1 (de) | 1998-12-01 | 2004-11-10 | Ebara Corporation | Vorrichtung zur behandlung von abgas |
US6183241B1 (en) | 1999-02-10 | 2001-02-06 | Midwest Research Institute | Uniform-burning matrix burner |
US6423284B1 (en) * | 1999-10-18 | 2002-07-23 | Advanced Technology Materials, Inc. | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases |
JP2001355820A (ja) * | 2000-06-12 | 2001-12-26 | Sumitomo Seika Chem Co Ltd | 排ガスの処理方法および処理装置 |
US6948929B2 (en) * | 2000-10-02 | 2005-09-27 | Ebara Corporation | Combustion type waste gas treatment system |
US6821489B1 (en) | 2000-10-10 | 2004-11-23 | International Business Machines Corporation | System and method for abating the simultaneous flow of silane and arsine |
GB0026697D0 (en) | 2000-11-01 | 2000-12-20 | Boc Group Plc | Removal of noxious substances from gas streams |
US20030044328A1 (en) * | 2001-09-01 | 2003-03-06 | Wu-Niang Feng | Semiconductor waste-gas treating apparatus being filth sedimentation-and etching-proof |
JP4172938B2 (ja) * | 2002-02-14 | 2008-10-29 | 昭和電工株式会社 | 排ガスの処理方法および処理装置 |
US20040083734A1 (en) * | 2002-11-05 | 2004-05-06 | Kendall Robert M. | Sintered metal fiber liner for gas burners |
DE10343439A1 (de) * | 2003-09-12 | 2005-04-14 | DAS-Dünnschicht Anlagen Systeme GmbH Dresden | Einlasselement an einer Entsorgungseinrichtung für Schadstoffe enthaltende Prozessabgase |
US7569193B2 (en) * | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
GB0417378D0 (en) | 2004-08-04 | 2004-09-08 | Boc Group Plc | Gas abatement |
US7736599B2 (en) * | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
US8095240B2 (en) * | 2004-11-18 | 2012-01-10 | Applied Materials, Inc. | Methods for starting and operating a thermal abatement system |
US7682574B2 (en) * | 2004-11-18 | 2010-03-23 | Applied Materials, Inc. | Safety, monitoring and control features for thermal abatement reactor |
JP4619798B2 (ja) * | 2005-01-14 | 2011-01-26 | 日本パイオニクス株式会社 | 有害ガスの浄化装置 |
GB0509944D0 (en) * | 2005-05-16 | 2005-06-22 | Boc Group Plc | Gas combustion apparatus |
KR101036734B1 (ko) | 2005-10-31 | 2011-05-24 | 어플라이드 머티어리얼스, 인코포레이티드 | 공정 저감 반응로 |
US7522974B2 (en) | 2006-08-23 | 2009-04-21 | Applied Materials, Inc. | Interface for operating and monitoring abatement systems |
DE102006052586B4 (de) * | 2006-11-08 | 2008-07-03 | Schott Solar Gmbh | Verfahren und Vorrichtung zur Reinigung der Abgase einer Siliziumdünnschicht-Produktionsanlage |
US8591819B2 (en) * | 2006-12-05 | 2013-11-26 | Ebara Corporation | Combustion-type exhaust gas treatment apparatus |
DE102007016018A1 (de) * | 2007-04-03 | 2008-10-09 | Sms Demag Ag | Brenneranordnung |
GB0706544D0 (en) * | 2007-04-04 | 2007-05-09 | Boc Group Plc | Combustive destruction of noxious substances |
JP5232407B2 (ja) * | 2007-05-25 | 2013-07-10 | 日本パイオニクス株式会社 | 排ガスの浄化装置 |
US20090149996A1 (en) * | 2007-12-05 | 2009-06-11 | Applied Materials, Inc. | Multiple inlet abatement system |
US20090311641A1 (en) * | 2008-06-13 | 2009-12-17 | Gunther Berthold | Gas flame stabilization method and apparatus |
DE102008032833A1 (de) * | 2008-07-14 | 2010-01-21 | Rational Ag | Nahrungsmittelbehandlungsgerät |
DE102008053959B4 (de) * | 2008-10-30 | 2010-12-09 | Rational Ag | Nahrungsmittelbehandlungsgerät mit Brenner |
WO2010075467A1 (en) * | 2008-12-23 | 2010-07-01 | Mks Instruments, Inc. | Reactive chemical containment system |
GB0902221D0 (en) * | 2009-02-11 | 2009-03-25 | Edwards Ltd | Pilot |
GB0902234D0 (en) | 2009-02-11 | 2009-03-25 | Edwards Ltd | Method of treating an exhaust gas stream |
WO2011117231A1 (en) | 2010-03-26 | 2011-09-29 | Solvay Sa | Method of treating waste gases |
CN103079678B (zh) * | 2010-08-27 | 2015-08-26 | 英派尔科技开发有限公司 | 氢氟烷消除装置 |
GB2504468B (en) | 2012-07-27 | 2017-03-22 | Edwards Ltd | Burner Nozzle Reciprocating Scraper Arrangement for Reducing Effluent Gas Deposits |
KR101278178B1 (ko) * | 2012-10-15 | 2013-07-05 | 씨에스케이(주) | 스크러버용 버너 |
US9023303B2 (en) * | 2013-04-15 | 2015-05-05 | Airgard, Inc. | Extended or multiple reaction zones in scrubbing apparatus |
GB2514341B (en) * | 2013-05-20 | 2016-08-24 | Edwards Ltd | Radiant burner combustion monitoring |
GB2516267B (en) | 2013-07-17 | 2016-08-17 | Edwards Ltd | Head assembly |
US10161628B2 (en) | 2014-03-14 | 2018-12-25 | Edwards Limited | Radiant burner |
JP6258797B2 (ja) * | 2014-06-27 | 2018-01-10 | 日本パイオニクス株式会社 | 排ガスの燃焼式浄化装置 |
JP6310765B2 (ja) * | 2014-05-12 | 2018-04-11 | 日本パイオニクス株式会社 | 排ガスの燃焼式浄化装置 |
GB2528444B (en) * | 2014-07-21 | 2018-06-20 | Edwards Ltd | Abatement apparatus |
GB2528445B (en) | 2014-07-21 | 2018-06-20 | Edwards Ltd | Separator apparatus |
GB2532776A (en) * | 2014-11-28 | 2016-06-01 | Edwards Ltd | Radiant burner |
GB2533293A (en) | 2014-12-15 | 2016-06-22 | Edwards Ltd | Inlet assembly |
CN106211790B (zh) * | 2015-03-26 | 2018-06-22 | 韩国能源技术研究院 | 用于难分解性有害气体焚烧处理的节能型燃烧装置及其方法 |
GB201505447D0 (en) * | 2015-03-30 | 2015-05-13 | Edwards Ltd | Radiant burner |
GB2536905B (en) * | 2015-03-30 | 2020-01-08 | Edwards Ltd | Radiant burner |
US10369582B2 (en) | 2015-04-30 | 2019-08-06 | Emissol Llc | System and method for spray visualization |
GB2550382B (en) | 2016-05-18 | 2020-04-22 | Edwards Ltd | Burner Inlet Assembly |
KR102450538B1 (ko) * | 2017-01-06 | 2022-10-04 | 알제타 코포레이션 | 개선된 폐가스 저감을 위한 시스템 및 방법 |
US11614230B2 (en) * | 2018-10-11 | 2023-03-28 | Corning Incorporated | Abatement systems including an oxidizer head assembly and methods for using the same |
GB2579197B (en) | 2018-11-22 | 2021-06-09 | Edwards Ltd | Abatement method |
GB2584675B (en) | 2019-06-10 | 2021-11-17 | Edwards Ltd | Inlet assembly for an abatement apparatus |
CN111412481B (zh) * | 2020-03-19 | 2023-01-10 | 长江存储科技有限责任公司 | 废气处理装置 |
GB2604652A (en) | 2021-03-12 | 2022-09-14 | Edwards Ltd | Abatement apparatus |
GB2608817A (en) | 2021-07-13 | 2023-01-18 | Edwards Ltd | Modular abatement apparatus |
GB2608816A (en) | 2021-07-13 | 2023-01-18 | Edwards Ltd | Abatement apparatus |
GB2608821A (en) | 2021-07-13 | 2023-01-18 | Edwards Ltd | Inlet assembly |
GB2608822A (en) | 2021-07-13 | 2023-01-18 | Edwards Ltd | Inlet nozzle assembly |
GB2608820A (en) | 2021-07-13 | 2023-01-18 | Edwards Ltd | Inlet assembly |
GB2608818A (en) | 2021-07-13 | 2023-01-18 | Edwards Ltd | Inlet nozzle assembly |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2775294A (en) | 1950-03-11 | 1956-12-25 | American Infra Red Radiant Co | Radiation burners |
US3173470A (en) | 1961-11-17 | 1965-03-16 | Gen Precision Inc | Gas-fueled radiant heater |
US3179156A (en) | 1962-01-17 | 1965-04-20 | American Thermocatalytic Corp | Space heater |
US3383159A (en) | 1966-02-03 | 1968-05-14 | American Thermocatalytic Corp | Combustion elements |
US3683058A (en) | 1969-08-25 | 1972-08-08 | Maurice Partiot | Infrared burners and high efficiency radiant plates |
US3840344A (en) * | 1972-06-06 | 1974-10-08 | Chemothermic Ind Inc | Carbon black production |
US3954387A (en) | 1972-06-08 | 1976-05-04 | J. Tennant & Sons (Warrington) Limited | Burners |
US4048290A (en) * | 1976-01-28 | 1977-09-13 | Cabot Corporation | Process for the production of finely-divided metal and metalloid oxides |
SU716574A1 (ru) * | 1978-05-15 | 1980-02-25 | Предприятие П/Я А-1997 | Способ очистки отход щих газов |
US4206711A (en) * | 1978-10-04 | 1980-06-10 | Angelo J. Noce | Method and apparatus for processing waste fluid |
SE453120B (sv) * | 1984-12-28 | 1988-01-11 | Lumalampan Ab | Anordning for efterbrenning av med framfor allt kolvatten bemengda avgaser fran destruktionsanleggningar eller liknande |
US4627388A (en) | 1985-07-22 | 1986-12-09 | The Dow Chemical Company | Combustion of halogenated hydrocarbons with heat recovery |
US4899696A (en) * | 1985-09-12 | 1990-02-13 | Gas Research Institute | Commercial storage water heater process |
US4801437A (en) * | 1985-12-04 | 1989-01-31 | Japan Oxygen Co., Ltd. | Process for treating combustible exhaust gases containing silane and the like |
US4746287A (en) | 1986-01-17 | 1988-05-24 | Gas Research Institute | Fiber matrix burner composition with aluminum alloys and method of formulation |
US4828481A (en) * | 1987-10-05 | 1989-05-09 | Institute Of Gas Technology | Process and apparatus for high temperature combustion |
JPH0195214A (ja) * | 1987-10-06 | 1989-04-13 | Toyo Sanso Kk | 特殊材料ガスの燃焼方法 |
US5183646A (en) * | 1989-04-12 | 1993-02-02 | Custom Engineered Materials, Inc. | Incinerator for complete oxidation of impurities in a gas stream |
US5211552A (en) * | 1990-08-15 | 1993-05-18 | Alzeta Corporation | Adiabatic surface combustion with excess air |
DE4201650C2 (de) * | 1992-01-22 | 1994-08-11 | Mahler Dienstleistung | Vorrichtung zur thermischen Verbrennung von mit oxidierbaren Schadstoffen belasteten Abgasen |
US5326631A (en) | 1993-06-07 | 1994-07-05 | Alzeta Corporation | Unsintered fiber burner made with metal fibers, ceramic fibers and binding agent |
-
1994
- 1994-07-25 US US08/280,072 patent/US5510093A/en not_active Expired - Lifetime
-
1995
- 1995-07-21 AT AT95305102T patent/ATE199776T1/de active
- 1995-07-21 DE DE69520313T patent/DE69520313T2/de not_active Expired - Lifetime
- 1995-07-21 EP EP95305102A patent/EP0694735B9/de not_active Expired - Lifetime
- 1995-07-25 JP JP18928795A patent/JP3512528B2/ja not_active Expired - Lifetime
- 1995-12-06 US US08/567,931 patent/US5603905A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0694735B9 (de) | 2002-01-02 |
EP0694735A1 (de) | 1996-01-31 |
US5603905A (en) | 1997-02-18 |
JP3512528B2 (ja) | 2004-03-29 |
DE69520313T2 (de) | 2001-10-31 |
ATE199776T1 (de) | 2001-03-15 |
EP0694735B1 (de) | 2001-03-14 |
US5510093A (en) | 1996-04-23 |
JPH08105618A (ja) | 1996-04-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |