DE69504548D1 - Verfahren zur Herstellung einer Membranstruktur aus Keramik mit einem konvexen Teil - Google Patents
Verfahren zur Herstellung einer Membranstruktur aus Keramik mit einem konvexen TeilInfo
- Publication number
- DE69504548D1 DE69504548D1 DE69504548T DE69504548T DE69504548D1 DE 69504548 D1 DE69504548 D1 DE 69504548D1 DE 69504548 T DE69504548 T DE 69504548T DE 69504548 T DE69504548 T DE 69504548T DE 69504548 D1 DE69504548 D1 DE 69504548D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- convex part
- membrane structure
- ceramic membrane
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000012528 membrane Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- H10N30/2048—Membrane type having non-planar shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
- H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/16—Two dimensionally sectional layer
- Y10T428/163—Next to unitary web or sheet of equal or greater extent
- Y10T428/164—Continuous two dimensionally sectional layer
- Y10T428/166—Glass, ceramic, or metal sections [e.g., floor or wall tile, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
- Y10T428/24322—Composite web or sheet
- Y10T428/24331—Composite web or sheet including nonapertured component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24628—Nonplanar uniform thickness material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Measuring Fluid Pressure (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1769794 | 1994-02-14 | ||
JP2417494 | 1994-02-22 | ||
JP12273394 | 1994-06-03 | ||
JP18920394 | 1994-08-11 | ||
JP24117294A JP3162584B2 (ja) | 1994-02-14 | 1994-10-05 | 圧電/電歪膜型素子及びその製造方法 |
JP24431794A JP3366132B2 (ja) | 1994-06-03 | 1994-10-07 | セラミックダイヤフラム構造体及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69504548D1 true DE69504548D1 (de) | 1998-10-15 |
DE69504548T2 DE69504548T2 (de) | 1999-03-04 |
Family
ID=27548740
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69504548T Expired - Lifetime DE69504548T2 (de) | 1994-02-14 | 1995-02-13 | Verfahren zur Herstellung einer Membranstruktur aus Keramik mit einem konvexen Teil |
DE69527312T Expired - Lifetime DE69527312T2 (de) | 1994-02-14 | 1995-02-13 | Membranstruktur aus Keramik mit einem konvexen Teil und Verfahren zu ihrer Herstellung |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69527312T Expired - Lifetime DE69527312T2 (de) | 1994-02-14 | 1995-02-13 | Membranstruktur aus Keramik mit einem konvexen Teil und Verfahren zu ihrer Herstellung |
Country Status (3)
Country | Link |
---|---|
US (1) | US5545461A (de) |
EP (2) | EP0843367B1 (de) |
DE (2) | DE69504548T2 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5634999A (en) * | 1994-09-06 | 1997-06-03 | Ngk Insulators, Ltd. | Method of producing ceramic diaphragm structure having convex diaphragm portion |
JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
JP3320947B2 (ja) * | 1995-05-26 | 2002-09-03 | 日本碍子株式会社 | 微細貫通孔を有するセラミック部材 |
US5728244A (en) * | 1995-05-26 | 1998-03-17 | Ngk Insulators, Ltd. | Process for production of ceramic member having fine throughholes |
JP3320596B2 (ja) * | 1995-09-27 | 2002-09-03 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
JP3432974B2 (ja) * | 1995-10-13 | 2003-08-04 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
JP3343030B2 (ja) * | 1996-05-22 | 2002-11-11 | 日本碍子株式会社 | センサ素子 |
EP0813254B1 (de) * | 1996-06-14 | 2001-10-17 | Ngk Insulators, Ltd. | Verfahren zur Herstellung einer keramischen Membranstruktur |
US5958165A (en) * | 1996-07-19 | 1999-09-28 | Ngk Insulators, Ltd. | Method of manufacturing ceramic member |
JP3414227B2 (ja) * | 1997-01-24 | 2003-06-09 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
US6494566B1 (en) * | 1997-01-31 | 2002-12-17 | Kyocera Corporation | Head member having ultrafine grooves and a method of manufacture thereof |
US6097135A (en) * | 1998-05-27 | 2000-08-01 | Louis J. Desy, Jr. | Shaped multilayer ceramic transducers and method for making the same |
DE69811333T2 (de) | 1997-07-25 | 2003-07-10 | Seiko Epson Corp., Tokio/Tokyo | Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsgerät |
EP0899107B1 (de) * | 1997-09-01 | 2002-12-18 | Seiko Epson Corporation | Tintenstrahldrucker |
US6246156B1 (en) * | 1998-03-27 | 2001-06-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element |
JP3648086B2 (ja) * | 1998-03-27 | 2005-05-18 | 日本碍子株式会社 | ZrO2磁器 |
JP3462400B2 (ja) | 1998-09-14 | 2003-11-05 | 日本碍子株式会社 | セラミックダイヤフラム構造体の製造方法 |
WO2001072521A1 (fr) * | 2000-03-27 | 2001-10-04 | Fujitsu Limited | Actionneur bimorphe, tete a jet d'encre utilisant un actionneur bimorphe et procede de fabrication de celui-ci |
WO2005008798A1 (ja) * | 2003-07-22 | 2005-01-27 | Ngk Insulators, Ltd. | アクチュエータ素子 |
US7141915B2 (en) * | 2003-07-22 | 2006-11-28 | Ngk Insulators, Ltd. | Actuator device |
ITMI20040223A1 (it) * | 2004-02-11 | 2004-05-11 | S I S A S R L | Dispositivo di emissione sonora particolarmente per sistemi di allarme per autoveicoli motoveicoli ambienti e simili |
US7126255B2 (en) * | 2004-04-05 | 2006-10-24 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film-type device |
JP4963159B2 (ja) * | 2004-11-19 | 2012-06-27 | 日本碍子株式会社 | 圧電/電歪デバイス |
JP2006147839A (ja) * | 2004-11-19 | 2006-06-08 | Ngk Insulators Ltd | 圧電/電歪デバイス |
JP5026796B2 (ja) * | 2004-12-22 | 2012-09-19 | 日本碍子株式会社 | ダイヤフラム構造体 |
JP4622574B2 (ja) * | 2005-02-21 | 2011-02-02 | 株式会社デンソー | 超音波素子 |
JP5177474B2 (ja) | 2006-04-24 | 2013-04-03 | 日本碍子株式会社 | セラミックス薄板体 |
JP4582176B2 (ja) * | 2008-03-31 | 2010-11-17 | ブラザー工業株式会社 | 液滴吐出ヘッド及びその製造方法 |
DE102008046336A1 (de) * | 2008-09-09 | 2010-03-11 | Osram Gesellschaft mit beschränkter Haftung | LTCC-Schichtstapel |
US8113053B2 (en) * | 2008-09-30 | 2012-02-14 | General Electric Company | Capacitive accelerometer |
EP2423993B1 (de) | 2009-04-24 | 2015-08-12 | NGK Insulators, Ltd. | Verfahren zur herstellung eines gebrannten piezoelektrischen körpers in dünnbrettform |
US8453506B2 (en) | 2010-11-29 | 2013-06-04 | General Electric Company | Spring mounting element for an accelerometer |
DE102013101936A1 (de) * | 2013-02-27 | 2014-08-28 | Endress + Hauser Gmbh + Co. Kg | Drucksensor |
US9851272B2 (en) | 2015-02-06 | 2017-12-26 | Viatran Corporation | Pressure sensor diaphragm |
WO2016130996A1 (en) * | 2015-02-13 | 2016-08-18 | Airmar Technology Corporation | Acoustic transducer element |
DE102016115260B3 (de) * | 2016-08-17 | 2018-02-08 | Infineon Technologies Ag | Schallwellensensor |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60111600A (ja) * | 1983-11-21 | 1985-06-18 | Mitsubishi Mining & Cement Co Ltd | 電気機械変換素子 |
JPS60260239A (ja) * | 1984-06-07 | 1985-12-23 | Sony Corp | 送受信装置 |
US4525464A (en) * | 1984-06-12 | 1985-06-25 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften | Ceramic body of zirconium dioxide (ZrO2) and method for its preparation |
JPS62213399A (ja) * | 1986-03-12 | 1987-09-19 | Omron Tateisi Electronics Co | 圧電磁器 |
JPS63292032A (ja) * | 1987-05-26 | 1988-11-29 | Ngk Insulators Ltd | 圧力検出器 |
JPH0731091B2 (ja) * | 1987-05-27 | 1995-04-10 | 日本碍子株式会社 | 歪検出器 |
US5089455A (en) * | 1989-08-11 | 1992-02-18 | Corning Incorporated | Thin flexible sintered structures |
JP2693291B2 (ja) * | 1990-07-26 | 1997-12-24 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
US5210455A (en) * | 1990-07-26 | 1993-05-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion |
JP3126212B2 (ja) * | 1992-03-21 | 2001-01-22 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
EP0526048B1 (de) * | 1991-07-18 | 1997-11-12 | Ngk Insulators, Ltd. | Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid |
JP3144949B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
-
1995
- 1995-02-10 US US08/386,677 patent/US5545461A/en not_active Expired - Lifetime
- 1995-02-13 DE DE69504548T patent/DE69504548T2/de not_active Expired - Lifetime
- 1995-02-13 EP EP98102069A patent/EP0843367B1/de not_active Expired - Lifetime
- 1995-02-13 EP EP95300875A patent/EP0671772B1/de not_active Expired - Lifetime
- 1995-02-13 DE DE69527312T patent/DE69527312T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0843367A3 (de) | 1998-06-03 |
EP0843367A2 (de) | 1998-05-20 |
DE69527312D1 (de) | 2002-08-08 |
DE69527312T2 (de) | 2003-02-13 |
DE69504548T2 (de) | 1999-03-04 |
EP0671772A1 (de) | 1995-09-13 |
EP0671772B1 (de) | 1998-09-09 |
US5545461A (en) | 1996-08-13 |
EP0843367B1 (de) | 2002-07-03 |
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