DE69127821D1 - Herstellung von siliciumnitrid mit verdichtungshilfsmittel, und resultate - Google Patents

Herstellung von siliciumnitrid mit verdichtungshilfsmittel, und resultate

Info

Publication number
DE69127821D1
DE69127821D1 DE69127821T DE69127821T DE69127821D1 DE 69127821 D1 DE69127821 D1 DE 69127821D1 DE 69127821 T DE69127821 T DE 69127821T DE 69127821 T DE69127821 T DE 69127821T DE 69127821 D1 DE69127821 D1 DE 69127821D1
Authority
DE
Germany
Prior art keywords
results
production
silicon nitride
compressing agent
compressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69127821T
Other languages
English (en)
Other versions
DE69127821T2 (de
Inventor
James Edler
Bohdan Lisowsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eaton Corp
Original Assignee
Eaton Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eaton Corp filed Critical Eaton Corp
Application granted granted Critical
Publication of DE69127821D1 publication Critical patent/DE69127821D1/de
Publication of DE69127821T2 publication Critical patent/DE69127821T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69127821T 1990-07-24 1991-07-23 Herstellung von siliciumnitrid mit verdichtungshilfsmittel, und resultate Expired - Lifetime DE69127821T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/557,371 US5213729A (en) 1990-07-24 1990-07-24 Process for preparing a densified beta-phase silicon nitride material having at least one densification aid, and the material resulting therefrom
PCT/US1991/005212 WO1992001654A1 (en) 1990-07-24 1991-07-23 Preparing silicon nitride with densification aid, and results

Publications (2)

Publication Number Publication Date
DE69127821D1 true DE69127821D1 (de) 1997-11-06
DE69127821T2 DE69127821T2 (de) 1998-04-30

Family

ID=24225125

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69127821T Expired - Lifetime DE69127821T2 (de) 1990-07-24 1991-07-23 Herstellung von siliciumnitrid mit verdichtungshilfsmittel, und resultate

Country Status (6)

Country Link
US (1) US5213729A (de)
EP (1) EP0540671B1 (de)
JP (1) JP3321621B2 (de)
DE (1) DE69127821T2 (de)
ES (1) ES2108712T3 (de)
WO (1) WO1992001654A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW209854B (de) * 1991-08-28 1993-07-21 Hoechst Ceram Tec Ag
JP3164917B2 (ja) * 1992-10-14 2001-05-14 株式会社いすゞセラミックス研究所 低摩擦セラミックス
EP0782555B1 (de) * 1993-01-22 2004-03-17 Eaton Corporation Verfahren zur herstellung eines siliciumhaltigen nitridierbaren basismaterials und von siliciumnitridmaterialien
US5364608A (en) * 1993-07-30 1994-11-15 Eaton Corporation Method of converting a silicon nitride from alpha-phase to beta-phase, apparatus used therefor, and silicon nitride material made therefrom
US5746969A (en) * 1993-10-25 1998-05-05 Bayer Ag Process for the production of dense silicon nitride materials
GB9413267D0 (en) * 1994-07-01 1994-08-24 T & N Technology Ltd Sintered reaction-bonded silicon nitride components
EP0782542A1 (de) * 1994-07-05 1997-07-09 Eaton Corporation Verfahren zur nitridierung von silizium
JP2001080967A (ja) * 1999-09-06 2001-03-27 Sumitomo Electric Ind Ltd Ｓｉ３Ｎ４セラミックスとその製造用Ｓｉ基組成物及びこれらの製造方法
JP3698143B2 (ja) * 2003-01-21 2005-09-21 住友電気工業株式会社 フィルタ用多孔質Ｓｉ３Ｎ４とその製造方法
JP4528938B2 (ja) * 2004-12-24 2010-08-25 独立行政法人物質・材料研究機構 マンガンがドープされた窒化ガリウムナノワイヤーの製造方法
IL213178A0 (en) * 2010-05-31 2011-07-31 Council Scient Ind Res A process for manufacturing high density slip-cast fused silica bodies
JP5717466B2 (ja) * 2011-02-25 2015-05-13 京セラ株式会社 窒化珪素質焼結体
CN102875153B (zh) * 2012-09-27 2013-11-27 宁波伏尔肯机械密封件制造有限公司 机械密封用氮化硅陶瓷粉体的喷雾干燥造粒方法
JP7219810B2 (ja) * 2019-03-29 2023-02-08 デンカ株式会社 窒化珪素基板、窒化珪素－金属複合体、窒化珪素回路基板、及び、半導体パッケージ

Family Cites Families (31)

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US779474A (en) * 1902-11-21 1905-01-10 John H Gruner Machine for cutting the shells of nuts.
US2268589A (en) * 1934-07-07 1942-01-06 Heany Ind Ceramic Corp Method of producing vitreous silica articles
US2869215A (en) * 1955-06-20 1959-01-20 Robert S Smith Molding method
NL121804C (de) * 1959-02-27
US3205080A (en) * 1964-10-19 1965-09-07 Nat Beryllia Corp Beryllia-silicon carbide ceramic bodies
GB1138284A (en) * 1966-02-09 1968-12-27 Nat Res Dev Spray deposition of silicon powder structures
US3819786A (en) * 1969-09-29 1974-06-25 Nat Res Dev Production of silicon nitride material components
US3991166A (en) * 1972-01-11 1976-11-09 Joseph Lucas (Industries) Limited Ceramic materials
JPS523647B2 (de) * 1972-10-24 1977-01-29
US3992497A (en) * 1973-05-18 1976-11-16 Westinghouse Electric Corporation Pressureless sintering silicon nitride powders
US4033400A (en) * 1973-07-05 1977-07-05 Eaton Corporation Method of forming a composite by infiltrating a porous preform
US3887412A (en) * 1973-12-20 1975-06-03 Ford Motor Co Method of making a triple density silicon nitride article
US4036653A (en) * 1975-05-28 1977-07-19 E. I. Du Pont De Nemours And Company Amorphous silicon nitride composition containing carbon, and vapor phase process
US4067943A (en) * 1975-07-18 1978-01-10 Ford Motor Company Method of manufacturing a slip cast article
JPS5830264B2 (ja) * 1975-10-18 1983-06-28 トウホクダイガク キンゾクザイリヨウケンキユウシヨチヨウ キンゾクチツカブツシヨウケツセイケイタイノセイゾウホウホウ
GB1556378A (en) * 1976-10-27 1979-11-21 Skf Uk Ltd Bearing cages
US4119689A (en) * 1977-01-03 1978-10-10 General Electric Company Sintering of silicon nitride using Be additive
GB2010913B (en) * 1977-12-23 1982-06-23 Fiat Spa Process for sintering silicon nitride compacts
US4285895A (en) * 1979-03-23 1981-08-25 Ford Motor Company Method of densifying a reaction bonded silicon nitride article
US4235857A (en) * 1979-07-02 1980-11-25 Ford Motor Company Method of nitriding silicon
US4356136A (en) * 1980-08-29 1982-10-26 Ford Motor Company Method of densifying an article formed of reaction bonded silicon nitride
US4376742A (en) * 1981-02-23 1983-03-15 Systems Research Laboratories, Inc. Fugitive liquid phase densification of silicon nitride
JPS5881250A (ja) * 1981-11-07 1983-05-16 Honda Motor Co Ltd Ｖ型多気筒内燃機関におけるバランシング構造
FR2517665B1 (fr) * 1981-12-08 1986-01-31 Ceraver Procede de fabrication d'un materiau fritte a base de nitrure de silicium, et materiau obtenu par ce procede
US4377542A (en) * 1981-12-21 1983-03-22 Ford Motor Company Method of forming a densified silicon nitride article
US4471060A (en) * 1983-07-08 1984-09-11 Ford Motor Company Method of forming a relatively stable slip of silicon metal particles and yttrium containing particles
US4443394A (en) * 1983-07-19 1984-04-17 Ford Motor Company Method of making a silicon nitride body from the Y2 O3 /SiO2 3 N4 /Al2 O3
US4519967A (en) * 1983-10-24 1985-05-28 Ford Motor Company Method of making a silicon metal containing article
JP2631102B2 (ja) * 1987-05-09 1997-07-16 京セラ株式会社 窒化珪素質焼結体の製造方法
US4781874A (en) * 1987-10-23 1988-11-01 Eaton Corporation Process for making silicon nitride articles
US4943401A (en) * 1987-12-21 1990-07-24 Eaton Corporation Process for making silicon nitride articles

Also Published As

Publication number Publication date
EP0540671A1 (de) 1993-05-12
JPH05508612A (ja) 1993-12-02
WO1992001654A1 (en) 1992-02-06
DE69127821T2 (de) 1998-04-30
ES2108712T3 (es) 1998-01-01
EP0540671A4 (en) 1993-11-18
JP3321621B2 (ja) 2002-09-03
EP0540671B1 (de) 1997-10-01
US5213729A (en) 1993-05-25

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