DE69108527D1 - Metallkatalysierte Herstellung von Siliziumtetrachlorsilan. - Google Patents

Metallkatalysierte Herstellung von Siliziumtetrachlorsilan.

Info

Publication number
DE69108527D1
DE69108527D1 DE69108527T DE69108527T DE69108527D1 DE 69108527 D1 DE69108527 D1 DE 69108527D1 DE 69108527 T DE69108527 T DE 69108527T DE 69108527 T DE69108527 T DE 69108527T DE 69108527 D1 DE69108527 D1 DE 69108527D1
Authority
DE
Germany
Prior art keywords
tetrachlorosilane
silicon
metal
catalyzed production
catalyzed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69108527T
Other languages
English (en)
Other versions
DE69108527T2 (de
Inventor
Roland Lee Halm
Brian Michael Naasz
Regie Harold Zapp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/622,913 external-priority patent/US5176892A/en
Priority claimed from US07/627,803 external-priority patent/US5160720A/en
Application filed by Dow Corning Corp filed Critical Dow Corning Corp
Application granted granted Critical
Publication of DE69108527D1 publication Critical patent/DE69108527D1/de
Publication of DE69108527T2 publication Critical patent/DE69108527T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Catalysts (AREA)
  • Silicon Compounds (AREA)
DE1991608527 1990-12-06 1991-12-05 Metallkatalysierte Herstellung von Siliziumtetrachlorsilan. Expired - Fee Related DE69108527T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/622,913 US5176892A (en) 1990-12-06 1990-12-06 Supported metal catalyzed production of tetrachlorosilane
US07/627,803 US5160720A (en) 1990-12-12 1990-12-12 Metal catalyzed production of tetrachlorosilane

Publications (2)

Publication Number Publication Date
DE69108527D1 true DE69108527D1 (de) 1995-05-04
DE69108527T2 DE69108527T2 (de) 1995-08-31

Family

ID=27089315

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1991608527 Expired - Fee Related DE69108527T2 (de) 1990-12-06 1991-12-05 Metallkatalysierte Herstellung von Siliziumtetrachlorsilan.

Country Status (4)

Country Link
EP (1) EP0489441B1 (de)
JP (1) JPH05147921A (de)
CA (1) CA2055304A1 (de)
DE (1) DE69108527T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401872A (en) * 1994-03-07 1995-03-28 Hemlock Semiconductor Treatment of vent gas to remove hydrogen chloride
US5871705A (en) * 1996-09-19 1999-02-16 Tokuyama Corporation Process for producing trichlorosilane
DE112005003497T5 (de) * 2005-03-09 2008-01-24 Rec Advanced Silicon Materials LLC, Silver Bow Verfahren zur Herstellung von Hydrochlorsilanen
CN102583392B (zh) * 2011-12-24 2015-08-05 江苏中能硅业科技发展有限公司 含硅卤化物脱卤加氢的方法
DE102013215011A1 (de) 2013-07-31 2015-02-05 Wacker Chemie Ag Verfahren zur Herstellung von Trichlorsilan

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2623290A1 (de) * 1976-05-25 1977-12-08 Wacker Chemitronic Verfahren zur herstellung von trichlorsilan und/oder siliciumtetrachlorid

Also Published As

Publication number Publication date
CA2055304A1 (en) 1992-06-07
JPH05147921A (ja) 1993-06-15
EP0489441A1 (de) 1992-06-10
EP0489441B1 (de) 1995-03-29
DE69108527T2 (de) 1995-08-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee