DE69225388D1 - Vorrichtung zur Bildung eines dünnen Films und Verfahren zur Bildung eines dünnen Films mittels dieser Vorrichtung - Google Patents

Vorrichtung zur Bildung eines dünnen Films und Verfahren zur Bildung eines dünnen Films mittels dieser Vorrichtung

Info

Publication number
DE69225388D1
DE69225388D1 DE69225388T DE69225388T DE69225388D1 DE 69225388 D1 DE69225388 D1 DE 69225388D1 DE 69225388 T DE69225388 T DE 69225388T DE 69225388 T DE69225388 T DE 69225388T DE 69225388 D1 DE69225388 D1 DE 69225388D1
Authority
DE
Germany
Prior art keywords
forming
thin film
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69225388T
Other languages
English (en)
Other versions
DE69225388T2 (de
Inventor
Kazuo Tsubouchi
Kazuya Masu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69225388D1 publication Critical patent/DE69225388D1/de
Application granted granted Critical
Publication of DE69225388T2 publication Critical patent/DE69225388T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/4557—Heated nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/14—Evaporating with heated gases or vapours or liquids in contact with the liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/16—Evaporating by spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/06—Flash distillation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
DE69225388T 1991-12-26 1992-12-22 Vorrichtung zur Bildung eines dünnen Films und Verfahren zur Bildung eines dünnen Films mittels dieser Vorrichtung Expired - Lifetime DE69225388T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34486991A JP3222518B2 (ja) 1991-12-26 1991-12-26 液体原料気化装置および薄膜形成装置

Publications (2)

Publication Number Publication Date
DE69225388D1 true DE69225388D1 (de) 1998-06-10
DE69225388T2 DE69225388T2 (de) 1998-11-19

Family

ID=18372624

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69225388T Expired - Lifetime DE69225388T2 (de) 1991-12-26 1992-12-22 Vorrichtung zur Bildung eines dünnen Films und Verfahren zur Bildung eines dünnen Films mittels dieser Vorrichtung

Country Status (4)

Country Link
US (2) US5421895A (de)
EP (1) EP0548926B1 (de)
JP (1) JP3222518B2 (de)
DE (1) DE69225388T2 (de)

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US7563503B2 (en) * 2003-01-10 2009-07-21 The University Of Connecticut Coatings, materials, articles, and methods of making thereof
US7112758B2 (en) * 2003-01-10 2006-09-26 The University Of Connecticut Apparatus and method for solution plasma spraying
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JP5920653B2 (ja) * 2012-01-11 2016-05-18 株式会社リコー 微粒子製造装置及び微粒子の製造方法
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Also Published As

Publication number Publication date
US5766682A (en) 1998-06-16
JP3222518B2 (ja) 2001-10-29
EP0548926A1 (de) 1993-06-30
EP0548926B1 (de) 1998-05-06
DE69225388T2 (de) 1998-11-19
JPH05168802A (ja) 1993-07-02
US5421895A (en) 1995-06-06

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