DE69131460T2 - Optische ventilvorrichtung - Google Patents

Optische ventilvorrichtung

Info

Publication number
DE69131460T2
DE69131460T2 DE69131460T DE69131460T DE69131460T2 DE 69131460 T2 DE69131460 T2 DE 69131460T2 DE 69131460 T DE69131460 T DE 69131460T DE 69131460 T DE69131460 T DE 69131460T DE 69131460 T2 DE69131460 T2 DE 69131460T2
Authority
DE
Germany
Prior art keywords
valve device
optical valve
optical
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69131460T
Other languages
English (en)
Other versions
DE69131460D1 (de
Inventor
Yutaka Hayashi
Masaaki Kamiya
Yoshikazu Kojima
Hiroaki Takasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Seiko Instruments Inc filed Critical Agency of Industrial Science and Technology
Application granted granted Critical
Publication of DE69131460D1 publication Critical patent/DE69131460D1/de
Publication of DE69131460T2 publication Critical patent/DE69131460T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1345Conductors connecting electrodes to cell terminals
    • G02F1/13454Drivers integrated on the active matrix substrate
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/10Materials and properties semiconductor
    • G02F2202/105Materials and properties semiconductor single crystal Si

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal Display Device Control (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
DE69131460T 1990-04-27 1991-04-26 Optische ventilvorrichtung Expired - Lifetime DE69131460T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11297790A JP2566175B2 (ja) 1990-04-27 1990-04-27 半導体装置及びその製造方法
PCT/JP1991/000580 WO1991017471A1 (en) 1990-04-27 1991-04-26 Optical valve device

Publications (2)

Publication Number Publication Date
DE69131460D1 DE69131460D1 (de) 1999-08-26
DE69131460T2 true DE69131460T2 (de) 1999-11-11

Family

ID=14600306

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69131460T Expired - Lifetime DE69131460T2 (de) 1990-04-27 1991-04-26 Optische ventilvorrichtung

Country Status (5)

Country Link
US (1) US5982461A (de)
EP (1) EP0497980B1 (de)
JP (1) JP2566175B2 (de)
DE (1) DE69131460T2 (de)
WO (1) WO1991017471A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3405364B2 (ja) * 1993-03-08 2003-05-12 セイコーインスツルメンツ株式会社 半導体装置
JP3583525B2 (ja) * 1994-10-07 2004-11-04 株式会社半導体エネルギー研究所 アクティブマトリックスパネル
US6798394B1 (en) 1994-10-07 2004-09-28 Semiconductor Energy Laboratory Co., Ltd. Active matrix panel
JPH0950045A (ja) * 1995-12-15 1997-02-18 Seiko Instr Inc 半導体装置、光弁装置およびプロジェクション装置
DE69942442D1 (de) * 1999-01-11 2010-07-15 Semiconductor Energy Lab Halbleiteranordnung mit Treiber-TFT und Pixel-TFT auf einem Substrat
JP4615174B2 (ja) * 2000-01-21 2011-01-19 シチズンホールディングス株式会社 液晶表示装置
JP2002124652A (ja) * 2000-10-16 2002-04-26 Seiko Epson Corp 半導体基板の製造方法、半導体基板、電気光学装置並びに電子機器
JP2002334994A (ja) * 2001-03-07 2002-11-22 Seiko Epson Corp 電気光学装置および電気光学装置の製造方法、電気光学装置用基板、投射型表示装置並びに電子機器
TW543145B (en) * 2001-10-11 2003-07-21 Samsung Electronics Co Ltd A thin film transistor array panel and a method of the same
EP3133590A1 (de) * 2006-04-19 2017-02-22 Ignis Innovation Inc. Stabiles ansteuerverfahren für aktivmatrix-displays

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3332137A (en) * 1964-09-28 1967-07-25 Rca Corp Method of isolating chips of a wafer of semiconductor material
US4024626A (en) * 1974-12-09 1977-05-24 Hughes Aircraft Company Method of making integrated transistor matrix for flat panel liquid crystal display
JPS5433679A (en) * 1977-08-22 1979-03-12 Agency Of Ind Science & Technol Semiconductor intergrated circuit on insulation substrate
JPS57167655A (en) * 1981-04-08 1982-10-15 Jido Keisoku Gijutsu Kenkiyuukumiai Manufacture of insulating isolation substrate
JPH0712210B2 (ja) * 1982-06-02 1995-02-08 株式会社日立製作所 撮像表示装置
JPS59126639A (ja) * 1983-01-10 1984-07-21 Nec Corp 半導体装置用基板の製造方法
JPS60143666A (ja) * 1983-12-29 1985-07-29 Hitachi Ltd マトリツクス型半導体装置
JPH0691227B2 (ja) * 1984-02-09 1994-11-14 松下電子工業株式会社 半導体装置の製造方法
US4768076A (en) * 1984-09-14 1988-08-30 Hitachi, Ltd. Recrystallized CMOS with different crystal planes
EP0197531B1 (de) * 1985-04-08 1993-07-28 Hitachi, Ltd. Dünnfilmtransistor auf isolierendem Substrat
JP2559700B2 (ja) * 1986-03-18 1996-12-04 富士通株式会社 半導体装置の製造方法
JPH0620140B2 (ja) * 1986-06-11 1994-03-16 株式会社日立製作所 薄膜トランジスタ
JPS6355529A (ja) * 1986-08-25 1988-03-10 Nec Corp アクティブ・マトリクス液晶表示装置の製造方法
JPS63101829A (ja) * 1986-10-17 1988-05-06 Nec Corp アクテイブ・マトリツクス液晶表示装置およびその製造方法
JPS6438727A (en) * 1987-08-04 1989-02-09 Nec Corp Transistor array substrate for display
US5343064A (en) * 1988-03-18 1994-08-30 Spangler Leland J Fully integrated single-crystal silicon-on-insulator process, sensors and circuits
JPH01241862A (ja) * 1988-03-24 1989-09-26 Sony Corp 表示装置の製造方法
JP2653099B2 (ja) * 1988-05-17 1997-09-10 セイコーエプソン株式会社 アクティブマトリクスパネル,投写型表示装置及びビューファインダー
US5144390A (en) * 1988-09-02 1992-09-01 Texas Instruments Incorporated Silicon-on insulator transistor with internal body node to source node connection
US4939101A (en) * 1988-09-06 1990-07-03 General Electric Company Method of making direct bonded wafers having a void free interface
JPH07101679B2 (ja) * 1988-11-01 1995-11-01 三菱電機株式会社 電子デバイス用ウエハ,ウエハ用棒状基材および電子デバイス
JPH02198428A (ja) * 1989-01-27 1990-08-06 Nec Corp 液晶表示装置用アクティブマトリクス基板
US5264721A (en) * 1989-04-29 1993-11-23 Fujitsu Limited Insulated-gate FET on an SOI-structure
US5181132A (en) * 1990-05-31 1993-01-19 Canon Kabushiki Kaisha Liquid crystal device and method for producing the same with metal spacer in hole of thin film device's insulator
JPH0453929A (ja) * 1990-06-22 1992-02-21 Fujitsu Ltd 反射型液晶装置
US5206749A (en) * 1990-12-31 1993-04-27 Kopin Corporation Liquid crystal display having essentially single crystal transistors pixels and driving circuits
US5185280A (en) * 1991-01-29 1993-02-09 Texas Instruments Incorporated Method of fabricating a soi transistor with pocket implant and body-to-source (bts) contact
CA2061796C (en) * 1991-03-28 2002-12-24 Kalluri R. Sarma High mobility integrated drivers for active matrix displays

Also Published As

Publication number Publication date
JPH04181227A (ja) 1992-06-29
DE69131460D1 (de) 1999-08-26
JP2566175B2 (ja) 1996-12-25
WO1991017471A1 (en) 1991-11-14
US5982461A (en) 1999-11-09
EP0497980A4 (en) 1992-10-28
EP0497980B1 (de) 1999-07-21
EP0497980A1 (de) 1992-08-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition