DE69203948D1 - Verfahren zur Herstellung von Matrixen von MIM-Anordnungen und solche Matrixen enthaltende Anzeigevorrichtungen. - Google Patents
Verfahren zur Herstellung von Matrixen von MIM-Anordnungen und solche Matrixen enthaltende Anzeigevorrichtungen.Info
- Publication number
- DE69203948D1 DE69203948D1 DE69203948T DE69203948T DE69203948D1 DE 69203948 D1 DE69203948 D1 DE 69203948D1 DE 69203948 T DE69203948 T DE 69203948T DE 69203948 T DE69203948 T DE 69203948T DE 69203948 D1 DE69203948 D1 DE 69203948D1
- Authority
- DE
- Germany
- Prior art keywords
- arrays
- pad electrodes
- layer
- support
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000003491 array Methods 0.000 title 3
- 239000004020 conductor Substances 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1365—Active matrix addressed cells in which the switching element is a two-electrode device
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB919110737A GB9110737D0 (en) | 1991-05-17 | 1991-05-17 | Method of fabricating mim type device arrays and display devices incorporating such arrays |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69203948D1 true DE69203948D1 (de) | 1995-09-14 |
DE69203948T2 DE69203948T2 (de) | 1996-03-21 |
Family
ID=10695191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69203948T Expired - Fee Related DE69203948T2 (de) | 1991-05-17 | 1992-05-08 | Verfahren zur Herstellung von Matrixen von MIM-Anordnungen und solche Matrixen enthaltende Anzeigevorrichtungen. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5258864A (de) |
EP (1) | EP0513911B1 (de) |
JP (1) | JPH07168207A (de) |
KR (1) | KR920022029A (de) |
AT (1) | ATE126398T1 (de) |
DE (1) | DE69203948T2 (de) |
GB (1) | GB9110737D0 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19538128C1 (de) * | 1995-10-13 | 1997-02-27 | Lueder Ernst | Verfahren zur Herstellung eines elektronischen Schaltelementes |
US6704133B2 (en) | 1998-03-18 | 2004-03-09 | E-Ink Corporation | Electro-optic display overlays and systems for addressing such displays |
US7075502B1 (en) | 1998-04-10 | 2006-07-11 | E Ink Corporation | Full color reflective display with multichromatic sub-pixels |
CA2330950A1 (en) | 1998-05-12 | 1999-11-18 | E Ink Corporation | Microencapsulated electrophoretic electrostatically-addressed media for drawing device applications |
US7202847B2 (en) | 2002-06-28 | 2007-04-10 | E Ink Corporation | Voltage modulated driver circuits for electro-optic displays |
CN1323321C (zh) * | 2003-06-30 | 2007-06-27 | 高通Mems科技公司 | 光干涉式显示单元的制造方法 |
CN1308764C (zh) * | 2003-07-18 | 2007-04-04 | 高通Mems科技公司 | 光干涉式显示器面板及其制造方法 |
CN100367080C (zh) * | 2003-08-27 | 2008-02-06 | 高通Mems科技公司 | 光干涉式显示面板以及其制造方法 |
US20080296562A1 (en) * | 2007-05-31 | 2008-12-04 | Murduck James M | Methods and apparatus for fabricating carbon nanotubes and carbon nanotube devices |
WO2012002165A1 (en) * | 2010-07-02 | 2012-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and method for driving liquid crystal display device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4396458A (en) * | 1981-12-21 | 1983-08-02 | International Business Machines Corporation | Method for forming planar metal/insulator structures |
JPS59131974A (ja) * | 1983-01-18 | 1984-07-28 | セイコーエプソン株式会社 | 液晶表示装置 |
DE3436527A1 (de) * | 1984-10-05 | 1986-04-10 | Vdo Adolf Schindling Ag, 6000 Frankfurt | Multiplexbare fluessigkristallzelle |
FR2579809B1 (fr) * | 1985-04-02 | 1987-05-15 | Thomson Csf | Procede de realisation de matrices decommande a diodes pour ecran plat de visualisation electro-optique et ecran plat realise par ce procede |
US4895789A (en) * | 1988-03-29 | 1990-01-23 | Seiko Instruments Inc. | Method of manufacturing non-linear resistive element array |
GB2244860A (en) * | 1990-06-04 | 1991-12-11 | Philips Electronic Associated | Fabricating mim type device array and display devices incorporating such arrays |
-
1991
- 1991-05-17 GB GB919110737A patent/GB9110737D0/en active Pending
-
1992
- 1992-04-16 US US07/869,408 patent/US5258864A/en not_active Expired - Fee Related
- 1992-05-08 DE DE69203948T patent/DE69203948T2/de not_active Expired - Fee Related
- 1992-05-08 AT AT92201311T patent/ATE126398T1/de active
- 1992-05-08 EP EP92201311A patent/EP0513911B1/de not_active Expired - Lifetime
- 1992-05-14 KR KR1019920008151A patent/KR920022029A/ko not_active Application Discontinuation
- 1992-05-18 JP JP12507992A patent/JPH07168207A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPH07168207A (ja) | 1995-07-04 |
EP0513911B1 (de) | 1995-08-09 |
US5258864A (en) | 1993-11-02 |
KR920022029A (ko) | 1992-12-19 |
EP0513911A1 (de) | 1992-11-19 |
DE69203948T2 (de) | 1996-03-21 |
ATE126398T1 (de) | 1995-08-15 |
GB9110737D0 (en) | 1991-07-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |