DE69125927D1 - Festkörper-bildaufnahmevorrichtung und verfahren zur herstellung derselben - Google Patents

Festkörper-bildaufnahmevorrichtung und verfahren zur herstellung derselben

Info

Publication number
DE69125927D1
DE69125927D1 DE69125927T DE69125927T DE69125927D1 DE 69125927 D1 DE69125927 D1 DE 69125927D1 DE 69125927 T DE69125927 T DE 69125927T DE 69125927 T DE69125927 T DE 69125927T DE 69125927 D1 DE69125927 D1 DE 69125927D1
Authority
DE
Germany
Prior art keywords
producing
same
imaging device
solid state
state imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69125927T
Other languages
English (en)
Other versions
DE69125927T2 (de
Inventor
Tadashi Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE69125927D1 publication Critical patent/DE69125927D1/de
Publication of DE69125927T2 publication Critical patent/DE69125927T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H01L27/14627—Microlenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02325—Optical elements or arrangements associated with the device the optical elements not being integrated nor being directly associated with the device
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
DE69125927T 1990-11-16 1991-11-15 Festkörper-bildaufnahmevorrichtung und verfahren zur herstellung derselben Expired - Fee Related DE69125927T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP31094290 1990-11-16
PCT/JP1991/001567 WO1992009105A1 (en) 1990-11-16 1991-11-15 Solid-state imaging device and method of manufacturing the same

Publications (2)

Publication Number Publication Date
DE69125927D1 true DE69125927D1 (de) 1997-06-05
DE69125927T2 DE69125927T2 (de) 1997-09-18

Family

ID=18011244

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69125927T Expired - Fee Related DE69125927T2 (de) 1990-11-16 1991-11-15 Festkörper-bildaufnahmevorrichtung und verfahren zur herstellung derselben

Country Status (6)

Country Link
US (1) US5321297A (de)
EP (1) EP0511404B1 (de)
JP (1) JP3128297B2 (de)
KR (1) KR960000223B1 (de)
DE (1) DE69125927T2 (de)
WO (1) WO1992009105A1 (de)

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US5895943A (en) * 1995-05-17 1999-04-20 Lg Semicon Co., Ltd. Color charge-coupled device
US5734190A (en) * 1996-03-11 1998-03-31 Eastman Kodak Company Imager having a plurality of cylindrical lenses
US6211916B1 (en) * 1996-03-11 2001-04-03 Eastman Kodak Company Solid state imager with inorganic lens array
US5711890A (en) * 1996-03-11 1998-01-27 Eastman Kodak Company Method for forming cylindrical lens arrays for solid state imager
US5824236A (en) * 1996-03-11 1998-10-20 Eastman Kodak Company Method for forming inorganic lens array for solid state imager
KR100223853B1 (ko) * 1996-08-26 1999-10-15 구본준 고체촬상소자의 구조 및 제조방법
JP3447510B2 (ja) * 1997-04-09 2003-09-16 Ｎｅｃエレクトロニクス株式会社 固体撮像素子、その製造方法及び固体撮像装置
DE19740612B4 (de) * 1997-08-30 2005-10-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung von Bildsensorelementen
WO1999014938A1 (de) 1997-09-12 1999-03-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bildsensorelement und anordnung von bildsensorelementen
JP4232213B2 (ja) * 1998-04-15 2009-03-04 ソニー株式会社 固体撮像素子
US6665014B1 (en) * 1998-11-25 2003-12-16 Intel Corporation Microlens and photodetector
JP3821614B2 (ja) * 1999-08-20 2006-09-13 独立行政法人科学技術振興機構 画像入力装置
US6582988B1 (en) 1999-09-30 2003-06-24 Taiwan Semiconductor Manufacturing Company Method for forming micro lens structures
US7129982B1 (en) * 1999-12-30 2006-10-31 Intel Corporation Color image sensor with integrated binary optical elements
DE10108303A1 (de) * 2001-02-21 2002-08-22 Deutsche Telekom Ag Anordnung und Verfahren zum Detektieren eines optischen Signals an der Längsseite einer Glasfaser
US20020159099A1 (en) * 2001-04-27 2002-10-31 Yin-Chun Huang Optical scanner
KR100467978B1 (ko) * 2001-08-20 2005-01-24 (주)시아이센서 3차원 시뮬레이션을 이용한 이미지 센서의 최적화 제조방법
US20030207212A1 (en) * 2002-05-02 2003-11-06 Law Benjamin Pain-Fong Micro-optics device and method for fabricating
WO2004023564A2 (en) * 2002-09-09 2004-03-18 Koninklijke Philips Electronics N.V. Optoelectronic semiconductor device and method of manufacturing such a device
US6979588B2 (en) * 2003-01-29 2005-12-27 Hynix Semiconductor Inc. Method for manufacturing CMOS image sensor having microlens therein with high photosensitivity
US20040223071A1 (en) * 2003-05-08 2004-11-11 David Wells Multiple microlens system for image sensors or display units
US7205526B2 (en) * 2003-12-22 2007-04-17 Micron Technology, Inc. Methods of fabricating layered lens structures
KR100538149B1 (ko) * 2003-12-27 2005-12-21 동부아남반도체 주식회사 이미지 센서
KR100595898B1 (ko) * 2003-12-31 2006-07-03 동부일렉트로닉스 주식회사 이미지 센서 및 그 제조방법
US7078260B2 (en) * 2003-12-31 2006-07-18 Dongbu Electronics Co., Ltd. CMOS image sensors and methods for fabricating the same
JP2005251804A (ja) * 2004-03-01 2005-09-15 Canon Inc 撮像素子
KR100617065B1 (ko) * 2004-07-15 2006-08-30 동부일렉트로닉스 주식회사 씨모스 이미지 센서의 제조방법
US20060138597A1 (en) * 2004-12-24 2006-06-29 Johnson David A Combined high reliability contact metal/ ballast resistor/ bypass capacitor structure for power transistors
KR20060073186A (ko) * 2004-12-24 2006-06-28 동부일렉트로닉스 주식회사 씨모스 이미지 센서 및 그 제조방법
KR100628235B1 (ko) * 2004-12-30 2006-09-26 동부일렉트로닉스 주식회사 씨모스 이미지 센서 및 그 제조방법
JP5104306B2 (ja) * 2005-07-08 2012-12-19 株式会社ニコン 固体撮像素子
KR100610497B1 (ko) * 2005-07-25 2006-08-09 삼성전자주식회사 이미지 센서 소자의 마이크로렌즈의 오염 방지 방법 및그를 이용한 이미지 센서 소자의 제조 방법
KR100752164B1 (ko) * 2005-12-28 2007-08-24 동부일렉트로닉스 주식회사 씨모스 이미지 센서의 제조방법
JP4212606B2 (ja) 2006-05-12 2009-01-21 シャープ株式会社 撮像素子の製造方法
KR100760922B1 (ko) * 2006-07-31 2007-09-21 동부일렉트로닉스 주식회사 실리콘 산화막을 이용한 씨모스 이미지 센서의마이크로렌즈 및 그 제조방법
US8466000B2 (en) 2011-04-14 2013-06-18 United Microelectronics Corp. Backside-illuminated image sensor and fabricating method thereof
US20130010165A1 (en) 2011-07-05 2013-01-10 United Microelectronics Corp. Optical micro structure, method for fabricating the same and applications thereof
US9312292B2 (en) 2011-10-26 2016-04-12 United Microelectronics Corp. Back side illumination image sensor and manufacturing method thereof
US8318579B1 (en) 2011-12-01 2012-11-27 United Microelectronics Corp. Method for fabricating semiconductor device
US8815102B2 (en) 2012-03-23 2014-08-26 United Microelectronics Corporation Method for fabricating patterned dichroic film
US9401441B2 (en) 2012-06-14 2016-07-26 United Microelectronics Corporation Back-illuminated image sensor with dishing depression surface
US8779344B2 (en) 2012-07-11 2014-07-15 United Microelectronics Corp. Image sensor including a deep trench isolation (DTI)that does not contact a connecting element physically
US8828779B2 (en) 2012-11-01 2014-09-09 United Microelectronics Corp. Backside illumination (BSI) CMOS image sensor process
JP2014093482A (ja) * 2012-11-06 2014-05-19 Toshiba Corp 固体撮像装置の製造方法および固体撮像装置
US8779484B2 (en) 2012-11-29 2014-07-15 United Microelectronics Corp. Image sensor and process thereof
USD758372S1 (en) * 2013-03-13 2016-06-07 Nagrastar Llc Smart card interface
USD759022S1 (en) * 2013-03-13 2016-06-14 Nagrastar Llc Smart card interface
US9279923B2 (en) 2013-03-26 2016-03-08 United Microelectronics Corporation Color filter layer and method of fabricating the same
US9537040B2 (en) 2013-05-09 2017-01-03 United Microelectronics Corp. Complementary metal-oxide-semiconductor image sensor and manufacturing method thereof
US9129876B2 (en) 2013-05-28 2015-09-08 United Microelectronics Corp. Image sensor and process thereof
US9054106B2 (en) 2013-11-13 2015-06-09 United Microelectronics Corp. Semiconductor structure and method for manufacturing the same
US9841319B2 (en) 2013-11-19 2017-12-12 United Microelectronics Corp. Light detecting device
USD864968S1 (en) * 2015-04-30 2019-10-29 Echostar Technologies L.L.C. Smart card interface
US11041980B2 (en) * 2015-09-07 2021-06-22 Sony Semiconductor Solutions Corporation Solid-state imaging element, manufacturing method, and electronic device

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Also Published As

Publication number Publication date
EP0511404A1 (de) 1992-11-04
DE69125927T2 (de) 1997-09-18
US5321297A (en) 1994-06-14
EP0511404B1 (de) 1997-05-02
WO1992009105A1 (en) 1992-05-29
KR960000223B1 (ko) 1996-01-03
EP0511404A4 (en) 1992-11-19
JP3128297B2 (ja) 2001-01-29
JPH0521770A (ja) 1993-01-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee