ATE199776T1 - Zerstörung giftiger substanzen durch verbrennung - Google Patents

Zerstörung giftiger substanzen durch verbrennung

Info

Publication number
ATE199776T1
ATE199776T1 AT95305102T AT95305102T ATE199776T1 AT E199776 T1 ATE199776 T1 AT E199776T1 AT 95305102 T AT95305102 T AT 95305102T AT 95305102 T AT95305102 T AT 95305102T AT E199776 T1 ATE199776 T1 AT E199776T1
Authority
AT
Austria
Prior art keywords
combustion
fuel gas
foraminous
gas
combustion zone
Prior art date
Application number
AT95305102T
Other languages
English (en)
Inventor
David Bartz
Robert M Kendall
Frederick E Moreno
Original Assignee
Alzeta Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alzeta Corp filed Critical Alzeta Corp
Application granted granted Critical
Publication of ATE199776T1 publication Critical patent/ATE199776T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12—Radiant burners
    • F23D14/16—Radiant burners using permeable blocks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2203/00—Gaseous fuel burners
    • F23D2203/10—Flame diffusing means
    • F23D2203/105—Porous plates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/10—Burner material specifications ceramic
    • F23D2212/103—Fibres
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/20—Burner material specifications metallic
    • F23D2212/201—Fibres
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2215/00—Preventing emissions
    • F23J2215/30—Halogen; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/70—Condensing contaminants with coolers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Compounds Of Unknown Constitution (AREA)
  • Combustion Of Fluid Fuel (AREA)
AT95305102T 1994-07-25 1995-07-21 Zerstörung giftiger substanzen durch verbrennung ATE199776T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/280,072 US5510093A (en) 1994-07-25 1994-07-25 Combustive destruction of halogenated compounds

Publications (1)

Publication Number Publication Date
ATE199776T1 true ATE199776T1 (de) 2001-03-15

Family

ID=23071536

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95305102T ATE199776T1 (de) 1994-07-25 1995-07-21 Zerstörung giftiger substanzen durch verbrennung

Country Status (5)

Country Link
US (2) US5510093A (de)
EP (1) EP0694735B9 (de)
JP (1) JP3512528B2 (de)
AT (1) ATE199776T1 (de)
DE (1) DE69520313T2 (de)

Families Citing this family (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3404981B2 (ja) * 1995-04-21 2003-05-12 日本鋼管株式会社 気体加熱装置
JP3486022B2 (ja) * 1995-10-16 2004-01-13 ジャパン・エア・ガシズ株式会社 排ガス処理装置
JPH09202973A (ja) * 1996-01-24 1997-08-05 Tokyo Electron Ltd 成膜処理装置の排気システム構造
GB9608061D0 (en) * 1996-04-16 1996-06-19 Boc Group Plc Removal of noxious substances from gas streams
USH1709H (en) * 1996-04-19 1998-02-03 E. I. Du Pont De Nemours And Company Thermal destruction of halocarbons
TW342436B (en) * 1996-08-14 1998-10-11 Nippon Oxygen Co Ltd Combustion type harm removal apparatus (1)
US5955037A (en) 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
US6000930A (en) * 1997-05-12 1999-12-14 Altex Technologies Corporation Combustion process and burner apparatus for controlling NOx emissions
JPH1151357A (ja) * 1997-07-31 1999-02-26 Tokyo Gas Co Ltd 有機溶剤直接燃焼処理装置および有機溶剤直接燃焼処理装置における廃熱回収システム
JPH1182978A (ja) * 1997-08-29 1999-03-26 Tokyo Gas Co Ltd 有機物含有排気燃焼処理装置および有機物含有排気燃焼処理装置における廃熱回収システム
JP4066107B2 (ja) 1997-11-21 2008-03-26 株式会社荏原製作所 排ガス処理用燃焼器
JP4176132B2 (ja) * 1997-11-21 2008-11-05 株式会社荏原製作所 排ガス処理用燃焼器
JPH11159734A (ja) * 1997-11-28 1999-06-15 Tokyo Gas Co Ltd 通気性多孔体配置型排気燃焼処理装置
US6153150A (en) 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
US6261524B1 (en) * 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants
US6224834B1 (en) 1998-04-16 2001-05-01 International Business Machines Corporation Silane oxidation exhaust trap
KR100644994B1 (ko) 1998-12-01 2006-11-10 가부시키가이샤 에바라 세이사꾸쇼 배기가스처리장치
JP4497726B2 (ja) 1998-12-01 2010-07-07 株式会社荏原製作所 排ガス処理装置
US6183241B1 (en) 1999-02-10 2001-02-06 Midwest Research Institute Uniform-burning matrix burner
US6423284B1 (en) 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
JP2001355820A (ja) * 2000-06-12 2001-12-26 Sumitomo Seika Chem Co Ltd 排ガスの処理方法および処理装置
TW536604B (en) * 2000-10-02 2003-06-11 Ebara Corp Combustion type waste gas treatment system
US6821489B1 (en) 2000-10-10 2004-11-23 International Business Machines Corporation System and method for abating the simultaneous flow of silane and arsine
GB0026697D0 (en) 2000-11-01 2000-12-20 Boc Group Plc Removal of noxious substances from gas streams
US20030044328A1 (en) * 2001-09-01 2003-03-06 Wu-Niang Feng Semiconductor waste-gas treating apparatus being filth sedimentation-and etching-proof
JP4172938B2 (ja) * 2002-02-14 2008-10-29 昭和電工株式会社 排ガスの処理方法および処理装置
US20040083734A1 (en) * 2002-11-05 2004-05-06 Kendall Robert M. Sintered metal fiber liner for gas burners
DE10343439A1 (de) * 2003-09-12 2005-04-14 DAS-Dünnschicht Anlagen Systeme GmbH Dresden Einlasselement an einer Entsorgungseinrichtung für Schadstoffe enthaltende Prozessabgase
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
GB0417378D0 (en) 2004-08-04 2004-09-08 Boc Group Plc Gas abatement
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US8095240B2 (en) * 2004-11-18 2012-01-10 Applied Materials, Inc. Methods for starting and operating a thermal abatement system
US7682574B2 (en) * 2004-11-18 2010-03-23 Applied Materials, Inc. Safety, monitoring and control features for thermal abatement reactor
JP4619798B2 (ja) * 2005-01-14 2011-01-26 日本パイオニクス株式会社 有害ガスの浄化装置
GB0509944D0 (en) * 2005-05-16 2005-06-22 Boc Group Plc Gas combustion apparatus
WO2007053626A2 (en) * 2005-10-31 2007-05-10 Applied Materials, Inc. Process abatement reactor
US7522974B2 (en) 2006-08-23 2009-04-21 Applied Materials, Inc. Interface for operating and monitoring abatement systems
DE102006052586B4 (de) * 2006-11-08 2008-07-03 Schott Solar Gmbh Verfahren und Vorrichtung zur Reinigung der Abgase einer Siliziumdünnschicht-Produktionsanlage
US8591819B2 (en) * 2006-12-05 2013-11-26 Ebara Corporation Combustion-type exhaust gas treatment apparatus
DE102007016018A1 (de) * 2007-04-03 2008-10-09 Sms Demag Ag Brenneranordnung
GB0706544D0 (en) * 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
JP5232407B2 (ja) * 2007-05-25 2013-07-10 日本パイオニクス株式会社 排ガスの浄化装置
US20090149996A1 (en) * 2007-12-05 2009-06-11 Applied Materials, Inc. Multiple inlet abatement system
US20090311641A1 (en) * 2008-06-13 2009-12-17 Gunther Berthold Gas flame stabilization method and apparatus
DE102008032833A1 (de) * 2008-07-14 2010-01-21 Rational Ag Nahrungsmittelbehandlungsgerät
DE102008053959B4 (de) * 2008-10-30 2010-12-09 Rational Ag Nahrungsmittelbehandlungsgerät mit Brenner
GB2481144B (en) * 2008-12-23 2014-06-18 Mks Instr Inc Reactive chemical containment system
GB0902234D0 (en) 2009-02-11 2009-03-25 Edwards Ltd Method of treating an exhaust gas stream
GB0902221D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Pilot
WO2011117231A1 (en) 2010-03-26 2011-09-29 Solvay Sa Method of treating waste gases
WO2012026945A1 (en) * 2010-08-27 2012-03-01 Empire Technology Development Llc Hydrofluorocarbon elimination device
GB2504468B (en) 2012-07-27 2017-03-22 Edwards Ltd Burner Nozzle Reciprocating Scraper Arrangement for Reducing Effluent Gas Deposits
KR101278178B1 (ko) * 2012-10-15 2013-07-05 씨에스케이(주) 스크러버용 버너
US9023303B2 (en) * 2013-04-15 2015-05-05 Airgard, Inc. Extended or multiple reaction zones in scrubbing apparatus
KR102277236B1 (ko) 2013-04-25 2021-07-13 에드워즈 리미티드 방사 버너
GB2514341B (en) * 2013-05-20 2016-08-24 Edwards Ltd Radiant burner combustion monitoring
GB2516267B (en) 2013-07-17 2016-08-17 Edwards Ltd Head assembly
JP6258797B2 (ja) * 2014-06-27 2018-01-10 日本パイオニクス株式会社 排ガスの燃焼式浄化装置
JP6310765B2 (ja) * 2014-05-12 2018-04-11 日本パイオニクス株式会社 排ガスの燃焼式浄化装置
GB2528444B (en) * 2014-07-21 2018-06-20 Edwards Ltd Abatement apparatus
GB2528445B (en) 2014-07-21 2018-06-20 Edwards Ltd Separator apparatus
GB2532776A (en) * 2014-11-28 2016-06-01 Edwards Ltd Radiant burner
GB2533293A (en) 2014-12-15 2016-06-22 Edwards Ltd Inlet assembly
WO2016153096A1 (ko) * 2015-03-26 2016-09-29 한국에너지기술연구원 난분해성 유해가스 소각처리를 위한 에너지 절약형 연소장치 및 이의 운전방법
GB201505447D0 (en) * 2015-03-30 2015-05-13 Edwards Ltd Radiant burner
GB2536905B (en) * 2015-03-30 2020-01-08 Edwards Ltd Radiant burner
US10369582B2 (en) 2015-04-30 2019-08-06 Emissol Llc System and method for spray visualization
GB2550382B (en) 2016-05-18 2020-04-22 Edwards Ltd Burner Inlet Assembly
SG11201906205UA (en) 2017-01-06 2019-08-27 Alzeta Corp Systems and methods for improved waste gas abatement
GB2573767A (en) 2018-05-15 2019-11-20 Edwards Ltd Method for fabricating a component of an abatement apparatus
US11614230B2 (en) * 2018-10-11 2023-03-28 Corning Incorporated Abatement systems including an oxidizer head assembly and methods for using the same
GB2579197B (en) 2018-11-22 2021-06-09 Edwards Ltd Abatement method
GB2584675B (en) 2019-06-10 2021-11-17 Edwards Ltd Inlet assembly for an abatement apparatus
CN111412481B (zh) * 2020-03-19 2023-01-10 长江存储科技有限责任公司 废气处理装置
KR102427056B1 (ko) * 2020-06-02 2022-08-01 씨에스케이(주) 스크러버용 버너
GB2604652A (en) 2021-03-12 2022-09-14 Edwards Ltd Abatement apparatus
GB2608818A (en) 2021-07-13 2023-01-18 Edwards Ltd Inlet nozzle assembly
GB2608817A (en) 2021-07-13 2023-01-18 Edwards Ltd Modular abatement apparatus
GB2608821A (en) 2021-07-13 2023-01-18 Edwards Ltd Inlet assembly
GB2608822A (en) 2021-07-13 2023-01-18 Edwards Ltd Inlet nozzle assembly
GB2608816A (en) * 2021-07-13 2023-01-18 Edwards Ltd Abatement apparatus
GB2608820A (en) 2021-07-13 2023-01-18 Edwards Ltd Inlet assembly

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2775294A (en) 1950-03-11 1956-12-25 American Infra Red Radiant Co Radiation burners
US3173470A (en) 1961-11-17 1965-03-16 Gen Precision Inc Gas-fueled radiant heater
US3179156A (en) 1962-01-17 1965-04-20 American Thermocatalytic Corp Space heater
US3383159A (en) 1966-02-03 1968-05-14 American Thermocatalytic Corp Combustion elements
US3683058A (en) 1969-08-25 1972-08-08 Maurice Partiot Infrared burners and high efficiency radiant plates
US3840344A (en) * 1972-06-06 1974-10-08 Chemothermic Ind Inc Carbon black production
US3954387A (en) 1972-06-08 1976-05-04 J. Tennant & Sons (Warrington) Limited Burners
US4048290A (en) * 1976-01-28 1977-09-13 Cabot Corporation Process for the production of finely-divided metal and metalloid oxides
SU716574A1 (ru) * 1978-05-15 1980-02-25 Предприятие П/Я А-1997 Способ очистки отход щих газов
US4206711A (en) * 1978-10-04 1980-06-10 Angelo J. Noce Method and apparatus for processing waste fluid
SE453120B (sv) * 1984-12-28 1988-01-11 Lumalampan Ab Anordning for efterbrenning av med framfor allt kolvatten bemengda avgaser fran destruktionsanleggningar eller liknande
US4627388A (en) 1985-07-22 1986-12-09 The Dow Chemical Company Combustion of halogenated hydrocarbons with heat recovery
US4899696A (en) * 1985-09-12 1990-02-13 Gas Research Institute Commercial storage water heater process
US4801437A (en) * 1985-12-04 1989-01-31 Japan Oxygen Co., Ltd. Process for treating combustible exhaust gases containing silane and the like
US4746287A (en) 1986-01-17 1988-05-24 Gas Research Institute Fiber matrix burner composition with aluminum alloys and method of formulation
US4828481A (en) * 1987-10-05 1989-05-09 Institute Of Gas Technology Process and apparatus for high temperature combustion
JPH0195214A (ja) * 1987-10-06 1989-04-13 Toyo Sanso Kk 特殊材料ガスの燃焼方法
US5183646A (en) * 1989-04-12 1993-02-02 Custom Engineered Materials, Inc. Incinerator for complete oxidation of impurities in a gas stream
US5211552A (en) * 1990-08-15 1993-05-18 Alzeta Corporation Adiabatic surface combustion with excess air
DE4201650C2 (de) * 1992-01-22 1994-08-11 Mahler Dienstleistung Vorrichtung zur thermischen Verbrennung von mit oxidierbaren Schadstoffen belasteten Abgasen
US5326631A (en) 1993-06-07 1994-07-05 Alzeta Corporation Unsintered fiber burner made with metal fibers, ceramic fibers and binding agent

Also Published As

Publication number Publication date
JPH08105618A (ja) 1996-04-23
US5510093A (en) 1996-04-23
JP3512528B2 (ja) 2004-03-29
EP0694735B1 (de) 2001-03-14
DE69520313D1 (de) 2001-04-19
DE69520313T2 (de) 2001-10-31
EP0694735B9 (de) 2002-01-02
EP0694735A1 (de) 1996-01-31
US5603905A (en) 1997-02-18

Similar Documents

Publication Publication Date Title
ATE199776T1 (de) Zerstörung giftiger substanzen durch verbrennung
EP0802370A3 (de) Entsorgung schädlicher Substanzen aus Gasströmen
ATE105396T1 (de) Verfahren zur verbrennungsluftzufuehrung und feuerungsanlage.
BR8006257A (pt) Processo para a combustao parcial de combustivel solido, e, queimador para executar o processo
DE69515109D1 (de) Verfahren und Vorrichtung zum Verbrennen sauerstoffhaltiger Bestandteile in einem Prozessgas
ATE70611T1 (de) Verfahren zum verbrennen von muell.
DK0874194T3 (da) Brænder til partikelindsprøjtning
JPS6467521A (en) Method and device for incinerating fluid noxious waste
ATE241779T1 (de) Verfahren und vorrichtung zur erzeugung und nutzung von gas aus abfallstoffen
ATE145274T1 (de) Verfahren und vorrichtung um durch anwendung von hitze feststoffabfall umweltunschädlich zu machen
ATE170968T1 (de) Verfahren und vorrichtung zur unterdrückung von flammen-/druckschwingungen bei einer feuerung
ATE168359T1 (de) Verfahren zum schmelzen von verbrennungsaschen
ATE28696T1 (de) Verfahren und vorrichtung zum nachverbrennen von abgasen.
ATE121527T1 (de) Verfahren und anlage zur verbrennung von abfällen.
ATE180558T1 (de) Verfahren zum verbrennen von staubförmigen materialen
CA2150969A1 (en) Combustion of Sulfur Released from Sulfur Bearing Materials
ATE233881T1 (de) Geregeltes verfahren zur thermischen oxidation von organischen abfallstoffen
ATE182668T1 (de) Müllverbrennungsanlage
US3563697A (en) Smoke abatement process
ATE113868T1 (de) Verfahren zur ermässigung der konzentration von schadstoffen in abgasen.
KR890000835A (ko) 분쇄연료 연소장치
ATE230094T1 (de) Verfahren und vorrichtung zur simultanen entsorgung von feinkörnigen schüttgütern und sonstigen abfällen in thermischen abfallbehandlungsanlagen
SE9301253L (sv) För fasta bränslen avsedd förbränningsanläggning
JPH06123417A (ja) 焼却炉における安定燃焼方法
DE59807861D1 (de) Vorrichtung in mit flüssigen Brennstoffen betriebenen Heizungsanlagen