DE69100211D1 - Herstellung von siliciumnitridpulver. - Google Patents

Herstellung von siliciumnitridpulver.

Info

Publication number
DE69100211D1
DE69100211D1 DE9191101303T DE69100211T DE69100211D1 DE 69100211 D1 DE69100211 D1 DE 69100211D1 DE 9191101303 T DE9191101303 T DE 9191101303T DE 69100211 T DE69100211 T DE 69100211T DE 69100211 D1 DE69100211 D1 DE 69100211D1
Authority
DE
Germany
Prior art keywords
production
silicon nitride
nitride powder
powder
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE9191101303T
Other languages
English (en)
Other versions
DE69100211T2 (de
Inventor
Hirofumi Fukuoka
Mutsuo Shimizu
Hidemitsu Ochiai
Hideaki Shimizu
Masanori Fukuhira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of DE69100211D1 publication Critical patent/DE69100211D1/de
Application granted granted Critical
Publication of DE69100211T2 publication Critical patent/DE69100211T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
DE91101303T 1990-01-31 1991-01-31 Herstellung von Siliciumnitridpulver. Expired - Fee Related DE69100211T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021864A JPH06102524B2 (ja) 1990-01-31 1990-01-31 窒化ケイ素粉末の製造方法

Publications (2)

Publication Number Publication Date
DE69100211D1 true DE69100211D1 (de) 1993-09-09
DE69100211T2 DE69100211T2 (de) 1994-03-03

Family

ID=12066989

Family Applications (1)

Application Number Title Priority Date Filing Date
DE91101303T Expired - Fee Related DE69100211T2 (de) 1990-01-31 1991-01-31 Herstellung von Siliciumnitridpulver.

Country Status (4)

Country Link
US (1) US5232677A (de)
EP (1) EP0440235B1 (de)
JP (1) JPH06102524B2 (de)
DE (1) DE69100211T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0733411A (ja) * 1993-07-16 1995-02-03 Shin Etsu Chem Co Ltd 高α型窒化ケイ素粉末の製造方法
JPH09156909A (ja) * 1995-12-07 1997-06-17 Shin Etsu Chem Co Ltd 窒化ケイ素粉末の連続製造方法
US6264908B1 (en) 1997-12-04 2001-07-24 Thomas C. Maganas Methods and systems for the catalytic formation of silicon nitride using a fluidized bed of silica
DE102008062177A1 (de) * 2008-12-13 2010-07-08 Alzchem Trostberg Gmbh Verfahren zur Herstellung von hochreinem Siliciumnitrid
CN107285287A (zh) * 2016-04-05 2017-10-24 新特能源股份有限公司 一种β相氮化硅的生产方法及β相氮化硅
CN107285772A (zh) * 2016-04-05 2017-10-24 新特能源股份有限公司 一种α相氮化硅的生产方法及α相氮化硅
CN115432676B (zh) * 2021-06-04 2024-03-26 中国科学院过程工程研究所 一种多级流化床制备高质量氮化硅粉体的系统及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE252597C (de) *
JPS58151311A (ja) * 1982-03-04 1983-09-08 Denki Kagaku Kogyo Kk 珪素系窒化物の製造方法
JPS60186406A (ja) * 1984-03-03 1985-09-21 Shin Etsu Chem Co Ltd アルフア型窒化けい素の連続的製造方法
JPS6197110A (ja) * 1984-10-18 1986-05-15 Osaka Titanium Seizo Kk 高α相率窒化けい素の製造方法
JPS61158804A (ja) * 1984-12-28 1986-07-18 Onoda Cement Co Ltd 窒化けい素の製法
JPS61266305A (ja) * 1985-05-17 1986-11-26 Onoda Cement Co Ltd 回転窯による窒化珪素の製造方法

Also Published As

Publication number Publication date
EP0440235A3 (en) 1992-03-04
EP0440235A2 (de) 1991-08-07
JPH06102524B2 (ja) 1994-12-14
US5232677A (en) 1993-08-03
JPH03228807A (ja) 1991-10-09
EP0440235B1 (de) 1993-08-04
DE69100211T2 (de) 1994-03-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee