DE69025031D1 - Antriebsvorrichtung für Ultraschallmotor - Google Patents

Antriebsvorrichtung für Ultraschallmotor

Info

Publication number
DE69025031D1
DE69025031D1 DE69025031T DE69025031T DE69025031D1 DE 69025031 D1 DE69025031 D1 DE 69025031D1 DE 69025031 T DE69025031 T DE 69025031T DE 69025031 T DE69025031 T DE 69025031T DE 69025031 D1 DE69025031 D1 DE 69025031D1
Authority
DE
Germany
Prior art keywords
drive device
ultrasonic motor
ultrasonic
motor
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69025031T
Other languages
English (en)
Other versions
DE69025031T2 (de
Inventor
Ryoichi Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE69025031D1 publication Critical patent/DE69025031D1/de
Publication of DE69025031T2 publication Critical patent/DE69025031T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/145—Large signal circuits, e.g. final stages
    • H02N2/147—Multi-phase circuits
DE69025031T 1989-10-30 1990-10-26 Antriebsvorrichtung für Ultraschallmotor Expired - Fee Related DE69025031T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1282278A JPH03145976A (ja) 1989-10-30 1989-10-30 超音波モータの駆動装置

Publications (2)

Publication Number Publication Date
DE69025031D1 true DE69025031D1 (de) 1996-03-07
DE69025031T2 DE69025031T2 (de) 1996-05-30

Family

ID=17650354

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69030200T Expired - Fee Related DE69030200T2 (de) 1989-10-30 1990-10-26 Antriebsvorrichtung für Ultraschallmotor
DE69025031T Expired - Fee Related DE69025031T2 (de) 1989-10-30 1990-10-26 Antriebsvorrichtung für Ultraschallmotor
DE69030512T Expired - Fee Related DE69030512T2 (de) 1989-10-30 1990-10-26 Antriebsvorrichtung für Ultraschallmotor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69030200T Expired - Fee Related DE69030200T2 (de) 1989-10-30 1990-10-26 Antriebsvorrichtung für Ultraschallmotor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69030512T Expired - Fee Related DE69030512T2 (de) 1989-10-30 1990-10-26 Antriebsvorrichtung für Ultraschallmotor

Country Status (4)

Country Link
US (1) US5173631A (de)
EP (3) EP0426042B1 (de)
JP (1) JPH03145976A (de)
DE (3) DE69030200T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6411008B1 (en) * 1919-09-11 2002-06-25 Canon Kabushiki Kaisha Drive device for vibration type motor and image forming apparatus
JPH04200282A (ja) * 1990-11-29 1992-07-21 Nikon Corp 超音波モータの駆動装置
JP3165701B2 (ja) * 1991-03-06 2001-05-14 キヤノン株式会社 振動波モーター
JP2972010B2 (ja) * 1992-01-08 1999-11-08 キヤノン株式会社 振動型アクチュエーター駆動制御装置
JPH05273361A (ja) * 1992-03-24 1993-10-22 Seiko Instr Inc 超音波モータ付電子機器
US5939847A (en) * 1992-08-07 1999-08-17 Nikon Corporation Drive control device for ultrasonic motors
JPH06178556A (ja) * 1992-12-10 1994-06-24 Asmo Co Ltd 超音波モータの駆動回路
US5563464A (en) * 1993-02-09 1996-10-08 Olympus Optical Co., Ltd. Circuit for rotating ultrasonic motor
JPH07170772A (ja) * 1993-10-21 1995-07-04 Seiko Instr Inc 超音波モータおよび超音波モータ付電子機器
US5670852A (en) * 1994-01-18 1997-09-23 Micropump, Inc. Pump motor and motor control
DE69517232T2 (de) * 1994-03-23 2000-10-26 Nikon Corp Ultraschallmotor
FR2721154B1 (fr) * 1994-06-08 1996-07-05 Moulinex Sa Circuit d'alimentation d'un moteur piézo-électrique.
FR2724787B1 (fr) * 1994-09-16 1997-01-24 Crouzet Automatismes Machine a ondes acoustiques de surface
JPH08116685A (ja) * 1994-10-17 1996-05-07 Canon Inc 振動波モータ
US5619089A (en) * 1994-10-31 1997-04-08 Seiko Instruments Inc. Ultrasonic motor and electronic apparatus provided with an ultrasonic motor
MY120661A (en) * 1994-11-18 2005-11-30 Sony Corp Method and apparatus for control of a supersonic motor
JP3402816B2 (ja) * 1994-12-22 2003-05-06 キヤノン株式会社 超音波モータの駆動回路
DE19529667C2 (de) * 1995-08-11 1998-07-16 Siemens Ag Anordnung zur Ansteuerung eines ersten und eines zweiten piezoelektrischen Aktors
JPH0984365A (ja) * 1995-09-18 1997-03-28 Canon Inc 振動型アクチュエーター装置
US5945768A (en) * 1997-05-08 1999-08-31 Alliedsignal Inc. Piezoelectric drive circuit
DE19942269A1 (de) * 1999-09-04 2001-03-08 Philips Corp Intellectual Pty Piezoelektrische Antriebsvorrichtung
DE10158584A1 (de) 2001-11-29 2003-07-03 Philips Intellectual Property Piezoelektrische Antriebsvorrichtung und ein Regelverfahren für eine piezoelektrische Antriebsvorrichtung
CN101686022B (zh) * 2008-09-24 2012-03-28 无锡华润矽科微电子有限公司 一种超声电机驱动电路
WO2011065441A1 (ja) * 2009-11-25 2011-06-03 シンフォニアテクノロジー株式会社 制振装置及びこれを備えた車両
JP5885380B2 (ja) * 2010-01-28 2016-03-15 キヤノン株式会社 振動波駆動装置の駆動制御装置及び駆動制御方法
JP5506552B2 (ja) 2010-06-07 2014-05-28 キヤノン株式会社 振動型アクチュエータの制御装置及び振動型アクチュエータの制御方法
CN101964601B (zh) * 2010-09-19 2012-08-08 河南科技大学 一种带低频控制的对称pwm控制信号发生器
JP5679781B2 (ja) * 2010-11-26 2015-03-04 キヤノン株式会社 振動型アクチュエータの制御装置
JP2014018027A (ja) 2012-07-11 2014-01-30 Canon Inc 振動型アクチュエータ、撮像装置、及びステージ
JP5843911B2 (ja) * 2014-03-20 2016-01-13 キヤノン株式会社 装置及び振動型アクチュエータの駆動方法
JP6672055B2 (ja) * 2016-04-22 2020-03-25 株式会社トプコン 超音波モータの制御方法及びそのための測量機
US10071400B2 (en) * 2016-06-20 2018-09-11 Texas Instruments Incorporated Ultrasonic lens cleaning with travelling wave excitation
US10606069B2 (en) 2016-08-01 2020-03-31 Texas Instruments Incorporated Ultrasound lens structure cleaner architecture and method
US10838199B2 (en) 2016-12-30 2020-11-17 Texas Instruments Incorporated Ultrasound lens structure cleaner architecture and method using standing and traveling waves
CN112152505B (zh) * 2020-05-27 2021-11-16 北京机械设备研究所 超声波电机的驱动电路及调速方法
CN117471150B (zh) * 2023-10-26 2024-04-30 南京航达超控科技有限公司 一种超声电机孤极归一化整定电路

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3975650A (en) * 1975-01-30 1976-08-17 Payne Stephen C Ultrasonic generator drive circuit
JPS59111609A (ja) * 1982-12-17 1984-06-27 Nippon Kogaku Kk <Nikon> レンズ鏡筒
JPS59204477A (ja) * 1983-05-04 1984-11-19 Nippon Kogaku Kk <Nikon> 超音波モーターの駆動制御回路
JPH072023B2 (ja) * 1985-04-26 1995-01-11 株式会社ニコン 超音波モータの駆動回路
SU1357915A1 (ru) * 1985-07-04 1987-12-07 Предприятие П/Я В-8670 Импульсный регул тор положени пьезодвигател
KR900007413B1 (ko) * 1986-08-26 1990-10-08 마쯔시다덴기산교 가부시기가이샤 초음파 모우터구동 방법
US4970656A (en) * 1986-11-07 1990-11-13 Alcon Laboratories, Inc. Analog drive for ultrasonic probe with tunable phase angle
JPS6450771A (en) * 1987-08-20 1989-02-27 Matsushita Electric Ind Co Ltd Ultrasonic motor driving device
JPH01185174A (ja) * 1988-01-11 1989-07-24 Canon Inc 振動波モータの駆動回路
JP2637467B2 (ja) * 1988-05-06 1997-08-06 キヤノン株式会社 振動型アクチュエーター装置
US4879528A (en) * 1988-08-30 1989-11-07 Olympus Optical Co., Ltd. Ultrasonic oscillation circuit

Also Published As

Publication number Publication date
EP0603163B1 (de) 1997-04-16
EP0603162B1 (de) 1997-03-12
DE69030512T2 (de) 1997-07-24
DE69030200T2 (de) 1997-06-19
EP0426042B1 (de) 1996-01-24
JPH03145976A (ja) 1991-06-21
EP0603162A1 (de) 1994-06-22
DE69025031T2 (de) 1996-05-30
US5173631A (en) 1992-12-22
DE69030200D1 (de) 1997-04-17
EP0426042A1 (de) 1991-05-08
DE69030512D1 (de) 1997-05-22
EP0603163A1 (de) 1994-06-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee