DE69220566T2 - Verfahren zur bildung einer beschichtung mittels aufdampfen - Google Patents
Verfahren zur bildung einer beschichtung mittels aufdampfenInfo
- Publication number
- DE69220566T2 DE69220566T2 DE69220566T DE69220566T DE69220566T2 DE 69220566 T2 DE69220566 T2 DE 69220566T2 DE 69220566 T DE69220566 T DE 69220566T DE 69220566 T DE69220566 T DE 69220566T DE 69220566 T2 DE69220566 T2 DE 69220566T2
- Authority
- DE
- Germany
- Prior art keywords
- devolving
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33396191 | 1991-11-21 | ||
JP35913691 | 1991-12-26 | ||
JP9187092 | 1992-03-17 | ||
JP4324964A JPH05320874A (ja) | 1991-11-21 | 1992-11-10 | 蒸着めっき層の形成方法及び蒸着Al−Zn合金めっき材料 |
PCT/JP1992/001511 WO1993010275A1 (en) | 1991-11-21 | 1992-11-19 | Method of forming layer of evaporation coating |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69220566D1 DE69220566D1 (de) | 1997-07-31 |
DE69220566T2 true DE69220566T2 (de) | 1998-02-19 |
Family
ID=27467956
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69220566T Expired - Fee Related DE69220566T2 (de) | 1991-11-21 | 1992-11-19 | Verfahren zur bildung einer beschichtung mittels aufdampfen |
Country Status (4)
Country | Link |
---|---|
US (1) | US5429843A (de) |
EP (1) | EP0572673B1 (de) |
DE (1) | DE69220566T2 (de) |
WO (1) | WO1993010275A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT400040B (de) * | 1993-06-02 | 1995-09-25 | Andritz Patentverwaltung | Verfahren und vorrichtung zur beschichtung von metallsubstraten, insbesondere stahl- oder aluminiumbblechen in bandform |
MY139695A (en) * | 1996-05-21 | 2009-10-30 | Panasonic Corp | Thin film, method and apparatus for forming the same, and electronic component incorporating the same |
US6007880A (en) * | 1998-07-17 | 1999-12-28 | United Technologies Corporation | Method for generating a ceramic coating |
SE527393C2 (sv) * | 2003-09-05 | 2006-02-21 | Sandvik Intellectual Property | Aluminiumbelagd bandprodukt av rostfritt stål för användning som offeranod |
SE0302903L (sv) * | 2003-11-04 | 2005-05-05 | Dieter Neidhardt | Anordning för förstoring av en bild på en bildskärm på en apparat |
SE527385C2 (sv) * | 2003-11-04 | 2006-02-21 | Sandvik Intellectual Property | Belagd bandprodukt av rostfrit stål för användning i lastbärande applikationer |
SE527386C2 (sv) * | 2003-12-23 | 2006-02-21 | Sandvik Intellectual Property | Belagd rostfri stålbandsprodukt med dekorativt utseende |
US20080050608A1 (en) * | 2006-08-25 | 2008-02-28 | Mcfaul Surry D | Metal coating process and product |
EP2045819A1 (de) * | 2007-10-03 | 2009-04-08 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Lichtdurchlässiges Neutronenbaumaterial |
US9315415B2 (en) * | 2008-09-05 | 2016-04-19 | Shincron Co., Ltd. | Method for depositing film and oil-repellent substrate |
JP4688230B2 (ja) * | 2008-10-09 | 2011-05-25 | 株式会社シンクロン | 成膜方法 |
JP2012201980A (ja) | 2011-03-28 | 2012-10-22 | Jx Nippon Mining & Metals Corp | 電気抵抗層付き金属箔及びその製造方法 |
US11426818B2 (en) | 2018-08-10 | 2022-08-30 | The Research Foundation for the State University | Additive manufacturing processes and additively manufactured products |
KR20210070681A (ko) * | 2019-12-05 | 2021-06-15 | 주식회사 포스코 | 알루미늄계 합금 도금강판 및 그 제조방법 |
CN111733378B (zh) * | 2020-05-15 | 2022-12-13 | 中国兵器科学研究院宁波分院 | 一种钢表面的涂层结构及其制备方法 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE135216C (de) * | 1900-01-01 | |||
DE1514668B2 (de) * | 1966-01-19 | 1977-05-12 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen von chrom- silber-kontakten auf halbleiterbauelementen |
US3642541A (en) * | 1969-02-12 | 1972-02-15 | Republic Steel Corp | Method for applying corrosion-resistant composite coating to ferrous metals and product resulting therefrom |
FR2088659A5 (de) * | 1970-04-21 | 1972-01-07 | Progil | |
US3915757A (en) * | 1972-08-09 | 1975-10-28 | Niels N Engel | Ion plating method and product therefrom |
GB1542299A (en) * | 1976-03-23 | 1979-03-14 | Warner Lambert Co | Blade shields |
US4237192A (en) * | 1979-01-30 | 1980-12-02 | Nisshin Steel Co., Ltd. | Zinc plated steel plate and can produced from the same |
EP0142083A3 (de) * | 1983-11-11 | 1987-04-29 | Hoesch Aktiengesellschaft | Verfahren und Einrichtung zum Herstellen metallischer Überzüge |
JPS60141869A (ja) * | 1983-12-29 | 1985-07-26 | Nissin Electric Co Ltd | 膜形成方法および膜形成装置 |
JPS60174873A (ja) * | 1984-02-20 | 1985-09-09 | Hitachi Cable Ltd | 蒸着用金属基板の前処理方法 |
US4933058A (en) * | 1986-01-23 | 1990-06-12 | The Gillette Company | Formation of hard coatings on cutting edges |
FI861898A (fi) * | 1986-05-07 | 1987-11-08 | Outokumpu Oy | Foerfarande foer hantering av metallstycken. |
JPS6324053A (ja) * | 1986-07-17 | 1988-02-01 | Kawasaki Steel Corp | 密着性に優れたセラミツク被膜をそなえる低炭素鋼板およびステンレス鋼板の製造方法 |
JPS63137159A (ja) * | 1986-11-27 | 1988-06-09 | Nissin Electric Co Ltd | 結晶性金属薄膜の形成方法 |
JPS63169372A (ja) * | 1987-01-06 | 1988-07-13 | Nissin Electric Co Ltd | 膜形成方法 |
AT388394B (de) * | 1987-01-09 | 1989-06-12 | Vni Instrument Inst | Verfahren zur herstellung von schneidwerkzeug |
JPH0649933B2 (ja) * | 1987-09-18 | 1994-06-29 | 日本鋼管株式会社 | 缶用めっき鋼板 |
US5073403A (en) * | 1987-12-10 | 1991-12-17 | Nkk Corporation | Aluminum-plated steel sheet for cans |
JPH01177363A (ja) * | 1987-12-29 | 1989-07-13 | Nkk Corp | 缶用光沢ドライ鍍金鋼板 |
JP2696987B2 (ja) * | 1988-09-16 | 1998-01-14 | 株式会社島津製作所 | 薄膜製造方法 |
US4964962A (en) * | 1988-10-08 | 1990-10-23 | Matsushita Electric Works, Ltd. | Method for forming conducting metal layer on inorganic substrate |
US5061512A (en) * | 1989-02-21 | 1991-10-29 | General Electric Company | Method of producing lubricated bearings |
JPH0788566B2 (ja) * | 1989-03-20 | 1995-09-27 | 日新製鋼株式会社 | イオンビーム照射前処理を施すことを特徴とする金属帯への連続真空蒸着またはイオンプレーテイング方法 |
US4980195A (en) * | 1989-05-08 | 1990-12-25 | Mcdonnen-Douglas Corporation | Method for inhibiting inland corrosion of steel |
SU1745776A1 (ru) * | 1989-07-11 | 1992-07-07 | Организация "Технотрон" | Способ формировани износостойкого покрыти на издели х из металлов и сплавов |
US5270081A (en) * | 1990-02-02 | 1993-12-14 | Mtu Motoren-Und Turbinen-Union Muenchen Gmbh | Iron-base alloy structural component having a corrosion-inhibiting coating, and method of producing the coating |
JPH0578818A (ja) * | 1991-09-19 | 1993-03-30 | Hitachi Cable Ltd | 部分被膜の形成方法 |
-
1992
- 1992-11-19 DE DE69220566T patent/DE69220566T2/de not_active Expired - Fee Related
- 1992-11-19 EP EP92923984A patent/EP0572673B1/de not_active Expired - Lifetime
- 1992-11-19 WO PCT/JP1992/001511 patent/WO1993010275A1/ja active IP Right Grant
- 1992-11-19 US US08/087,731 patent/US5429843A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0572673A1 (de) | 1993-12-08 |
US5429843A (en) | 1995-07-04 |
EP0572673B1 (de) | 1997-06-25 |
WO1993010275A1 (en) | 1993-05-27 |
EP0572673A4 (de) | 1995-03-01 |
DE69220566D1 (de) | 1997-07-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE794839T1 (de) | Verfahren zur beschichtung einer oberfläche | |
DE69433582D1 (de) | Verfahren zur Bildung einer Halbleiteranordnung | |
DE69634194D1 (de) | Verfahren zur bearbeitung einer oberfläche | |
DE69333369D1 (de) | Verfahren zur Identifikation einer optischen Leitung | |
DE69221665D1 (de) | Verfahren zur Ermittlung einer Belichtung | |
DE69117351T2 (de) | Verfahren zur Qualitätsbestimmung einer Quetschverbindung | |
DE69210123T2 (de) | Verfahren zur Modernisierung einer Aufzugsgruppe | |
DE59107994D1 (de) | Verfahren zur präzisen lagebestimmung | |
DE69728812D1 (de) | Verfahren zur Erhöhung der Lötbarkeit einer Oberfläche | |
DE69413346D1 (de) | Verfahren zur Beschichtung einer Abzweigeleitung | |
DE69219944D1 (de) | Verfahren zur Erfassung der Bewegung einer Kamera | |
DE69414496D1 (de) | Verfahren zur Beschichtung einer Abzweigeleitung | |
DE69226107T2 (de) | Verfahren zur Herstellung einer gemusterten Metalloberfläche | |
DE69220566T2 (de) | Verfahren zur bildung einer beschichtung mittels aufdampfen | |
DE69607546T2 (de) | Verfahren zur Herstellung einer Schaltungsanordnung | |
DE59205952D1 (de) | Verfahren zur Mehrschichtlackierung | |
DE69325382T2 (de) | Verfahren zur oberflächenmodifikation | |
DE69304509T2 (de) | Verfahren zur Beschichtung einer Abzweigeleitung | |
DE69027698T2 (de) | Verfahren zur Einschätzung einer Fahrbahn | |
DE3688193T2 (de) | Verfahren zur bildung einer komposit-gekruemmten oberflaeche. | |
DE69231268D1 (de) | Verfahren zur Trockenätzung | |
DE69530698D1 (de) | Verfahren zur herstellung einer leiterplatte | |
DE69811800D1 (de) | Verfahren zur Ablagerung einer dielektrischen Ta2O5-Schicht | |
DE69419583T2 (de) | Verfahren zur Beschichtung mittels MOCVD | |
ATE157639T1 (de) | Verfahren zur verbesserung einer paraffinischen beschichtung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |