DE69026340T2 - Strahlungsempfindliche Harzzusammensetzung - Google Patents

Strahlungsempfindliche Harzzusammensetzung

Info

Publication number
DE69026340T2
DE69026340T2 DE69026340T DE69026340T DE69026340T2 DE 69026340 T2 DE69026340 T2 DE 69026340T2 DE 69026340 T DE69026340 T DE 69026340T DE 69026340 T DE69026340 T DE 69026340T DE 69026340 T2 DE69026340 T2 DE 69026340T2
Authority
DE
Germany
Prior art keywords
resin composition
sensitive resin
radiation sensitive
radiation
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69026340T
Other languages
English (en)
Other versions
DE69026340D1 (de
Inventor
Yoshiji Yumoto
Tsutomu Shimokawa
Takao Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Application granted granted Critical
Publication of DE69026340D1 publication Critical patent/DE69026340D1/de
Publication of DE69026340T2 publication Critical patent/DE69026340T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
DE69026340T 1989-11-14 1990-11-14 Strahlungsempfindliche Harzzusammensetzung Expired - Fee Related DE69026340T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1295416A JPH03155554A (ja) 1989-11-14 1989-11-14 放射線感応性樹脂組成物

Publications (2)

Publication Number Publication Date
DE69026340D1 DE69026340D1 (de) 1996-05-09
DE69026340T2 true DE69026340T2 (de) 1996-10-02

Family

ID=17820323

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69026340T Expired - Fee Related DE69026340T2 (de) 1989-11-14 1990-11-14 Strahlungsempfindliche Harzzusammensetzung

Country Status (5)

Country Link
US (1) US5110706A (de)
EP (1) EP0428398B1 (de)
JP (1) JPH03155554A (de)
KR (1) KR0163761B1 (de)
DE (1) DE69026340T2 (de)

Families Citing this family (67)

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US5324620A (en) * 1989-09-08 1994-06-28 Ocg Microeletronic Materials, Inc. Radiation-sensitive compositions containing novolak polymers made from four phenolic derivatives and an aldehyde
DE4013575C2 (de) * 1990-04-27 1994-08-11 Basf Ag Verfahren zur Herstellung negativer Reliefkopien
DE4134526A1 (de) * 1990-10-18 1992-05-14 Toyo Gosei Kogyo Kk Positive photoresist-zusammensetzung und mustererzeugungsverfahren unter verwendung dieser zusammensetzung
JPH04178451A (ja) * 1990-11-09 1992-06-25 Fuji Photo Film Co Ltd ポジ型フオトレジスト組成物
US5413896A (en) * 1991-01-24 1995-05-09 Japan Synthetic Rubber Co., Ltd. I-ray sensitive positive resist composition
US5362597A (en) * 1991-05-30 1994-11-08 Japan Synthetic Rubber Co., Ltd. Radiation-sensitive resin composition comprising an epoxy-containing alkali-soluble resin and a naphthoquinone diazide sulfonic acid ester
US5372909A (en) * 1991-09-24 1994-12-13 Mitsubishi Kasei Corporation Photosensitive resin composition comprising an alkali-soluble resin made from a phenolic compound and at least 2 different aldehydes
US5346799A (en) * 1991-12-23 1994-09-13 Ocg Microelectronic Materials, Inc. Novolak resins and their use in radiation-sensitive compositions wherein the novolak resins are made by condensing 2,6-dimethylphenol, 2,3-dimethylphenol, a para-substituted phenol and an aldehyde
JP3095847B2 (ja) * 1991-12-27 2000-10-10 コニカ株式会社 カラー写真用処理液及び該処理液を用いたハロゲン化銀カラー写真感光材料の処理方法
US5437952A (en) * 1992-03-06 1995-08-01 Konica Corporation Lithographic photosensitive printing plate comprising a photoconductor and a naphtho-quinone diazide sulfonic acid ester of a phenol resin
US5384228A (en) * 1992-04-14 1995-01-24 Tokyo Ohka Kogyo Co., Ltd. Alkali-developable positive-working photosensitive resin composition
KR100277365B1 (ko) * 1992-11-11 2001-09-17 고사이 아끼오 포지티브형레제스트조성물
US6280910B1 (en) 1992-11-23 2001-08-28 Pioneer Electronic Corporation Photoresist for optical disc and method of preparing optical disc utilizing photoresist
US5643356A (en) 1993-08-05 1997-07-01 Kimberly-Clark Corporation Ink for ink jet printers
US5721287A (en) 1993-08-05 1998-02-24 Kimberly-Clark Worldwide, Inc. Method of mutating a colorant by irradiation
CA2120838A1 (en) 1993-08-05 1995-02-06 Ronald Sinclair Nohr Solid colored composition mutable by ultraviolet radiation
US5865471A (en) 1993-08-05 1999-02-02 Kimberly-Clark Worldwide, Inc. Photo-erasable data processing forms
US6017471A (en) 1993-08-05 2000-01-25 Kimberly-Clark Worldwide, Inc. Colorants and colorant modifiers
US5681380A (en) 1995-06-05 1997-10-28 Kimberly-Clark Worldwide, Inc. Ink for ink jet printers
US6017661A (en) 1994-11-09 2000-01-25 Kimberly-Clark Corporation Temporary marking using photoerasable colorants
US5733693A (en) 1993-08-05 1998-03-31 Kimberly-Clark Worldwide, Inc. Method for improving the readability of data processing forms
US5700850A (en) 1993-08-05 1997-12-23 Kimberly-Clark Worldwide Colorant compositions and colorant stabilizers
US6211383B1 (en) 1993-08-05 2001-04-03 Kimberly-Clark Worldwide, Inc. Nohr-McDonald elimination reaction
US5773182A (en) 1993-08-05 1998-06-30 Kimberly-Clark Worldwide, Inc. Method of light stabilizing a colorant
US5645964A (en) 1993-08-05 1997-07-08 Kimberly-Clark Corporation Digital information recording media and method of using same
JP3192548B2 (ja) * 1994-04-22 2001-07-30 東京応化工業株式会社 ポジ型ホトレジスト組成物
US6242057B1 (en) 1994-06-30 2001-06-05 Kimberly-Clark Worldwide, Inc. Photoreactor composition and applications therefor
US5739175A (en) 1995-06-05 1998-04-14 Kimberly-Clark Worldwide, Inc. Photoreactor composition containing an arylketoalkene wavelength-specific sensitizer
US5685754A (en) 1994-06-30 1997-11-11 Kimberly-Clark Corporation Method of generating a reactive species and polymer coating applications therefor
US6071979A (en) 1994-06-30 2000-06-06 Kimberly-Clark Worldwide, Inc. Photoreactor composition method of generating a reactive species and applications therefor
US6008268A (en) 1994-10-21 1999-12-28 Kimberly-Clark Worldwide, Inc. Photoreactor composition, method of generating a reactive species, and applications therefor
EP0722120B1 (de) * 1994-12-27 2000-10-18 Mitsubishi Chemical Corporation Fotoempfindliche Harzzusammensetzung und Verfahren zum Herstellen von Fotoresistmustern, das dieselbe benutzt
US5786132A (en) 1995-06-05 1998-07-28 Kimberly-Clark Corporation Pre-dyes, mutable dye compositions, and methods of developing a color
US5811199A (en) 1995-06-05 1998-09-22 Kimberly-Clark Worldwide, Inc. Adhesive compositions containing a photoreactor composition
DE69609967T2 (de) 1995-06-05 2001-04-12 Kimberly Clark Co Farbstoffvorläufer und diese enthaltende zusammensetzungen
US5798015A (en) 1995-06-05 1998-08-25 Kimberly-Clark Worldwide, Inc. Method of laminating a structure with adhesive containing a photoreactor composition
US5849411A (en) 1995-06-05 1998-12-15 Kimberly-Clark Worldwide, Inc. Polymer film, nonwoven web and fibers containing a photoreactor composition
US5747550A (en) 1995-06-05 1998-05-05 Kimberly-Clark Worldwide, Inc. Method of generating a reactive species and polymerizing an unsaturated polymerizable material
CA2221565A1 (en) 1995-06-28 1997-01-16 Kimberly-Clark Worldwide, Inc. Novel colorants and colorant modifiers
US5652081A (en) * 1995-09-20 1997-07-29 Fuji Photo Film Co., Ltd. Positive working photoresist composition
JPH0990622A (ja) * 1995-09-22 1997-04-04 Fuji Photo Film Co Ltd ポジ型フォトレジスト組成物
EP0854896B1 (de) 1995-11-28 2002-04-03 Kimberly-Clark Worldwide, Inc. Lichtstabilisierte fabstoffzusammensetzungen
US5855655A (en) 1996-03-29 1999-01-05 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5782963A (en) 1996-03-29 1998-07-21 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US6099628A (en) 1996-03-29 2000-08-08 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
JP3562673B2 (ja) * 1996-01-22 2004-09-08 富士写真フイルム株式会社 ポジ型フォトレジスト組成物
US5821345A (en) * 1996-03-12 1998-10-13 Shipley Company, L.L.C. Thermodynamically stable photoactive compound
US5891229A (en) 1996-03-29 1999-04-06 Kimberly-Clark Worldwide, Inc. Colorant stabilizers
US5674657A (en) * 1996-11-04 1997-10-07 Olin Microelectronic Chemicals, Inc. Positive-working photoresist compositions comprising an alkali-soluble novolak resin made with four phenolic monomers
US6524379B2 (en) 1997-08-15 2003-02-25 Kimberly-Clark Worldwide, Inc. Colorants, colorant stabilizers, ink compositions, and improved methods of making the same
JP2002517540A (ja) 1998-06-03 2002-06-18 キンバリー クラーク ワールドワイド インコーポレイテッド インク及びインクジェット印刷用のネオナノプラスト及びマイクロエマルション技術
BR9906513A (pt) 1998-06-03 2001-10-30 Kimberly Clark Co Fotoiniciadores novos e aplicações para osmesmos
US6228157B1 (en) 1998-07-20 2001-05-08 Ronald S. Nohr Ink jet ink compositions
DE69930948T2 (de) 1998-09-28 2006-09-07 Kimberly-Clark Worldwide, Inc., Neenah Chelate mit chinoiden gruppen als photoinitiatoren
DE60002294T2 (de) 1999-01-19 2003-10-30 Kimberly Clark Co Farbstoffe, farbstoffstabilisatoren, tintenzusammensetzungen und verfahren zu deren herstellung
US6331056B1 (en) 1999-02-25 2001-12-18 Kimberly-Clark Worldwide, Inc. Printing apparatus and applications therefor
US6294698B1 (en) 1999-04-16 2001-09-25 Kimberly-Clark Worldwide, Inc. Photoinitiators and applications therefor
US6368395B1 (en) 1999-05-24 2002-04-09 Kimberly-Clark Worldwide, Inc. Subphthalocyanine colorants, ink compositions, and method of making the same
JP2000347397A (ja) 1999-06-04 2000-12-15 Jsr Corp 感放射線性樹脂組成物およびその層間絶縁膜への使用
KR100455652B1 (ko) 1999-09-06 2004-11-06 삼성전자주식회사 포지티브형 포토레지스트 막의 제조방법
MXPA02012011A (es) 2000-06-19 2003-04-22 Kimberly Clark Co Fotoiniciaodres novedosos y aplicaciones para los mismos.
JP2002040796A (ja) 2000-07-19 2002-02-06 Sharp Corp 現像装置
KR20030026666A (ko) * 2001-09-26 2003-04-03 주식회사 동진쎄미켐 감광성 수지 조성물
KR100940565B1 (ko) * 2003-02-28 2010-02-03 삼성전자주식회사 Ｌｃｄ용 포토레지스트 조성물
DE102004038485A1 (de) * 2004-08-07 2006-02-23 Symrise Gmbh & Co. Kg alpha-Benzoyl-zimtsäurenitrile als neue UV-Absorber
JP4975008B2 (ja) * 2007-12-13 2012-07-11 エルジー ディスプレイ カンパニー リミテッド インキ組成物及びこれを用いたパターン形成方法
KR20180044332A (ko) * 2015-08-21 2018-05-02 메르크 파텐트 게엠베하 기판 상의 패터닝된 뱅크 구조체들 및 형성 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1597614B2 (de) * 1967-07-07 1977-06-23 Hoechst Ag, 6000 Frankfurt Lichtempfindliche kopiermasse
CA1287768C (en) * 1986-01-27 1991-08-20 Thap Dominh Antireflective photoresist composition
US4732836A (en) * 1986-05-02 1988-03-22 Hoechst Celanese Corporation Novel mixed ester O-quinone photosensitizers
JPS63190860A (ja) * 1987-02-04 1988-08-08 Mitsubishi Gas Chem Co Inc アミノベンザルアセトフエノン類の製造方法
DE3811040A1 (de) * 1988-03-31 1989-10-19 Ciba Geigy Ag Im nahen uv hochaufloesende positiv-fotoresists

Also Published As

Publication number Publication date
US5110706A (en) 1992-05-05
EP0428398A2 (de) 1991-05-22
EP0428398A3 (en) 1991-06-12
EP0428398B1 (de) 1996-04-03
KR0163761B1 (ko) 1998-12-15
KR910010239A (ko) 1991-06-29
JPH03155554A (ja) 1991-07-03
DE69026340D1 (de) 1996-05-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: JSR CORP., TOKIO/TOKYO, JP

8339 Ceased/non-payment of the annual fee