DE69102980D1 - Reinigung von Siliziumtetrachlorid. - Google Patents

Reinigung von Siliziumtetrachlorid.

Info

Publication number
DE69102980D1
DE69102980D1 DE69102980T DE69102980T DE69102980D1 DE 69102980 D1 DE69102980 D1 DE 69102980D1 DE 69102980 T DE69102980 T DE 69102980T DE 69102980 T DE69102980 T DE 69102980T DE 69102980 D1 DE69102980 D1 DE 69102980D1
Authority
DE
Germany
Prior art keywords
purification
silicon tetrachloride
tetrachloride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69102980T
Other languages
English (en)
Other versions
DE69102980T2 (de
Inventor
Tsutomu Ogihara
Takaaki Shimizu
Masahiko Naruse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=18263256&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69102980(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE69102980D1 publication Critical patent/DE69102980D1/de
Publication of DE69102980T2 publication Critical patent/DE69102980T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE1991602980 1990-11-29 1991-11-29 Reinigung von Siliziumtetrachlorid. Expired - Lifetime DE69102980T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2333185A JP2867696B2 (ja) 1990-11-29 1990-11-29 四塩化ケイ素の精製方法

Publications (2)

Publication Number Publication Date
DE69102980D1 true DE69102980D1 (de) 1994-08-25
DE69102980T2 DE69102980T2 (de) 1995-01-19

Family

ID=18263256

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991602980 Expired - Lifetime DE69102980T2 (de) 1990-11-29 1991-11-29 Reinigung von Siliziumtetrachlorid.

Country Status (4)

Country Link
EP (1) EP0488765B1 (de)
JP (1) JP2867696B2 (de)
KR (1) KR100197173B1 (de)
DE (1) DE69102980T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6127343A (en) * 1996-05-14 2000-10-03 Novo Nordisk A/S Somatostatin agonists and antagonists
NL1019371C2 (nl) * 2001-11-15 2003-05-16 Draka Fibre Technology Bv Werkwijze voor het bereiden van zeer zuiver siliciumchloride en/of germaniumchloride.
DE102005041137A1 (de) * 2005-08-30 2007-03-01 Degussa Ag Reaktor, Anlage und großtechnisches Verfahren zur kontinuierlichen Herstellung von hochreinem Siliciumtetrachlorid oder hochreinem Germaniumtetrachlorid
CN100345753C (zh) * 2006-03-10 2007-10-31 锦州铁合金股份有限公司 锆英砂沸腾氯化反应中产生的四氯化硅的回收提纯方法
JP2007269679A (ja) * 2006-03-31 2007-10-18 Sumitomo Titanium Corp 高純度アルキルシランの製造方法
JP4714197B2 (ja) 2007-09-05 2011-06-29 信越化学工業株式会社 トリクロロシランの製造方法および多結晶シリコンの製造方法
JP4659797B2 (ja) 2007-09-05 2011-03-30 信越化学工業株式会社 多結晶シリコンの製造方法
JP4659798B2 (ja) 2007-09-05 2011-03-30 信越化学工業株式会社 トリクロロシランの製造方法
CN103738966A (zh) * 2014-01-12 2014-04-23 北京国辰华星科技有限责任公司 一种高纯度四氯化硅提纯方法
CN104058410B (zh) * 2014-06-26 2016-06-01 中国恩菲工程技术有限公司 纯化四氯化硅的系统
CN105439152B (zh) * 2014-08-18 2017-06-30 中国科学院化学研究所 纯化SiCl4和/或SiHCl3的粗品的液固相光催化净化方法
RU2672428C1 (ru) * 2017-10-25 2018-11-14 Акционерное общество "Государственный научно-исследовательский и проектный институт редкометаллической промышленности АО "Гиредмет" Способ получения тетрахлорида кремния высокой чистоты

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE756657A (fr) * 1969-09-27 1971-03-01 Dynamit Nobel Ag Procede d'elimination d'hydrogeno-silanes de chlorosilanes
JPS53100193A (en) * 1977-02-14 1978-09-01 Shin Etsu Chem Co Ltd Silicon tetrachloride purifying method
US4372834A (en) * 1981-06-19 1983-02-08 Bell Telephone Laboratories, Incorporated Purification process for compounds useful in optical fiber manufacture

Also Published As

Publication number Publication date
DE69102980T2 (de) 1995-01-19
JPH04202007A (ja) 1992-07-22
EP0488765B1 (de) 1994-07-20
KR100197173B1 (ko) 1999-06-15
EP0488765A1 (de) 1992-06-03
JP2867696B2 (ja) 1999-03-08
KR920009696A (ko) 1992-06-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition