DE69519706D1 - Membranstruktur aus Keramik mit einem konvexen Teil und Verfahren zu ihrer Herstellung - Google Patents

Membranstruktur aus Keramik mit einem konvexen Teil und Verfahren zu ihrer Herstellung

Info

Publication number
DE69519706D1
DE69519706D1 DE69519706T DE69519706T DE69519706D1 DE 69519706 D1 DE69519706 D1 DE 69519706D1 DE 69519706 T DE69519706 T DE 69519706T DE 69519706 T DE69519706 T DE 69519706T DE 69519706 D1 DE69519706 D1 DE 69519706D1
Authority
DE
Germany
Prior art keywords
manufacture
convex part
membrane structure
ceramic membrane
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69519706T
Other languages
English (en)
Other versions
DE69519706T2 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Hideo Masumori
Katsuyuki Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69519706D1 publication Critical patent/DE69519706D1/de
Application granted granted Critical
Publication of DE69519706T2 publication Critical patent/DE69519706T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/16—Two dimensionally sectional layer
    • Y10T428/163—Next to unitary web or sheet of equal or greater extent
    • Y10T428/164—Continuous two dimensionally sectional layer
    • Y10T428/166—Glass, ceramic, or metal sections [e.g., floor or wall tile, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y10T428/24331—Composite web or sheet including nonapertured component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24628—Nonplanar uniform thickness material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Fluid Pressure (AREA)
DE69519706T 1994-09-06 1995-09-05 Membranstruktur aus Keramik mit einem konvexen Teil und Verfahren zu ihrer Herstellung Expired - Lifetime DE69519706T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21244494 1994-09-06

Publications (2)

Publication Number Publication Date
DE69519706D1 true DE69519706D1 (de) 2001-02-01
DE69519706T2 DE69519706T2 (de) 2001-05-31

Family

ID=16622719

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69519706T Expired - Lifetime DE69519706T2 (de) 1994-09-06 1995-09-05 Membranstruktur aus Keramik mit einem konvexen Teil und Verfahren zu ihrer Herstellung

Country Status (4)

Country Link
US (2) US5634999A (de)
EP (1) EP0701112B1 (de)
CN (1) CN1047341C (de)
DE (1) DE69519706T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3471447B2 (ja) * 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
US6140746A (en) * 1995-04-03 2000-10-31 Seiko Epson Corporation Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film
JP3320596B2 (ja) 1995-09-27 2002-09-03 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US6217158B1 (en) † 1996-04-11 2001-04-17 Seiko Epson Corporation Layered type ink jet recording head with improved piezoelectric actuator unit
DE69707359T2 (de) * 1996-06-14 2002-06-27 Ngk Insulators Ltd Verfahren zur Herstellung einer keramischen Membranstruktur
US5895702A (en) * 1996-07-16 1999-04-20 Ngk Insulators, Ltd. Ceramic member
JP4334139B2 (ja) 1997-12-23 2009-09-30 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 容量式の真空測定セルのためのダイヤフラム
WO1999034184A1 (de) * 1997-12-23 1999-07-08 Unaxis Trading Ag Kapazitive vakuummesszelle
JP3508682B2 (ja) 1999-03-02 2004-03-22 セイコーエプソン株式会社 圧電アクチュエータ、インクジェット式記録ヘッド、これらの製造方法及びインクジェットプリンタ
DE10203024B4 (de) * 2002-01-26 2009-11-26 Robert Bosch Gmbh Verfahren zur Herstellung eines Keramiksubstrats
US7141915B2 (en) * 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device
WO2005008798A1 (ja) * 2003-07-22 2005-01-27 Ngk Insulators, Ltd. アクチュエータ素子
US20050133808A1 (en) * 2003-09-11 2005-06-23 Kyocera Corporation Package for housing light-emitting element, light-emitting apparatus and illumination apparatus
DE102004018999B4 (de) * 2004-04-20 2006-04-20 Forschungszentrum Jülich GmbH Federelement sowie Herstellung und Verwendung derselben
JP5026796B2 (ja) * 2004-12-22 2012-09-19 日本碍子株式会社 ダイヤフラム構造体
DE102008046336A1 (de) * 2008-09-09 2010-03-11 Osram Gesellschaft mit beschränkter Haftung LTCC-Schichtstapel
DK2405514T3 (da) 2010-07-07 2013-05-27 Univ Denmark Tech Dtu Fremgangsmåde til sintring
IT1401220B1 (it) * 2010-07-15 2013-07-12 Metallux Sa Sensore e metodo di fabbricazione.
DE102010063065A1 (de) * 2010-12-14 2012-06-14 Endress + Hauser Gmbh + Co. Kg Drucksensor und Verfahren zu dessen Herstellung+
WO2012112540A2 (en) * 2011-02-15 2012-08-23 Fujifilm Dimatix, Inc. Piezoelectric transducers using micro-dome arrays
WO2014051299A1 (ko) * 2012-09-25 2014-04-03 Bae Sang-Cheol 발전용 압전소자 및 이를 이용한 발전장치
US9851272B2 (en) 2015-02-06 2017-12-26 Viatran Corporation Pressure sensor diaphragm
US9882115B2 (en) * 2015-04-02 2018-01-30 The Boeing Company Integrated compliant boundary for piezoelectric bimorph actuator
KR102377658B1 (ko) * 2016-03-23 2022-03-24 엔지케이 인슐레이터 엘티디 코디어라이트질 소결체, 그 제법 및 복합 기판
US10571348B2 (en) * 2016-08-30 2020-02-25 Honeywell International Inc. Overforce control through sense die design
CN106582295B (zh) * 2016-11-28 2023-05-12 昆明理工大学 一种压电陶瓷滤膜及使用装置
CN107932706B (zh) * 2017-10-27 2018-12-04 中国科学院长春光学精密机械与物理研究所 凝胶注模成型米级碳化硅陶瓷素坯无阻力干燥装置及方法
CN109551614B (zh) * 2018-10-11 2021-04-20 中国科学院宁波材料技术与工程研究所 一种用于粉末压制成型的超声波装置
CN110636420B (zh) * 2019-09-25 2021-02-09 京东方科技集团股份有限公司 一种薄膜扬声器、薄膜扬声器的制备方法以及电子设备
CN113532704A (zh) * 2020-04-14 2021-10-22 联合汽车电子有限公司 压力传感器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60111600A (ja) * 1983-11-21 1985-06-18 Mitsubishi Mining & Cement Co Ltd 電気機械変換素子
GB2161647A (en) * 1984-07-10 1986-01-15 Gen Electric Co Plc Piezoelectric devices
JPS62213399A (ja) * 1986-03-12 1987-09-19 Omron Tateisi Electronics Co 圧電磁器
JPH0731091B2 (ja) * 1987-05-27 1995-04-10 日本碍子株式会社 歪検出器
US5255427A (en) * 1989-03-07 1993-10-26 Pfister Gmbh Ceramic hollow bodies and method of manufacturing such bodies
US5089455A (en) * 1989-08-11 1992-02-18 Corning Incorporated Thin flexible sintered structures
DE4042336A1 (de) * 1990-02-12 1991-08-14 Fraunhofer Ges Forschung Drucksensoranordnung mit einem drucksensor und einem referenzelement
US5210455A (en) * 1990-07-26 1993-05-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
JP3120260B2 (ja) * 1992-12-26 2000-12-25 日本碍子株式会社 圧電／電歪膜型素子
JP3280799B2 (ja) * 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same

Also Published As

Publication number Publication date
US5634999A (en) 1997-06-03
EP0701112A3 (de) 1997-02-05
CN1128199A (zh) 1996-08-07
DE69519706T2 (de) 2001-05-31
US5798168A (en) 1998-08-25
EP0701112A2 (de) 1996-03-13
EP0701112B1 (de) 2000-12-27
CN1047341C (zh) 1999-12-15

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Legal Events

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8364 No opposition during term of opposition