DE69311915D1 - Verfahren zur bildung eines musters mittels elektronenstrahls - Google Patents

Verfahren zur bildung eines musters mittels elektronenstrahls

Info

Publication number
DE69311915D1
DE69311915D1 DE69311915T DE69311915T DE69311915D1 DE 69311915 D1 DE69311915 D1 DE 69311915D1 DE 69311915 T DE69311915 T DE 69311915T DE 69311915 T DE69311915 T DE 69311915T DE 69311915 D1 DE69311915 D1 DE 69311915D1
Authority
DE
Germany
Prior art keywords
pattern
forming
electron beam
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69311915T
Other languages
English (en)
Other versions
DE69311915T2 (de
Inventor
Grahame Rosolen
Peter Mitchell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vistec Lithography Ltd
Original Assignee
Vistec Lithography Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vistec Lithography Ltd filed Critical Vistec Lithography Ltd
Publication of DE69311915D1 publication Critical patent/DE69311915D1/de
Application granted granted Critical
Publication of DE69311915T2 publication Critical patent/DE69311915T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control
    • H01J37/3026—Patterning strategy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/887—Nanoimprint lithography, i.e. nanostamp

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Manufacturing Optical Record Carriers (AREA)
DE69311915T 1993-12-08 1993-12-08 Verfahren zur bildung eines musters mittels elektronenstrahls Expired - Fee Related DE69311915T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1993/003454 WO1995016274A1 (en) 1993-12-08 1993-12-08 Method of writing a pattern by an electron beam

Publications (2)

Publication Number Publication Date
DE69311915D1 true DE69311915D1 (de) 1997-08-07
DE69311915T2 DE69311915T2 (de) 1998-01-08

Family

ID=8165801

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311915T Expired - Fee Related DE69311915T2 (de) 1993-12-08 1993-12-08 Verfahren zur bildung eines musters mittels elektronenstrahls

Country Status (6)

Country Link
US (1) US5879860A (de)
EP (1) EP0729642B1 (de)
JP (1) JPH09511096A (de)
KR (1) KR100279899B1 (de)
DE (1) DE69311915T2 (de)
WO (1) WO1995016274A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7279046B2 (en) * 2002-03-27 2007-10-09 Nanoink, Inc. Method and apparatus for aligning patterns on a substrate
EP1556737B1 (de) * 2002-10-21 2008-12-31 Nanoink, Inc. Verfahren zur herstellung von strukturen im nanometerbereich zur anwendung im bereich der maskenreparatur
GB2404782B (en) * 2003-08-01 2005-12-07 Leica Microsys Lithography Ltd Pattern-writing equipment
JP4649187B2 (ja) * 2004-12-07 2011-03-09 株式会社東芝 荷電ビーム描画データの作成方法、荷電ビーム描画方法および荷電ビーム描画装置
US8999514B2 (en) * 2012-02-03 2015-04-07 General Electric Company Bond coating powder comprising MCrAlY (M=Ni,Fe,Co), method of making, and a method of applying as bond coating

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5957431A (ja) * 1982-09-27 1984-04-03 Fujitsu Ltd 電子ビ−ム露光装置
JPH02218115A (ja) * 1989-02-20 1990-08-30 Toshiba Corp パターン形成方法

Also Published As

Publication number Publication date
EP0729642A1 (de) 1996-09-04
JPH09511096A (ja) 1997-11-04
EP0729642B1 (de) 1997-07-02
WO1995016274A1 (en) 1995-06-15
US5879860A (en) 1999-03-09
KR960706688A (ko) 1996-12-09
KR100279899B1 (ko) 2001-03-02
DE69311915T2 (de) 1998-01-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee