DE69111671T2 - Verfahren und Vorrichtung zur Dekontaminierung durch Ionenätzen. - Google Patents
Verfahren und Vorrichtung zur Dekontaminierung durch Ionenätzen.Info
- Publication number
- DE69111671T2 DE69111671T2 DE1991611671 DE69111671T DE69111671T2 DE 69111671 T2 DE69111671 T2 DE 69111671T2 DE 1991611671 DE1991611671 DE 1991611671 DE 69111671 T DE69111671 T DE 69111671T DE 69111671 T2 DE69111671 T2 DE 69111671T2
- Authority
- DE
- Germany
- Prior art keywords
- housing
- substrate
- sputtering
- decontaminated
- electrically conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 22
- 238000005202 decontamination Methods 0.000 title claims description 16
- 230000003588 decontaminative effect Effects 0.000 title claims description 15
- 238000000992 sputter etching Methods 0.000 title claims 6
- 239000000758 substrate Substances 0.000 claims description 65
- 239000000463 material Substances 0.000 claims description 36
- 238000004544 sputter deposition Methods 0.000 claims description 30
- 238000005086 pumping Methods 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 239000011241 protective layer Substances 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 4
- 235000021110 pickles Nutrition 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 10
- 239000004020 conductor Substances 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000010410 layer Substances 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000012857 radioactive material Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010808 liquid waste Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21F—PROTECTION AGAINST X-RADIATION, GAMMA RADIATION, CORPUSCULAR RADIATION OR PARTICLE BOMBARDMENT; TREATING RADIOACTIVELY CONTAMINATED MATERIAL; DECONTAMINATION ARRANGEMENTS THEREFOR
- G21F9/00—Treating radioactively contaminated material; Decontamination arrangements therefor
- G21F9/001—Decontamination of contaminated objects, apparatus, clothes, food; Preventing contamination thereof
- G21F9/005—Decontamination of the surface of objects by ablation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- General Chemical & Material Sciences (AREA)
- Food Science & Technology (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9005417A FR2661544B1 (fr) | 1990-04-27 | 1990-04-27 | Procede et dispositif de decontamination par decapage ionique. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69111671D1 DE69111671D1 (de) | 1995-09-07 |
| DE69111671T2 true DE69111671T2 (de) | 1996-04-04 |
Family
ID=9396183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1991611671 Expired - Fee Related DE69111671T2 (de) | 1990-04-27 | 1991-04-25 | Verfahren und Vorrichtung zur Dekontaminierung durch Ionenätzen. |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0454584B1 (fr) |
| JP (1) | JP2892857B2 (fr) |
| DE (1) | DE69111671T2 (fr) |
| FR (1) | FR2661544B1 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL119634A (en) * | 1996-11-18 | 2000-12-06 | Omerco Ltd | Method and apparatus for the treatment of surfaces of large metal objects |
| JP6052538B2 (ja) * | 2012-12-04 | 2016-12-27 | 清水建設株式会社 | 汚染コンクリート塊の除染処理方法および装置 |
| RU2711292C1 (ru) * | 2018-11-21 | 2020-01-16 | Акционерное Общество "Российский Концерн По Производству Электрической И Тепловой Энергии На Атомных Станциях" (Ао "Концерн Росэнергоатом") | Способ дезактивации элемента конструкции ядерного реактора |
| CN112139151A (zh) * | 2020-09-11 | 2020-12-29 | 韩山师范学院 | 一种大型设备表面清理装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1382915A (en) * | 1972-04-25 | 1975-02-05 | British Nuclear Fuels Ltd | Decontamination of fuel element sheaths |
| DE3114543A1 (de) * | 1981-04-10 | 1982-12-16 | Alkem Gmbh, 6450 Hanau | Verfahren zum dekontaminieren der oberflaeche eines koerpers von radioaktiven verunreinigungspartikeln und einrichtung zur durchfuehrung dieses verfahrens |
| GB2159753B (en) * | 1984-03-06 | 1988-09-07 | Asm Fico Tooling | Method and apparatus for cleaning lead pins before soldering operations |
| BE1001027A3 (nl) * | 1987-10-21 | 1989-06-13 | Bekaert Sa Nv | Werkwijze en inrichting voor het reinigen van een langwerpig metalen substraat, zoals een draad, een band, een koord, enz., alsmede volgens die werkwijze gereinigde substraten en met dergelijke substraten versterkte voorwerpen uit polymeermateriaal. |
-
1990
- 1990-04-27 FR FR9005417A patent/FR2661544B1/fr not_active Expired - Fee Related
-
1991
- 1991-04-25 EP EP19910401101 patent/EP0454584B1/fr not_active Expired - Lifetime
- 1991-04-25 DE DE1991611671 patent/DE69111671T2/de not_active Expired - Fee Related
- 1991-04-26 JP JP3095983A patent/JP2892857B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| FR2661544B1 (fr) | 1994-05-27 |
| FR2661544A1 (fr) | 1991-10-31 |
| EP0454584A1 (fr) | 1991-10-30 |
| DE69111671D1 (de) | 1995-09-07 |
| JPH04230898A (ja) | 1992-08-19 |
| EP0454584B1 (fr) | 1995-08-02 |
| JP2892857B2 (ja) | 1999-05-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |