DE69203737D1 - Verfahren und Vorrichtung zur Kristallzüchtung. - Google Patents

Verfahren und Vorrichtung zur Kristallzüchtung.

Info

Publication number
DE69203737D1
DE69203737D1 DE69203737T DE69203737T DE69203737D1 DE 69203737 D1 DE69203737 D1 DE 69203737D1 DE 69203737 T DE69203737 T DE 69203737T DE 69203737 T DE69203737 T DE 69203737T DE 69203737 D1 DE69203737 D1 DE 69203737D1
Authority
DE
Germany
Prior art keywords
growing crystals
crystals
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69203737T
Other languages
English (en)
Other versions
DE69203737T2 (de
Inventor
Muhammed Afzal Shahid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Application granted granted Critical
Publication of DE69203737D1 publication Critical patent/DE69203737D1/de
Publication of DE69203737T2 publication Critical patent/DE69203737T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/14—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method characterised by the seed, e.g. its crystallographic orientation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/901—Levitation, reduced gravity, microgravity, space
    • Y10S117/902—Specified orientation, shape, crystallography, or size of seed or substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE69203737T 1991-01-28 1992-01-17 Verfahren und Vorrichtung zur Kristallzüchtung. Expired - Lifetime DE69203737T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/646,125 US5123996A (en) 1991-01-28 1991-01-28 Crystal growth method and apparatus

Publications (2)

Publication Number Publication Date
DE69203737D1 true DE69203737D1 (de) 1995-09-07
DE69203737T2 DE69203737T2 (de) 1996-04-04

Family

ID=24591858

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69203737T Expired - Lifetime DE69203737T2 (de) 1991-01-28 1992-01-17 Verfahren und Vorrichtung zur Kristallzüchtung.

Country Status (7)

Country Link
US (1) US5123996A (de)
EP (1) EP0497482B1 (de)
JP (1) JPH04362084A (de)
KR (1) KR100190771B1 (de)
DE (1) DE69203737T2 (de)
HK (1) HK78196A (de)
TW (1) TW288155B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69934643T2 (de) * 1998-03-31 2007-10-25 Nippon Mining & Metals Co., Ltd. Verfahren zur herstellung eines einkristalls mit halbleitender zusammensetzung
WO2011050170A2 (en) * 2009-10-22 2011-04-28 Advanced Renewable Energy Company Llc Crystal growth methods and systems
KR101198163B1 (ko) 2011-01-26 2012-11-12 디케이아즈텍 주식회사 타원형 도가니를 이용한 카이로플러스법에 의한 사파이어 단결정 제조 장치
JP2012212851A (ja) 2011-03-18 2012-11-01 Ricoh Co Ltd プリント基板、画像形成装置及びプリント基板の再利用回数の認識方法
JP7155968B2 (ja) * 2018-12-04 2022-10-19 Tdk株式会社 単結晶育成用ルツボ及び単結晶製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2116916A5 (fr) * 1970-12-11 1972-07-21 Radiotechnique Compelec Procede de fabrication de monocristaux de composes semiconducteurs
FR2175594B1 (de) * 1972-03-15 1974-09-13 Radiotechnique Compelec
US3944393A (en) * 1973-11-21 1976-03-16 Monsanto Company Apparatus for horizontal production of single crystal structure
US4404172A (en) * 1981-01-05 1983-09-13 Western Electric Company, Inc. Method and apparatus for forming and growing a single crystal of a semiconductor compound
US4343662A (en) * 1981-03-31 1982-08-10 Atlantic Richfield Company Manufacturing semiconductor wafer devices by simultaneous slicing and etching
US4714101A (en) * 1981-04-02 1987-12-22 United Technologies Corporation Method and apparatus for epitaxial solidification
JPS6221786A (ja) * 1985-07-18 1987-01-30 Hitachi Cable Ltd 横型ボ−ト法による３−ｖ族化合物半導体単結晶製造装置のボ−ト及びこれに収容される種結晶
JPS63182288A (ja) * 1987-01-22 1988-07-27 Mitsubishi Metal Corp ３−５族化合物単結晶の製造方法
JP2723249B2 (ja) * 1988-04-28 1998-03-09 日本電信電話株式会社 結晶育成方法および結晶育成用るつぼ
US4946542A (en) * 1988-12-05 1990-08-07 At&T Bell Laboratories Crystal growth method in crucible with step portion
US4966645A (en) * 1989-12-04 1990-10-30 At&T Bell Laboratories Crystal growth method and apparatus

Also Published As

Publication number Publication date
EP0497482A1 (de) 1992-08-05
JPH04362084A (ja) 1992-12-15
TW288155B (de) 1996-10-11
HK78196A (en) 1996-05-10
EP0497482B1 (de) 1995-08-02
US5123996A (en) 1992-06-23
DE69203737T2 (de) 1996-04-04
KR100190771B1 (ko) 1999-06-01
KR920014956A (ko) 1992-08-26

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Legal Events

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