US5083857A
(en)
*
|
1990-06-29 |
1992-01-28 |
Texas Instruments Incorporated |
Multi-level deformable mirror device
|
US5233459A
(en)
*
|
1991-03-06 |
1993-08-03 |
Massachusetts Institute Of Technology |
Electric display device
|
US6219015B1
(en)
|
1992-04-28 |
2001-04-17 |
The Board Of Directors Of The Leland Stanford, Junior University |
Method and apparatus for using an array of grating light valves to produce multicolor optical images
|
US5436753A
(en)
*
|
1992-05-27 |
1995-07-25 |
Opticon, Inc. |
Vibrating mirror
|
US6674562B1
(en)
*
|
1994-05-05 |
2004-01-06 |
Iridigm Display Corporation |
Interferometric modulation of radiation
|
US7830587B2
(en)
*
|
1993-03-17 |
2010-11-09 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light with semiconductor substrate
|
JPH06301066A
(ja)
*
|
1993-03-23 |
1994-10-28 |
Daewoo Electron Co Ltd |
ミラーアレーおよびその製法
|
US5550669A
(en)
*
|
1993-04-19 |
1996-08-27 |
Martin Marietta Corporation |
Flexure design for a fast steering scanning mirror
|
KR970003007B1
(ko)
*
|
1993-05-21 |
1997-03-13 |
대우전자 주식회사 |
투사형 화상표시장치용 광로조절장치 및 그 구동방법
|
US5345521A
(en)
*
|
1993-07-12 |
1994-09-06 |
Texas Instrument Incorporated |
Architecture for optical switch
|
US5673139A
(en)
*
|
1993-07-19 |
1997-09-30 |
Medcom, Inc. |
Microelectromechanical television scanning device and method for making the same
|
US5585956A
(en)
*
|
1993-07-31 |
1996-12-17 |
Daewoo Electronics Co, Ltd. |
Electrostrictive actuated mirror array
|
US5448395A
(en)
*
|
1993-08-03 |
1995-09-05 |
Northrop Grumman Corporation |
Non-mechanical step scanner for electro-optical sensors
|
US6059416A
(en)
*
|
1993-08-31 |
2000-05-09 |
Daewoo Electronics Co., Ltd. |
Actuated mirror array and method for the fabricating thereof
|
KR970003465B1
(ko)
*
|
1993-09-28 |
1997-03-18 |
대우전자 주식회사 |
광로조절장치의 제조방법
|
KR970003466B1
(ko)
*
|
1993-09-28 |
1997-03-18 |
대우전자 주식회사 |
투사형 화상 표시 장치의 광로 조절 장치 제조 방법
|
US6467345B1
(en)
|
1993-10-18 |
2002-10-22 |
Xros, Inc. |
Method of operating micromachined members coupled for relative rotation
|
US6044705A
(en)
*
|
1993-10-18 |
2000-04-04 |
Xros, Inc. |
Micromachined members coupled for relative rotation by torsion bars
|
US6426013B1
(en)
|
1993-10-18 |
2002-07-30 |
Xros, Inc. |
Method for fabricating micromachined members coupled for relative rotation
|
US5936757A
(en)
*
|
1993-10-29 |
1999-08-10 |
Daewoo Electronics Co., Ltd. |
Thin film actuated mirror array
|
PL176406B1
(pl)
*
|
1993-10-29 |
1999-05-31 |
Daewoo Electronics Co Ltd |
Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych
|
US5452024A
(en)
*
|
1993-11-01 |
1995-09-19 |
Texas Instruments Incorporated |
DMD display system
|
US5583688A
(en)
*
|
1993-12-21 |
1996-12-10 |
Texas Instruments Incorporated |
Multi-level digital micromirror device
|
US5444566A
(en)
*
|
1994-03-07 |
1995-08-22 |
Texas Instruments Incorporated |
Optimized electronic operation of digital micromirror devices
|
JPH07303174A
(ja)
*
|
1994-04-28 |
1995-11-14 |
Canon Inc |
原稿走査装置
|
US7123216B1
(en)
|
1994-05-05 |
2006-10-17 |
Idc, Llc |
Photonic MEMS and structures
|
US7852545B2
(en)
*
|
1994-05-05 |
2010-12-14 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US7297471B1
(en)
|
2003-04-15 |
2007-11-20 |
Idc, Llc |
Method for manufacturing an array of interferometric modulators
|
US7776631B2
(en)
|
1994-05-05 |
2010-08-17 |
Qualcomm Mems Technologies, Inc. |
MEMS device and method of forming a MEMS device
|
US7826120B2
(en)
*
|
1994-05-05 |
2010-11-02 |
Qualcomm Mems Technologies, Inc. |
Method and device for multi-color interferometric modulation
|
US7550794B2
(en)
|
2002-09-20 |
2009-06-23 |
Idc, Llc |
Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
|
US7839556B2
(en)
*
|
1994-05-05 |
2010-11-23 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US20010003487A1
(en)
*
|
1996-11-05 |
2001-06-14 |
Mark W. Miles |
Visible spectrum modulator arrays
|
US7738157B2
(en)
|
1994-05-05 |
2010-06-15 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US7808694B2
(en)
|
1994-05-05 |
2010-10-05 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US8014059B2
(en)
|
1994-05-05 |
2011-09-06 |
Qualcomm Mems Technologies, Inc. |
System and method for charge control in a MEMS device
|
US7800809B2
(en)
*
|
1994-05-05 |
2010-09-21 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US8081369B2
(en)
*
|
1994-05-05 |
2011-12-20 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
JP3546532B2
(ja)
*
|
1994-06-14 |
2004-07-28 |
株式会社デンソー |
光スキャナ装置
|
FR2726135B1
(fr)
*
|
1994-10-25 |
1997-01-17 |
Suisse Electronique Microtech |
Dispositif de commutation
|
KR960019139A
(ko)
*
|
1994-11-10 |
1996-06-17 |
사또오 후미오 |
갈바노미러 및 그것을 이용한 광디스크 장치
|
US5719695A
(en)
*
|
1995-03-31 |
1998-02-17 |
Texas Instruments Incorporated |
Spatial light modulator with superstructure light shield
|
US5535047A
(en)
*
|
1995-04-18 |
1996-07-09 |
Texas Instruments Incorporated |
Active yoke hidden hinge digital micromirror device
|
JP3349332B2
(ja)
*
|
1995-04-28 |
2002-11-25 |
インターナショナル・ビジネス・マシーンズ・コーポレーション |
反射式空間光変調素子配列及びその形成方法
|
US7898722B2
(en)
*
|
1995-05-01 |
2011-03-01 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with restoring electrode
|
US5629794A
(en)
*
|
1995-05-31 |
1997-05-13 |
Texas Instruments Incorporated |
Spatial light modulator having an analog beam for steering light
|
US5841579A
(en)
|
1995-06-07 |
1998-11-24 |
Silicon Light Machines |
Flat diffraction grating light valve
|
KR100213026B1
(ko)
*
|
1995-07-27 |
1999-08-02 |
윤종용 |
디엠디 및 그 제조공정
|
US6324192B1
(en)
|
1995-09-29 |
2001-11-27 |
Coretek, Inc. |
Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
|
US5739945A
(en)
*
|
1995-09-29 |
1998-04-14 |
Tayebati; Parviz |
Electrically tunable optical filter utilizing a deformable multi-layer mirror
|
US6044056A
(en)
|
1996-07-30 |
2000-03-28 |
Seagate Technology, Inc. |
Flying optical head with dynamic mirror
|
US6061323A
(en)
*
|
1996-07-30 |
2000-05-09 |
Seagate Technology, Inc. |
Data storage system having an improved surface micro-machined mirror
|
US6850475B1
(en)
|
1996-07-30 |
2005-02-01 |
Seagate Technology, Llc |
Single frequency laser source for optical data storage system
|
US5914801A
(en)
|
1996-09-27 |
1999-06-22 |
Mcnc |
Microelectromechanical devices including rotating plates and related methods
|
US7929197B2
(en)
*
|
1996-11-05 |
2011-04-19 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US6025951A
(en)
*
|
1996-11-27 |
2000-02-15 |
National Optics Institute |
Light modulating microdevice and method
|
US7471444B2
(en)
|
1996-12-19 |
2008-12-30 |
Idc, Llc |
Interferometric modulation of radiation
|
US7830588B2
(en)
*
|
1996-12-19 |
2010-11-09 |
Qualcomm Mems Technologies, Inc. |
Method of making a light modulating display device and associated transistor circuitry and structures thereof
|
US5982553A
(en)
|
1997-03-20 |
1999-11-09 |
Silicon Light Machines |
Display device incorporating one-dimensional grating light-valve array
|
US6076256A
(en)
*
|
1997-04-18 |
2000-06-20 |
Seagate Technology, Inc. |
Method for manufacturing magneto-optical data storage system
|
US5867302A
(en)
*
|
1997-08-07 |
1999-02-02 |
Sandia Corporation |
Bistable microelectromechanical actuator
|
KR100259151B1
(ko)
*
|
1997-08-26 |
2000-06-15 |
윤종용 |
비대칭강성구조를 갖는 광 경로 변환 액츄에이터 및 그의 구동방법
|
US6088102A
(en)
|
1997-10-31 |
2000-07-11 |
Silicon Light Machines |
Display apparatus including grating light-valve array and interferometric optical system
|
JPH11144401A
(ja)
|
1997-11-13 |
1999-05-28 |
Teac Corp |
記録媒体記録再生装置
|
WO1999052006A2
(en)
*
|
1998-04-08 |
1999-10-14 |
Etalon, Inc. |
Interferometric modulation of radiation
|
US7532377B2
(en)
|
1998-04-08 |
2009-05-12 |
Idc, Llc |
Movable micro-electromechanical device
|
US8928967B2
(en)
|
1998-04-08 |
2015-01-06 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
KR100313851B1
(ko)
*
|
1998-04-10 |
2001-12-12 |
윤종용 |
화상표시장치용마이크로미러디바이스
|
US6271808B1
(en)
|
1998-06-05 |
2001-08-07 |
Silicon Light Machines |
Stereo head mounted display using a single display device
|
US6200882B1
(en)
|
1998-06-10 |
2001-03-13 |
Seagate Technology, Inc. |
Method for processing a plurality of micro-machined mirror assemblies
|
US6130770A
(en)
|
1998-06-23 |
2000-10-10 |
Silicon Light Machines |
Electron gun activated grating light valve
|
US6101036A
(en)
|
1998-06-23 |
2000-08-08 |
Silicon Light Machines |
Embossed diffraction grating alone and in combination with changeable image display
|
US6215579B1
(en)
|
1998-06-24 |
2001-04-10 |
Silicon Light Machines |
Method and apparatus for modulating an incident light beam for forming a two-dimensional image
|
US6303986B1
(en)
|
1998-07-29 |
2001-10-16 |
Silicon Light Machines |
Method of and apparatus for sealing an hermetic lid to a semiconductor die
|
US6529310B1
(en)
|
1998-09-24 |
2003-03-04 |
Reflectivity, Inc. |
Deflectable spatial light modulator having superimposed hinge and deflectable element
|
JP3919954B2
(ja)
*
|
1998-10-16 |
2007-05-30 |
富士フイルム株式会社 |
アレイ型光変調素子及び平面ディスプレイの駆動方法
|
US6329738B1
(en)
*
|
1999-03-30 |
2001-12-11 |
Massachusetts Institute Of Technology |
Precision electrostatic actuation and positioning
|
US6724125B2
(en)
*
|
1999-03-30 |
2004-04-20 |
Massachusetts Institute Of Technology |
Methods and apparatus for diffractive optical processing using an actuatable structure
|
US6275320B1
(en)
|
1999-09-27 |
2001-08-14 |
Jds Uniphase, Inc. |
MEMS variable optical attenuator
|
WO2003007049A1
(en)
|
1999-10-05 |
2003-01-23 |
Iridigm Display Corporation |
Photonic mems and structures
|
US6552840B2
(en)
*
|
1999-12-03 |
2003-04-22 |
Texas Instruments Incorporated |
Electrostatic efficiency of micromechanical devices
|
US6373682B1
(en)
|
1999-12-15 |
2002-04-16 |
Mcnc |
Electrostatically controlled variable capacitor
|
KR100708077B1
(ko)
|
2000-05-01 |
2007-04-16 |
삼성전자주식회사 |
화상표시장치용 마이크로미러 디바이스
|
US6813053B1
(en)
*
|
2000-05-19 |
2004-11-02 |
The Regents Of The University Of California |
Apparatus and method for controlled cantilever motion through torsional beams and a counterweight
|
US6735008B2
(en)
*
|
2000-07-31 |
2004-05-11 |
Corning Incorporated |
MEMS mirror and method of fabrication
|
US6873450B2
(en)
*
|
2000-08-11 |
2005-03-29 |
Reflectivity, Inc |
Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
|
US6485273B1
(en)
|
2000-09-01 |
2002-11-26 |
Mcnc |
Distributed MEMS electrostatic pumping devices
|
US6738177B1
(en)
*
|
2000-09-05 |
2004-05-18 |
Siwave, Inc. |
Soft snap-down optical element using kinematic supports
|
US6590267B1
(en)
|
2000-09-14 |
2003-07-08 |
Mcnc |
Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
|
US6962771B1
(en)
*
|
2000-10-13 |
2005-11-08 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Dual damascene process
|
US6377438B1
(en)
|
2000-10-23 |
2002-04-23 |
Mcnc |
Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
|
US6771326B2
(en)
|
2000-10-26 |
2004-08-03 |
General Atomics, Inc. |
Multi-screen laser projection system using a shared laser source
|
US6975366B2
(en)
*
|
2000-10-26 |
2005-12-13 |
General Atomics |
Digital display system using pulsed lasers
|
US6396620B1
(en)
|
2000-10-30 |
2002-05-28 |
Mcnc |
Electrostatically actuated electromagnetic radiation shutter
|
FR2820833B1
(fr)
*
|
2001-02-15 |
2004-05-28 |
Teem Photonics |
Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir
|
JP3908566B2
(ja)
*
|
2001-03-02 |
2007-04-25 |
三星電子株式会社 |
マイクロミラー駆動装置及びその制御方法
|
US20020167695A1
(en)
*
|
2001-03-02 |
2002-11-14 |
Senturia Stephen D. |
Methods and apparatus for diffractive optical processing using an actuatable structure
|
US6707591B2
(en)
|
2001-04-10 |
2004-03-16 |
Silicon Light Machines |
Angled illumination for a single order light modulator based projection system
|
US6586738B2
(en)
|
2001-04-13 |
2003-07-01 |
Mcnc |
Electromagnetic radiation detectors having a micromachined electrostatic chopper device
|
US7026602B2
(en)
*
|
2001-04-13 |
2006-04-11 |
Research Triangle Institute |
Electromagnetic radiation detectors having a microelectromechanical shutter device
|
US6608712B2
(en)
|
2001-05-15 |
2003-08-19 |
Network Photonics, Inc. |
Hidden flexure ultra planar optical routing element
|
US6782205B2
(en)
|
2001-06-25 |
2004-08-24 |
Silicon Light Machines |
Method and apparatus for dynamic equalization in wavelength division multiplexing
|
US6747781B2
(en)
|
2001-06-25 |
2004-06-08 |
Silicon Light Machines, Inc. |
Method, apparatus, and diffuser for reducing laser speckle
|
US6701037B2
(en)
|
2001-07-03 |
2004-03-02 |
Pts Corporation |
MEMS-based noncontacting free-space optical switch
|
US6625342B2
(en)
*
|
2001-07-03 |
2003-09-23 |
Network Photonics, Inc. |
Systems and methods for overcoming stiction using a lever
|
US6614581B2
(en)
|
2001-07-03 |
2003-09-02 |
Network Photonics, Inc. |
Methods and apparatus for providing a multi-stop micromirror
|
US20030025981A1
(en)
*
|
2001-07-31 |
2003-02-06 |
Ball Semiconductor, Inc. |
Micromachined optical phase shift device
|
US6589625B1
(en)
|
2001-08-01 |
2003-07-08 |
Iridigm Display Corporation |
Hermetic seal and method to create the same
|
US6829092B2
(en)
|
2001-08-15 |
2004-12-07 |
Silicon Light Machines, Inc. |
Blazed grating light valve
|
US7046410B2
(en)
|
2001-10-11 |
2006-05-16 |
Polychromix, Inc. |
Actuatable diffractive optical processor
|
US6809851B1
(en)
*
|
2001-10-24 |
2004-10-26 |
Decicon, Inc. |
MEMS driver
|
US6747799B2
(en)
|
2001-11-12 |
2004-06-08 |
Pts Corporation |
High-efficiency low-polarization-dependent-loss lamellar diffraction-grating profile and production process
|
US6798951B2
(en)
*
|
2001-11-12 |
2004-09-28 |
Pts Corporation |
Wavelength router with a transmissive dispersive element
|
US7158180B2
(en)
*
|
2001-12-31 |
2007-01-02 |
Texas Instruments Incorporated |
System and method for varying exposure time for different parts of a field of view while acquiring an image
|
US6800238B1
(en)
|
2002-01-15 |
2004-10-05 |
Silicon Light Machines, Inc. |
Method for domain patterning in low coercive field ferroelectrics
|
US6794119B2
(en)
|
2002-02-12 |
2004-09-21 |
Iridigm Display Corporation |
Method for fabricating a structure for a microelectromechanical systems (MEMS) device
|
US6437903B1
(en)
*
|
2002-02-20 |
2002-08-20 |
Intel Corporation |
Light modulator with two mirror sets
|
KR100452113B1
(ko)
*
|
2002-02-25 |
2004-10-12 |
한국과학기술원 |
외팔보를 이용하는 마이크로미러 디바이스
|
US6574033B1
(en)
|
2002-02-27 |
2003-06-03 |
Iridigm Display Corporation |
Microelectromechanical systems device and method for fabricating same
|
US6959132B2
(en)
*
|
2002-03-13 |
2005-10-25 |
Pts Corporation |
One-to-M wavelength routing element
|
US7177498B2
(en)
*
|
2002-03-13 |
2007-02-13 |
Altera Corporation |
Two-by-two optical routing element using two-position MEMS mirrors
|
SE0200788D0
(sv)
*
|
2002-03-15 |
2002-03-15 |
Micronic Laser Systems Ab |
Method using a movable micro-element
|
US6728023B1
(en)
|
2002-05-28 |
2004-04-27 |
Silicon Light Machines |
Optical device arrays with optimized image resolution
|
US6767751B2
(en)
|
2002-05-28 |
2004-07-27 |
Silicon Light Machines, Inc. |
Integrated driver process flow
|
US6822797B1
(en)
|
2002-05-31 |
2004-11-23 |
Silicon Light Machines, Inc. |
Light modulator structure for producing high-contrast operation using zero-order light
|
US6785039B2
(en)
|
2002-06-03 |
2004-08-31 |
Pts Corporation |
Optical routing elements
|
US6813059B2
(en)
|
2002-06-28 |
2004-11-02 |
Silicon Light Machines, Inc. |
Reduced formation of asperities in contact micro-structures
|
US6714337B1
(en)
|
2002-06-28 |
2004-03-30 |
Silicon Light Machines |
Method and device for modulating a light beam and having an improved gamma response
|
US6970283B2
(en)
*
|
2002-07-16 |
2005-11-29 |
Dekel Tzidon |
Micromirrors array with improved light throughput
|
US6809384B1
(en)
|
2002-08-09 |
2004-10-26 |
Pts Corporation |
Method and apparatus for protecting wiring and integrated circuit device
|
US6801354B1
(en)
|
2002-08-20 |
2004-10-05 |
Silicon Light Machines, Inc. |
2-D diffraction grating for substantially eliminating polarization dependent losses
|
US7781850B2
(en)
|
2002-09-20 |
2010-08-24 |
Qualcomm Mems Technologies, Inc. |
Controlling electromechanical behavior of structures within a microelectromechanical systems device
|
US6712480B1
(en)
|
2002-09-27 |
2004-03-30 |
Silicon Light Machines |
Controlled curvature of stressed micro-structures
|
US7002215B1
(en)
|
2002-09-30 |
2006-02-21 |
Pts Corporation |
Floating entrance guard for preventing electrical short circuits
|
US6870659B2
(en)
*
|
2002-10-11 |
2005-03-22 |
Exajoule, Llc |
Micromirror systems with side-supported mirrors and concealed flexure members
|
US6825968B2
(en)
*
|
2002-10-11 |
2004-11-30 |
Exajoule, Llc |
Micromirror systems with electrodes configured for sequential mirror attraction
|
US6798560B2
(en)
*
|
2002-10-11 |
2004-09-28 |
Exajoula, Llc |
Micromirror systems with open support structures
|
US6849170B2
(en)
*
|
2003-01-27 |
2005-02-01 |
Institut National D'optique |
Process for making microdevice with movable microplatform
|
US6903487B2
(en)
*
|
2003-02-14 |
2005-06-07 |
Hewlett-Packard Development Company, L.P. |
Micro-mirror device with increased mirror tilt
|
US6900922B2
(en)
*
|
2003-02-24 |
2005-05-31 |
Exajoule, Llc |
Multi-tilt micromirror systems with concealed hinge structures
|
US6906848B2
(en)
*
|
2003-02-24 |
2005-06-14 |
Exajoule, Llc |
Micromirror systems with concealed multi-piece hinge structures
|
US6829077B1
(en)
|
2003-02-28 |
2004-12-07 |
Silicon Light Machines, Inc. |
Diffractive light modulator with dynamically rotatable diffraction plane
|
US6806997B1
(en)
|
2003-02-28 |
2004-10-19 |
Silicon Light Machines, Inc. |
Patterned diffractive light modulator ribbon for PDL reduction
|
JP4314054B2
(ja)
*
|
2003-04-15 |
2009-08-12 |
キヤノン株式会社 |
露光装置及びデバイスの製造方法
|
TW570896B
(en)
*
|
2003-05-26 |
2004-01-11 |
Prime View Int Co Ltd |
A method for fabricating an interference display cell
|
US7221495B2
(en)
*
|
2003-06-24 |
2007-05-22 |
Idc Llc |
Thin film precursor stack for MEMS manufacturing
|
US6972885B2
(en)
*
|
2003-06-24 |
2005-12-06 |
Drs Sensors & Targeting Systems, Inc. |
Precision mirror displacement assembly
|
TWI231865B
(en)
|
2003-08-26 |
2005-05-01 |
Prime View Int Co Ltd |
An interference display cell and fabrication method thereof
|
TW593126B
(en)
*
|
2003-09-30 |
2004-06-21 |
Prime View Int Co Ltd |
A structure of a micro electro mechanical system and manufacturing the same
|
US6876485B1
(en)
|
2003-11-07 |
2005-04-05 |
Reflectivity, Inc |
Micromirrors with asymmetric stopping mechanisms
|
US7161728B2
(en)
|
2003-12-09 |
2007-01-09 |
Idc, Llc |
Area array modulation and lead reduction in interferometric modulators
|
US7142346B2
(en)
|
2003-12-09 |
2006-11-28 |
Idc, Llc |
System and method for addressing a MEMS display
|
US7532194B2
(en)
*
|
2004-02-03 |
2009-05-12 |
Idc, Llc |
Driver voltage adjuster
|
US7706050B2
(en)
|
2004-03-05 |
2010-04-27 |
Qualcomm Mems Technologies, Inc. |
Integrated modulator illumination
|
US7304782B2
(en)
*
|
2004-03-24 |
2007-12-04 |
Fujifilm Corporation |
Driving method of spatial light modulator array, spatial light modulator array, and image forming apparatus
|
CA2464207C
(en)
*
|
2004-04-14 |
2011-03-29 |
Institut National D'optique |
Light modulating microdevice
|
US7476327B2
(en)
|
2004-05-04 |
2009-01-13 |
Idc, Llc |
Method of manufacture for microelectromechanical devices
|
US7256922B2
(en)
|
2004-07-02 |
2007-08-14 |
Idc, Llc |
Interferometric modulators with thin film transistors
|
CA2571829A1
(en)
*
|
2004-07-23 |
2006-02-02 |
Afa Controls, Llc |
Methods of operating microvalve assemblies and related structures and related devices
|
EP1779173A1
(de)
|
2004-07-29 |
2007-05-02 |
Idc, Llc |
System und verfahren zum mikroelektromechanischen betrieb eines interferometrischen modulators
|
US7499208B2
(en)
|
2004-08-27 |
2009-03-03 |
Udc, Llc |
Current mode display driver circuit realization feature
|
US7515147B2
(en)
|
2004-08-27 |
2009-04-07 |
Idc, Llc |
Staggered column drive circuit systems and methods
|
US7560299B2
(en)
|
2004-08-27 |
2009-07-14 |
Idc, Llc |
Systems and methods of actuating MEMS display elements
|
US7889163B2
(en)
|
2004-08-27 |
2011-02-15 |
Qualcomm Mems Technologies, Inc. |
Drive method for MEMS devices
|
US7551159B2
(en)
|
2004-08-27 |
2009-06-23 |
Idc, Llc |
System and method of sensing actuation and release voltages of an interferometric modulator
|
US7623142B2
(en)
*
|
2004-09-14 |
2009-11-24 |
Hewlett-Packard Development Company, L.P. |
Flexure
|
US7602375B2
(en)
*
|
2004-09-27 |
2009-10-13 |
Idc, Llc |
Method and system for writing data to MEMS display elements
|
US7679627B2
(en)
|
2004-09-27 |
2010-03-16 |
Qualcomm Mems Technologies, Inc. |
Controller and driver features for bi-stable display
|
US7446927B2
(en)
|
2004-09-27 |
2008-11-04 |
Idc, Llc |
MEMS switch with set and latch electrodes
|
US7259449B2
(en)
|
2004-09-27 |
2007-08-21 |
Idc, Llc |
Method and system for sealing a substrate
|
US7719500B2
(en)
|
2004-09-27 |
2010-05-18 |
Qualcomm Mems Technologies, Inc. |
Reflective display pixels arranged in non-rectangular arrays
|
US7161730B2
(en)
*
|
2004-09-27 |
2007-01-09 |
Idc, Llc |
System and method for providing thermal compensation for an interferometric modulator display
|
US20060076631A1
(en)
*
|
2004-09-27 |
2006-04-13 |
Lauren Palmateer |
Method and system for providing MEMS device package with secondary seal
|
US7843410B2
(en)
|
2004-09-27 |
2010-11-30 |
Qualcomm Mems Technologies, Inc. |
Method and device for electrically programmable display
|
US7813026B2
(en)
|
2004-09-27 |
2010-10-12 |
Qualcomm Mems Technologies, Inc. |
System and method of reducing color shift in a display
|
US7349136B2
(en)
|
2004-09-27 |
2008-03-25 |
Idc, Llc |
Method and device for a display having transparent components integrated therein
|
US7304784B2
(en)
|
2004-09-27 |
2007-12-04 |
Idc, Llc |
Reflective display device having viewable display on both sides
|
US7630119B2
(en)
|
2004-09-27 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Apparatus and method for reducing slippage between structures in an interferometric modulator
|
US7553684B2
(en)
|
2004-09-27 |
2009-06-30 |
Idc, Llc |
Method of fabricating interferometric devices using lift-off processing techniques
|
US7327510B2
(en)
*
|
2004-09-27 |
2008-02-05 |
Idc, Llc |
Process for modifying offset voltage characteristics of an interferometric modulator
|
US7545550B2
(en)
|
2004-09-27 |
2009-06-09 |
Idc, Llc |
Systems and methods of actuating MEMS display elements
|
US7372613B2
(en)
|
2004-09-27 |
2008-05-13 |
Idc, Llc |
Method and device for multistate interferometric light modulation
|
US7492502B2
(en)
|
2004-09-27 |
2009-02-17 |
Idc, Llc |
Method of fabricating a free-standing microstructure
|
US7373026B2
(en)
|
2004-09-27 |
2008-05-13 |
Idc, Llc |
MEMS device fabricated on a pre-patterned substrate
|
US7420725B2
(en)
|
2004-09-27 |
2008-09-02 |
Idc, Llc |
Device having a conductive light absorbing mask and method for fabricating same
|
US7355780B2
(en)
|
2004-09-27 |
2008-04-08 |
Idc, Llc |
System and method of illuminating interferometric modulators using backlighting
|
US7675669B2
(en)
|
2004-09-27 |
2010-03-09 |
Qualcomm Mems Technologies, Inc. |
Method and system for driving interferometric modulators
|
US7944599B2
(en)
|
2004-09-27 |
2011-05-17 |
Qualcomm Mems Technologies, Inc. |
Electromechanical device with optical function separated from mechanical and electrical function
|
US7136213B2
(en)
*
|
2004-09-27 |
2006-11-14 |
Idc, Llc |
Interferometric modulators having charge persistence
|
US7345805B2
(en)
|
2004-09-27 |
2008-03-18 |
Idc, Llc |
Interferometric modulator array with integrated MEMS electrical switches
|
US7369296B2
(en)
|
2004-09-27 |
2008-05-06 |
Idc, Llc |
Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
|
US8008736B2
(en)
|
2004-09-27 |
2011-08-30 |
Qualcomm Mems Technologies, Inc. |
Analog interferometric modulator device
|
US7724993B2
(en)
|
2004-09-27 |
2010-05-25 |
Qualcomm Mems Technologies, Inc. |
MEMS switches with deforming membranes
|
US7527995B2
(en)
|
2004-09-27 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Method of making prestructure for MEMS systems
|
US8310441B2
(en)
|
2004-09-27 |
2012-11-13 |
Qualcomm Mems Technologies, Inc. |
Method and system for writing data to MEMS display elements
|
US7684104B2
(en)
|
2004-09-27 |
2010-03-23 |
Idc, Llc |
MEMS using filler material and method
|
US7486429B2
(en)
*
|
2004-09-27 |
2009-02-03 |
Idc, Llc |
Method and device for multistate interferometric light modulation
|
US7302157B2
(en)
|
2004-09-27 |
2007-11-27 |
Idc, Llc |
System and method for multi-level brightness in interferometric modulation
|
US7532195B2
(en)
|
2004-09-27 |
2009-05-12 |
Idc, Llc |
Method and system for reducing power consumption in a display
|
US7564612B2
(en)
|
2004-09-27 |
2009-07-21 |
Idc, Llc |
Photonic MEMS and structures
|
US7420728B2
(en)
|
2004-09-27 |
2008-09-02 |
Idc, Llc |
Methods of fabricating interferometric modulators by selectively removing a material
|
US7321456B2
(en)
|
2004-09-27 |
2008-01-22 |
Idc, Llc |
Method and device for corner interferometric modulation
|
US7626581B2
(en)
|
2004-09-27 |
2009-12-01 |
Idc, Llc |
Device and method for display memory using manipulation of mechanical response
|
US8878825B2
(en)
|
2004-09-27 |
2014-11-04 |
Qualcomm Mems Technologies, Inc. |
System and method for providing a variable refresh rate of an interferometric modulator display
|
US20060076634A1
(en)
*
|
2004-09-27 |
2006-04-13 |
Lauren Palmateer |
Method and system for packaging MEMS devices with incorporated getter
|
US7417783B2
(en)
*
|
2004-09-27 |
2008-08-26 |
Idc, Llc |
Mirror and mirror layer for optical modulator and method
|
US7936497B2
(en)
|
2004-09-27 |
2011-05-03 |
Qualcomm Mems Technologies, Inc. |
MEMS device having deformable membrane characterized by mechanical persistence
|
US7310179B2
(en)
|
2004-09-27 |
2007-12-18 |
Idc, Llc |
Method and device for selective adjustment of hysteresis window
|
US7554714B2
(en)
|
2004-09-27 |
2009-06-30 |
Idc, Llc |
Device and method for manipulation of thermal response in a modulator
|
US7289259B2
(en)
|
2004-09-27 |
2007-10-30 |
Idc, Llc |
Conductive bus structure for interferometric modulator array
|
US7893919B2
(en)
*
|
2004-09-27 |
2011-02-22 |
Qualcomm Mems Technologies, Inc. |
Display region architectures
|
US7405861B2
(en)
|
2004-09-27 |
2008-07-29 |
Idc, Llc |
Method and device for protecting interferometric modulators from electrostatic discharge
|
JP4448039B2
(ja)
|
2005-01-26 |
2010-04-07 |
キヤノン株式会社 |
撮像装置及びその制御方法
|
TW200628877A
(en)
|
2005-02-04 |
2006-08-16 |
Prime View Int Co Ltd |
Method of manufacturing optical interference type color display
|
US7830561B2
(en)
*
|
2005-03-16 |
2010-11-09 |
The Trustees Of Columbia University In The City Of New York |
Lensless imaging with controllable apertures
|
KR100707185B1
(ko)
|
2005-03-16 |
2007-04-13 |
삼성전자주식회사 |
복층 플레이트 구조의 액츄에이터
|
US7468572B2
(en)
*
|
2005-03-28 |
2008-12-23 |
Maurice Thomas |
Versatile digitally controlled micro-mechanical actuator
|
US7920136B2
(en)
*
|
2005-05-05 |
2011-04-05 |
Qualcomm Mems Technologies, Inc. |
System and method of driving a MEMS display device
|
US7948457B2
(en)
|
2005-05-05 |
2011-05-24 |
Qualcomm Mems Technologies, Inc. |
Systems and methods of actuating MEMS display elements
|
WO2006121784A1
(en)
|
2005-05-05 |
2006-11-16 |
Qualcomm Incorporated, Inc. |
Dynamic driver ic and display panel configuration
|
CA2507177C
(en)
*
|
2005-05-13 |
2012-04-24 |
Institut National D'optique |
Image projector with flexible reflective analog modulator
|
US20060262180A1
(en)
*
|
2005-05-17 |
2006-11-23 |
Robbins Gene A |
Object processing assembly operable to form dynamically variable images in objects in single shot events
|
US20070018065A1
(en)
*
|
2005-07-21 |
2007-01-25 |
Rockwell Scientific Licensing, Llc |
Electrically controlled tiltable microstructures
|
EP2495212A3
(de)
|
2005-07-22 |
2012-10-31 |
QUALCOMM MEMS Technologies, Inc. |
MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
|
BRPI0612997A2
(pt)
|
2005-07-22 |
2010-12-14 |
Qualcomm Inc |
dispositivos mems e respectivos mÉtodos de fabrico
|
JP2009503564A
(ja)
|
2005-07-22 |
2009-01-29 |
クアルコム,インコーポレイテッド |
Memsデバイスのための支持構造、およびその方法
|
US7423798B2
(en)
*
|
2005-08-16 |
2008-09-09 |
Spatial Photonics, Inc. |
Addressing circuit and method for bi-directional micro-mirror array
|
US7355779B2
(en)
|
2005-09-02 |
2008-04-08 |
Idc, Llc |
Method and system for driving MEMS display elements
|
US7630114B2
(en)
*
|
2005-10-28 |
2009-12-08 |
Idc, Llc |
Diffusion barrier layer for MEMS devices
|
US7561334B2
(en)
*
|
2005-12-20 |
2009-07-14 |
Qualcomm Mems Technologies, Inc. |
Method and apparatus for reducing back-glass deflection in an interferometric modulator display device
|
US8391630B2
(en)
|
2005-12-22 |
2013-03-05 |
Qualcomm Mems Technologies, Inc. |
System and method for power reduction when decompressing video streams for interferometric modulator displays
|
US7795061B2
(en)
|
2005-12-29 |
2010-09-14 |
Qualcomm Mems Technologies, Inc. |
Method of creating MEMS device cavities by a non-etching process
|
US7916980B2
(en)
|
2006-01-13 |
2011-03-29 |
Qualcomm Mems Technologies, Inc. |
Interconnect structure for MEMS device
|
US7382515B2
(en)
|
2006-01-18 |
2008-06-03 |
Qualcomm Mems Technologies, Inc. |
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
|
WO2007089770A2
(en)
*
|
2006-01-31 |
2007-08-09 |
Polychromix Corporation |
Hand-held ir spectrometer with a fixed grating and a diffractive mems-array
|
US8194056B2
(en)
|
2006-02-09 |
2012-06-05 |
Qualcomm Mems Technologies Inc. |
Method and system for writing data to MEMS display elements
|
US7547568B2
(en)
|
2006-02-22 |
2009-06-16 |
Qualcomm Mems Technologies, Inc. |
Electrical conditioning of MEMS device and insulating layer thereof
|
US7550810B2
(en)
|
2006-02-23 |
2009-06-23 |
Qualcomm Mems Technologies, Inc. |
MEMS device having a layer movable at asymmetric rates
|
US7450295B2
(en)
|
2006-03-02 |
2008-11-11 |
Qualcomm Mems Technologies, Inc. |
Methods for producing MEMS with protective coatings using multi-component sacrificial layers
|
US20070228156A1
(en)
*
|
2006-03-28 |
2007-10-04 |
Household Corporation |
Interoperability facilitator
|
US7643203B2
(en)
*
|
2006-04-10 |
2010-01-05 |
Qualcomm Mems Technologies, Inc. |
Interferometric optical display system with broadband characteristics
|
EP1979268A2
(de)
*
|
2006-04-13 |
2008-10-15 |
Qualcomm Mems Technologies, Inc. |
Verpackung einer mems-vorrichtung mithilfe eines rahmens
|
US7623287B2
(en)
|
2006-04-19 |
2009-11-24 |
Qualcomm Mems Technologies, Inc. |
Non-planar surface structures and process for microelectromechanical systems
|
US7527996B2
(en)
|
2006-04-19 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Non-planar surface structures and process for microelectromechanical systems
|
US7417784B2
(en)
|
2006-04-19 |
2008-08-26 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device and method utilizing a porous surface
|
US7711239B2
(en)
|
2006-04-19 |
2010-05-04 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device and method utilizing nanoparticles
|
US8049713B2
(en)
|
2006-04-24 |
2011-11-01 |
Qualcomm Mems Technologies, Inc. |
Power consumption optimized display update
|
US7369292B2
(en)
|
2006-05-03 |
2008-05-06 |
Qualcomm Mems Technologies, Inc. |
Electrode and interconnect materials for MEMS devices
|
US20070268201A1
(en)
*
|
2006-05-22 |
2007-11-22 |
Sampsell Jeffrey B |
Back-to-back displays
|
US7405863B2
(en)
|
2006-06-01 |
2008-07-29 |
Qualcomm Mems Technologies, Inc. |
Patterning of mechanical layer in MEMS to reduce stresses at supports
|
US7649671B2
(en)
|
2006-06-01 |
2010-01-19 |
Qualcomm Mems Technologies, Inc. |
Analog interferometric modulator device with electrostatic actuation and release
|
US7321457B2
(en)
*
|
2006-06-01 |
2008-01-22 |
Qualcomm Incorporated |
Process and structure for fabrication of MEMS device having isolated edge posts
|
US7471442B2
(en)
|
2006-06-15 |
2008-12-30 |
Qualcomm Mems Technologies, Inc. |
Method and apparatus for low range bit depth enhancements for MEMS display architectures
|
US7702192B2
(en)
|
2006-06-21 |
2010-04-20 |
Qualcomm Mems Technologies, Inc. |
Systems and methods for driving MEMS display
|
EP2029473A2
(de)
*
|
2006-06-21 |
2009-03-04 |
Qualcomm Incorporated |
Mems-vorrichtung mit ausgespartem hohlraum und verfahren dafür
|
US7835061B2
(en)
|
2006-06-28 |
2010-11-16 |
Qualcomm Mems Technologies, Inc. |
Support structures for free-standing electromechanical devices
|
US7385744B2
(en)
|
2006-06-28 |
2008-06-10 |
Qualcomm Mems Technologies, Inc. |
Support structure for free-standing MEMS device and methods for forming the same
|
US7777715B2
(en)
|
2006-06-29 |
2010-08-17 |
Qualcomm Mems Technologies, Inc. |
Passive circuits for de-multiplexing display inputs
|
US7527998B2
(en)
|
2006-06-30 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Method of manufacturing MEMS devices providing air gap control
|
US7566664B2
(en)
|
2006-08-02 |
2009-07-28 |
Qualcomm Mems Technologies, Inc. |
Selective etching of MEMS using gaseous halides and reactive co-etchants
|
US7763546B2
(en)
|
2006-08-02 |
2010-07-27 |
Qualcomm Mems Technologies, Inc. |
Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
|
US7545552B2
(en)
|
2006-10-19 |
2009-06-09 |
Qualcomm Mems Technologies, Inc. |
Sacrificial spacer process and resultant structure for MEMS support structure
|
US7404909B2
(en)
*
|
2006-12-06 |
2008-07-29 |
Texas Instruments Incorporated |
Mirror including dielectric portions and a method of manufacturing the same
|
US7706042B2
(en)
|
2006-12-20 |
2010-04-27 |
Qualcomm Mems Technologies, Inc. |
MEMS device and interconnects for same
|
US7911672B2
(en)
*
|
2006-12-26 |
2011-03-22 |
Zhou Tiansheng |
Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
|
US7535621B2
(en)
|
2006-12-27 |
2009-05-19 |
Qualcomm Mems Technologies, Inc. |
Aluminum fluoride films for microelectromechanical system applications
|
US7719752B2
(en)
|
2007-05-11 |
2010-05-18 |
Qualcomm Mems Technologies, Inc. |
MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
|
US7782521B2
(en)
*
|
2007-05-31 |
2010-08-24 |
Texas Instruments Incorporated |
System and method for displaying images
|
US7625825B2
(en)
*
|
2007-06-14 |
2009-12-01 |
Qualcomm Mems Technologies, Inc. |
Method of patterning mechanical layer for MEMS structures
|
US8068268B2
(en)
|
2007-07-03 |
2011-11-29 |
Qualcomm Mems Technologies, Inc. |
MEMS devices having improved uniformity and methods for making them
|
US7692841B2
(en)
*
|
2007-07-31 |
2010-04-06 |
Texas Instruments Incorporated |
System and method for regulating micromirror position
|
US7952778B2
(en)
*
|
2008-01-15 |
2011-05-31 |
Jds Uniphase Corporation |
Biaxial MEMS mirror with hidden hinge
|
US8274722B2
(en)
*
|
2008-01-15 |
2012-09-25 |
Moidu Abdul Jaleel K |
Counter-balanced MEMS mirror with hidden hinge
|
US7863079B2
(en)
|
2008-02-05 |
2011-01-04 |
Qualcomm Mems Technologies, Inc. |
Methods of reducing CD loss in a microelectromechanical device
|
US20100020382A1
(en)
*
|
2008-07-22 |
2010-01-28 |
Qualcomm Mems Technologies, Inc. |
Spacer for mems device
|
US8736590B2
(en)
|
2009-03-27 |
2014-05-27 |
Qualcomm Mems Technologies, Inc. |
Low voltage driver scheme for interferometric modulators
|
US8238018B2
(en)
*
|
2009-06-01 |
2012-08-07 |
Zhou Tiansheng |
MEMS micromirror and micromirror array
|
US8379392B2
(en)
|
2009-10-23 |
2013-02-19 |
Qualcomm Mems Technologies, Inc. |
Light-based sealing and device packaging
|
US8134277B2
(en)
*
|
2009-12-15 |
2012-03-13 |
Moidu Abdul Jaleel K |
Electrostatic comb actuator
|
WO2011126953A1
(en)
|
2010-04-09 |
2011-10-13 |
Qualcomm Mems Technologies, Inc. |
Mechanical layer of an electromechanical device and methods of forming the same
|
US10551613B2
(en)
|
2010-10-20 |
2020-02-04 |
Tiansheng ZHOU |
Micro-electro-mechanical systems micromirrors and micromirror arrays
|
US9036231B2
(en)
|
2010-10-20 |
2015-05-19 |
Tiansheng ZHOU |
Micro-electro-mechanical systems micromirrors and micromirror arrays
|
US8963159B2
(en)
|
2011-04-04 |
2015-02-24 |
Qualcomm Mems Technologies, Inc. |
Pixel via and methods of forming the same
|
US9134527B2
(en)
|
2011-04-04 |
2015-09-15 |
Qualcomm Mems Technologies, Inc. |
Pixel via and methods of forming the same
|
US8659816B2
(en)
|
2011-04-25 |
2014-02-25 |
Qualcomm Mems Technologies, Inc. |
Mechanical layer and methods of making the same
|
US8885245B2
(en)
|
2012-01-26 |
2014-11-11 |
Jds Uniphase Corporation |
Biaxial MEMS mirror with hidden hinge and staggered electrodes
|
US9385634B2
(en)
|
2012-01-26 |
2016-07-05 |
Tiansheng ZHOU |
Rotational type of MEMS electrostatic actuator
|
JP6550866B2
(ja)
*
|
2015-04-01 |
2019-07-31 |
セイコーエプソン株式会社 |
電気光学装置および電子機器
|
US10831018B2
(en)
*
|
2017-12-08 |
2020-11-10 |
Texas Instruments Incorporated |
Methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator
|
US10371939B2
(en)
|
2017-12-08 |
2019-08-06 |
Texas Instruments Incorporated |
Apparatus providing over-travel protection for actuators
|
US10429590B1
(en)
*
|
2018-05-21 |
2019-10-01 |
Dicon Fiberoptics, Inc. |
Damping mechanism for micro-electro-mechanical systems (MEMS) structures, including tilting mirror devices used in optical components
|
US11256083B2
(en)
|
2018-12-27 |
2022-02-22 |
Texas Instruments Incorporated |
MEMS electrostatic actuator with linearized displacements
|