DE69231479T2 - Magnetron-Plasma-Bearbeitungsvorrichtung - Google Patents

Magnetron-Plasma-Bearbeitungsvorrichtung

Info

Publication number
DE69231479T2
DE69231479T2 DE69231479T DE69231479T DE69231479T2 DE 69231479 T2 DE69231479 T2 DE 69231479T2 DE 69231479 T DE69231479 T DE 69231479T DE 69231479 T DE69231479 T DE 69231479T DE 69231479 T2 DE69231479 T2 DE 69231479T2
Authority
DE
Germany
Prior art keywords
electrode
wafer
ring
silicon wafer
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69231479T
Other languages
German (de)
English (en)
Other versions
DE69231479D1 (de
Inventor
Isahiro Hasegawa
Makoto Hasegawa
Masahito Hiratsuka
Keiji Horioka
Yoshio Ishikawa
Satoshi Kaneko
Takaya Matsushita
Toshihisa Nozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP20740791A external-priority patent/JP3238933B2/ja
Priority claimed from JP3207408A external-priority patent/JP3054638B2/ja
Priority claimed from JP3208445A external-priority patent/JPH0529435A/ja
Priority claimed from JP20844491A external-priority patent/JP2971995B2/ja
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of DE69231479D1 publication Critical patent/DE69231479D1/de
Application granted granted Critical
Publication of DE69231479T2 publication Critical patent/DE69231479T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/3255—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32642—Focus rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32669—Particular magnets or magnet arrangements for controlling the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0421—Apparatus for fluid treatment for etching for drying etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Plasma Technology (AREA)
DE69231479T 1991-07-23 1992-07-23 Magnetron-Plasma-Bearbeitungsvorrichtung Expired - Fee Related DE69231479T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP20740991 1991-07-23
JP20740791A JP3238933B2 (ja) 1991-07-23 1991-07-23 マグネトロンプラズマ処理方法
JP3207408A JP3054638B2 (ja) 1991-07-23 1991-07-23 マグネトロンプラズマ処理装置
JP3208445A JPH0529435A (ja) 1991-07-24 1991-07-24 搬送装置
JP20844491A JP2971995B2 (ja) 1991-07-24 1991-07-24 搬送装置

Publications (2)

Publication Number Publication Date
DE69231479D1 DE69231479D1 (de) 2000-11-02
DE69231479T2 true DE69231479T2 (de) 2001-04-26

Family

ID=27529430

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69231479T Expired - Fee Related DE69231479T2 (de) 1991-07-23 1992-07-23 Magnetron-Plasma-Bearbeitungsvorrichtung

Country Status (5)

Country Link
US (1) US5271788A (enExample)
EP (1) EP0525633B1 (enExample)
KR (1) KR100297358B1 (enExample)
DE (1) DE69231479T2 (enExample)
TW (1) TW239897B (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6063233A (en) 1991-06-27 2000-05-16 Applied Materials, Inc. Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna
US6165311A (en) 1991-06-27 2000-12-26 Applied Materials, Inc. Inductively coupled RF plasma reactor having an overhead solenoidal antenna
US6074512A (en) * 1991-06-27 2000-06-13 Applied Materials, Inc. Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners
JP3172758B2 (ja) * 1993-11-20 2001-06-04 東京エレクトロン株式会社 プラズマエッチング方法
JP2659919B2 (ja) * 1994-01-13 1997-09-30 インターナショナル・ビジネス・マシーンズ・コーポレイション プラズマの不均一性を補正するプラズマ装置
JP3124204B2 (ja) * 1994-02-28 2001-01-15 株式会社東芝 プラズマ処理装置
US5639334A (en) * 1995-03-07 1997-06-17 International Business Machines Corporation Uniform gas flow arrangements
TW279240B (en) 1995-08-30 1996-06-21 Applied Materials Inc Parallel-plate icp source/rf bias electrode head
DE19532100A1 (de) * 1995-08-30 1997-03-06 Leybold Ag Vorrichtung zur Plasmabehandlung von Substraten
US5891348A (en) * 1996-01-26 1999-04-06 Applied Materials, Inc. Process gas focusing apparatus and method
US5748434A (en) * 1996-06-14 1998-05-05 Applied Materials, Inc. Shield for an electrostatic chuck
US6284093B1 (en) 1996-11-29 2001-09-04 Applied Materials, Inc. Shield or ring surrounding semiconductor workpiece in plasma chamber
US6113731A (en) * 1997-01-02 2000-09-05 Applied Materials, Inc. Magnetically-enhanced plasma chamber with non-uniform magnetic field
US5976309A (en) * 1996-12-17 1999-11-02 Lsi Logic Corporation Electrode assembly for plasma reactor
BE1011098A3 (fr) * 1997-04-10 1999-04-06 Cockerill Rech & Dev Procede et dispositif de decapage.
WO1999014788A1 (en) * 1997-09-16 1999-03-25 Applied Materials, Inc. Shield or ring surrounding semiconductor workpiece in plasma chamber
US6074488A (en) * 1997-09-16 2000-06-13 Applied Materials, Inc Plasma chamber support having an electrically coupled collar ring
US6039836A (en) * 1997-12-19 2000-03-21 Lam Research Corporation Focus rings
US6165910A (en) * 1997-12-29 2000-12-26 Lam Research Corporation Self-aligned contacts for semiconductor device
US6579421B1 (en) 1999-01-07 2003-06-17 Applied Materials, Inc. Transverse magnetic field for ionized sputter deposition
US6344105B1 (en) * 1999-06-30 2002-02-05 Lam Research Corporation Techniques for improving etch rate uniformity
JP4394778B2 (ja) * 1999-09-22 2010-01-06 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理方法
US6494958B1 (en) 2000-06-29 2002-12-17 Applied Materials Inc. Plasma chamber support with coupled electrode
US6872281B1 (en) * 2000-09-28 2005-03-29 Lam Research Corporation Chamber configuration for confining a plasma
JP2002261147A (ja) 2001-03-02 2002-09-13 Seiko Instruments Inc 真空装置および搬送装置
US6554954B2 (en) 2001-04-03 2003-04-29 Applied Materials Inc. Conductive collar surrounding semiconductor workpiece in plasma chamber
TWI246873B (en) 2001-07-10 2006-01-01 Tokyo Electron Ltd Plasma processing device
JP2003100713A (ja) * 2001-09-26 2003-04-04 Kawasaki Microelectronics Kk プラズマ電極用カバー
KR101141488B1 (ko) * 2003-03-21 2012-05-03 도쿄엘렉트론가부시키가이샤 처리중의 기판이면(裏面) 증착 감소방법 및 장치
US20050103274A1 (en) * 2003-11-14 2005-05-19 Cheng-Tsung Yu Reliability assessment system and method
KR101218114B1 (ko) 2005-08-04 2013-01-18 주성엔지니어링(주) 플라즈마 식각 장치
WO2018099690A1 (en) * 2016-12-02 2018-06-07 Asml Netherlands B.V. A method to change an etch parameter
US11702748B2 (en) 2017-03-03 2023-07-18 Lam Research Corporation Wafer level uniformity control in remote plasma film deposition
CN111466009B (zh) * 2017-12-15 2023-07-07 朗姆研究公司 等离子体室中使用的环形结构和系统

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124379A (en) * 1975-04-23 1976-10-29 Fujitsu Ltd Plasma etching method
JPS5927213A (ja) * 1982-08-09 1984-02-13 Ichiro Ishii 上空より写真撮影や計測を行なう方法
US4581118A (en) * 1983-01-26 1986-04-08 Materials Research Corporation Shaped field magnetron electrode
JPS60120520A (ja) * 1983-12-02 1985-06-28 Canon Inc 半導体製造用搬送装置
US4891087A (en) * 1984-10-22 1990-01-02 Texas Instruments Incorporated Isolation substrate ring for plasma reactor
US4871420A (en) * 1984-12-18 1989-10-03 American Telephone And Telegraph Company, At&T Bell Laboratories Selective etching process
US4552369A (en) * 1984-12-24 1985-11-12 Gray Tool Company Stem sealing for high pressure valve
US4572759A (en) * 1984-12-26 1986-02-25 Benzing Technology, Inc. Troide plasma reactor with magnetic enhancement
US4793975A (en) * 1985-05-20 1988-12-27 Tegal Corporation Plasma Reactor with removable insert
DE3678612D1 (de) * 1985-05-20 1991-05-16 Tegal Corp Plasmareaktor mit entnehmbarem einsatz.
JPS61278149A (ja) * 1985-06-03 1986-12-09 Canon Inc ウエハ位置決め装置
JPS6216167A (ja) * 1985-07-15 1987-01-24 Canon Inc プリンタ
JPS6221644A (ja) * 1985-07-22 1987-01-30 Canon Inc ウエハ搬送装置
JPS62150735A (ja) * 1985-12-25 1987-07-04 Canon Inc ウエハ搬送装置
KR910005733B1 (ko) * 1986-01-17 1991-08-02 가부시기가이샤 히다찌 세이사꾸쇼 플라즈마 처리방법 및 장치
JPS63224232A (ja) * 1987-03-13 1988-09-19 Hitachi Ltd プラズマ処理方法および装置
US4878995A (en) * 1987-07-02 1989-11-07 Kabushiki Kaisha Toshiba Method of dry etching and apparatus for use in such method
JPH0618182B2 (ja) * 1987-08-05 1994-03-09 松下電器産業株式会社 ドライエッチング装置
JPH0730468B2 (ja) * 1988-06-09 1995-04-05 日電アネルバ株式会社 ドライエッチング装置
JP2892787B2 (ja) * 1990-07-20 1999-05-17 東京エレクトロン株式会社 電気信号の抽出方法

Also Published As

Publication number Publication date
DE69231479D1 (de) 2000-11-02
KR930003271A (ko) 1993-02-24
EP0525633A1 (en) 1993-02-03
US5271788A (en) 1993-12-21
EP0525633B1 (en) 2000-09-27
KR100297358B1 (ko) 2001-11-30
TW239897B (enExample) 1995-02-01

Similar Documents

Publication Publication Date Title
DE69231479T2 (de) Magnetron-Plasma-Bearbeitungsvorrichtung
DE69204670T2 (de) Sanftaetz-einheit fuer modulare bearbeitungsanlagen und ecr-plasmaerzeuger fuer eine solche einheit.
DE69507757T2 (de) Unterteilte Substratbehandlungskammer
DE3854276T2 (de) Kathodenzerstäubungsverfahren und Vorrichtung zur Durchführung desselben.
DE69902665T2 (de) Nockenanordnung zur positionierung von begrenzungsringen in einem plasmabehandlungskammer
DE69129081T2 (de) Gerät und Verfahren zur Niederschlagung durch einen Kollimator
DE19649412B4 (de) Vorrichtung und Verfahren zum Bewegen eines Substrats
DE3650697T2 (de) Wafertransferarm und Wafertransfermethode
DE69700893T2 (de) Magnetrongerät für ganzflächige Niederdruckerosion
DE3789212T2 (de) Integriertes Bearbeitungssystem mit Vielfachkammer.
DE69736977T2 (de) Vakuumkammer mit hohem durchfluss und modularen ausstattungselementen wie plasmaerzeugungsquelle, vakuumpumpe und/oder freitragendem werkstückträger
DE69124411T2 (de) Vorrichtung zur Kontrolle der Kontaminierung in einen mit einer Spannung betriebenen Elektroden versehenen Gerät
DE69626265T2 (de) Verfahren und Gerät zum Einfangen und Entfernen von kontaminierenden Teilchen aus einem inneren Bereich eines Ionen-implantierungsgerätes
DE2513034C2 (de) Vorrichtung zur Herstellung von dotierten dünnen Halbleiterschichten
DE3588132T2 (de) Vorrichtung zum Scannen von Wafern
DE60131511T2 (de) Halbleiterverarbeitungsmodul und Vorrichtung
DE69931294T2 (de) Magnetischer Filter für Ionenquelle
DE60036631T2 (de) Plasmabehandlungsapparatur und plasmabehandlungsverfahren
DE3331245A1 (de) Ebene magnetron-zerstaeubungsvorrichtung
DE69312544T2 (de) Plasmaerzeugungsverfahren und dieses Verfahren verwendende Plasmaerzeugungsvorrichtung
DE3425267A1 (de) System zum transportieren und behandeln von duennen substraten wie platten oder wafer
DE69321762T2 (de) Vakuumbehälter
DE69211583T2 (de) Ionenimplantierungsverfahren und Vorrichtung zur Kontrolle der Kontaminierungspartikel
DE2208032A1 (de) Zerstäubungsvorrichtung
EP0090067B2 (de) Reaktor für das reaktive Ionenätzen und Ätzverfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee